The accuracy and repeatability of the laser interferometer measurement system （LIMS） are often limited by the mirror surface error that comes from the mirror surface shape and distortion. This paper describes a new ...The accuracy and repeatability of the laser interferometer measurement system （LIMS） are often limited by the mirror surface error that comes from the mirror surface shape and distortion. This paper describes a new method to calibrate mirror map on ultraprecise movement stage （UPMS） with nanopositioning and to make a real-time compensation for the mirror surface error by using mirror map data tables with the software algorithm. Based on the mirror map test model, the factors affecting mirror map are analyzed through geometric method on the UPMS with six digrees of freedom. Dam processing methods including spline interpolation and spline offsets are used to process the raw sampling data to build mirror map tables. The linear interpolation as compensation method to make a real-time correction on the stage mirror unflatness is adopted and the correction formulas are illuminated. In this way, the measurement accuracy of the system is obviously improved from 40 nm to 5 nm.展开更多
A five-channel far-infrared (FIR) hydrogen cyanide (HCN) laser interferometer was developed to measure plasma electron density profile on the HT-7 superconducting tokamak. The principle and structure of the five-chann...A five-channel far-infrared (FIR) hydrogen cyanide (HCN) laser interferometer was developed to measure plasma electron density profile on the HT-7 superconducting tokamak. The principle and structure of the five-channel FIR laser interferometer is described. The laser source used in the interferometer was a continuous wave glow discharge HCN laser with a 3.4 m cavity length and a 100 mW power output at 337μm wavelength. The temporal resolution was 0.1 ms and the detection sensitivity was 1/12 fringe. Preliminary experimental results measured by the interferometer on HT-7 tokamak are reported.展开更多
Interferometric Rayleigh scattering diagnostic technique for the time-resolved measurement of flow velocity is studied. Theoretically, this systematic velocity-measured accuracy can reach up to 1.23 m/s. Measurement a...Interferometric Rayleigh scattering diagnostic technique for the time-resolved measurement of flow velocity is studied. Theoretically, this systematic velocity-measured accuracy can reach up to 1.23 m/s. Measurement accuracy is then evaluated by comparing with hot wire anemometry results. Moreover, the distributions of velocity and turbulence intensity in a supersonic free jet from a Laval nozzle with a Mach number of 1.8 are also obtained quantitatively. The sampling rate in this measurement is determined to be approximately 10 k Hz.展开更多
A fiber in-line Fabry-Perot interferometer is presented. The sensing head consists of a micro ellipsoidal air cavity and a small section of solid-core photonic crystal fiber. The reflective index （RI） and temperatur...A fiber in-line Fabry-Perot interferometer is presented. The sensing head consists of a micro ellipsoidal air cavity and a small section of solid-core photonic crystal fiber. The reflective index （RI） and temperature can be interrogated simultaneously through a fast Fourier transform and by tracing the dip wavelength shift of the reflective spectrum. Experimental results show that the RI amplitude and wavelength sensitivities are 5.30/ RIU and 8.46 × 10-1 nm/RIU in the range from 1.34 to 1.43, and the temperature amplitude and wavelength sensitivities are 6.8 × 10-4/℃ and 2.48 × 10-3 nm/℃ in the range from 15℃ to 75℃, respectively. Easy fabrication, a simple system, and simultaneous measurement make it appropriate for aluM-parameter sensing application.展开更多
In this paper, a sinusoidal phase-modulating Fabry-Perot interferometer is proposed to measure angular displacement. The usefulness of the interferometer is demonstrated by simulations and experiments.
