Here we report 1.3μm electrical injection lasers based on InAs/GaAs quantum dots(QDs)grown on a GaAs substrate,which can steadily work at 110-℃without visible degradation.The QD structure is designed by applying the...Here we report 1.3μm electrical injection lasers based on InAs/GaAs quantum dots(QDs)grown on a GaAs substrate,which can steadily work at 110-℃without visible degradation.The QD structure is designed by applying the Stranski-Krastanow growth mode in solid source molecular beam epitaxy.The density of InAs QDs in the active region is increased from 3.8×10^(10)cm^(-2)to 5.9×10^(10)cm^(-2).As regards laser performance,the maximum output power of devices with lowdensity QDs as the active region is 65 m W at room temperature,and that of devices with the high-density QDs is 103 mW.Meanwhile the output power of high-density devices is 131 mW under an injection current of 4 A at 110-℃.展开更多
We demonstrate high-performance broadband tunable external-cavity lasers(ECLs) with the metal-organic chemical vapor deposition(MOCVD) grown In As/In P quantum dots(QDs) structures. Without cavity facet coatings, the ...We demonstrate high-performance broadband tunable external-cavity lasers(ECLs) with the metal-organic chemical vapor deposition(MOCVD) grown In As/In P quantum dots(QDs) structures. Without cavity facet coatings, the 3-d B spectral bandwidth of the Fabry–Perot(FP) laser is approximately 10.8 nm, while the tuning bandwidth of ECLs is 45 nm.Combined with the anti-reflection(AR)/high-reflection(HR) facet coating, a 92 nm bandwidth tuning range has been obtained with the wavelength covering from 1414 nm to 1506 nm. In most of the tuning range, the threshold current density is lower than 1.5 k A/cm2. The maximum output power of 6.5 m W was achieved under a 500 m A injection current.All achievements mentioned above were obtained under continuous-wave(CW) mode at room temperature(RT).展开更多
The growth of multi-layer InGaAs/InAs/GaAs self-assembled quantum dots (QDs) by molecular beam epitaxy (MBE) is investigated,and a QD laser diode lasing at 1.33μm in continuous operation mode at room temperature ...The growth of multi-layer InGaAs/InAs/GaAs self-assembled quantum dots (QDs) by molecular beam epitaxy (MBE) is investigated,and a QD laser diode lasing at 1.33μm in continuous operation mode at room temperature is reported. The full width at half maximum of the band edge emitting peaks of the photoluminescence (PL) spectra at room temperature is less than 35meV for most of the multi-layer QD samples,revealing good,reproducible MBE growth conditions. Moreover,atomic force microscopy images show that the QD surface density can be controlled in the range from 1×10^10 to 7 ×10^10 cm^-2 . The best PL properties are obtained at a QD surface density of about 4×10^10cm^-2. Edge emitting lasers containing 3 and 5 stacked QD layers as the active layer lasing at room temperature in continuous wave operation mode are reported.展开更多
The self-assembled growth of InAs/GaAs quantum dots by molecular beam epitaxy is conducted by optimizing several growth parameters, using a one-step interruption method after island formation. The dependence of photol...The self-assembled growth of InAs/GaAs quantum dots by molecular beam epitaxy is conducted by optimizing several growth parameters, using a one-step interruption method after island formation. The dependence of photoluminescence on areal quantum-dot density is systematically investigated as a function of InAs deposition, growth temperature and arsenic pressure. The results of this investigation along with time-resolved photoluminescence measurements show that the com- bination of a growth temperature of 490℃, with a deposition rate of 0.02 ML/s, under an arsenic pressure of 1×10^-6 Torr (1 Torr = 1.33322×10^2 Pa), provides the best compromise between high density and the photoluminescence of quantum dot structure, with a radiative lifetime of 780 ps. The applicability of this 5-layer quantum dot structure to high-repetition-rate pulsed lasers is demonstrated with the fabrication and characterization of a monolithic InAs/GaAs quantum-dot passively mode-locked laser operating at nearly 1300 nm. Picosecond pulse generation is achieved from a two-section laser, with a 19.7-GHz repetition rate.展开更多
