Effect of internal structure of a batch-processing wet-etch reactor on fluid flow and heat transfer

Batch-processing wet-etch reactors are the key equipment widely used in chip fabrication,and their performance is largely affected by the internal structure.This work develops a three-dimensional computational fluid dynamics(CFD)model considering heat generation of wet-etching reactions to investigate the fluid flow and heat transfer in the wet-etch reactor.The backflow is observed below and above the wafer region,as the flow resistance in this region is high.The temperature on the upper part of a wafer is higher due to the accumulation of reaction heat,and the average temperature of the side wafer is highest as its convective heat transfer is weakest.Narrowing the gap between wafer and reactor wall can force the etchant to flow in the wafer region and then facilitate the convective heat transfer,leading to better within-wafer and wafer-to-wafer etch uniformities.An inlet angle of 60°balances fluid by-pass and mechanical energy loss,and it yields the best temperature and etch uniformities.The batch with 25wafers has much wider flow channels and much lower flow resistance compared with that with 50wafers,and thus it shows better temperature and etch uniformities.These results and the CFD model should serve to guide the optimal design of batch-processing wet-etch reactors.

VIBRATION NUMERICAL ANALYSIS OF COUNTER-ROTATING TURBINE WITH WAKE-FLOW USING FLUID-STRUCTURE INTERACTION METHOD

The design of counter-rotating turbine is one of new techniques to improve the thrust-weight ratio of jet propulsion engines.Numerical analysis of a low pressure（LP）counter-rotating turbine rotor blade is presented by using ANSYS/CFX software.Interaction of aerodynamics and solid mechanics coupling in the computation is applied.In some rating of turbine,stress distribution and vibration characteristics of low pressure turbine（LPT）blade are computed.The wake aerodynamic forces and LPT blade vibration are transformed in frequency domain using fast Fourier transform（FFT）method.The results show that under wake aerodynamic force excitation,the first order modal vibration is more easily aroused and the higher order response cannot be ignored.Moreover,with different temperature fields,the vibration responses of blade are also different.

Experimental study of solid-liquid origami composite structures with improved impact resistance

In this paper,a liquid-solid origami composite design is proposed for the improvement of impact resistance.Employing this design strategy,Kresling origami composite structures with different fillings were designed and fabricated,namely air,water,and shear thickening fluid(STF).Quasi-static compression and drop-weight impact experiments were carried out to compare and reveal the static and dynamic mechanical behavior of these structures.The results from drop-weight impact experiments demonstrated that the solid-liquid Kresling origami composite structures exhibited superior yield strength and reduced peak force when compared to their empty counterparts.Notably,the Kresling origami structures filled with STF exhibited significantly heightened yield strength and reduced peak force.For example,at an impact velocity of 3 m/s,the yield strength of single-layer STF-filled Kresling origami structures increased by 772.7%and the peak force decreased by 68.6%.This liquid-solid origami composite design holds the potential to advance the application of origami structures in critical areas such as aerospace,intelligent protection and other important fields.The demonstrated improvements in impact resistance underscore the practical viability of this approach in enhancing structural performance for a range of applications.

Dynamic Analysis of Tension Leg Platform for Offshore Wind Turbine Support as Fluid-Structure Interaction

Tension leg platform （TLP） for offshore wind turbine support is a new type structure in wind energy utilization. The strong-interaction method is used in analyzing the coupled model, and the dynamic characteristics of the TLP for offshore wind turbine support are recognized. As shown by the calculated results： for the lower modes, the shapes are water＇s vibration, and the vibration of water induces the structure＇s swing; the mode shapes of the structure are complex, and can largely change among different members; the mode shapes of the platform are related to the tower＇s. The frequencies of the structure do not change much after adjusting the length of the tension cables and the depth of the platform; the TLP has good adaptability for the water depths and the environment loads. The change of the size and parameters of TLP can improve the dynamic characteristics, which can reduce the vibration of the TLP caused by the loads. Through the vibration analysis, the natural vibration frequencies of TLP can be distinguished from the frequencies of condition loads, and thus the resonance vibration can be avoided, therefore the offshore wind turbine can work normally in the complex conditions.

