A dual-route optical emission spectroscopy(D-OES)diagnostic is newly developed to monitor the optical emission from the X-point plasma region on the HL-2 A tokamak.This diagnostic is composed of an imaging system,a be...A dual-route optical emission spectroscopy(D-OES)diagnostic is newly developed to monitor the optical emission from the X-point plasma region on the HL-2 A tokamak.This diagnostic is composed of an imaging system,a beam-splitting system for dual-route measurements,fiber bundles,a spectrometer system,and a control and acquisition system.One route is used to obtain wide-spectral-range spectra,and the other route is used to acquire high-wavelengthresolution line shapes.The spectral resolution of the wide-range spectrometers is 0.8 nm with a coverage of 800 nm(@200-1000 nm).The spectral resolution of the high-resolution spectrometer is 0.01 nm with a coverage of 6 nm(@200-660 nm).The spatial resolution of each route of D-OES is about 4 cm with 11 channels.The temporal resolution is 16 ms at maximum in the single-channel mode.Wide-range spectra(containing Balmer series and a Fulcher band)and highly resolved Ha line shapes are obtained by D-OES in the hydrogen glow discharge in the lab.D-OES measurements are carried out in the high-density deuterium experiments of HL-2A.The electron density n_(e)and deuterium temperature T_(D) in the X-point multifaceted asymmetric radiation from the edge(MARFE)region are derived simultaneously by fitting the measured D_(a) shape.The density n_(e)is observed to increase from~8.7×10^(18)m^(-3)to~7.8×10^(19)m^(-3),and the temperature T_(D)drops from~14.4 eV to~2.3 eV after the onset of MARFE in the discharge#38260.展开更多
Optical emission spectroscopy was used to study a gas mixture glow discharge of CO2 and N2 at a total pressure of 1.2 Torr, a power of 100 W and a flow of 16.5 L/min. The emission bands were measured in the wavelength...Optical emission spectroscopy was used to study a gas mixture glow discharge of CO2 and N2 at a total pressure of 1.2 Torr, a power of 100 W and a flow of 16.5 L/min. The emission bands were measured in the wavelength range of 200 nm to 900 nm. The principal species observed were O2^+ (A^2П→ X^2П), CO^+ (A^2П→X^2∑), N2^+ (B^2∑u+ → X^2∑g^+), CO2^+ (A^2∏ → X^2∏), N2(C^3∏u → B^3∏g), O2(b^1∑g^+→ X^3∑g^-), and CO (a^r3∑→a^3∏). The behavior of the band intensities as a function of the N2 percentage is consistent with recent Monte Carlo simulations. The electron temperature and ion density were determined by a double Langmuir probe. The electron temperature was found in the range of 1.55 eV to 2.93 eV, and the electron concentration in the order of 10^10 cm^-3. The electron temperature and ion density at pure N2 and pure CO2 agree with previous measurements.展开更多
The spectral emission and plasma parameters of SnO2 plasmas have been investigated. A planar ceramic SnO2 target was irradiated by a CO2 laser with a full width at half maximmn of 80 ns. The temporal behavior of the s...The spectral emission and plasma parameters of SnO2 plasmas have been investigated. A planar ceramic SnO2 target was irradiated by a CO2 laser with a full width at half maximmn of 80 ns. The temporal behavior of the specific emission lines from the SnO2 plasma was characterized. The intensities of Sn I and Sn Ⅱ lines first increased, and then decreased with the delay time. The results also showed a faster decay of Sn I atoms than that of Sn II ionic species. The temporal evolutions of the SnO2 plasma parameters (electron temperature and density) were deduced. The measured temperature and density of SnO2 plasma are 4.38 eV to 0.5 eV and 11.38×1017 cm 3 to 1.1×1017^ cm-3, for delay times between 0.1 μs and 2.2 #s. We also investigated the effect of the laser pulse energy on Sn02 plasma.展开更多
Two experimental techniques have been used to quantify the atomic oxygen density in the case of hot air plasma generated by a microwave (MW) resonant cavity. The latter operates at a frequency of 2.45 GHz inside a c...Two experimental techniques have been used to quantify the atomic oxygen density in the case of hot air plasma generated by a microwave (MW) resonant cavity. The latter operates at a frequency of 2.45 GHz inside a cell of gas conditioning at a pressure of 600 mbar, an injected air flow of 12 L/min and an input MW power of 1 kW. The first technique is based on the standard two photon absorption laser induced fluorescence (TALIF) using xenon for calibration but applied for the first time in the present post discharge hot air plasma column having a temperature of about 4500 K near the axis of the nozzle. The second diagnostic technique is an actinometry method based on optical emission spectroscopy (OES). In this case, we compared the spectra intensities of a specific atomic oxygen line (844 nm) and the closest wavelength xenon line (823 nm). The two lines need to be collected under absolutely the same spectroscopic parameters. The xenon emission is due to the addition of a small proportion of xenon (1% Xe) of this chemically inert gas inside the air while a further small quantity of H2 (2~) is also added in the mixture in order to collect OH(A- X) and NH(A-X) spectra without noise. The latter molecular spectra are required to estimate gas and excitation temperatures. Optical emission spectroscopy measurements, at for instance the position z=12 mm on the axis plasma column that leads to a gas measured temperature equal to 3500 K, an excitation temperature of about 9500 K and an atomic oxygen density 2.09× 1017+ 0.2×1017 cm-3. This is in very good agreement with the TALIF measurement, which is equal to 2.0×101T cm-3.展开更多