In this paper, simulation of InAs/GaAs quantum dot (QD) laser is performed based upon a set of eight rate equations for the carriers and photons in five energy states. Carrier dynamics in these lasers were under analy...In this paper, simulation of InAs/GaAs quantum dot (QD) laser is performed based upon a set of eight rate equations for the carriers and photons in five energy states. Carrier dynamics in these lasers were under analysis and the rate equations are solved using 4th order Runge-Kutta method. We have shown that by increasing injected current to the active medium of laser, switching-on and stability time of the system would decrease and power peak and stationary power will be increased. Also, emission in any state will start when the lower state is saturated and remain steady. The results including P-I characteristic curve for the ground state (GS), first excited state (ES1), second excited state (ES2) and output power of the QD laser will be presented.展开更多
Photoluminescence (PL) and lasing properties of InAs/GaAs quantum dots (QDs) with different growth procedures prepared by metalorganic chemical vapour deposition are studied. PL measurements show that the low grow...Photoluminescence (PL) and lasing properties of InAs/GaAs quantum dots (QDs) with different growth procedures prepared by metalorganic chemical vapour deposition are studied. PL measurements show that the low growth rate QD sample has a larger PL intensity and a narrower PL line width than the high growth rate sample. During rapid thermal annealing, however, the low growth rate sample shows a greater blueshift of PL peak wavelength. This is caused by the larger InAs layer thickness which results from the larger 2-3 dimensional transition critical layer thickness for the QDs in the low-growth-rate sample. A growth technique including growth interruption and in-situ annealing, named indium flush method, is used during the growth of GaAs cap layer, which can flatten the GaAs surface effectively. Though the method results in a blueshift of PL peak wavelength and a broadening of PL line width, it is essential for the fabrication of room temperature working QD lasers.展开更多
InAs quantum dots (QDs) grown on InxGa1-xAs/InP matrix by low pressure metal organic vapor phase epitaxy (LP-MOVPE) in nitrogen ambient were studied. Formation of the InAs QDs with different growth conditions was inve...InAs quantum dots (QDs) grown on InxGa1-xAs/InP matrix by low pressure metal organic vapor phase epitaxy (LP-MOVPE) in nitrogen ambient were studied. Formation of the InAs QDs with different growth conditions was investigated. To improve the dot size uniformity, a two-step growth method was used and investigated. It is found that morphology of the InAs QDs formed on such InxGa1-xAs/InP matrix is very sensitive to the growth conditions. InAs QDs with high density of 1.3×1010 cm?2 are grown by using S-K growth method with fast growth rate. Using the two-step growth method, the InAs QDs size uniformity improves by 63% and 110% compared that of the dots grown by ordinary S-K method and ALE method, respectively. Narrow photoluminescence (PL) emission spectrum of the QDs grown by using the two-step growth method is received. FWHM of the PL curve is measured at 26 meV and the peak emission wavelength is larger than 2.3 μm at 77 K.展开更多
We report the InAs/GaAs quantum dot laterally coupled distributed feedback(LC-DFB)lasers operating at room temperature in the wavelength range of 1.31μm.First-order chromium Bragg gratings were fabricated alongside t...We report the InAs/GaAs quantum dot laterally coupled distributed feedback(LC-DFB)lasers operating at room temperature in the wavelength range of 1.31μm.First-order chromium Bragg gratings were fabricated alongside the ridge waveguide to obtain the maximum coupling coefficient with the optical field.Stable continuous-wave single-frequency operation has been achieved with output power above 5 mW/facet and side mode suppression ratio exceeding 52 dB.Moreover,a single chip integrating three LC-DFB lasers was tentatively explored.The three LC-DFB lasers on the chip can operate in single mode at room temperature,covering the wavelength span of 35.6 nm.展开更多
We investigate InAs/GaAs quantum dot (QD) lasers grown by gas source molecular beam epitaxy with different growth temperatures for InAs dot layers. The same laser structures are grown, but the growth temperatures of...We investigate InAs/GaAs quantum dot (QD) lasers grown by gas source molecular beam epitaxy with different growth temperatures for InAs dot layers. The same laser structures are grown, but the growth temperatures of InAs dot layers are set as 425 and 500℃, respectively. Ridge waveguide laser diodes are fabricated, and the characteristics of the QD lasers are systematically studied. The laser diodes with QDs grown at 425 ~C show better performance, such as threshold current density, output power, internal quantum efficiency, and characteristic temperature, than those with QDs grown at 500℃. This finding is ascribed to the higher QD density and more uniform size distribution of QDs achieved at 425℃.展开更多
