In addition to being used for pattern transfer,the negative photoresist SU-8 iswidely used as a structural material in microelectromechanical systems(MEMS).Due to its good photopatternability,SU-8 has lower manufactur...In addition to being used for pattern transfer,the negative photoresist SU-8 iswidely used as a structural material in microelectromechanical systems(MEMS).Due to its good photopatternability,SU-8 has lower manufacturing costs than many other materials,but its mechanical properties are relatively weak to some extent,which limits its performance.The mechanical properties of epoxy-like SU-8 can be enhanced by addingmicro-or nano-fillers such as carbon nanotube,clay,and SiC nanowire,which have superior elastic modulus.In this study,SiC nanowires were used to improve the mechanical properties of SU-8 while the SU-8 retains its photopatternability.The SiC nanowires were uniformly dispersed in SU-8 by stirring and ultrasonication.SU-8 materials with different SiC nanowire contents were fabricated into dog bone samples by lithography.The elastic modulus,storage modulus,and damping factor of the samples were measured by the Dynamic mechanical analysis(DMA)Q800.The experiment result shows that the rigidity and toughness increased,and the damping reduced.The 2 wt%SiC nanowires-reinforced SU-8 had a 73.88%increase in elastic modulus and a 103.4%increase in elongation at break.Furthermore,a spring component made by SiC-doped SU-8 could withstand greater acceleration.The SiC nanowires-reinforced SU-8 has the potential tomeet higher requirements in the design andmanufacture of MEMS and greatly reduce the manufacturing costs of MEMS devices.展开更多
The thermodynamic parameters of FRW fire-retardant plywood at different temperatures were measured by dynamic mechanical analysis (DMA) equipment such as storage modulus, loss modulus and loss angle tangent. The influ...The thermodynamic parameters of FRW fire-retardant plywood at different temperatures were measured by dynamic mechanical analysis (DMA) equipment such as storage modulus, loss modulus and loss angle tangent. The influences on the thermodynamic properties of FRW fire-retardant plywood by the FRW fire retardant were analyzed between the FRW fire-retardant plywood and the untreated plywood. The results showed that the transition temperature of FRW fire-retardant plywood’s storage modulus was delayed than the untreated plywood. Its value was also higher than the untreated plywood. Meanwhile the glass transition temperature of plywood treated by FRW fire retardant was raised. FRW fire-retardant plywood could keep the better mechanical performances and ability of deformation-resistance at higher temperature and during longer period than the untreated plywood.展开更多
基金supports from the Shanghai Professional Technical Service Platform for Non-Silicon Micro-Nano Integrated ManufacturingProject funded by China Postdoctoral Science Foundation (No. 2018M630440)
文摘In addition to being used for pattern transfer,the negative photoresist SU-8 iswidely used as a structural material in microelectromechanical systems(MEMS).Due to its good photopatternability,SU-8 has lower manufacturing costs than many other materials,but its mechanical properties are relatively weak to some extent,which limits its performance.The mechanical properties of epoxy-like SU-8 can be enhanced by addingmicro-or nano-fillers such as carbon nanotube,clay,and SiC nanowire,which have superior elastic modulus.In this study,SiC nanowires were used to improve the mechanical properties of SU-8 while the SU-8 retains its photopatternability.The SiC nanowires were uniformly dispersed in SU-8 by stirring and ultrasonication.SU-8 materials with different SiC nanowire contents were fabricated into dog bone samples by lithography.The elastic modulus,storage modulus,and damping factor of the samples were measured by the Dynamic mechanical analysis(DMA)Q800.The experiment result shows that the rigidity and toughness increased,and the damping reduced.The 2 wt%SiC nanowires-reinforced SU-8 had a 73.88%increase in elastic modulus and a 103.4%increase in elongation at break.Furthermore,a spring component made by SiC-doped SU-8 could withstand greater acceleration.The SiC nanowires-reinforced SU-8 has the potential tomeet higher requirements in the design andmanufacture of MEMS and greatly reduce the manufacturing costs of MEMS devices.
文摘The thermodynamic parameters of FRW fire-retardant plywood at different temperatures were measured by dynamic mechanical analysis (DMA) equipment such as storage modulus, loss modulus and loss angle tangent. The influences on the thermodynamic properties of FRW fire-retardant plywood by the FRW fire retardant were analyzed between the FRW fire-retardant plywood and the untreated plywood. The results showed that the transition temperature of FRW fire-retardant plywood’s storage modulus was delayed than the untreated plywood. Its value was also higher than the untreated plywood. Meanwhile the glass transition temperature of plywood treated by FRW fire retardant was raised. FRW fire-retardant plywood could keep the better mechanical performances and ability of deformation-resistance at higher temperature and during longer period than the untreated plywood.
