Deposition of organosilicone thin film from hexamethyldisiloxane(HMDSO)with 50kHz/33MHz dual-frequency atmospheric-pressure plasma jet

The deposition of organosilicone thin films from hexamethyldisiloxane（HMDSO） by using a dual-frequency （50 kHz/33 MHz） atmospheric-pressure micro-plasma jet with an admixture of a small volume of HMDSO and Ar was investigated.The topography was measured by using scanning electron microscopy.The chemical bond and composition of these films were analyzed by Fourier transform infrared spectroscopy （FTIR） and x-ray photoelectron spectroscopy.The results indicated that the as-deposited film was constituted by silicon,carbon,and oxygen elements,and FTIR suggested the films are organosilicon with the organic component （-CHx） and hydroxyl functional group（-OH） connected to the Si-O-Si backbone.Thin-film hardness was recorded by an MH-5-VM Digital Micro-Hardness Tester.Radio frequency power had a strong impact on film hardness and the hardness increased with increasing power.

Material Compatibility of Hexamethyldisiloxane as Organic Rankine Cycle Working Fluids at High Temperatures

The organic Rankine cycle(ORC)is a promising technology for industrial waste heat recovery and renewable energy utilization.High temperature ORCs have attracted particular interest because of their high thermal efficiencies and outputs.The material compatibility of working fluid is a significant limitation for the working fluid selection and system design for high temperature ORCs.This work presents a method for studying the material compatibility of ORC working fluids based on the calculated conditions of the ORCs and matching of components,temperatures,and materials.Hexamethyldisiloxane(MM)was chosen as the test fluid.The experimental results show that 304 stainless steel has better compatibility with MM than copper as the material of evaporators.Fluoric rubber is not a suitable sealing material for high temperature ORCs with MM as the working fluids because of the bad compatibility.Mineral oil has better compatibility with MM than polyol ester(POE)lubricant as the lubricant for the fluid pump.

Roll-to-roll fabrication of large-scale polyorgansiloxane thin film with high flexibility and ultra-efficient atomic oxygen resistance

One of the most widely used and well-established atomic oxygen(AO)protection solutions for low Earth orbit(LEO)satellites is the deposition of protective coatings on polymeric materials.However,manufacturing extensive expanses of these coating materials with good transparency,flexibility,smoothness,ultra-thinness,and exceptional AO resistance remains a critical issue.Herein,we successfully deposited a 400 nm thick polyorgansiloxane(SiO_(x)C_(y)H_(z))coating with high optical transparency and uniform good adherence on to a 1.2 m wide polyimide surface,by optimizing the distribution of hexamethyldisiloxane and oxygen as precursors in the roll-to-roll compatible plasmaenhanced chemical vapor deposition process.After AO irradiation with the fluence of 7.9×10^(20)atoms·cm^(–2),the erosion yield of the SiO_(x)C_(y)H_(z)-coated Kapton was less than 2.30×10^(–26)cm^3·atom^(–1),which was less than 0.77%of that of the Kapton.It indicates that the SiO_(x)C_(y)H_(z)coating can well prevent the erosion of Kapton by AO.In addition,it was also clarified that a SiO_(2) passivation layer was formed on the surface of the SiO_(x)C_(y)H_(z)coating during AO irradiation,which exhibited a‘self-reinforcing’defense mechanism.The entire preparation process of the SiO_(x)C_(y)H_(z)coating was highly efficient and low-cost,and it has shown great potential for applications in LEO.