A low phase noise millimeter-wave(MMW) signal generator is proposed and experimentally demonstrated with a C-band passively Fabry-Pérot(F-P) quantum dot mode-locked laser. A novel method is proposed to generate l...A low phase noise millimeter-wave(MMW) signal generator is proposed and experimentally demonstrated with a C-band passively Fabry-Pérot(F-P) quantum dot mode-locked laser. A novel method is proposed to generate low phase noise MMW signal, which is simply based on a commercial off-the-shelf dual-driven Li Nb O3 Mach-Zehnder modulator and a passively F-P quantum dot mode-locked laser. MMW signal with the frequency of 30 GHz, 45 GHz and 90 GHz respectively is obtained experimentally. Single-sideband phase noise of the 30 GHz and 45 GHz MMW signal is-112 d Bc/Hz and-106 d Bc/Hz at an offset of 1 k Hz, respectively. The linewidth of the 30 GHz and 45 GHz MMW signal is about from 225 Hz and 239 Hz. This is considered a very simple MMW generator with a quasi-tunable broadband and ultra-low phase noise.展开更多
Chip-scale integration of optoelectronic devices such as lasers, waveguides, and modulators on silicon is prevailing as a promising approach to realize future ultrahigh speed optical interconnects. We review recent pr...Chip-scale integration of optoelectronic devices such as lasers, waveguides, and modulators on silicon is prevailing as a promising approach to realize future ultrahigh speed optical interconnects. We review recent progress of the direct epitaxy and fabrication of quantum dot (QD) lasers and integrated guided-wave devices on silicon. This approach involves the development of molecular beam epitaxial growth of self- organized QD lasers directly on silicon substrates and their monolithic integration with amorphous silicon waveguides and quantum well electroabsorption modulators. Additionally, we report a preliminary study of long-wavelength (〉 1.3 μm) QD lasers grown on silicon and integrated crystalline silicon waveguides using membrane transfer technology.展开更多
基金the Science and Technology Program of Guangzhou(Grant No.202103030001)the KeyArea Research and Development Program of Guangdong Province(Grant No.2018B030329001)+8 种基金the National Natural Science Foundation of China(Grant Nos.62035017,61505196,and 62204238)the Scientific Instrument Developing Project of the Chinese Academy of Sciences(Grant No.YJKYYQ20170032)the Major Program of the National Natural Science Foundation of China(Grant Nos.61790580 and 61790581)the Chinese Academy of Sciences and Changchun City Science and Technology Innovation Cooperation Project(Grant No.21SH06)Jincheng Key Research and Development Project(Grant No.20210209)the Key R&D Program of Shanxi Province(Grant No.202102030201004)the R&D Program of Guangdong Province(Grant Nos.2018B030329001 and2020B0303020001)Shenzhen Technology Research Project(Grant No.JSGG20201102145200001)the National Key Technologies R&D Program of China(Grant No.2018YFA0306100)。
文摘Here we report 1.3μm electrical injection lasers based on InAs/GaAs quantum dots(QDs)grown on a GaAs substrate,which can steadily work at 110-℃without visible degradation.The QD structure is designed by applying the Stranski-Krastanow growth mode in solid source molecular beam epitaxy.The density of InAs QDs in the active region is increased from 3.8×10^(10)cm^(-2)to 5.9×10^(10)cm^(-2).As regards laser performance,the maximum output power of devices with lowdensity QDs as the active region is 65 m W at room temperature,and that of devices with the high-density QDs is 103 mW.Meanwhile the output power of high-density devices is 131 mW under an injection current of 4 A at 110-℃.
基金Project supported by the National Natural Science Foundation of China(Grant No.61974141)Tianjin Municipal Science and Technology BureauScience and Technology Innovation Bureau of China-Singapore Tianjin Eco-City。
文摘We demonstrate high-performance broadband tunable external-cavity lasers(ECLs) with the metal-organic chemical vapor deposition(MOCVD) grown In As/In P quantum dots(QDs) structures. Without cavity facet coatings, the 3-d B spectral bandwidth of the Fabry–Perot(FP) laser is approximately 10.8 nm, while the tuning bandwidth of ECLs is 45 nm.Combined with the anti-reflection(AR)/high-reflection(HR) facet coating, a 92 nm bandwidth tuning range has been obtained with the wavelength covering from 1414 nm to 1506 nm. In most of the tuning range, the threshold current density is lower than 1.5 k A/cm2. The maximum output power of 6.5 m W was achieved under a 500 m A injection current.All achievements mentioned above were obtained under continuous-wave(CW) mode at room temperature(RT).