Optical emission spectroscopy (OES) was applied for plasma characterization during the erosion of asphaltene substrates. An amount of 100 mg of asphaltene was carefully applied to an electrode and exposed to air-pla...Optical emission spectroscopy (OES) was applied for plasma characterization during the erosion of asphaltene substrates. An amount of 100 mg of asphaltene was carefully applied to an electrode and exposed to air-plasma glow discharge at a pressure of 1.0 Torr. The plasma was generated in a stainless steel discharge chamber by an ac generator at a frequency of 60 Hz, output power of 50 W and a gas flow rate of 1.8 L/min. The electron temperature and ion density were estimated to be 2.15±0.11 eV and (1.24±0.05)× 10^16 m^-3, respectively, using a double Langmuir probe. OES was employed to observe the emission from the asphaltene exposed to air plasma. Both molecular band emission from N2, N2+, OH, CH, NH, O2 as well as CN, and atomic light emission from V and Hγ were observed and used to monitor the evolution of asphaltene erosion. The asphaltene erosion was analyzed with the aid of a scanning electron microscope (SEM) equipped with an energy dispersive X-ray (EDX) detector. The EDX analysis showed that the time evolution of elements C, O, S and V were similar and the chemical composition of the exposed asphaltenes remained constant. Particle size evolution was measured, showing a maximum size of 2307 μm after 60 min. This behavior is most likely related to particle agglomeration as a function of time.展开更多
Silicon etching is an essential process in various applications,and a major challenge for etching process is anisotropic high aspect ratio etching characteristics.The etch profile is determined by the plasma parameter...Silicon etching is an essential process in various applications,and a major challenge for etching process is anisotropic high aspect ratio etching characteristics.The etch profile is determined by the plasma parameters and process parameters.In this study,the plasma state with each process parameters were analyzed through the optical emission spectroscopy(OES)plasma diagnostic sensor by both chemical and physical approaches.Electron temperature and electron density were additionally acquired using the corona model with OES data that provides chemical species information,and the etch profile was evaluated through scanning electron microscope measurement data.The results include changes in profile with gas ratio,bias power,and pressure.We figure out that factors like ion energy and ion angular distribution as well as chemical reaction affect the anisotropic profile.展开更多
Atmospheric pressure micro-discharges in helium gas with a mixture of 0.5%water vapor between two pin electrodes are generated with nanosecond overvoltage pulses.The temporal and spatial characteristics of the dischar...Atmospheric pressure micro-discharges in helium gas with a mixture of 0.5%water vapor between two pin electrodes are generated with nanosecond overvoltage pulses.The temporal and spatial characteristics of the discharges are investigated by means of time-resolved imaging and optical emission spectroscopy with respect to the discharge morphology,gas temperature,electron density,and excited species.The evolution of micro-discharges is captured by intensified CCD camera and electrical properties.The gas temperature is diagnosed by a two-temperature fit to the ro-vibrational OH(A^(2)Σ^(+)–X^П(2),0–0)emission band and is found to remain low at 425 K during the discharge pulses.The profile of electron density performed by the Stark broadening of Ha 656.1-nm and He I 667.8-nm lines is uniform across the discharge gap at the initial of discharge and reaches as high as 10^(23)m^(-3).The excited species of He,OH,and H show different spatio-temporal behaviors from each other by the measurement of their emission intensities,which are discussed qualitatively in regard of their plasma kinetics.展开更多
This paper reports that the optical emission spectroscopy (OES) is used to monitor the plasma during the deposition process of hydrogenated microcrystalline silicon films in a very high frequency plasma enhanced che...This paper reports that the optical emission spectroscopy (OES) is used to monitor the plasma during the deposition process of hydrogenated microcrystalline silicon films in a very high frequency plasma enhanced chemical vapour deposition system. The OES intensities (Sill^*, H^* and H^*β) are investigated by varying the deposition parameters. The result shows that the discharge power, silane concentrations and substrate temperature affect the OES intensities. When the discharge power at silane concentration of 4% increases, the OES intensities increase first and then are constant, the intensities increase with the discharge power monotonously at silane concentration of 6%. The SiH^* intensity increases with silane concentration, while the intensities of H^*α and H^*β increase first and then decrease. When the substrate temperature increases, the SiH^* intensity decreases and the intensities of H^*α and H^*β are constant. The correlation between the intensity ratio of IH^*α/ISiH^* and the crystalline volume fraction (Xc) of films is confirmed.展开更多
Burners of metal halide lamps used for illumination are generally made of polycrystalline alumina ceramic (PCA) which is translucent to visible light. We show that the difficulty of selecting a line of sight through...Burners of metal halide lamps used for illumination are generally made of polycrystalline alumina ceramic (PCA) which is translucent to visible light. We show that the difficulty of selecting a line of sight through the lamp prevents the use of optical emission diagnostic. X-rays photons are mainly absorbed and not scattered by PCA. Absorption by mercury atoms contributing to the discharge allowed us to determine the density of mercury in the lamp. By comparing diagnostic methods, we put in evidence the difficulty of taking into account the scattering of light mathematically.展开更多