This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure three-dimensional displacement...This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure three-dimensional displacement fringe patterns with a single loading on the specimen, and the in-plane and out-of-plane displacement fields can be measured independently and defined clearly. The optical setup has the advantages of structural novelty, flexibility, and high fringe contrast. Moreover, the in-plane displacement sensitivity is twice of that of the normal moire interferometer. The measuring techniques to obtain the fringe patterns and displacement fields using the MMI-T/G system are described. The experimental results of thermal displacement of an electronic device are shown.展开更多
A novel photonic-assisted approach to microwave frequency measurement is proposed and experimentally demonstrated. The proposed scheme is based on the frequency-to-power mapping with different transmis- sion responses...A novel photonic-assisted approach to microwave frequency measurement is proposed and experimentally demonstrated. The proposed scheme is based on the frequency-to-power mapping with different transmis- sion responses. A polarizer is used in one output branch of a phase modulator to simultaneously implement phase modulation and intensity modulation. Owing to the complementary nature of the transmission re- sponses and the Mach-Zehnder interferometers （MZIs）, this scheme theoretically provides high resolution and tunable measurement range. The measurement errors in the experimental results can be kept within 0.2 GHz over a freauencv ranee from 0.1 to 5.3 GHz.展开更多
In this study, an improved phase-shi^ng diffraction interferometer for measuring the surface topography of a microsphere is developed. A common diode-pumped solid state laser is used as the light source to facilitate ...In this study, an improved phase-shi^ng diffraction interferometer for measuring the surface topography of a microsphere is developed. A common diode-pumped solid state laser is used as the light source to facilitate ap- paratus realization, and a new polarized optical arrangement is designed to filter the bias light for phase-shifting control. A pinhole diffraction self-calibration method is proposed to eliminate systematic errors introduced by optical elements. The system has an adjustable signal contrast and is suitable for testing the surface with low reflectivity. Finally, a spherical ruby probe of a coordinate measuring machine is used as an example tested by the new phase-shifting diffraction interferometer system and the WYKO scanning white light interferometer for experimental comparison. The measured region presents consistent overall topography features, and the resulting peak-to-valley value of 84.43 nm and RMS value of 18.41 nm are achieved. The average roughness coincides with the manufacturer＇s specification value.展开更多
A novel interferometer using a composite light source for real time measurements of micro-vibrations is proposed. The experimental results make it clear that it is insensitive to external disturbances and intensity fl...A novel interferometer using a composite light source for real time measurements of micro-vibrations is proposed. The experimental results make it clear that it is insensitive to external disturbances and intensity fluctuations of the source light.展开更多
This paper presents a review of recent progress in simultaneous measurement of multiparameters including strain, temperature, vibration, transverse load, based on the combinations of extrinsic fiber-optic Fabry-Perot ...This paper presents a review of recent progress in simultaneous measurement of multiparameters including strain, temperature, vibration, transverse load, based on the combinations of extrinsic fiber-optic Fabry-Perot interferometers and fiber gratings.展开更多
A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase- modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective sinus...A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase- modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective sinusoidal phase-modulating depth is detailed, and the residual amplitude modulation is also taken into account. Numerical simulations and experiments are carried out to compare this method with the traditional one. We prove that, with this method, the sinusoidal phase-modulating laser diode interferometer can realize a centimeter-level displacement measurement range with high precision, which is much better than the traditional method.展开更多
文摘The accuracy and repeatability of the laser interferometer measurement system （LIMS） are often limited by the mirror surface error that comes from the mirror surface shape and distortion. This paper describes a new method to calibrate mirror map on ultraprecise movement stage （UPMS） with nanopositioning and to make a real-time compensation for the mirror surface error by using mirror map data tables with the software algorithm. Based on the mirror map test model, the factors affecting mirror map are analyzed through geometric method on the UPMS with six digrees of freedom. Dam processing methods including spline interpolation and spline offsets are used to process the raw sampling data to build mirror map tables. The linear interpolation as compensation method to make a real-time correction on the stage mirror unflatness is adopted and the correction formulas are illuminated. In this way, the measurement accuracy of the system is obviously improved from 40 nm to 5 nm.
文摘A five-channel far-infrared (FIR) hydrogen cyanide (HCN) laser interferometer was developed to measure plasma electron density profile on the HT-7 superconducting tokamak. The principle and structure of the five-channel FIR laser interferometer is described. The laser source used in the interferometer was a continuous wave glow discharge HCN laser with a 3.4 m cavity length and a 100 mW power output at 337μm wavelength. The temporal resolution was 0.1 ms and the detection sensitivity was 1/12 fringe. Preliminary experimental results measured by the interferometer on HT-7 tokamak are reported.
基金Project supported by the National Natural Science Foundation of China(Grant No.11272337)
文摘Interferometric Rayleigh scattering diagnostic technique for the time-resolved measurement of flow velocity is studied. Theoretically, this systematic velocity-measured accuracy can reach up to 1.23 m/s. Measurement accuracy is then evaluated by comparing with hot wire anemometry results. Moreover, the distributions of velocity and turbulence intensity in a supersonic free jet from a Laval nozzle with a Mach number of 1.8 are also obtained quantitatively. The sampling rate in this measurement is determined to be approximately 10 k Hz.