文摘The growth of multi-layer InGaAs/InAs/GaAs self-assembled quantum dots (QDs) by molecular beam epitaxy (MBE) is investigated,and a QD laser diode lasing at 1.33μm in continuous operation mode at room temperature is reported. The full width at half maximum of the band edge emitting peaks of the photoluminescence (PL) spectra at room temperature is less than 35meV for most of the multi-layer QD samples,revealing good,reproducible MBE growth conditions. Moreover,atomic force microscopy images show that the QD surface density can be controlled in the range from 1×10^10 to 7 ×10^10 cm^-2 . The best PL properties are obtained at a QD surface density of about 4×10^10cm^-2. Edge emitting lasers containing 3 and 5 stacked QD layers as the active layer lasing at room temperature in continuous wave operation mode are reported.
基金Project supported by the Natural Science Foundation of Beijing,China (Grant No.4112060)the Special Foundation for National Key Scientific Instrument,China (Grant No.2012YQ140005)+5 种基金the Open Fund of High Power Laser Laboratory,China Academy of Engineering Physics (Grant No.2013HEL03)the National Natural Science Foundation of China (Grant No.61274125)the National Basic Research Program,China (Grant No.2010CB327601)the State Key Laboratory on Integrated Optoelectronics Open Project,China (Grant No.2011KFB002)financially supported by a Marie Curie International Incoming Fellowship within the 7th European Community Framework Programmethe financial support through a Royal Academy of Engineering/EPSRC Research Fellowship
文摘The self-assembled growth of InAs/GaAs quantum dots by molecular beam epitaxy is conducted by optimizing several growth parameters, using a one-step interruption method after island formation. The dependence of photoluminescence on areal quantum-dot density is systematically investigated as a function of InAs deposition, growth temperature and arsenic pressure. The results of this investigation along with time-resolved photoluminescence measurements show that the com- bination of a growth temperature of 490℃, with a deposition rate of 0.02 ML/s, under an arsenic pressure of 1×10^-6 Torr (1 Torr = 1.33322×10^2 Pa), provides the best compromise between high density and the photoluminescence of quantum dot structure, with a radiative lifetime of 780 ps. The applicability of this 5-layer quantum dot structure to high-repetition-rate pulsed lasers is demonstrated with the fabrication and characterization of a monolithic InAs/GaAs quantum-dot passively mode-locked laser operating at nearly 1300 nm. Picosecond pulse generation is achieved from a two-section laser, with a 19.7-GHz repetition rate.
文摘In this paper, simulation of InAs/GaAs quantum dot (QD) laser is performed based upon a set of eight rate equations for the carriers and photons in five energy states. Carrier dynamics in these lasers were under analysis and the rate equations are solved using 4th order Runge-Kutta method. We have shown that by increasing injected current to the active medium of laser, switching-on and stability time of the system would decrease and power peak and stationary power will be increased. Also, emission in any state will start when the lower state is saturated and remain steady. The results including P-I characteristic curve for the ground state (GS), first excited state (ES1), second excited state (ES2) and output power of the QD laser will be presented.
基金Project supported by the National Natural Science Foundation of China (Grant Nos 60706009, 90401025, 60736036, 60777021 and60476009)the National Key Basic Research Program of China (Grant Nos 2006CB604901 and 2006CB604902)the National High Technology Research and Development Program of China (Grant Nos 2006AA01Z256, 2007AA03Z419 and 2007AA03Z417)
文摘Photoluminescence (PL) and lasing properties of InAs/GaAs quantum dots (QDs) with different growth procedures prepared by metalorganic chemical vapour deposition are studied. PL measurements show that the low growth rate QD sample has a larger PL intensity and a narrower PL line width than the high growth rate sample. During rapid thermal annealing, however, the low growth rate sample shows a greater blueshift of PL peak wavelength. This is caused by the larger InAs layer thickness which results from the larger 2-3 dimensional transition critical layer thickness for the QDs in the low-growth-rate sample. A growth technique including growth interruption and in-situ annealing, named indium flush method, is used during the growth of GaAs cap layer, which can flatten the GaAs surface effectively. Though the method results in a blueshift of PL peak wavelength and a broadening of PL line width, it is essential for the fabrication of room temperature working QD lasers.
