Surface Plasmon Interference Lithography Assisted by a Fabry-Perot Cavity Composed of Subwavelength Metal Grating and Thin Metal Film

A surface plasmon interference lithography assisted by a Fabry-Perot （F-P） cavity composed of subwavelength metal gratings and a thin metal fihn is proposed to fabricate high-quality nanopatterns. The calculated results indicate that uniform straight interference fringes with high contrast and high electric-field intensity are formed in the resist under the F-P cavity. The analyses of spatial frequency spectra illuminate the physical mechanism of the formation for the interference fringes. The influence of the F-P cavity spacing is discussed in detail. Moreover, the error analyses reveal that all parameters except the metal grating period in this scheme can bear large tolerances for the device fabrication.

基于可重构PRS的一维电子波束转向Fabry-Perot天线设计

设计了一种具有一维电子波束转向的新型Fabry-Perot(F-P)谐振腔天线。该天线由同轴探针馈电的方形微带贴片天线作为辐射源,并采用加载PIN二极管的可重构部分反射表面(Partially Reflective Surface,PRS)实现波束转向。所设计的可重构PRS由6×6个花瓣型单元组成,并均分为相等的两部分Part 1和Part 2,分别由两个控制信号独立控制,因此可以有选择地调节每部分PIN二极管的开关状态。所设计的天线具有三种不同的辐射模式。测量结果表明,天线主波束能够在+9°、0°、-9°三种离散状态下自由切换。所有状态下重叠的阻抗带宽(|S_(11)|<-10 dB)为5.5%(5.43~5.74 GHz),最大增益达到14.2 dBi。

Research on stress characteristics of Fabry-Perot sensor with center microbubble structure

The optical fiber based on silicon materials has a smaller thermal expansion coefficient, therefore it can be used for the preparation of sensor devices which are insensitive to temperature but sensitive to refractive index, strain, stress, etc. For example, we can use optical fiber Fabry-Perot （F-P） sensor to achieve high sensitivity stress sensing. In this paper, we design an optical fiber F-P sensor with low cost and high sensitivity based on chemical etching method and analyze the stress sensing properties. Hydrofluoric acid is used to prepare the end face concave hole of the optical fiber first, and then the hollow struc-ture of the fiber F-P sensor is obtained by melting and discharge. This preparation method contributes greatly to enhancing the stress sensing properties and temperature insensitivity of the optical fiber device. The experimental results show that interference spectrum peak change is proportional to the stress change of optical fiber F-P sensor, stress sensitivity can reach 5. 2, and the cost is relatively low. Based on this,it has a certain application value in the stress sensing field.

基于MOEMS敏感结构的非本征F-P干涉仪式光纤声压传感器

随着声学探测技术的不断进步,对声压传感器提出了高精度、小型化、抗电磁干扰能力强和易批量生产等要求。研制了基于微光电子机械系统(MOEMS)敏感结构的非本征Fabry-Perot(F-P)干涉仪式光纤声压传感器。利用圆片级集成技术实现MOEMS敏感结构与光学腔室的高精度对准,大大提高了传感器的一致性。声压传感器的声学性能测试结果表明,其具有高灵敏度和良好的线性响应度,信噪比达到78.3 dB,实现了对声压信号的优良响应。此外,该传感器既具有光纤传感技术精度高和抗电磁干扰能力强等优点,又具备了微电子机械系统(MEMS)体积小和易批量生产的优势。

基于光纤Fabry-Perot传感器的静冰压力检测方法

针对静冰压力检测需求,提出了一种基于光纤Fabry-Perot传感原理的静冰压力检测方法。其特点是结合精密切割方法,制备了一种单模光纤-毛细玻璃管-单模光纤结构的Fabry-Perot(F-P)传感器,并采用金属管/PDMS(聚二甲基硅氧烷)填充方法对传感器进行了封装。为了提升传感器的抗温度干扰能力,采用了双传感器检测方法。在此基础上,进行了基于光纤F-P传感器的静冰内部应力检测实验,研究了传感器受到冰温压力时的干涉谱峰偏移情况。实验结果表明:在静冰冷冻与融化过程中,传感器干涉光谱的谱峰移动达14 nm。同时双传感器检测方法明显提升了温度抗干扰能力。

