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Fabrication of large-scale ripples on fluorine-doped tin oxide films by femtosecond laser irradiation
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作者 韩艳华 李岩 +1 位作者 赵秀丽 曲士良 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第9期242-246,共5页
The large-scale uniform self-organized ripples are fabricated on fluorine-doped tin oxide (FTO) coated glass by femtosecond laser. They can be smoothly linked in a horizontal line with the moving of XYZ stage by set... The large-scale uniform self-organized ripples are fabricated on fluorine-doped tin oxide (FTO) coated glass by femtosecond laser. They can be smoothly linked in a horizontal line with the moving of XYZ stage by setting its velocity and the repetition rate of the laser. The ripple-to-ripple linking can also be realized through line-by-line scanning on a vertical level. The mechanism analysis shows that the seeding effect plays a key role in the linking of ripples. 展开更多
关键词 femtosecond laser RIPPLES fto film seeding effect
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Effect of Annealing on the Morphology,Structure and Photoelectric Properties of AZO/Pt/FTO Trilayer Films
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作者 Li-Jing Huang Nai-Fei Ren +1 位作者 Bao-Jia Li Ming Zhou 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2015年第3期281-288,共8页
Aluminum-doped zinc oxide/platinum/fluorine-doped tin oxide(AZO/Pt/FTO) trilayer films were prepared by sputtering 5-nm-thick Pt layers and 150-nm-thick AZO layers in sequence on commercial FTO glass.The effects of ... Aluminum-doped zinc oxide/platinum/fluorine-doped tin oxide(AZO/Pt/FTO) trilayer films were prepared by sputtering 5-nm-thick Pt layers and 150-nm-thick AZO layers in sequence on commercial FTO glass.The effects of onestep annealing and layer-by-layer annealing on the morphology,structure and photoelectric properties of the AZO/Pt/FTO trilayer films were comparatively analyzed.It is found that the both annealing approaches increased the grain size and improved the crystallinity of the films,leading to enhancement in transmittance and conductivity.However,layer-by-layer annealing led to the formation of quasi-continuous or continuous AZO layers,different from the sparsely distributed AZO particles brought about by one-step annealing,resulting in excellent optical and electrical properties.Specifically,after layer-by-layer annealing at 400 ℃ for both Pt and AZO layers,the AZO/Pt/FTO trilayer film showed an increase in average transmittance from 71.3% to 85.3% and a decrease in sheet resistance from 7.5 to 5.6 Ω/□,leading to the highest figure of merit of 3.64 × 10^(-2) Ω^(-1). 展开更多
关键词 Annealing Magnetron sputtering Optical property Electrical property AZO/Pt/fto trilayer film
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