文摘InAs quantum dots (QDs) grown on InxGa1-xAs/InP matrix by low pressure metal organic vapor phase epitaxy (LP-MOVPE) in nitrogen ambient were studied. Formation of the InAs QDs with different growth conditions was investigated. To improve the dot size uniformity, a two-step growth method was used and investigated. It is found that morphology of the InAs QDs formed on such InxGa1-xAs/InP matrix is very sensitive to the growth conditions. InAs QDs with high density of 1.3×1010 cm?2 are grown by using S-K growth method with fast growth rate. Using the two-step growth method, the InAs QDs size uniformity improves by 63% and 110% compared that of the dots grown by ordinary S-K method and ALE method, respectively. Narrow photoluminescence (PL) emission spectrum of the QDs grown by using the two-step growth method is received. FWHM of the PL curve is measured at 26 meV and the peak emission wavelength is larger than 2.3 μm at 77 K.
基金supported by the National Key Research and Development Program of China(No.2021YFB2800500).
文摘We report the InAs/GaAs quantum dot laterally coupled distributed feedback(LC-DFB)lasers operating at room temperature in the wavelength range of 1.31μm.First-order chromium Bragg gratings were fabricated alongside the ridge waveguide to obtain the maximum coupling coefficient with the optical field.Stable continuous-wave single-frequency operation has been achieved with output power above 5 mW/facet and side mode suppression ratio exceeding 52 dB.Moreover,a single chip integrating three LC-DFB lasers was tentatively explored.The three LC-DFB lasers on the chip can operate in single mode at room temperature,covering the wavelength span of 35.6 nm.
基金supported by the National Natural Foundation of China (Nos. 61021064,61176065,10990103,and 61204058)the National Basic Research Program of China (No. 2011CB921201)
文摘We investigate InAs/GaAs quantum dot (QD) lasers grown by gas source molecular beam epitaxy with different growth temperatures for InAs dot layers. The same laser structures are grown, but the growth temperatures of InAs dot layers are set as 425 and 500℃, respectively. Ridge waveguide laser diodes are fabricated, and the characteristics of the QD lasers are systematically studied. The laser diodes with QDs grown at 425 ~C show better performance, such as threshold current density, output power, internal quantum efficiency, and characteristic temperature, than those with QDs grown at 500℃. This finding is ascribed to the higher QD density and more uniform size distribution of QDs achieved at 425℃.
基金supported by the Humanity and Social Science Foundation of Chinese Ministry of Education (No.19YJC880053)the Natural Science Foundation of Zhejiang Province (No.LQ18F010008)+3 种基金the Philosophy and Social Science Planning Project of Zhejiang Province (No.19NDJC0103YB)the Natural Science Foundation of Ningbo (No.2018A610092)the Research Fund Project of Ningbo Institute of Finance&Economics (No.1320171002)the Education and Teaching Reform Program of Ningbo Institute of Finance&Economics (No.20jyyb16)。
文摘A low phase noise millimeter-wave(MMW) signal generator is proposed and experimentally demonstrated with a C-band passively Fabry-Pérot(F-P) quantum dot mode-locked laser. A novel method is proposed to generate low phase noise MMW signal, which is simply based on a commercial off-the-shelf dual-driven Li Nb O3 Mach-Zehnder modulator and a passively F-P quantum dot mode-locked laser. MMW signal with the frequency of 30 GHz, 45 GHz and 90 GHz respectively is obtained experimentally. Single-sideband phase noise of the 30 GHz and 45 GHz MMW signal is-112 d Bc/Hz and-106 d Bc/Hz at an offset of 1 k Hz, respectively. The linewidth of the 30 GHz and 45 GHz MMW signal is about from 225 Hz and 239 Hz. This is considered a very simple MMW generator with a quasi-tunable broadband and ultra-low phase noise.
基金the Defense Advanced Research Projects Agency of the United States under Grant No.W911NF-04-1-0429
文摘Chip-scale integration of optoelectronic devices such as lasers, waveguides, and modulators on silicon is prevailing as a promising approach to realize future ultrahigh speed optical interconnects. We review recent progress of the direct epitaxy and fabrication of quantum dot (QD) lasers and integrated guided-wave devices on silicon. This approach involves the development of molecular beam epitaxial growth of self- organized QD lasers directly on silicon substrates and their monolithic integration with amorphous silicon waveguides and quantum well electroabsorption modulators. Additionally, we report a preliminary study of long-wavelength (〉 1.3 μm) QD lasers grown on silicon and integrated crystalline silicon waveguides using membrane transfer technology.