Progress in molecular-simulation-based research on the effects of interface-induced fluid microstructures on flow resistance

In modern chemical engineering processes, solid interface involvement is the most important component of process intensification techniques, such as nanoporous membrane separation and heterogeneous catalysis. The fundamental mechanism underlying interfacial transport remains incompletely understood given the complexity of heterogeneous interfacial molecular interactions and the high nonideality of the fluid involved. Thus, understanding the effects of interface-induced fluid microstructures on flow resistance is the first step in further understanding interfacial transport. Molecular simulation has become an indispensable method for the investigation of fluid microstructure and flow resistance. Here, we reviewed the recent research progress of our group and the latest relevant works to elucidate the contribution of interface-induced fluid microstructures to flow resistance.We specifically focused on water, ionic aqueous solutions, and alcohol–water mixtures given the ubiquity of these fluid systems in modern chemical engineering processes. We discussed the effects of the interfaceinduced hydrogen bond networks of water molecules, the ionic hydration of ionic aqueous solutions, and the spatial distributions of alcohol and alcohol–water mixtures on flow resistance on the basis of the distinctive characteristics of different fluid systems.

Structure and Fluid Transportation Performance of Faults in the Changxing-Feixianguan Formation, Xuanhan County, Northeastern Sichuan Basin

On the basis of field observations, microscopic thin-sections and laboratory data analysis of ten faults in Xuanhan County area, northeastern Sichuan Basin, central China, the internal and megascopic structures and tectonite development characteristics are mainly controlled by the geomechanical quality in brittle formation of the Changxing-Feixianguan Formation. The fluid transportation performance difference between the faults formed by different geomechanics or different structural parts of the same fault are controlled by the mcgascopic structure and tectonite development characteristics. For instance, the extension fault structure consists of a tectonite breccia zone and an extension fracture zone. Good fluid transportation performance zones are the extension fracture zone adjacent to the tectonite breccia zone and the breccia zone formed at the early evolutionary stage. The typical compression fault structure consists of a boulder-clay zone or zones of grinding gravel rock, compression foliation, tectonite lens, and dense fracture development. The dense fracture development zone is the best fluid transporting area at a certain scale of the compression fault, and then the lens, grinding gravel rock zone and compression foliation zones are the worst areas for hydrocarbon migration. The typical tensor-shear fault with a certain scale can be divided into boulder-clay or grinding gravel rock zones of the fault, as well as a pinnate fractures zone and a derivative fractures zone. The grinding gravel rock zone is the worst one for fluid transportation. Because of the fracture mesh connectivity and better penetration ability, the pinnate fractures zone provides the dominant pathway for hydrocarbon vertical migration along the tensor-shear fault.

Three-dimensional Computational Fluid Dynamics Modeling of Two-phase Flow in a Structured Packing Column

Characterizing the complex two-phase hydrodynamics in structured packed columns requires a power- ful modeling tool. The traditional two-dimensional model exhibits limitations when one attempts to model the de- tailed two-phase flow inside the columns. The present paper presents a three-dimensional computational fluid dy- namics （CFD） model to simulate the two-phase flow in a representative unit of the column. The unit consists of an CFD calculations on column packed with Flexipak 1Y were implemented within the volume of fluid （VOF） mathe- matical framework. The CFD model was validated by comparing the calculated thickness of liquid film with the available experimental data. Special attention was given to quantitative analysis of the effects of gravity on the hy- drodynamics. Fluctuations in the liquid mass flow rate and the calculated pressure drop loss were found to be quali- tatively in agreement with the experimental observations.

