A novel technique to fabricate ultra deep high aspect ratio electrical isolation trenches with DRIE and dielectric refill is presented.The relationship between trench profile and DRIE parameters is discussed.By optimi...A novel technique to fabricate ultra deep high aspect ratio electrical isolation trenches with DRIE and dielectric refill is presented.The relationship between trench profile and DRIE parameters is discussed.By optimizing DRIE parameters and RIE etching the trenches’ opening,the ideal trench profile is obtained to ensure that the trenches are fully refilled without voids.The electrical isolation trenches are 5μm wide and 92μm deep with 0.5μm thick oxide layers on the sidewall as isolation material.The measured I-V result shows that the trench structure has good electrical isolation performance:the average resistance in the range of 0～100V is more than 10 11Ω and no breakdown appears under 100V.This isolation trench structure has been used in fabrication of the bulk integrated micromachined gyroscope,which shows high performance.展开更多
We demonstrated an electrically pumped InP-based microcavity laser operating in continuous-wave mode.The active region is designed with antimony surfactants to enhance the gain at 2 μm,and a selective electrical isol...We demonstrated an electrically pumped InP-based microcavity laser operating in continuous-wave mode.The active region is designed with antimony surfactants to enhance the gain at 2 μm,and a selective electrical isolation scheme is used to secure continuous-wave operation for the microcavity laser at room temperature.The lasers were fabricated as a notched elliptical resonator,resulting in a highly unidirectional far-field profile with an in-plane beam divergence of less than 2°.Single-mode emission was obtained over the entire dynamic range,and the laser frequencies were tuned linearly with the pumping current.Overall,these directional lasers pave the way for portable and highly integrated on-chip sensing applications.展开更多
Owing to the advantages of high efficiency,high energy density,electrical isolation,low electromagnetic interference(EMI)and harmonic pollution,magnetic integration,wide output ranges,low voltage stress,and high opera...Owing to the advantages of high efficiency,high energy density,electrical isolation,low electromagnetic interference(EMI)and harmonic pollution,magnetic integration,wide output ranges,low voltage stress,and high operation frequency,the LLC resonant converters are widely used in various sectors of the electronics-based industries.The history and development of the LLC resonant converters are presented,their advantages are analyzed,three of the most popular LLC resonant converter topologies with detailed assessments of their strengths and drawbacks are elaborated.Furthermore,an important piece of research on the industrial applications of the LLC resonant converters is conducted,mainly including electric vehicle(EV)charging,photovoltaic systems,and light emitting diode(LED)lighting drivers and liquid crystal display(LCD)TV power supplies.Finally,the future evolution of the LLC resonant converter technology is discussed.展开更多
文摘A novel technique to fabricate ultra deep high aspect ratio electrical isolation trenches with DRIE and dielectric refill is presented.The relationship between trench profile and DRIE parameters is discussed.By optimizing DRIE parameters and RIE etching the trenches’ opening,the ideal trench profile is obtained to ensure that the trenches are fully refilled without voids.The electrical isolation trenches are 5μm wide and 92μm deep with 0.5μm thick oxide layers on the sidewall as isolation material.The measured I-V result shows that the trench structure has good electrical isolation performance:the average resistance in the range of 0～100V is more than 10 11Ω and no breakdown appears under 100V.This isolation trench structure has been used in fabrication of the bulk integrated micromachined gyroscope,which shows high performance.
基金supported by the National Basic Research Program of China(No.2021YFB3201900)the National Natural Science Foundation of China(Nos.61991430,61790583,and 61774150)the Youth Innovation Promotion Association of the Chinese Academy of Sciences(No.2021107)。
文摘We demonstrated an electrically pumped InP-based microcavity laser operating in continuous-wave mode.The active region is designed with antimony surfactants to enhance the gain at 2 μm,and a selective electrical isolation scheme is used to secure continuous-wave operation for the microcavity laser at room temperature.The lasers were fabricated as a notched elliptical resonator,resulting in a highly unidirectional far-field profile with an in-plane beam divergence of less than 2°.Single-mode emission was obtained over the entire dynamic range,and the laser frequencies were tuned linearly with the pumping current.Overall,these directional lasers pave the way for portable and highly integrated on-chip sensing applications.
基金Supported by the National Natural Science Foundation of China(51907032)the Natural Science Foundation of Guangdong Province(2018A030313365).
文摘Owing to the advantages of high efficiency,high energy density,electrical isolation,low electromagnetic interference(EMI)and harmonic pollution,magnetic integration,wide output ranges,low voltage stress,and high operation frequency,the LLC resonant converters are widely used in various sectors of the electronics-based industries.The history and development of the LLC resonant converters are presented,their advantages are analyzed,three of the most popular LLC resonant converter topologies with detailed assessments of their strengths and drawbacks are elaborated.Furthermore,an important piece of research on the industrial applications of the LLC resonant converters is conducted,mainly including electric vehicle(EV)charging,photovoltaic systems,and light emitting diode(LED)lighting drivers and liquid crystal display(LCD)TV power supplies.Finally,the future evolution of the LLC resonant converter technology is discussed.