Argon plasma was generated by DC magnetron sputtering discharge at a constant input power and sputtering pressure. The emission spectra of the argon plasma, in a region of 300 nm to 800 nm, were recorded with three di...Argon plasma was generated by DC magnetron sputtering discharge at a constant input power and sputtering pressure. The emission spectra of the argon plasma, in a region of 300 nm to 800 nm, were recorded with three different base pressures (4×10^-4 Pa, 13×10^-4 Pa and 26×10^-4 Pa). From the spectra, the Boltzmann temperature (TB) was calculated by using the atomic Boltzmann plot method. The intensity ratio of N and N2 lines provided the information on the changes in the degree of dissociation of nitrogen molecules. The obtained results showed that with the increase in base pressure the dissociation of N2 increased and the Boltzmann temperature (TB) decreased.展开更多
Optical emission spectroscopy and Langmuir Probe diagnostics were incorporated into the experiment, in which dust particles were formed in-situ by using reactive mixture gases (SiHa/C2H4/Ar) in a radio-frequency (R...Optical emission spectroscopy and Langmuir Probe diagnostics were incorporated into the experiment, in which dust particles were formed in-situ by using reactive mixture gases (SiHa/C2H4/Ar) in a radio-frequency (RF) discharge plasma. The excitation temperature was first calculated by combining several optical emission spectra of argon lines and using a Boltzmann distribution to fit the experimental data, then the excitation temperature as functions of both gas pressure and RF power in SiH4/C2Ha/Ar discharges for different discharge conditions were obtained. Correspondingly, based on the measurement of the electron temperature by a Langmuir probe, the excitation temperature was compared with the electron temperature, and some discussions were presented. Finally the emission intensities of spectral lines of Si 390.6 ran, Si2+ 380.6 nm and C+ 426.7 nm were measured and presented as functions of pressure, RF power and flow rate of SiH4/C2H4.展开更多
A Maxwellian electron energy distribution function (EEDF) is often assumed when using the optical emission line-ratio method to determine the electron temperature in low- temperature plasmas. However, in many cases,...A Maxwellian electron energy distribution function (EEDF) is often assumed when using the optical emission line-ratio method to determine the electron temperature in low- temperature plasmas. However, in many cases, non-Maxwellian EEDFs can be formed due to the non-local electron heating or the inelastic-collisional energy loss processes. In this work, with a collisional-radiative model, we propose an approach to obtain the non-Maxwellian EEDF with a 'two-temperature structure' from the emission line-ratios of Paschen 2p levels of argon and kryp- ton atoms. For applications of this approach in reactive gas (CF4, O2, etc) discharges that contain argon and krypton, recommendations of some specific emission line-ratios are provided, according to their sensitivities to the EEDF variation. The kinetic processes of the relevant excited atoms are also discussed in detail.展开更多
The characteristics of CHF3 and CF4 electron cyclotron resonance (ECR) plasma have been studied by optical emission spectroscopy (OES) and Langmuir probe. It is found that C2 radical is one of main compositions in bot...The characteristics of CHF3 and CF4 electron cyclotron resonance (ECR) plasma have been studied by optical emission spectroscopy (OES) and Langmuir probe. It is found that C2 radical is one of main compositions in both of the two plasmas. We investigated the relative concentration of C2 radical as a function of F (H) radical and ion density. The formation mechanism of C2 radical is analyzed.展开更多
An experimental setup was built up to carry out radio frequency (RF) inductively coupled plasma (ICP) and dielectric barrier discharge (DBD), and to depict the optical emission spectra (OES) of the discharges. OES fro...An experimental setup was built up to carry out radio frequency (RF) inductively coupled plasma (ICP) and dielectric barrier discharge (DBD), and to depict the optical emission spectra (OES) of the discharges. OES from argon ICP and DBD plasmas in visible and near ultraviolet region were measured. For argon ICP, the higher RF power input (higher than 500 W for our machine), the higher degree of argon plasma ionization. But that doesn't mean a higher mean electron energy. With the increase in the power input, the mean electron energy increases slightly, whereas the density of electron increases apparently On the contrary, argon DBD discharge behaves in the manner of a pulsed DC discharge on optical emission spectroscopy and V-I characteristics. DBD current is composed of a series of pulses equally spaced in temporal domain. The Kinetics of DBD emission strength is mainly governed by the frequency of the current pulse.展开更多
The mass application of Hall thrusters poses the need for a diagnostic method of ionization mechanism in the discharge channel to boost the iteration and optimization of thruster design.This work presents an Optical E...The mass application of Hall thrusters poses the need for a diagnostic method of ionization mechanism in the discharge channel to boost the iteration and optimization of thruster design.This work presents an Optical Emission Spectroscopy (OES) method for diagnostics of the contribution of different ionization mechanisms and the flux of ions in different valences in the discharge channel of a Hall thruster.The emission spectra in the discharge channel are analyzed by jointly utilizing a collisional-radiative model,an ionization-excitation model,and a flux-conservation model.It is found that the intensities of some spectral lines can be converted into the reaction rates of collision processes,e.g.,electron-induced excitation and ionization processes.The latter can further be used to determine the evolutions of particle fluxes by utilizing the conservation law of matter.The novel method is demonstrated on a kilo-watt Hall thruster.The evolutions of several parameters are determined using this method along the discharge channel,including the ionization rates of different mechanisms,particle fluxes,particle densities,and particle velocities.This novel method can be further developed by being jointly utilized with spectral imaging and tomography techniques,enabling diagnostics of multi-dimensional distributions of the above-mentioned parameters in the discharge channel and near-field plume.展开更多
