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Atomic-scale insights of indium segregation and its suppression by GaAs insertion layer in InGaAs/AlGaAs multiple quantum wells 被引量:1
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作者 马淑芳 李磊 +8 位作者 孔庆波 徐阳 刘青明 张帅 张西数 韩斌 仇伯仓 许并社 郝晓东 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第3期544-548,共5页
The In segregation and its suppression in InGaAs/AlGaAs quantum well are investigated by using high-resolution x-ray diffraction(XRD)and photoluminescence(PL),combined with the state-of-the-art aberration corrected sc... The In segregation and its suppression in InGaAs/AlGaAs quantum well are investigated by using high-resolution x-ray diffraction(XRD)and photoluminescence(PL),combined with the state-of-the-art aberration corrected scanning transmission electron microscopy(Cs-STEM)techniques.To facility our study,we grow two multiple quantum wells(MQWs)samples,which are almost identical except that in sample B a thin GaAs layer is inserted in each of the InGaAs well and AlGaAs barrier layer comparing to pristine InGaAs/AlGaAs MQWs(sample A).Our study indeed shows the direct evidences that In segregation occurs in the InGaAs/AlGaAs interface,and the effect of the Ga As insertion layer on suppressing the segregation of In atoms is also demonstrated on the atomic-scale.Therefore,the atomic-scale insights are provided to understand the segregation behavior of In atoms and to unravel the underlying mechanism of the effect of GaAs insertion layer on the improvement of crystallinity,interface roughness,and further an enhanced optical performance of InGaAs/AlGaAs QWs. 展开更多
关键词 InGaAs/algaas quantum well GaAs insertion layer In segregation scanning transmission electron microscopy
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大功率宽面808nm GaAsP/AlGaAs量子阱激光器分别限制结构设计 被引量:4
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作者 王俊 马骁宇 +2 位作者 林涛 郑凯 冯小明 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第12期2449-2454,共6页
本文对有源区条宽100μm的GaAsP/AlGaAs808nm量子阱激光器分别限制结构进行了理论分析和设计.选取了三种情况的波导层和限制层的铝组分,分别计算和分析了波导层厚度与激光器光限制因子、最大出光功率、垂直发散角和阈值电流密度的函数关... 本文对有源区条宽100μm的GaAsP/AlGaAs808nm量子阱激光器分别限制结构进行了理论分析和设计.选取了三种情况的波导层和限制层的铝组分,分别计算和分析了波导层厚度与激光器光限制因子、最大出光功率、垂直发散角和阈值电流密度的函数关系.根据计算结果可知:当波导层和限制层铝组分为0.4和0.5时,采用窄波导结构可以获得器件的最大输出功率为11.2W,发散角为19°,阈值电流密度为266A/cm2;采用宽波导结构可以得到器件的最大输出功率为9.4W,发散角为32°,阈值电流密度为239A/cm2. 展开更多
关键词 大功率808nm半导体激光器 gaasp/algaas量子阱激光器 分别限制异质结构
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高效率GaAsP/AlGaAs张应变量子阱激光二极管 被引量:1
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作者 白一鸣 王俊 陈诺夫 《微纳电子技术》 CAS 北大核心 2011年第3期146-149,158,共5页
从理论上设计优化了高效率808nm GaAsP/AlGaAs张应变量子阱激光二极管外延材料的量子阱结构和波导结构参数,并采用低压金属有机气相外延技术实验制备了外延材料。将制作的芯片解理成不同腔长,测试得到外延材料的内损耗系数和内量子效率... 从理论上设计优化了高效率808nm GaAsP/AlGaAs张应变量子阱激光二极管外延材料的量子阱结构和波导结构参数,并采用低压金属有机气相外延技术实验制备了外延材料。将制作的芯片解理成不同腔长,测试得到外延材料的内损耗系数和内量子效率分别为0.82cm-1和93.6%。把腔长为900μm的单巴条芯片封装在热传导热沉上,器件在准连续工作条件下最大电光效率达到60.5%,相应的斜率效率和输出光功率分别为1.28W/A和74.9W。器件测试结果表明,采用优化的GaAsP/AlGaAs张应变量子阱和宽波导结构,可以有效提高器件的电光效率。 展开更多
关键词 激光二极管 gaasp/algaas量子阱 张应变量子阱 金属有机气相外延(MOCVD) 电光效率
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QUANTUM MECHANICAL MODEL AND SIMULATION OF GaAs/AlGaAs QUANTUM WELL INFRARED PHOTO-DETECTOR-ⅠOPTICAL ASPECTS 被引量:2
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作者 Fu Y Willander M +1 位作者 Li Ning Lu W 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2002年第5期321-326,共6页
