This paper reports the design and fabrication of a MEMS-based ZnO piezoelectric tactile sensor,which can be integrated on to the endoscopic grasper used in minimally invasive surgery (MIS).The sensor includes a silico...This paper reports the design and fabrication of a MEMS-based ZnO piezoelectric tactile sensor,which can be integrated on to the endoscopic grasper used in minimally invasive surgery (MIS).The sensor includes a silicon substrate, platinum bottom electrode,platinum top electrode,and a ZnO piezoelectric thin film,which is sandwiched between the two-electrode layers.The sensitivity of the micro-force sensor is analyzed in theory and the sensor exhibits high sensitivity about 7pc/uN.The application of this tactile sensor to MIS will allow the surgeon feeling the touch force between the endoscopic grasper and tissue in real-time,and manipulating the tissue safely.展开更多
基金supported by National Natural Science Foundation of China(No.90207003)
文摘This paper reports the design and fabrication of a MEMS-based ZnO piezoelectric tactile sensor,which can be integrated on to the endoscopic grasper used in minimally invasive surgery (MIS).The sensor includes a silicon substrate, platinum bottom electrode,platinum top electrode,and a ZnO piezoelectric thin film,which is sandwiched between the two-electrode layers.The sensitivity of the micro-force sensor is analyzed in theory and the sensor exhibits high sensitivity about 7pc/uN.The application of this tactile sensor to MIS will allow the surgeon feeling the touch force between the endoscopic grasper and tissue in real-time,and manipulating the tissue safely.