Channel Stability Analysis by One-Way Fluid Structure Interaction: A Case Study in China

Channel engineering stability with underground goafs is a complex three-dimensional problem, especially when considering channel leakage, and is influenced by a number of processes, such as seepage, fluid structure interaction (FSI), modeling, and selection of geological mechanical parameters. In this study, stability finite element analysis by one-way FSI was performed by establishing an integrated 3D engineering geological model. The extended Fourier amplitude sensitivity test was used to quantitatively assess the first-order and total sensitivities of the engineering model to critical geological mechanical parameters. Results illustrate that the channel engineering deformation is under a reasonable range and the elastic modulus is the highest total sensitivity parameter for the channel tilt and curvature at 0.7395 and 0.7525, respectively. Moreover, the most observable coupling effects for the curvature and horizontal strain are cohesion (0.1933) and density (0.7410), respectively. © 2017, Tianjin University and Springer-Verlag GmbH Germany.

Fluid−Structure Interaction of Two-Phase Flow Passing Through 90° Pipe Bend Under Slug Pattern Conditions

Numerical simulations of evolution characteristics of slug flow across a 90°pipe bend have been carried out to study the fluid−structure interaction response induced by internal slug flow.The two-phase flow patterns and turbulence were modelled by using the volume of fluid(VOF)model and the Realizable k−εturbulence model respectively.Firstly,validation of the CFD model was carried out and the desirable results were obtained.The different flow patterns and the time-average mean void fraction was coincident with the reported experimental data.Simulations of different cases of slug flow have been carried out to show the effects of superficial gas and liquid velocity on the evolution characteristics of slug flow.Then,a one-way coupled fluid-structure interaction framework was established to investigate the slug flow interaction with a 90°pipe bend under various superficial liquid and gas velocities.It was found that the maximum total deformation and equivalent stress increased with the increasing superficial gas velocity,while decreased with the increasing superficial liquid velocity.In addition,the total deformation and equivalent stress has obvious periodic fluctuation.Furthermore,the distribution position of maximum deformation and stress was related to the evolution of slug flow.With the increasing superficial gas velocity,the maximum total deformation was mainly located at the 90°pipe bend.But as the superficial liquid velocity increases,the maximum total deformation was mainly located in the horizontal pipe section.Consequently,the slug flow with higher superficial gas velocity will induce more serious cyclical impact on the 90°pipe bend.

New high-resolution 2D seismic imaging of fluid escape structures in the Makran subduction zone,Arabian Sea

Seabed fluid escape is active in the Makran subduction zone,Arabian Sea.Based on the new highresolution 2D seismic data,acoustic blanking zones and seafloor mounds are identified.Acoustic blanking zones include three kinds of geometries:Bell-shaped,vertically columnar and tilted zones.The bellshaped blanking zone is characterized by weak and discontinuous reflections in the interior and upbending reflections on the top,interpreted as gas chimneys.Vertically columnar blanking zone is interpreted as side-imaged gas chimneys associated with focused fluid flow and topped by a seafloor anomaly expressed as a localized reflection discontinuity,which may together serve as a vent structure.Tilted acoustic blanking zone could be induced by accretionary thrust activity and rapid sedimentation surrounding slope.Seafloor mounds occur at the sites of bell-shaped acoustic blanking zone and may be associated with the material intrusion.Bottom simulating refectors(BSRs)are widely distributed and exhibit a series of characteristics including diminished amplitude,low continuity as well as local shoaling overlapping with these acoustic blanking zones.The large amount of gases dissociated from the gas hydrates migrated upwards and then arrived at the near-seafloor sediments,followed by the formation of the gas hydrates and hence the seafloor mound.

Thermal-Fluid-Structure Coupling Analysis of Flexible Corrugated Cryogenic Hose

This work presents a numerical investigation of the thermal–fluid–structure coupling behavior of the liquid natural gas(LNG)transported in the flexible corrugated cryogenic hose.A three-dimensional model of the corrugated hose structure composed of multiple layers of different materials is established and coupled with turbulent LNG flow and heat transfer models in the commercial software ANSYS Workbench.The flow transport behavior,heat transfer across the hose layers,and structural response caused by the flow are analyzed.Parametric studies are performed to evaluate the impacts of inlet flow rate and thermal conductivity of insulation material on the temperature and structural stress of the corrugated hose.The study found that,compared with a regular operating condition,higher inlet flow velocities not only suppress the heat gain of the LNG but also lower the flow-induced structural stress.The insulation layer exhibits excellent performance in maintaining the temperature at the fluid–structure interface,showing little temperature change with respect to material thermal conductivity and ambient temperature.The simulation results may contribute to the research and design of the flexible corrugated cryogenic hoses and provide guidance for safer and more efficient field operations.