Application of a joint algorithm based on L-T to pulse pressure detection signal of fiber Fabry-Perot nano pressure sensor

An improved denoising method and its application in pulse beat signal denoising are studied.The proposed denoising algorithm takes the advantages of local mean decomposition(LMD)and time-frequency peak filtering(TFPF),called L-T algorithm.As a classical time-frequency filtering method,TFPF can effectively suppress random noise with signal amplitude retained when selecting a longer window length,while the signal amplitude will be seriously attenuated when selecting a shorter window length.In order to maintain effective signal amplitude and suppress random noise,LMD and TFPF are improved.Firstly,the original signal is decomposed into progression-free survival(PFS)by LMD,and then the standard error of mean(SEM)of each product function is calculated to classify many PFSs into useful component,mixed component and noise component.Secondly,by using the shorter window TFPF for useful component and the longer window TFPF for mixed component,noise component is removed and the final signal is obtained after reconstruction.Finally,the proposed algorithm is used for noise reduction of an Fabry-Perot(F-P)pressure sensor.Experimental results show that compared with traditional wavelet,L-T algorithm has better denoising effect on sampled data.

Mesa Diaphragm-Based Fabry-Perot Optical MEMS Pressure Sensor

An optical micro electron mechanical system （MEMS） pressure sensor with a mesa membrane is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Perot （F-P） interference and the relation between deflection and pressure is analyzed. Both the mechanical model of the mesa structure diaphragm and the signal averaging effect is validated by simulation, which declares that the mesa structure diaphragm is superior to the planar one on the parallelism and can reduce the signal averaging effect. Experimental results demonstrate that the mesa structure sensor has a reasonable linearity and sensitivity.

Fabry-Perot interference and piezo-phototronic effect enhanced flexible MoS_(2) photodetector

Flexible photodetectors(PDs)are indispensable components for next-generation wearable electronics.Recently,two-dimensional(2D)materials have been implemented as functional flexible optoelectronic devices due to their characteristics of atomically thin layers,excellent flexibility,and strain sensitivity.In this work,we developed a flexible photodetector based on MoS_(2)/NiO heterojunction,and Fabry-Perot(F-P)and piezo-phototronic effect have been employed to enhance the responsivity(R)and external quantum efficiency(EQE)of the devices.The F-P effect is utilized to improve the optical absorption of the MoS_(2),resulting in an enhancement in the photoluminescence(PL)of monolayer MoS_(2) and the EQE of the photodetector by 30 and 130 times,respectively.The flexible photodetector exhibits an ultrahigh detectivity(D*)of 2.6×10^(14) Jones,which is the highest value ever reported for flexible MoS_(2) PDs.The piezo-potential of monolayer MoS_(2) decreases the valence band offset at the interface of MoS_(2)/NiO,which increases the transfer efficiency of the photon-generated carriers significantly.Under 1.17%tensile strain,the R of the flexible photodetector can be enhanced by 271%.This research may provide a universal strategy for the design and performance optimization of 2D materials heterostructures for flexible optoelectronics.

High-finesse displacement sensor and a theoretical accelerometer model based on a fiber Fabry-Perot interferometer

A displacement sensor based on the fiber Fabry-Perot (F-P) cavity was proposed in this paper. Theoretical and experimental analyses were presented. Displacement resolution was demonstrated by spectrum-domain experiments to obtain the dynamic range of the F-P sensor, and a piezoelectric crystal unit (PZT) was used as the driver. The output signal was modulated by a piezoelectric ceramic ring and demodulated by a phase-locked oscillator. The experimental results show that the displacement resolution of the F-P sensor is less than 5 nm and the dynamic range is more than 100 μm. As acceleration is the second-order differential of displacement, an accelerometer model was proposed using the finite element method (FEM) nd ANSYS software.

