A method for hardness measurement and evaluation of thin films on the material surface was proposed. Firstly, it is studied how to obtain the force indentation response with a finite element method when the indentati...A method for hardness measurement and evaluation of thin films on the material surface was proposed. Firstly, it is studied how to obtain the force indentation response with a finite element method when the indentation is less than 100 nanometers, in which current nanoindentation experiments have not reliable accuracy. The whole hardness indentation curve and fitted equation were obtained. At last, a formula to predict the hardness of the thin film on the material surface was derived and favorably compared with experiments.展开更多
According to nanoscratch results for the TiN film, an evaluation method for interfacial fracture toughness of thin hard films is presented with fuzzy concepts, which can account for such influential factors in scratch...According to nanoscratch results for the TiN film, an evaluation method for interfacial fracture toughness of thin hard films is presented with fuzzy concepts, which can account for such influential factors in scratch test as surface roughness and material imperfection. Based on configuration changes in scratching curves, the parameters RV and RF are defined as the relative ratios of tip vertical displacement and of friction coefficinet. Fuzzy features of the scratching curves are analyzed carefully. The critical load is deduced from fuzzy logic operations and used to calculate the value of interfacial fracture toughness. With this method, the interfacial fracture toughness of TiN/HSS is evaluated approximately as 4.18 MPam^1/2. Results show that the method is valid and can benefit the interfacial adhesion property investigation for thin hard films.展开更多
基金Chinese Academy of Sciences Foundation (KGCX1-11) National Natural Science Foundation of China(10 2 3 2 0 5 0 ) Min-istry of Science and Technology Foundation(2 0 0 2 CB412 70 6)
文摘A method for hardness measurement and evaluation of thin films on the material surface was proposed. Firstly, it is studied how to obtain the force indentation response with a finite element method when the indentation is less than 100 nanometers, in which current nanoindentation experiments have not reliable accuracy. The whole hardness indentation curve and fitted equation were obtained. At last, a formula to predict the hardness of the thin film on the material surface was derived and favorably compared with experiments.
文摘According to nanoscratch results for the TiN film, an evaluation method for interfacial fracture toughness of thin hard films is presented with fuzzy concepts, which can account for such influential factors in scratch test as surface roughness and material imperfection. Based on configuration changes in scratching curves, the parameters RV and RF are defined as the relative ratios of tip vertical displacement and of friction coefficinet. Fuzzy features of the scratching curves are analyzed carefully. The critical load is deduced from fuzzy logic operations and used to calculate the value of interfacial fracture toughness. With this method, the interfacial fracture toughness of TiN/HSS is evaluated approximately as 4.18 MPam^1/2. Results show that the method is valid and can benefit the interfacial adhesion property investigation for thin hard films.