Performance of viscous fluid dampers coupling adjacent inelastic structures under near-fault earthquakes

The behavior of viscous fluid damper applied in coupling structures subjected to near-fault earthquake was studied.The structural nonlinearity was characterized by Bouc-Wen model and several near-fault ground motions were simulated by the combination of a recorded earthquake(background ground motion) with equivalent velocity pulses that possess near-fault features.Extensive parametric studies were carried out to find the appropriate damping coefficient.Performances of viscous fluid dampers were demonstrated by the relationship between the force and displacement,the maximal damper force and stroke.The control performances were demonstrated in terms of the response reductions of adjacent structures.The results show that the dynamic responses of adjacent structures are mitigated greatly.Proper damping coefficients of connecting fluid dampers have a small difference,while adjacent structures under different near-fault ground motions with the same peak acceleration.The maximum force of damper is about 0.8 MN,and the maximum damper stroke is about ±550 mm.Satisfied viscous fluid dampers can be produced according to the current manufacturing skills.

NUMERICAL SOLUTION OF FLUID-STRUCTURE INTERACTION IN LIQUID-FILLED PIPES BY METHOD OF CHARACTERISTICS

Fluid-structure interaction （FSI） is essentially a dynamic phenomenon and always exists in fluid-filled pipe system. The four-equation model, which has been proved to be effective to describe and predict the phenomenon of FSI due to friction coupling and Poisson coupling being taken into account, is utilized to describe the FSI of fluid-filled pipe system. Terse compatibility equations are educed by the method of characteristics （MOC） to describe the fluid-filled pipe system. To shorten computing time needed to get the solutions under the condition of keeping accuracy requirement, two steps are adopted, firstly the time step Δt and divided number of the straight pipe are optimized, sec-ondly the mesh spacing Δz close to boundary is subdivided in several submeshes automatically ac-cording to the speed gradient of fluid. The mathematical model and arithmetic are validated by com-parisons between simulation solutions of two straight pipe systems and experiment known from lit-erature.

An improved algorithm for fluid-structure interaction of high-speed trains under crosswind

Based on the train-track coupling dynamics and high-speed train aerodynamics, this paper deals with an improved algorithm for fluid-structure interaction of high-speed trains. In the algorithm, the data communication between fluid solver and structure solver is avoided by inserting the program of train-track coupling dynamics into fluid dynamics program, and the relaxation factor concerning the load boundary of the fluid-structure interface is introduced to improve the fluctuation and convergence of aerodynamic forces. With this method, the fluid-structure dynamics of a highspeed train are simulated under the condition that the velocity of crosswind is 13.8 m/s and the train speed is 350 km/h. When the relaxation factor equals 0.5, the fluctuation of aerodynamic forces is lower and its convergence is faster than in other cases. The side force and lateral displacement of the head train are compared between off-line simulation and co-simulation. Simulation results show that the fluid-structure interaction has a significant influence on the aerodynam- ics and attitude of the head train under crosswind conditions. In addition, the security indexes of the head train worsen after the fluid-structure interaction calculation. Therefore, the fluid-structure interaction calculation is necessary for high-speed trains.