A complete quantum mechanical model for GaAs?AlGaAs quantum well infrared photodetectors(QWIPs) is presented here. The model consisted of four parts: (1) Starting with the description of the electromagnetic field of t... A complete quantum mechanical model for GaAs?AlGaAs quantum well infrared photodetectors(QWIPs) is presented here. The model consisted of four parts: (1) Starting with the description of the electromagnetic field of the infrared radiation in the QWIP, effective component of the vector potential <| A z |> along the QWIP growth direction ( z axis) due to the optical diffraction grating was calculated. (2) From the wave transmissions and the occupations of the electronic states, it was discussed that the dark current in the QWIP is determined by the drift diffusion current of carriers thermally excited from the ground sublevel in the quantum well to extended states above the barrier. (3) The photocurrent was investigated by the optical transition (absorption coefficient between the ground state to excited states due to the nonzero <| A z |> ). (4) By studying the inter diffusion of the Al atoms across the GaAs?AlGaAs heterointerfaces,the mobility of the drift diffusion carriers in the excited states was calculated, so the measurement results of the dark current and photocurrent spectra can be explained theoretically. With the complete quantum mechanical descriptions of (1 4), QWIP device design and optimization are possible. 展开更多
关键词 GAAS/algaas PHOTODETECTOR quantum well infrared photodetector(QWIP) quantum mechanical model
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GaAs插入层对InGaAs/AlGaAs量子阱发光性质的影响
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作者 于海鑫 王海珠 +4 位作者 郎天宇 吕明辉 徐睿良 范杰 邹永刚 《发光学报》 EI CAS CSCD 北大核心 2023年第11期1967-1973,共7页
InGaAs/AlGaAs多量子阱(MQWs)作为一种常见的Ⅲ-Ⅴ族外延材料,通常应用于半导体激光器和太阳能电池等领域。然而,由于量子阱的势阱层和势垒层生长温度不同,铟原子的偏析和多量子阱生长质量较差等问题尚未得到很好的解决。本文设计了一... InGaAs/AlGaAs多量子阱(MQWs)作为一种常见的Ⅲ-Ⅴ族外延材料,通常应用于半导体激光器和太阳能电池等领域。然而,由于量子阱的势阱层和势垒层生长温度不同,铟原子的偏析和多量子阱生长质量较差等问题尚未得到很好的解决。本文设计了一种砷化镓(GaAs)材料作为插入层(ISL),并用于InGaAs/AlGaAs MQWs的结构。PL、XRD、AFM测试表明,GaAs插入层保证了MQWs结构中更多的辐射复合,阻止了铟原子的偏析。但GaAs插入层的引入也会产生“局域态”,影响量子阱的发光性质。本研究可以加深对InGaAs/AlGaAs多量子阱辐射复合机制的理解,并且对引入GaAs插入层的InGaAs/AlGaAs多量子阱发光性质的研究具有重要意义。 展开更多
关键词 InGaAs/algaas多量子阱 局域态 插入层 金属有机化合物气相外延(MOCVD)
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Effect of growth interruption and strain buffer layer on PL performance of AlGaAs/GaAs/InGaAs quantum well for 1065 nm wavelength lasers
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作者 PANJiaoqing HUANGBaibiao +3 位作者 ZHANGXiaoyang YUEJinshun YUYongqin WEIJiyong 《Rare Metals》 SCIE EI CAS CSCD 2004年第1期64-67,共4页
Strained InGaAs/GaAs quantum well (QW) was grown by low-pressuremetallorganic chemical vapor deposition (MOCVD). Growth interruption and strain buffer layer wereintroduced to improve the photoluminescence (PL) perform... Strained InGaAs/GaAs quantum well (QW) was grown by low-pressuremetallorganic chemical vapor deposition (MOCVD). Growth interruption and strain buffer layer wereintroduced to improve the photoluminescence (PL) performance of the InGaAs/GaAs quantum well. GoodPL results were obtained under condition of growth an interruption of 10 s combined with a moderatestrain buffer layer. Wavelength lasers of 1064 nm using the QW were grown and processed intodevices. Broad area lasers (100 μm x 500 μm) show very low threshold current densities (43 A/cm^2)and high slop efficiency (0.34 W/A, per facet). 展开更多