法布里—珀罗干涉仪在现代光学中的应用

十九世纪未由法布里和珀罗研制出了多光束干涉仪,简称E—P干涉仪。由于它在近代物理和现代物理中具有非常重要的应用价值,因此在国内外的光学教材中都进行了专门论述,并详细地介绍了它的应用。它的特殊价值在于:它是一种分辨本领极高的光谱仪器,可精确地比较各光谱线的波长,用于光谱线超精细结构的研究;其次它还是现代激光器的谐振腔;以及在光学仪器中作为干涉滤光片。

Research on a Pulse Interference Filter Used for the Fiber Bragg Grating Interrogation System

In this paper, a novel pulse interference filter for fiber Bragg grating （FBG） interrogation based on the tunable Fabry-Perot （F-P） filtering principle is proposed and experimentally demonstrated. The self-developed FBG interrogation system is devised for the aircraft health management of key structures. Nevertheless, the pulse interference is detected in the reflection spectrum of FBG causing interrogation system unstable. To address the problem, the first-order lag pulse broadening filter is proposed in this paper. The first-order lag filter is applied to preprocess and smooth the original signal, meanwhile enhancing the signal-to-noise ratio （SNR）. Afterwards, peaks of reflection spectrum are distinguished with pulse interference by pulse broadening. Experimental results indicate that 634 peaks are detected before adopting the first-order lag pulse broadening filter. Comparatively, the number of peaks decreases to 203 after filtering the interference pulse, and the correct rate of peak detection is higher than 98.5%. Through the comparison with the finite impulse response （FIR） filter, the advantage of first-order lag filter is proved. The vibration monitoring experiment demonstrates that this system has high dynamic precision with a dynamic interrogation range of 0Hz-400Hz, and the maximum repetition rate of 800Hz.

High-sensitivity refractive index sensors based on Fano resonance in a metal-insulator-metal based arc-shaped resonator coupled with a rectangular stub

A metal-insulator-metal(MIM)-based arc-shaped resonator coupled with a rectangular stub(MARS) structure is proposed. This structure can generate two tunable Fano resonances originating from two different mechanisms. The structure has the advantage of being sensitive to the refractive index, and this feature makes it favorable for application in various microsensors. The relationship between the structural parameters and Fano resonance is researched using the finite element method(FEM) based on the software COMSOL Multiphysics 5.4. The simulation reveals that the sensitivity reaches1900 nm/refractive index unit(RIU), and the figure of merit(FOM) is 23.75.

光纤F-P腔压力传感器在高温油井下的应用研究

针对高温、高压油井的测量环境,设计研制了基于光纤非本征型Fabry-Perot(F-P)腔的波长解调型光纤压力传感器系统。该系统采用激光熔接制作的光纤F-P传感头,具有测量动态范围大、温度敏感性小、耐高温和长期工作稳定等优点,在压强0～30MPa范围内,系统压力测量分辨率达到0.003MPa,温度敏感性小于0.002MPa/℃。光纤传感头采用光纤-厚壁石英管激光熔接的无胶封装方式,解决了高温环境下的传感器高压密封和光纤保护问题。

基于空芯光子晶体光纤的F-P干涉式折射率计

提出了一种基于空芯光子晶体光纤(HCPCF)的Fabry-Perot(F-P)干涉式高灵敏度折射率计。利用被测液体进入F-P腔后可改变腔内介质的折射率,从而使得干涉光光程差发生变化这一特点,通过检测光程差的变化就可实现对液体折射率的测量。实验结果表明,对折射率在1.3340～1.3612内变化的不同浓度酒精溶液测量时,光程差变化了9.508μm。

光纤F-P传感低相干信号的小波提取研究

研究了Morlet小波在光纤Fabry-Perot(F-P)低相干干涉条纹包络提取方面的应用,给出了Morlet小波尺度的计算公式。对不同信噪比(SNR)下低相干干涉峰值的提取作了仿真计算,并利用实测干涉图作了小波提取实验,验证了Morlet小波处理方法的有效性。实验结果显示,采用Morlet小波处理的低相干干涉解调方法的测量线性度好,线性相关系数为0.999 9。