Photon emission during contact electrification(CE)has recently been observed,which is called as CE-induced interface photon emission spectroscopy(CEIIPES).Physical mechanisms of CEIIPES are essential for interpreting ...Photon emission during contact electrification(CE)has recently been observed,which is called as CE-induced interface photon emission spectroscopy(CEIIPES).Physical mechanisms of CEIIPES are essential for interpreting the structure and electronic interactions of a contacted interface.Using the methods of density functional theory(DFT)and time-dependent DFT(TDDFT),it is confirmed theoretically that the spectrum of emitted photons is contributed from electron transfer and transition during CE.Specifically,the excited electrons from higher energy state in one material may transfer to a lower energy state of another material followed by a transition;and/or some unstable excited electrons at a higher energy level of one material may transit to a lower energy state of itself,both of which result in CEIIPES.Furthermore,the CE-induced interface absorption spectrum(CEIIAS)has been demonstrated,due to the intermolecular electron transfer excitation.展开更多
The phylogenetic relationship for classification traits and eight mineral elements in brown rice (Oryza sativa L.) from Yunnan Province in China was carried out using microwave assisted digestion followed by inducti...The phylogenetic relationship for classification traits and eight mineral elements in brown rice (Oryza sativa L.) from Yunnan Province in China was carried out using microwave assisted digestion followed by inductively coupled plasma atomic emission spectroscopy, and the analytical procedures were carefully controlled and validated. In general, the results show that the mean levels of K, Ca, Mg, Fe and Cu in brown rice for 789 accessions of rice landraces was distinctly lower than that of improved cultivars. They further demonstrate that Ca plays an important role in the differentiation of subspecies indica-japonica, especially to enhance adaptation of cold stress, and that five mineral elements in brown rice enhance the eurytopicity from landrace to improved cultivar. Hierarchical cluster analysis, using average linkage from SPSS software based on eight mineral elements in brown rice, showed that Yunnan rice could be grouped into rice landrace and improved cultivar, with the rice landrace being further clustered into five subgroups, and that, interestingly, purple rice does not cluster with either of the groups. Our present data confirm that indica is the closest relative of late rice and white rice, and that they constitute rice landraces together, whereas japonica is the closest relatives of non-nuda, early-mid and glutinous rice. It is further shown that japonica, non-nuda, early-mid, glutinous, white and red rice might be more primitive than indica, nuda, late, non-glutinous and purple rice, respectively.展开更多
Nondestructive Raman spectroscopy and external-beam proton-induced X-ray emission (PIXE) technique to analyze eight ancient glasses unearthed from the provinces of Henan,Hubei,and Jiangsu,which allowes for a good ch...Nondestructive Raman spectroscopy and external-beam proton-induced X-ray emission (PIXE) technique to analyze eight ancient glasses unearthed from the provinces of Henan,Hubei,and Jiangsu,which allowes for a good characterization of the glass matrix and chemical compositions,is carried out.The results indicate that all the eight glass samples could be typically divided into three systems: faience (sample No.SZWG-4),PbO-BaO-SiO 2 (sample Nos.NYWKI-5-1,HNWKII-88,and HNWKII-84),and Na 2 OCaO-SiO 2 (sample Nos.HBWKI-16,HBWKI-17,HBWKI-18,and SZWG-1).Additional relationships between the Raman spectra and parameters,such as residues of raw materials and opacifying agent,are also discussed by respectively comparing them with similar glass samples excavated from other historical sites.展开更多
Plasma jet has extensive application potentials in various fields, which normally operates in a diffuse mode when helium is used as the working gas. However, when less expensive argon is used, the plasma jet often ope...Plasma jet has extensive application potentials in various fields, which normally operates in a diffuse mode when helium is used as the working gas. However, when less expensive argon is used, the plasma jet often operates in a filamentary mode. Compared to the filamentary mode, the diffuse mode is more desirable for applications. Hence, many efforts have been exerted to accomplish the diffuse mode of the argon plasma jet. In this paper, a novel single-needle argon plasma jet is developed to obtain the diffuse mode. It is found that the plasma jet operates in the filamentary mode when the distance from the needle tip to the central line of the argon stream(d) is short. It transits to the diffuse mode with increasing d. For the diffuse mode, there is always one discharge pulse per voltage cycle, which initiates at the rising edge of the positive voltage. For comparison, the number of discharge pulse increases with an increase in the peak voltage for the filamentary mode. Fast photography reveals that the plasma plume in the filamentary mode results from a guided positive streamer,which propagates in the argon stream. However, the plume in the diffuse mode originates from a branched streamer, which propagates in the interfacial layer between the argon stream and the surrounding air. By optical emission spectroscopy,plasma parameters are investigated for the two discharge modes, which show a similar trend with increasing d. The diffuse mode has lower electron temperature, electron density, vibrational temperature, and gas temperature compared to the filamentary mode.展开更多