关键词 algaas/GaAs/InGaAs strained quantum well MOCVD strain buffer layer growthinterruption laser diodes
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Partial Disordering of GaAs/AlGaAs Quantum Well by Rapid Thermal Annealing
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作者 WANG Jian-hua YU Guang-rui +1 位作者 JIN Feng LI De-jie 《Chinese Physics Letters》 SCIE CAS CSCD 1996年第7期531-533,共3页
The partial disordering of GaAs/AlGaAs quantum well(QW)material has been obtained by rapid thermal annealing with SO2 dielectric capping film.In this case,the absorption edge of QW material was shifted apparently.A la... The partial disordering of GaAs/AlGaAs quantum well(QW)material has been obtained by rapid thermal annealing with SO2 dielectric capping film.In this case,the absorption edge of QW material was shifted apparently.A laser and a modulator were integrated on a same chip by partial disordering process on the select4d area of QW wafer which was grown by molecular beam epitaxy. 展开更多
关键词 GAAS/algaas MODULATOR quantum
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Demonstration of Far-Infrared GaAs/AlGaAs Quantum Well Photodetectors for Broadband Wavelength Detection
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作者 沈文忠 Perera A.G.U 《Chinese Physics Letters》 SCIE CAS CSCD 2000年第12期921-923,共3页
We discuss the realization of broadband wavelength detection by demonstrating the longest cutoff wavelength(λc=28.6μm)far-infrared GaAs/AIGaAs quantum well infrared photodetectors(QWIPs).The responsivity is comparab... We discuss the realization of broadband wavelength detection by demonstrating the longest cutoff wavelength(λc=28.6μm)far-infrared GaAs/AIGaAs quantum well infrared photodetectors(QWIPs).The responsivity is comparable to that of mid-infrared GaAs/AIGaAs and InGaAs/GaAs QWIPs,with a responsivity of 0.265 A/W and detectivity of 3.4x109 cm.Hz1/2/W at the peak wavelength of 26.9μm at 4.2K.Based on the temperature-dependent dark current and response results,it is expected that similar performance can be obtained at least up to 20 K.Several ways to expand the wavelength coverage are also addressed. 展开更多
关键词 GAAS/algaas Infrared quantum
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Femtosecond Reflections of Bulk GaAs and GaAs/AlGaAs Multiple Quantum Wells
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作者 LI Wei-liang QIU Zhi-ren +3 位作者 PENG Wen-ji HUANG Xu-guang ZHOU Jian-ying YU Zhen-xin 《Chinese Physics Letters》 SCIE CAS CSCD 1996年第3期237-240,共4页
We present room temperature femtosecond rejection studies on the photocarrier dynamics of GaAs and GaAs/AlGaAs multiple quantum wells(MQW).A rising wing with a time constant of about.5 ps and an increased amplitude pe... We present room temperature femtosecond rejection studies on the photocarrier dynamics of GaAs and GaAs/AlGaAs multiple quantum wells(MQW).A rising wing with a time constant of about.5 ps and an increased amplitude per carrier is observed for the MQW sample at carrier densities lower than 5×10^(11) cm^(-2).This phenomenon is explained as the saturation of the excitonic transitions. 展开更多
关键词 GAAS/algaas FEMTO quantum
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PHOTOREFLECTANCE STUDY OF GaAs/AlGaAs MULTI-QUANTUM WELLS
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作者 汤寅生 江德生 +1 位作者 庄蔚华 陈宗圭 《Chinese Physics Letters》 SCIE CAS 1987年第10期477-479,共3页
