The possibility of using of pulsed supersonic gas jets for the formation of high intensity cluster ion beams are discusses. The results of experimental investigations of pulsed gases expansion are generalized in terms...The possibility of using of pulsed supersonic gas jets for the formation of high intensity cluster ion beams are discusses. The results of experimental investigations of pulsed gases expansion are generalized in terms of dimensionless similarity parameters. The results of the experimental study of formation of an high-intensity cluster beam of argon are presented. The fundamental phenomenon influences on the main parameters of cluster beam (cluster size, intensity ect.) are considered.展开更多
文摘The possibility of using of pulsed supersonic gas jets for the formation of high intensity cluster ion beams are discusses. The results of experimental investigations of pulsed gases expansion are generalized in terms of dimensionless similarity parameters. The results of the experimental study of formation of an high-intensity cluster beam of argon are presented. The fundamental phenomenon influences on the main parameters of cluster beam (cluster size, intensity ect.) are considered.
基金Fundamental Research Funds for the Central Universities(DUT16LAB11)Opening Project of Key Laboratory of Inorganic Coating Materials,Chinese Academy of Sciences(KLICM-2014-01)