Hybrid algorithm for modeling of fluid-structure interaction in incompressible, viscous flows

The objective of this paper is to present and to validate a new hybrid coupling （HC） algorithm for modeling of fluid-structure interaction （FSI） in incompressible, viscous flows. The HC algorithm is able to avoid numerical instability issues associated with artificial added mass effects, which are often encountered by standard loosely coupled （LC） and tightly coupled （TC） algorithms, when modeling the FSI response of flexible structures in incompressible flow. The artificial added mass effect is caused by the lag in exchange of interfacial displacements and forces between the fluid and solid solvers in partitioned algorithms. The artificial added mass effect is much more prominent for light/flexible struc- tures moving in water, because the fluid forces are in the same order of magnitude as the solid forces, and because the speed at which numerical errors propagate in an incom- pressible fluid. The new HC algorithm avoids numerical instability issues associated with artificial added mass effects by embedding Theodorsen＇s analytical approximation of the hydroelastic forces in the solution process to obtain better initial estimates of the displacements. Details of the new HC algorithm are presented. Numerical validation studies are shown for the forced pitching response of a steel and a plastic hydrofoil. The results show that the HC algorithm is able to converge faster, and is able to avoid numerical insta- bility issues, compared to standard LC and TC algorithms, when modeling the transient FSI response of a plastic hydrofoil. Although the HC algorithm is only demonstrated for a NACA0009 hydrofoil subject to pure pitching motion, the method can be easily extended to model general 3-D FSI response and stability of complex, flexible structures in turbulent, incompressible, multiphase flows.

Fluid-structure interaction simulation of three-dimensional flexible hydrofoil in water tunnel

The closely coupled approach combined with the finite volume method （FVM） solver and the finite element method （FEM） solver is used to investigate the fluid-structure interaction （FSI） of a three-dimensional cantilevered hydrofoil in the water tunnel. The FVM solver and the coupled approach are verified and validated by compar- ing the numerical predictions with the experimental measurements, and good agreement is obtained concerning both the lift on the foil and the tip displacement. In the noncav- itating flow, the result indicates that the growth of the initial incidence angle and the Reynolds number improves the deformation of the foil, and the lift on the foil is increased by the twist deformation. The normalized twist angle and displacement along the span of the hydrofoil for different incidence angles and Reynolds numbers are almost uniform. For the cavitation flow, it is shown that the small amplitude vibration of the foil has limited influence on the developing process of the partial cavity, and the quasi two-dimensional cavity shedding does not change the deformation mode of the hydrofoil. However, the frequency spectrum of the lift on the foil contains the frequency which is associated with the first bend frequency of the hydrofoil.

VIBRATION ANALYSIS OF TURBINE BASED ON FLUID-STRUCTURE COUPLING

The vibration of a Francis turbine is analyzed with the additional quality matrix method based on fluid-structure coupling （FSC）. Firstly, the vibration frequency and mode of blade and runner in air and water are calculated. Secondly, the influences to runner frequency domain by large flow, small flow and design flow working conditions are compared. Finally the influences to runner modes by centrifugal forces under three rotating speeds of 400 r/rain, 500 r/min and 600 r/rain are compared. The centrifugal force and small flow working condition have greatly influence on the vibration of small runner. With the increase of centrifugal force, the vibration frequency of the runner is sharply increased. Some order frequencies are even close to the runner natural frequency in the air. Because the low frequency vibration will severely damage the stability of the turbine, low frequency vibration of units should be avoided as soon as possible.

Fluid-Structure Interaction Modeling of the Living Artery: Based on the Zero-Pressure Status and the Anisotropic Hyperelastic Constitutive Model