Using photoreflectance(PR)at room temperature,we have studied GaAs/AlGaAs multi-quantum wells(MQWs)grown by molecular beam epitaxy.Analysis shows that the modulation mechanism of PR of MQWs is Stark shift of the subba... Using photoreflectance(PR)at room temperature,we have studied GaAs/AlGaAs multi-quantum wells(MQWs)grown by molecular beam epitaxy.Analysis shows that the modulation mechanism of PR of MQWs is Stark shift of the subbands produced by photo-injection of carriers,which has first derivative functional lineshapes.By fitting the experimental spectra,an unusual transition coming from the interfaces in MQWs was observed. 展开更多
关键词 GAAS/algaas reflectance quantum
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Improved thermal property of strained InGaAlAs/AlGaAs quantum wells for 808-nm vertical cavity surface emitting lasers
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作者 赵壮壮 荀孟 +3 位作者 潘冠中 孙昀 周静涛 吴德馨 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第3期299-305,共7页
The 808-nm vertical cavity surface emitting laser(VCSEL) with strained In_(0.13)Ga_(0.75)Al_(0.12)As/Al_(0.3)Ga_(0.7)As quantum wells is designed and fabricated. Compared with the VCSELs with Al_(0.05)Ga_(0.95)As/Al_(... The 808-nm vertical cavity surface emitting laser(VCSEL) with strained In_(0.13)Ga_(0.75)Al_(0.12)As/Al_(0.3)Ga_(0.7)As quantum wells is designed and fabricated. Compared with the VCSELs with Al_(0.05)Ga_(0.95)As/Al_(0.3)Ga_(0.7)As quantum wells, the VCSEL with strained In_(0.13)Ga_(0.75)Al_(0.12)As/Al_(0.3)Ga_(0.7)As quantum wells is demonstrated to possess higher power conversion efficiency(PCE) and better temperature stability. The maximum PCE of 43.8% for 10-μm VCSEL is achieved at an ambient temperature of 30°C. The size-dependent thermal characteristics are also analyzed by characterizing the spectral power and output power. It demonstrates that small oxide-aperture VCSELs are advantageous for temperature-stable performance. 展开更多
关键词 808-nm VCSEL InGaAlAs/algaas quantum wells thermal property
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Tuning of the Electron Spin Relaxation Anisotropy via Optical Gating in GaAs/AlGaAs Quantum Wells
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作者 牛秉慧 闫腾飞 +2 位作者 倪海桥 牛智川 张新惠 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第10期120-123,共4页
The carrier-density-dependent spin relaxation dynamics for modulation-doped GaAs/Al0.3 Gao,TAs quantum wells is studied using the time-resolved magneto-Kerr rotation measurements. The electron spin relaxation time and... The carrier-density-dependent spin relaxation dynamics for modulation-doped GaAs/Al0.3 Gao,TAs quantum wells is studied using the time-resolved magneto-Kerr rotation measurements. The electron spin relaxation time and its in-plane anisotropy are studied as a function of the optically injected electron density, Moreover, the relative strength of the Rashba and the Dresselhaus spin-rbit coupling fields, and thus the observed spin relaxation time anisotropy, is further tuned by the additional excitation of a 532nm continuous wave laser, demonstrating an effective spin relaxation manipulation via an optical gating method. 展开更多
关键词 GAAS on is Tuning of the Electron Spin Relaxation Anisotropy via Optical Gating in GaAs/algaas quantum Wells of in