基金supported by the National Natural Science Foundation of China(Nos.61178044 and 51405240)the Natural Science Foundation of Jiangsu Province of China(No.BK20140925)+2 种基金the Major Project of the Nature Science Research for Colleges and Universities in Jiangsu Province(No.15KJA140002)the Program of Natural Science Research of the Jiangsu Higher Education Institutions of China(No.14KJB510015)the University Postgraduate Research and Innovation Project of Jiangsu Province(No.1812000002A422)
文摘A fiber in-line Fabry-Perot interferometer is presented. The sensing head consists of a micro ellipsoidal air cavity and a small section of solid-core photonic crystal fiber. The reflective index （RI） and temperature can be interrogated simultaneously through a fast Fourier transform and by tracing the dip wavelength shift of the reflective spectrum. Experimental results show that the RI amplitude and wavelength sensitivities are 5.30/ RIU and 8.46 × 10-1 nm/RIU in the range from 1.34 to 1.43, and the temperature amplitude and wavelength sensitivities are 6.8 × 10-4/℃ and 2.48 × 10-3 nm/℃ in the range from 15℃ to 75℃, respectively. Easy fabrication, a simple system, and simultaneous measurement make it appropriate for aluM-parameter sensing application.
文摘In this paper, a sinusoidal phase-modulating Fabry-Perot interferometer is proposed to measure angular displacement. The usefulness of the interferometer is demonstrated by simulations and experiments.
基金The authors are grateful to the financial support by the Science and Technology Development Foundation, Education Commission of Beijing, P. R. China (No. 00KJ-094).
文摘This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure three-dimensional displacement fringe patterns with a single loading on the specimen, and the in-plane and out-of-plane displacement fields can be measured independently and defined clearly. The optical setup has the advantages of structural novelty, flexibility, and high fringe contrast. Moreover, the in-plane displacement sensitivity is twice of that of the normal moire interferometer. The measuring techniques to obtain the fringe patterns and displacement fields using the MMI-T/G system are described. The experimental results of thermal displacement of an electronic device are shown.
基金supported by the National "973" Program of China(No.2012CB315705)the National "863" Program of China(No.2011AA010306)+2 种基金the National Natural Science Foundation of China(Nos.61107058,61120106001,60932004,61001121,and 60837004)the Beijing Excellent Doctoral Thesis Project(No.YB20101001301)the Cooperation Project between the Province and Ministries(No.2011A090200025)
文摘A novel photonic-assisted approach to microwave frequency measurement is proposed and experimentally demonstrated. The proposed scheme is based on the frequency-to-power mapping with different transmis- sion responses. A polarizer is used in one output branch of a phase modulator to simultaneously implement phase modulation and intensity modulation. Owing to the complementary nature of the transmission re- sponses and the Mach-Zehnder interferometers （MZIs）, this scheme theoretically provides high resolution and tunable measurement range. The measurement errors in the experimental results can be kept within 0.2 GHz over a freauencv ranee from 0.1 to 5.3 GHz.
基金supported by the National Natural Science Foundation of China under Grant Nos.61275096 and 51275120
文摘In this study, an improved phase-shi^ng diffraction interferometer for measuring the surface topography of a microsphere is developed. A common diode-pumped solid state laser is used as the light source to facilitate ap- paratus realization, and a new polarized optical arrangement is designed to filter the bias light for phase-shifting control. A pinhole diffraction self-calibration method is proposed to eliminate systematic errors introduced by optical elements. The system has an adjustable signal contrast and is suitable for testing the surface with low reflectivity. Finally, a spherical ruby probe of a coordinate measuring machine is used as an example tested by the new phase-shifting diffraction interferometer system and the WYKO scanning white light interferometer for experimental comparison. The measured region presents consistent overall topography features, and the resulting peak-to-valley value of 84.43 nm and RMS value of 18.41 nm are achieved. The average roughness coincides with the manufacturer＇s specification value.
文摘A novel interferometer using a composite light source for real time measurements of micro-vibrations is proposed. The experimental results make it clear that it is insensitive to external disturbances and intensity fluctuations of the source light.
文摘This paper presents a review of recent progress in simultaneous measurement of multiparameters including strain, temperature, vibration, transverse load, based on the combinations of extrinsic fiber-optic Fabry-Perot interferometers and fiber gratings.
基金supported by the National Natural Science Foundation of China under Grant No.51475262
文摘A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase- modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective sinusoidal phase-modulating depth is detailed, and the residual amplitude modulation is also taken into account. Numerical simulations and experiments are carried out to compare this method with the traditional one. We prove that, with this method, the sinusoidal phase-modulating laser diode interferometer can realize a centimeter-level displacement measurement range with high precision, which is much better than the traditional method.