The influence of the energy of femtosecond laser pulses on the intensity of Fe I (371.99 nm) emission line and the continuous spectrum of the plasma generated on the surface of Fe^3+ water solution by a Ti: sapphi...The influence of the energy of femtosecond laser pulses on the intensity of Fe I (371.99 nm) emission line and the continuous spectrum of the plasma generated on the surface of Fe^3+ water solution by a Ti: sapphire laser radiation with pulse duration 〈45 fs and energies up to 7 mJ is determined. A calibration curve was obtained for Fe3+ concentration range from 0.5 g/L to the limit of detection in water solution, and its saturation was detected for concentrations above 0.25 g/L, which is ascribed to self-absorption. The 3σ- limit of detection obtained for Fe in water solution is 2.6 mg/L in the case of 7 mJ laser pulse energy. It is found that an increase of laser pulse energy insignificantly affects on LOD in the time-resolved LIBS and leads to a slight improvement of the limit of detection.展开更多
基金supported by the National MCF Energy R&D Program of China(Nos.2018YFE0301102,2022YFE03100004 and 2018YFE 0303102)National Natural Science Foundation of China(Nos.12375210 and 12305238)the Sichuan Natural Science Foundation(Nos.2022NSFSC1791,2022JDRC0014 and 2022TFQCCXTD)。
文摘A dual-route optical emission spectroscopy(D-OES)diagnostic is newly developed to monitor the optical emission from the X-point plasma region on the HL-2 A tokamak.This diagnostic is composed of an imaging system,a beam-splitting system for dual-route measurements,fiber bundles,a spectrometer system,and a control and acquisition system.One route is used to obtain wide-spectral-range spectra,and the other route is used to acquire high-wavelengthresolution line shapes.The spectral resolution of the wide-range spectrometers is 0.8 nm with a coverage of 800 nm(@200-1000 nm).The spectral resolution of the high-resolution spectrometer is 0.01 nm with a coverage of 6 nm(@200-660 nm).The spatial resolution of each route of D-OES is about 4 cm with 11 channels.The temporal resolution is 16 ms at maximum in the single-channel mode.Wide-range spectra(containing Balmer series and a Fulcher band)and highly resolved Ha line shapes are obtained by D-OES in the hydrogen glow discharge in the lab.D-OES measurements are carried out in the high-density deuterium experiments of HL-2A.The electron density n_(e)and deuterium temperature T_(D) in the X-point multifaceted asymmetric radiation from the edge(MARFE)region are derived simultaneously by fitting the measured D_(a) shape.The density n_(e)is observed to increase from~8.7×10^(18)m^(-3)to~7.8×10^(19)m^(-3),and the temperature T_(D)drops from~14.4 eV to~2.3 eV after the onset of MARFE in the discharge#38260.
基金supported by UAEM 2260/06, UAEM 2362/2006U, PROMEP FE018/2003 of Mexico
文摘Optical emission spectroscopy was used to study a gas mixture glow discharge of CO2 and N2 at a total pressure of 1.2 Torr, a power of 100 W and a flow of 16.5 L/min. The emission bands were measured in the wavelength range of 200 nm to 900 nm. The principal species observed were O2^+ (A^2П→ X^2П), CO^+ (A^2П→X^2∑), N2^+ (B^2∑u+ → X^2∑g^+), CO2^+ (A^2∏ → X^2∏), N2(C^3∏u → B^3∏g), O2(b^1∑g^+→ X^3∑g^-), and CO (a^r3∑→a^3∏). The behavior of the band intensities as a function of the N2 percentage is consistent with recent Monte Carlo simulations. The electron temperature and ion density were determined by a double Langmuir probe. The electron temperature was found in the range of 1.55 eV to 2.93 eV, and the electron concentration in the order of 10^10 cm^-3. The electron temperature and ion density at pure N2 and pure CO2 agree with previous measurements.
基金supported by National Natural Science Foundation of China(No.11304235)the Director Fund of WNLO
文摘The spectral emission and plasma parameters of SnO2 plasmas have been investigated. A planar ceramic SnO2 target was irradiated by a CO2 laser with a full width at half maximmn of 80 ns. The temporal behavior of the specific emission lines from the SnO2 plasma was characterized. The intensities of Sn I and Sn Ⅱ lines first increased, and then decreased with the delay time. The results also showed a faster decay of Sn I atoms than that of Sn II ionic species. The temporal evolutions of the SnO2 plasma parameters (electron temperature and density) were deduced. The measured temperature and density of SnO2 plasma are 4.38 eV to 0.5 eV and 11.38×1017 cm 3 to 1.1×1017^ cm-3, for delay times between 0.1 μs and 2.2 #s. We also investigated the effect of the laser pulse energy on Sn02 plasma.
文摘Two experimental techniques have been used to quantify the atomic oxygen density in the case of hot air plasma generated by a microwave (MW) resonant cavity. The latter operates at a frequency of 2.45 GHz inside a cell of gas conditioning at a pressure of 600 mbar, an injected air flow of 12 L/min and an input MW power of 1 kW. The first technique is based on the standard two photon absorption laser induced fluorescence (TALIF) using xenon for calibration but applied for the first time in the present post discharge hot air plasma column having a temperature of about 4500 K near the axis of the nozzle. The second diagnostic technique is an actinometry method based on optical emission spectroscopy (OES). In this case, we compared the spectra intensities of a specific atomic oxygen line (844 nm) and the closest wavelength xenon line (823 nm). The two lines need to be collected under absolutely the same spectroscopic parameters. The xenon emission is due to the addition of a small proportion of xenon (1% Xe) of this chemically inert gas inside the air while a further small quantity of H2 (2~) is also added in the mixture in order to collect OH(A- X) and NH(A-X) spectra without noise. The latter molecular spectra are required to estimate gas and excitation temperatures. Optical emission spectroscopy measurements, at for instance the position z=12 mm on the axis plasma column that leads to a gas measured temperature equal to 3500 K, an excitation temperature of about 9500 K and an atomic oxygen density 2.09× 1017+ 0.2×1017 cm-3. This is in very good agreement with the TALIF measurement, which is equal to 2.0×101T cm-3.