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Left-Handedness with Three Zero-Absorption Windows Tuned by the Incoherent Pumping Field and Inter-Dot Tunnelings in a GaAs/AlGaAs Triple Quantum Dots System
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作者 赵顺才 张双颖 +1 位作者 吴奇宣 贾靖 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第5期157-160,共4页
Left-handedness with three zero-absorption windows is achieved in a triple-quantum-dot system. With the typ- ical parameters of a GaAs/AlGaAs heterostructure, the simultaneous negative relative electric permittivity a... Left-handedness with three zero-absorption windows is achieved in a triple-quantum-dot system. With the typ- ical parameters of a GaAs/AlGaAs heterostructure, the simultaneous negative relative electric permittivity and magnetic permeability are obtained by the adjustable incoherent pumping field and two inter-dot tunnelings. Furthermore, three zero-absorption windows in the left-handedness frequency bands are observed. The left- handedness with zero-absorption in the solid state heterostrueture may solve the challenges not only in the left-handed materials achieved by the photonic resonant scheme but also in the application of negative refractive materials with a large amount of absorption. 展开更多
关键词 In Left-Handedness with Three Zero-Absorption Windows Tuned by the Incoherent Pumping Field and Inter-Dot Tunnelings in a GaAs/algaas Triple quantum Dots System
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Effect of growth-interrupted method on quality of AlGaAs/GaAs multiple quantum wells prepared by MBE
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作者 国凤云 王怀芒 赵连城 《中国有色金属学会会刊:英文版》 CSCD 2006年第B01期183-186,共4页
AlGaAs/GaAs multi-quantum well (MQW) was prepared by molecular beam epitaxy(MBE) with growth-interrupted heterointerface (GIH) method and continuous growth (CG) method, respectively. The microstructures of the MQWs we... AlGaAs/GaAs multi-quantum well (MQW) was prepared by molecular beam epitaxy(MBE) with growth-interrupted heterointerface (GIH) method and continuous growth (CG) method, respectively. The microstructures of the MQWs were characterized by double-crystal X-ray rocking curve (DCRC) and atomic force microscopy (AFM), and the photoluminescence (PL) properties of the MQWs were also studied. The MQWs grown with GIH method show that higher order satellite peaks of Pendell?sung fringes are observed in DCRC, the roughness of surface is much reduced in AFM, and the full width at half maximum (FWHM) of exciton line is much narrower in PL. The results indicate that the GIH method reduces the monolayer growth step density at the heterointerface due to the migration of surface atoms for a few minutes growth interruption, and substantially improves the quality of AlGaAs/GaAs MQWs. 展开更多
关键词 algaas/GaAs多量子阱 MBE 生长中断法 多晶X射线摇摆曲线 原子力显微镜
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基于MOCVD技术的长波AlGaAs/GaAs量子阱红外焦平面探测器 被引量:10
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作者 李献杰 刘英斌 +6 位作者 冯震 过帆 赵永林 赵润 周瑞 娄辰 张世祖 《红外与激光工程》 EI CSCD 北大核心 2007年第4期435-438,共4页
采用n型掺杂背面入射AlGaAs/GaAs量子阱结构,用MOCVD外延生长和GaAs集成电路工艺,设计制作了大面积AlGaAs/GaAs QWIP单元测试器件和128×128、128×160、256×256 AlGaAs/GaAsQWIP焦平面探测器阵列。用液氮温度下的暗电流... 采用n型掺杂背面入射AlGaAs/GaAs量子阱结构,用MOCVD外延生长和GaAs集成电路工艺,设计制作了大面积AlGaAs/GaAs QWIP单元测试器件和128×128、128×160、256×256 AlGaAs/GaAsQWIP焦平面探测器阵列。用液氮温度下的暗电流和傅里叶红外响应光谱对单元测试器件进行了评估,针对不同材料结构,实现了9μm和10.9μm的截止波长;黑体探测率最高达到2.6×109 cm.Hz1/2.W-1。将128×128 AlGaAs/GaAs QWIP阵列芯片与CMOS读出电路芯片倒装焊互连,成功演示了室温环境下目标的红外热成像;并进一步讨论了提高QWIP组件成像质量的途径。 展开更多
