Fabrication and optical properties of InGaN/GaN multiple quantum well light emitting diodes with amorphous BaTiO_3 ferroelectric film

BaTiO3 （BTO） ferroelectric thin films are prepared by the sol,el method. The fabrication and the optical properties of an InGaN/GaN multiple quantum well light emitting diode （LED） with amorphous BTO ferroelectric thin film are studied. The photolumineseence （PL） of the BTO ferroelectric film is attributed to the structure. The ferroeleetric film which annealed at 673 K for 8 h has the better PL property. The peak width is about 30 nm from 580 nm to 610 nm, towards the yellow region. The mixed electroluminescence （EL） spectrum of InGaN/GaN multiple quantum well LED with 150-nm thick amorphous BTO ferroelectric thin film displays the blue-white light. The Commission Internationale De L＇Eclairage （CIE） coordinate of EL is （0.2139, 0.1627）. EL wavelength and intensity depends on the composition, microstructure and thickness of the ferroelectric thin film. The transmittance of amorphous BTO thin film is about 93% at a wavelength of 450 nm-470 nm. This means the amorphous ferroelectrie thin films can output more blue-ray and emission lights. In addition, the amorphous ferroelectric thin films can be directly fabricated without a binder and used at higher temperatures （200 ℃-400 ℃）. It is very favourable to simplify the preparation process and reduce the heat dissipation requirements of an LED. This provides a new way to study LEDs.

Fabrication of high-voltage light emitting diodes with a deep isolation groove structure

In order to connect several independent LEDs in series, inductively coupled plasma （ICP） deep etching of GaN is required for isolation. The GaN-based high-voltage （HV） LEDs with a 5 μm deep isolation groove and an acceptable mesa sidewall angle of 79.2° are fabricated and presented. The surface morphology and construction profile of the etched groove are characterized by laser microscopy and scanning electron microscopy. After contact metal formation and annealing, the electrical properties are evaluated by I-V characteristics. The trend of the I-V curve has good accordance with conventional LEDs. The contact resistance of HV LEDs is also tested and was reduced by 4.6 Ω compared to conventional LEDs, while the output power increased by 5 W. The results show that this technique can be applied to practical fabrication.

Rapid thermal annealing effects on vacuum evaporated ITO for InGaN/GaN blue LEDs

8 mil×10 mil InGaN/GaN blue LEDs with indium tin oxide（ITO） emitting at 460 nm were fabricated. A vacuum evaporation technique was adopted to deposit ITO on P-GaN with thickness of 240 nm.The electrical and optical properties of ITO films on P-GaN wafers,as well as rapid thermal annealing（RTA） effects at different temperatures（100 to 550℃） were analyzed and compared.It was found that resistivity of 450℃RTA was as low as 1.19×10^（-4）Ω·cm,along with a high transparency of 94.17%at 460 nm.AES analysis indicated the variation of oxygen content after 450℃annealing,and ITO contact resistance showed a minimized value of 3.9×10^（-3）Ω·cm^2.With 20 mA current injection,it was found that forward voltage and output power were 3.14 V and 12.57 mW.Furthermore,maximum luminous flux of 0.49 lm of ITO RTA at 550℃was measured,which is the consequence of a higher transparency.