Vascular diseases such as aneurysm,hemadostenosis,aortic dissection are the primary causes of people’s death around world.As a result,it is significant to improve our knowledge about them,which can help to treat the disease.Measuring the hemodynamic factor like the blood pressure,the wall shear stress(WSS)and the oscillatory shear index(OSI)is,however,still beyond the capabilities of in-vivo measurement techniques.So the use of mathematical models and numerical simulations for the studies of the blood flow in arteries and,in general,of the cardiovascular system,both in physiological and pathological conditions,has received an increasing attention in the biomedical community during the last two decades.Indeed,such studies aims at enhancing the current knowledge of the physiology of the cardiovascular system,as well as providing reliable tools for the medical doctors to predict the natural course of pathologies and,possibly,the occurrence of cardiovascular accidents.The computational vascular fluid-structure interaction(FSI)methodology is a numerical simulation method which is used to explain the hemodynamic factors.The WSS on the luminal wall and the mechanical stress in the vascular wall are directly related to the location of the lesion,and the blood flow strongly interacts with the vascular wall motion.The arterial wall continually adapts to the charge of its mechanical environment(due to,for example,growth,atrophy,remodelling,repair,ageing,and disease)and consequently undergoes several irreversible processes.Primary acute mechanisms of vascularFSI numerical simulation seem to be associated with(1)the arterial histology and the patient-specific complex geometry,(2)the typical mechanical properties of the layer,(3)properties of the blood is assumed as Newtonian fluid or non-Newtonian fluid based on the scale ofthe diameter of a vessel,(4)residual stress in the zero-pressure configuration.The arterial system naturally function under permanent physiological loading conditions.Fung defined the residual stress and measured the opening angle which varies greatly along the aortic tree.Consequently,most of these systems never experience a stress-free state in their’service life’,so a stress and strain fields are present in any in vivo obtained patientspecific cardiovascular geometry.The residual stress always be ignored in FSI simulation or be assumed to equal zero,and the vivo patient-specific artery geometry is assumed as zero-pressure configuration.To define the in vivo stress state of artery,an inverse problem needs to be solved:the undeformed shape of a body or its stress state in its deformed state needs to be determined given the deformed configuration and the loads causing this deformation.The modular inverse elastostatics method is used to resolve the pressure-induced stress state for in vivo imaging based on cardiovascular modeling proposed by Peirlinck.Here,we build a living vessel FSI model based on 4 key factors.In order to get the universal simulation results,we focus on idealized geometries of the vessel that represent healthy(physiological)conditions of the cerebral vasculature.Blood can be assumed as the Newtonian fluid at this scale.The anisotropic hyperelastic constitutive law(Gasser-Holzapfel-Ogden)is used in zero-pressure configuration.Afterwards,we propose the material parameters for the different constitutive models and the computational configurations.We demonstrate the importance of introducing the residual stress into vascular blood flow modeling by performing a comparing zero-pressure configuration and no-resistance configuration.We get the conclusion that the zero-pressure status model has smaller displacement and larger stress distribution compared with no-resistance stress model.Hence,the methodology presented here will be particularly useful to study the mechanobiological processes in the healthy and diseased vascular wall.

3D numerical simulation on fluid-structure interaction of structure subjected to underwater explosion with cavitation

In the underwater-shock environment, cavitation occurs near the structural surface. The dynamic response of fluid-structure interactions is influenced seriously by the cavitation effects. It is also the difficulty in the field of underwater explosion. With the traditional boundary element method and the finite element method （FEM）, it is difficult to solve the nonlinear problem with cavitation effects subjected to the underwater explosion. To solve this problem, under the consideration of the cavitation effects and fluid compressibility, with fluid viscidity being neglected, a 3D numerical model of transient nonlinear fluid-structure interaction subjected to the underwater explosion is built. The fluid spectral element method （SEM） and the FEM are adopted to solve this model. After comparison with the FEM, it is shown that the SEM is more precise than the FEM, and the SEM results are in good coincidence with benchmark results and experiment results. Based on this, combined with ABAQUS, the transient fluid-structure interaction mechanism of the 3D submerged spherical shell and ship stiffened plates subjected to the underwater explosion is discussed, and the cavitation region and its influence on the structural dynamic responses are presented. The paper aims at providing references for relevant research on transient fluid-structure interaction of ship structures subjected to the underwater explosion.

Effects of renal artery stenosis on realistic model of abdominalaorta and renal arteries incorporating fluid-structureinteraction and pulsatile non-Newtonian blood flow

The effects of the renal artery stenosis （RAS） on the blood flow and vessel walls are investigated. The pulsatile blood flow through an anatomically realistic model of the abdominal aorta and renal arteries reconstructed from CT-scan images is simulated, which incorporates the fluid-structure interaction （FSI）. In addition to the investigation of the RAS effects on the wall shear stress and the displacement of the vessel wall, it is determined that the RAS leads to decrease in the renal mass flow. This may cause the activation of the renin-angiotension system and results in severe hypertension.