关键词 MOCVD algaas/GAAS 量子阱红外探测器 红外热成像
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InGaAs/AlGaAs量子阱中量子尺寸效应对PL谱的影响 被引量:3
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作者 于永芹 黄柏标 +7 位作者 尉吉勇 潘教青 周海龙 齐云 陈文澜 秦晓燕 张晓阳 任忠祥 《量子电子学报》 CAS CSCD 北大核心 2003年第3期345-349,共5页
本文采用金属有机物化学气相淀积(MOCVD)方法设计并生长了两组InGaAs/AlGaAs应变多量子阱,量子阱的厚度分别为3nm和6nm,对其光致发光谱(PL)进行了研究,二者的发光波长分别为843nm和942nm,用有限深单量子阱理论近似计算了由于量子尺寸效... 本文采用金属有机物化学气相淀积(MOCVD)方法设计并生长了两组InGaAs/AlGaAs应变多量子阱,量子阱的厚度分别为3nm和6nm,对其光致发光谱(PL)进行了研究,二者的发光波长分别为843nm和942nm,用有限深单量子阱理论近似计算了由于量子尺寸效应和应变效应引起的InGaAs/AlGaAs量子阱带隙的改变,这解释了两组样品室温下PL发射波长变化的原因。 展开更多
关键词 InGaAs/algaas量子阱 量子尺寸效应 MOCVD 应变效应 金属有机物化学气相淀积 铟钙砷化合物 铝钙砷
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9μm截止波长128×128AlGaAs/GaAs量子阱红外焦平面探测器阵列(英文) 被引量:4
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作者 李献杰 刘英斌 +6 位作者 冯震 过帆 赵永林 赵润 周瑞 娄辰 张世祖 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2006年第8期1355-1359,共5页
报道了128×128 Al GaAs/GaAs量子阱红外焦平面探测器阵列的设计和制作.采用金属有机化学气相淀积外延技术生长外延材料,并在GaAs集成电路工艺线上完成工艺制作.为得到器件参数,设计制作了台面尺寸为300μm×300μm的大面积测... 报道了128×128 Al GaAs/GaAs量子阱红外焦平面探测器阵列的设计和制作.采用金属有机化学气相淀积外延技术生长外延材料,并在GaAs集成电路工艺线上完成工艺制作.为得到器件参数,设计制作了台面尺寸为300μm×300μm的大面积测试器件;77K下2V偏压时暗电流密度为1·5×10-3A/cm2;80K工作温度下,器件峰值响应波长为8·4μm,截止波长为9μm,黑体探测率DB*为3·95×108(cm·Hz1/2)/ W.将128×128元Al GaAs/GaAs量子阱红外焦平面探测器阵列芯片与相关CMOS读出电路芯片倒装焊互连,在80K工作温度下实现了室温环境目标的红外热成像,盲元率小于1%. 展开更多
关键词 algaas/GAAS 量子阱红外探测器 红外热成像
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新型GaAs/AlGaAs量子阱红外探测器暗电流特性 被引量:3
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作者 史衍丽 邓军 +6 位作者 杜金玉 廉鹏 高国 陈建新 沈光地 尹洁 吴兴惠 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第4期503-506,共4页
对基于 Ga As/ Al Ga As系子带间吸收的一种新型量子阱红外探测器 ,采用 Poisson方程和 Schrodinger方程 ,计算了新器件结构的能带结构、电子分布特性 ,在此基础上采用热离子发射、热辅助遂穿模型对器件的暗电流特性进行了模拟 ,计算结... 对基于 Ga As/ Al Ga As系子带间吸收的一种新型量子阱红外探测器 ,采用 Poisson方程和 Schrodinger方程 ,计算了新器件结构的能带结构、电子分布特性 ,在此基础上采用热离子发射、热辅助遂穿模型对器件的暗电流特性进行了模拟 ,计算结果与器件实测的暗电流特性吻合得很好 ,说明热离子发射、热辅助遂穿机制是形成器件暗电流的主要构成机制 ,增加垒高、降低阱中掺杂浓度及降低工作温度是抑制器件暗电流的主要途径 ,计算结果对进一步优化器件的设计将起到重要的理论指导作用 . 展开更多
关键词 GAAS/AIGAAS 量子阱红外探测器 暗电流特性分析 砷化镓
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MOCVD生长GaAs/AlGaAs掺杂量子异质结构工艺评价 被引量:1
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作者 任红文 刘士文 +2 位作者 徐现刚 黄柏标 蒋民华 《人工晶体学报》 EI CAS CSCD 1993年第2期132-135,共4页
对常压 MOCVD 生长 GaAs/AIGaAs 掺杂多量子阱、超晶格及双极异质晶体管(HBT)和双势垒量子共振隧穿二极管(DBRTD)的生长工艺与结构性能的关系进行了研究。连续生长的量子阱材料载流子低温光荧光(PL)发光波长较间断生长结果蓝移,但强度... 对常压 MOCVD 生长 GaAs/AIGaAs 掺杂多量子阱、超晶格及双极异质晶体管(HBT)和双势垒量子共振隧穿二极管(DBRTD)的生长工艺与结构性能的关系进行了研究。连续生长的量子阱材料载流子低温光荧光(PL)发光波长较间断生长结果蓝移,但强度为后者的10倍,且谱线也较窄。透射电镜(TEM)观察发现,间断生长界面间断处有一因组分波动和杂质吸附产生的亮条纹,且 AlGaAs/GaAs 和 GaAs/AlGaAs 两种异质界面不等同。利用连续生长工艺得到了间断生长未能实现的较高性能的 HBT、DBRTD 器件。 展开更多
关键词 化学汽相沉积 晶体 砷化镓 algaas
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MOCVD生长GaAs/AlGaAs量子阱研究 被引量:1
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作者 任红文 黄柏标 +3 位作者 刘士文 刘立强 徐现刚 蒋民华 《固体电子学研究与进展》 CAS CSCD 北大核心 1992年第1期4-7,共4页
利用常压MOCVD技术在较低生长速率下生长出多种GaAs/AlGaAs多量子阱结构材料,利用低温PL谱和TEM对材料结构进行了表征。所得势阱和势垒结构厚度均匀平整,最窄阱宽为1.8nm。本研究表明,低速率(γ≤0.5nm/s)连续生长工艺能够避免杂质在界... 利用常压MOCVD技术在较低生长速率下生长出多种GaAs/AlGaAs多量子阱结构材料,利用低温PL谱和TEM对材料结构进行了表征。所得势阱和势垒结构厚度均匀平整,最窄阱宽为1.8nm。本研究表明,低速率(γ≤0.5nm/s)连续生长工艺能够避免杂质在界面富集,优于间断生长工艺,且在掺si n^+-GaAs衬底上所得量子阱发光强度高于掺Cr SI-GaAs衬底上的结果。 展开更多
关键词 生长 量子阱 MOCVD GAAS/algaas
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