基金supported partially by DGAPA IN-105010, CONACyT 128714 of Mexico
文摘Optical emission spectroscopy (OES) was applied for plasma characterization during the erosion of asphaltene substrates. An amount of 100 mg of asphaltene was carefully applied to an electrode and exposed to air-plasma glow discharge at a pressure of 1.0 Torr. The plasma was generated in a stainless steel discharge chamber by an ac generator at a frequency of 60 Hz, output power of 50 W and a gas flow rate of 1.8 L/min. The electron temperature and ion density were estimated to be 2.15±0.11 eV and (1.24±0.05)× 10^16 m^-3, respectively, using a double Langmuir probe. OES was employed to observe the emission from the asphaltene exposed to air plasma. Both molecular band emission from N2, N2+, OH, CH, NH, O2 as well as CN, and atomic light emission from V and Hγ were observed and used to monitor the evolution of asphaltene erosion. The asphaltene erosion was analyzed with the aid of a scanning electron microscope (SEM) equipped with an energy dispersive X-ray (EDX) detector. The EDX analysis showed that the time evolution of elements C, O, S and V were similar and the chemical composition of the exposed asphaltenes remained constant. Particle size evolution was measured, showing a maximum size of 2307 μm after 60 min. This behavior is most likely related to particle agglomeration as a function of time.
基金supported by the Koran Ministry of Trade,Industry&Energy(MOTIE:GID:20006499)via KSRC(Korea Semiconductor Research Consortium)support program。
文摘Silicon etching is an essential process in various applications,and a major challenge for etching process is anisotropic high aspect ratio etching characteristics.The etch profile is determined by the plasma parameters and process parameters.In this study,the plasma state with each process parameters were analyzed through the optical emission spectroscopy(OES)plasma diagnostic sensor by both chemical and physical approaches.Electron temperature and electron density were additionally acquired using the corona model with OES data that provides chemical species information,and the etch profile was evaluated through scanning electron microscope measurement data.The results include changes in profile with gas ratio,bias power,and pressure.We figure out that factors like ion energy and ion angular distribution as well as chemical reaction affect the anisotropic profile.
基金supported by the National Natural Science Foundation of China(Grant No.51806186)the Natural Science Foundation of the Jiangsu Higher Education Institutions of China(Grant No.20KJB140025)+1 种基金the Natural Science Foundation of Jiangsu Province,China(Grant No.BK20181050)the Scientific Research Project for the Introduction Talent of Yancheng Institute of Technology(Grant No.XJR2020)。
文摘Atmospheric pressure micro-discharges in helium gas with a mixture of 0.5%water vapor between two pin electrodes are generated with nanosecond overvoltage pulses.The temporal and spatial characteristics of the discharges are investigated by means of time-resolved imaging and optical emission spectroscopy with respect to the discharge morphology,gas temperature,electron density,and excited species.The evolution of micro-discharges is captured by intensified CCD camera and electrical properties.The gas temperature is diagnosed by a two-temperature fit to the ro-vibrational OH(A^(2)Σ^(+)–X^П(2),0–0)emission band and is found to remain low at 425 K during the discharge pulses.The profile of electron density performed by the Stark broadening of Ha 656.1-nm and He I 667.8-nm lines is uniform across the discharge gap at the initial of discharge and reaches as high as 10^(23)m^(-3).The excited species of He,OH,and H show different spatio-temporal behaviors from each other by the measurement of their emission intensities,which are discussed qualitatively in regard of their plasma kinetics.
文摘This paper reports that the optical emission spectroscopy (OES) is used to monitor the plasma during the deposition process of hydrogenated microcrystalline silicon films in a very high frequency plasma enhanced chemical vapour deposition system. The OES intensities (Sill^*, H^* and H^*β) are investigated by varying the deposition parameters. The result shows that the discharge power, silane concentrations and substrate temperature affect the OES intensities. When the discharge power at silane concentration of 4% increases, the OES intensities increase first and then are constant, the intensities increase with the discharge power monotonously at silane concentration of 6%. The SiH^* intensity increases with silane concentration, while the intensities of H^*α and H^*β increase first and then decrease. When the substrate temperature increases, the SiH^* intensity decreases and the intensities of H^*α and H^*β are constant. The correlation between the intensity ratio of IH^*α/ISiH^* and the crystalline volume fraction (Xc) of films is confirmed.
文摘Burners of metal halide lamps used for illumination are generally made of polycrystalline alumina ceramic (PCA) which is translucent to visible light. We show that the difficulty of selecting a line of sight through the lamp prevents the use of optical emission diagnostic. X-rays photons are mainly absorbed and not scattered by PCA. Absorption by mercury atoms contributing to the discharge allowed us to determine the density of mercury in the lamp. By comparing diagnostic methods, we put in evidence the difficulty of taking into account the scattering of light mathematically.
文摘Argon plasma was generated by DC magnetron sputtering discharge at a constant input power and sputtering pressure. The emission spectra of the argon plasma, in a region of 300 nm to 800 nm, were recorded with three different base pressures (4×10^-4 Pa, 13×10^-4 Pa and 26×10^-4 Pa). From the spectra, the Boltzmann temperature (TB) was calculated by using the atomic Boltzmann plot method. The intensity ratio of N and N2 lines provided the information on the changes in the degree of dissociation of nitrogen molecules. The obtained results showed that with the increase in base pressure the dissociation of N2 increased and the Boltzmann temperature (TB) decreased.