基于高精细度F-P滤波器的40Gb/s全光时钟提取

提出了一种基于高精细度Fabry-Perot(F-P)滤波器的全光时钟提取方案,并进行了实验验证。为了实现对信号波长无关的特性,系统利用光纤中交叉相位调制(XPM)效应对输入信号进行正码波长变换,使变换后的波长始终与F-P滤波器的透射峰精确对准。采用精细度为1 012的高精细度F-P滤波器提取时钟,并利用半导体光放大器(SDA)的自增益调制(SGM)效应进一步抑制时钟信号的低频噪声,保证了高质量的时钟输出。实验中,利用这种装置对40 Gb/s归零(RZ)码信号进行了时钟提取,得到了抖动为285 fs的高质量40 GHz时钟信号,验证了方案的可行性。

光纤F-P腔与FBG复用传感器精确解调方法研究

建立了基于光纤Fabry-Perot(F-P)腔与光纤Bragg光栅(FBG)串联复用结构传感器的解复用数学模型,分析了串联复用中FBG与F-P腔光谱的叠加对各自解调的影响,得到了分离FBG与F-P腔光谱的方法,从而实现双参数测量高精度解调的目的,并采用基于扫描激光器的波长查询系统验证了该方法的有效性。实验结果表明,该解调方法可以消除串联复用时光纤F-P腔与FBG间的交叉干扰,光纤F-P腔的解调数据最大离散值小于0.2nm,FBG峰值反射波长测量数据最大离散值小于0.7pm。

基于HCPCF的F-P应变传感器的波分频分复用

提出一种基于空芯光子晶体光纤(HCPCF,hollow core photonic crystalfiber)的Fabry-Perot(HCPCF F-P)干涉应变传感器进行大容量的波分频分复用实验。HCPCFF-P应变传感器的干涉腔长度可达cm数量级,并且温度对应变的交叉影响小。优化制作了HCPCFF-P应变传感器,重点研究了6个不同长度干涉腔应变传感器的波分频分复用实验。实验结果表明,复用系统的应变测量精度可达±20με。

Ultra-high sensitivity fiber optic microphone with corrugated graphene-oxide diaphragm for voice recognition

To avoid interference from unexpected background noises and obtain high fidelity voice signal,acoustic sensors with high sensitivity,flat frequency response,and high signal-to-noise ratio(SNR)are urgently needed for voice recognition.Grapheneoxide(GO)has received extensive attention due to its advantages of controllable thickness and high fracture strength.However,low mechanical sensitivity(SM)introduced by undesirable initial stress limits the performance of GO material in the field of voice recognition.To alleviate the aforementioned issue,GO diaphragm with annular corrugations is proposed.By means of the reusable copper mold machined by picosecond laser,the fabrication and transfer of corrugated GO diaphragm are realized,thus achieving a Fabry–Perot(F–P)acoustic sensor.Benefitting from the structural advantage of the corrugated GO diaphragm,our F–P acoustic sensor exhibits high S_(M)(43.70 nm/Pa@17 kHz),flat frequency response(−3.2 to 3.7 dB within 300–3500 Hz),and high SNR(76.66 dB@1 kHz).In addition,further acoustic measurements also demonstrate other merits,including an excellent frequency detection resolution(0.01 Hz)and high time stability(output relative variation less than 6.7% for 90 min).Given the merits presented before,the fabricated F–P acoustic sensor with corrugated GO diaphragm can serve as a high-fidelity platform for acoustic detection and voice recognition.In conjunction with the deep residual learning framework,high recognition accuracy of 98.4%is achieved by training and testing the data recorded by the fabricated F–P acoustic sensor.

基于琼脂薄膜的微型端面光纤F-P湿度传感器

提出了一种基于琼脂薄膜的微型法布里-珀罗(Fabry-Perot,F-P)光纤湿度传感器。传感器通过将标准单模光纤插入空芯玻璃管并在玻璃管端面浸涂琼脂薄膜形成双F-P结构。当环境相对湿度变化时,琼脂薄膜的体积和折射率发生改变,从而引起干涉光发生波长偏移。搭建了湿度传感实验系统,对传感器的湿度传感特性进行了表征,在50%RH—80%RH的相对湿度范围内实现了高达1.2324 nm/%RH的相对湿度测量灵敏度。该传感器尺寸紧凑、成本低、具有较好的线性灵敏度,且制备方式简单。