基金supported by the National Basic Research Program of China 973 Program (No. 2009GB107004)the Fundamental Research Funds for the Central Universities of China (No. ZYGX2010J056)
文摘Optical emission spectroscopy and Langmuir Probe diagnostics were incorporated into the experiment, in which dust particles were formed in-situ by using reactive mixture gases (SiHa/C2H4/Ar) in a radio-frequency (RF) discharge plasma. The excitation temperature was first calculated by combining several optical emission spectra of argon lines and using a Boltzmann distribution to fit the experimental data, then the excitation temperature as functions of both gas pressure and RF power in SiH4/C2Ha/Ar discharges for different discharge conditions were obtained. Correspondingly, based on the measurement of the electron temperature by a Langmuir probe, the excitation temperature was compared with the electron temperature, and some discussions were presented. Finally the emission intensities of spectral lines of Si 390.6 ran, Si2+ 380.6 nm and C+ 426.7 nm were measured and presented as functions of pressure, RF power and flow rate of SiH4/C2H4.
基金supported by National Natural Science Foundation of China (Nos. 11075093 and 10935006) and the China Postdoctoral Science Foundation (No. 20100480327)
文摘A Maxwellian electron energy distribution function (EEDF) is often assumed when using the optical emission line-ratio method to determine the electron temperature in low- temperature plasmas. However, in many cases, non-Maxwellian EEDFs can be formed due to the non-local electron heating or the inelastic-collisional energy loss processes. In this work, with a collisional-radiative model, we propose an approach to obtain the non-Maxwellian EEDF with a 'two-temperature structure' from the emission line-ratios of Paschen 2p levels of argon and kryp- ton atoms. For applications of this approach in reactive gas (CF4, O2, etc) discharges that contain argon and krypton, recommendations of some specific emission line-ratios are provided, according to their sensitivities to the EEDF variation. The kinetic processes of the relevant excited atoms are also discussed in detail.
基金This work was supported by the National Natural Science Foundation of China No. 10175048 by the Key Laboratory Foundation of Education Ministry, Jiangsu China No. KJS01012.
文摘The characteristics of CHF3 and CF4 electron cyclotron resonance (ECR) plasma have been studied by optical emission spectroscopy (OES) and Langmuir probe. It is found that C2 radical is one of main compositions in both of the two plasmas. We investigated the relative concentration of C2 radical as a function of F (H) radical and ion density. The formation mechanism of C2 radical is analyzed.
基金This work is supported by the National Science Foundation of China No.19835030.
文摘An experimental setup was built up to carry out radio frequency (RF) inductively coupled plasma (ICP) and dielectric barrier discharge (DBD), and to depict the optical emission spectra (OES) of the discharges. OES from argon ICP and DBD plasmas in visible and near ultraviolet region were measured. For argon ICP, the higher RF power input (higher than 500 W for our machine), the higher degree of argon plasma ionization. But that doesn't mean a higher mean electron energy. With the increase in the power input, the mean electron energy increases slightly, whereas the density of electron increases apparently On the contrary, argon DBD discharge behaves in the manner of a pulsed DC discharge on optical emission spectroscopy and V-I characteristics. DBD current is composed of a series of pulses equally spaced in temporal domain. The Kinetics of DBD emission strength is mainly governed by the frequency of the current pulse.
基金financially supported by the National Natural Science Foundation of China (No.U22B2094)。
文摘The mass application of Hall thrusters poses the need for a diagnostic method of ionization mechanism in the discharge channel to boost the iteration and optimization of thruster design.This work presents an Optical Emission Spectroscopy (OES) method for diagnostics of the contribution of different ionization mechanisms and the flux of ions in different valences in the discharge channel of a Hall thruster.The emission spectra in the discharge channel are analyzed by jointly utilizing a collisional-radiative model,an ionization-excitation model,and a flux-conservation model.It is found that the intensities of some spectral lines can be converted into the reaction rates of collision processes,e.g.,electron-induced excitation and ionization processes.The latter can further be used to determine the evolutions of particle fluxes by utilizing the conservation law of matter.The novel method is demonstrated on a kilo-watt Hall thruster.The evolutions of several parameters are determined using this method along the discharge channel,including the ionization rates of different mechanisms,particle fluxes,particle densities,and particle velocities.This novel method can be further developed by being jointly utilized with spectral imaging and tomography techniques,enabling diagnostics of multi-dimensional distributions of the above-mentioned parameters in the discharge channel and near-field plume.
基金supported by the National Natural Science Foundation of China(Nos.62001031,52192610,51702018,and 51432005)the Youth Innovation Promotion Association,CAS,the Fundamental Research Funds for the Central Universities(No.E0E48957)the National Key R&D Program from Minister of Science and Technology(No.2016YFA0202704).
文摘Photon emission during contact electrification(CE)has recently been observed,which is called as CE-induced interface photon emission spectroscopy(CEIIPES).Physical mechanisms of CEIIPES are essential for interpreting the structure and electronic interactions of a contacted interface.Using the methods of density functional theory(DFT)and time-dependent DFT(TDDFT),it is confirmed theoretically that the spectrum of emitted photons is contributed from electron transfer and transition during CE.Specifically,the excited electrons from higher energy state in one material may transfer to a lower energy state of another material followed by a transition;and/or some unstable excited electrons at a higher energy level of one material may transit to a lower energy state of itself,both of which result in CEIIPES.Furthermore,the CE-induced interface absorption spectrum(CEIIAS)has been demonstrated,due to the intermolecular electron transfer excitation.
基金Supported by the National Natural Science Foundation of China (30660092)the Cooperation Program between Province and Zhejiang University from Yunnan Provincial Scientific and Technology Department (2006YX12)the Yunnan Introduction and Foster Talent Program (2005PY01-14)
文摘The phylogenetic relationship for classification traits and eight mineral elements in brown rice (Oryza sativa L.) from Yunnan Province in China was carried out using microwave assisted digestion followed by inductively coupled plasma atomic emission spectroscopy, and the analytical procedures were carefully controlled and validated. In general, the results show that the mean levels of K, Ca, Mg, Fe and Cu in brown rice for 789 accessions of rice landraces was distinctly lower than that of improved cultivars. They further demonstrate that Ca plays an important role in the differentiation of subspecies indica-japonica, especially to enhance adaptation of cold stress, and that five mineral elements in brown rice enhance the eurytopicity from landrace to improved cultivar. Hierarchical cluster analysis, using average linkage from SPSS software based on eight mineral elements in brown rice, showed that Yunnan rice could be grouped into rice landrace and improved cultivar, with the rice landrace being further clustered into five subgroups, and that, interestingly, purple rice does not cluster with either of the groups. Our present data confirm that indica is the closest relative of late rice and white rice, and that they constitute rice landraces together, whereas japonica is the closest relatives of non-nuda, early-mid and glutinous rice. It is further shown that japonica, non-nuda, early-mid, glutinous, white and red rice might be more primitive than indica, nuda, late, non-glutinous and purple rice, respectively.
基金supported by the National Natural Science Foundation of China under Grant No.51072206
文摘Nondestructive Raman spectroscopy and external-beam proton-induced X-ray emission (PIXE) technique to analyze eight ancient glasses unearthed from the provinces of Henan,Hubei,and Jiangsu,which allowes for a good characterization of the glass matrix and chemical compositions,is carried out.The results indicate that all the eight glass samples could be typically divided into three systems: faience (sample No.SZWG-4),PbO-BaO-SiO 2 (sample Nos.NYWKI-5-1,HNWKII-88,and HNWKII-84),and Na 2 OCaO-SiO 2 (sample Nos.HBWKI-16,HBWKI-17,HBWKI-18,and SZWG-1).Additional relationships between the Raman spectra and parameters,such as residues of raw materials and opacifying agent,are also discussed by respectively comparing them with similar glass samples excavated from other historical sites.
基金Project supported by the National Natural Science Foundation of China (Grant Nos.51977057,11875121,and 11805013)the Natural Science Foundation of Hebei Province,China (Grant Nos.A2020201025 and A2022201036)+2 种基金the Funds for Distinguished Young Scientists of Hebei Province,China (Grant No.A2012201045)the Natural Science Interdisciplinary Research Program of Hebei University (Grant No.DXK202011)the Postgraduate’s Innovation Fund Project of Hebei University (Grant No.HBU2022bs004)。
文摘Plasma jet has extensive application potentials in various fields, which normally operates in a diffuse mode when helium is used as the working gas. However, when less expensive argon is used, the plasma jet often operates in a filamentary mode. Compared to the filamentary mode, the diffuse mode is more desirable for applications. Hence, many efforts have been exerted to accomplish the diffuse mode of the argon plasma jet. In this paper, a novel single-needle argon plasma jet is developed to obtain the diffuse mode. It is found that the plasma jet operates in the filamentary mode when the distance from the needle tip to the central line of the argon stream(d) is short. It transits to the diffuse mode with increasing d. For the diffuse mode, there is always one discharge pulse per voltage cycle, which initiates at the rising edge of the positive voltage. For comparison, the number of discharge pulse increases with an increase in the peak voltage for the filamentary mode. Fast photography reveals that the plasma plume in the filamentary mode results from a guided positive streamer,which propagates in the argon stream. However, the plume in the diffuse mode originates from a branched streamer, which propagates in the interfacial layer between the argon stream and the surrounding air. By optical emission spectroscopy,plasma parameters are investigated for the two discharge modes, which show a similar trend with increasing d. The diffuse mode has lower electron temperature, electron density, vibrational temperature, and gas temperature compared to the filamentary mode.
基金supported by the Russian Science Foundation(agreement#14-50-00034)(measurements of limit of detection)Russian Foundation for Basic Research(NK 15-32-20878/15)obtained in the frame of "Organization of Scientific Research"in the Far Eastern Federal University supported by Ministry of Education and Science of Russian Federation
文摘The influence of the energy of femtosecond laser pulses on the intensity of Fe I (371.99 nm) emission line and the continuous spectrum of the plasma generated on the surface of Fe^3+ water solution by a Ti: sapphire laser radiation with pulse duration 〈45 fs and energies up to 7 mJ is determined. A calibration curve was obtained for Fe3+ concentration range from 0.5 g/L to the limit of detection in water solution, and its saturation was detected for concentrations above 0.25 g/L, which is ascribed to self-absorption. The 3σ- limit of detection obtained for Fe in water solution is 2.6 mg/L in the case of 7 mJ laser pulse energy. It is found that an increase of laser pulse energy insignificantly affects on LOD in the time-resolved LIBS and leads to a slight improvement of the limit of detection.