Micro-hotplate(MHP) technology is one key part in the manufacturing of gas sensors.The pursuit of analytical solutions for the temperature distribution and also thermal stresses within the MHP is of intrinsic scientif...Micro-hotplate(MHP) technology is one key part in the manufacturing of gas sensors.The pursuit of analytical solutions for the temperature distribution and also thermal stresses within the MHP is of intrinsic scientific interest.In this study,analytical solutions for the temperature field,and both radial and tangential stresses and von Mises stress for circular MHP were obtained.Two geometries were considered:one had a circular heater at the center and the other had a circular heater at the center and an annular heater within the membrane part.Internal heat generation was incorporated in the energy equation for the MHP and different values of convection heat transfer coefficient were used at the upper and lower surfaces of the MHP.It has been shown that the MHP with two heaters can provide more uniform temperature field compared with the MHP with one heater.The main objective of this work is to provide an exact analytical solution for thermal stresses within the circular micro-heater with a simple geometry as a benchmark,from mathematical point of view,against which the accuracy of new numerical schemes can be checked.To make sure that the analytical procedure is correct,the analytical results are checked against numerical solutions derived from finite element simulation.Since the analytical models for the temperature field and especially for the thermal stresses of MHP are seldom investigated in the literature,the obtained results are believed to facilitate the design and performance evaluation of MHPs as well.展开更多
针对空间监视跟踪环境中对于包含角变量的状态向量估计存在精度较低的缺点,利用Gauss von Mises(GVM)多变量概率密度分布,提出一种基于矩匹配的GVM参数估计方法,并在此基础上改进GVM分布的确定性采样方法,建立针对GVM分布的递推滤波算法...针对空间监视跟踪环境中对于包含角变量的状态向量估计存在精度较低的缺点,利用Gauss von Mises(GVM)多变量概率密度分布,提出一种基于矩匹配的GVM参数估计方法,并在此基础上改进GVM分布的确定性采样方法,建立针对GVM分布的递推滤波算法,该算法充分考虑了流形的内蕴结构,克服了传统滤波方法假设状态向量定义于欧氏空间及采用欧氏空间中高斯分布模型的局限性。仿真结果表明,该滤波算法能有效估计状态变量的后验概率分布,对角变量的估计精度明显优于扩展卡尔曼滤波方法(EKF)。展开更多
文摘Micro-hotplate(MHP) technology is one key part in the manufacturing of gas sensors.The pursuit of analytical solutions for the temperature distribution and also thermal stresses within the MHP is of intrinsic scientific interest.In this study,analytical solutions for the temperature field,and both radial and tangential stresses and von Mises stress for circular MHP were obtained.Two geometries were considered:one had a circular heater at the center and the other had a circular heater at the center and an annular heater within the membrane part.Internal heat generation was incorporated in the energy equation for the MHP and different values of convection heat transfer coefficient were used at the upper and lower surfaces of the MHP.It has been shown that the MHP with two heaters can provide more uniform temperature field compared with the MHP with one heater.The main objective of this work is to provide an exact analytical solution for thermal stresses within the circular micro-heater with a simple geometry as a benchmark,from mathematical point of view,against which the accuracy of new numerical schemes can be checked.To make sure that the analytical procedure is correct,the analytical results are checked against numerical solutions derived from finite element simulation.Since the analytical models for the temperature field and especially for the thermal stresses of MHP are seldom investigated in the literature,the obtained results are believed to facilitate the design and performance evaluation of MHPs as well.
文摘针对空间监视跟踪环境中对于包含角变量的状态向量估计存在精度较低的缺点,利用Gauss von Mises(GVM)多变量概率密度分布,提出一种基于矩匹配的GVM参数估计方法,并在此基础上改进GVM分布的确定性采样方法,建立针对GVM分布的递推滤波算法,该算法充分考虑了流形的内蕴结构,克服了传统滤波方法假设状态向量定义于欧氏空间及采用欧氏空间中高斯分布模型的局限性。仿真结果表明,该滤波算法能有效估计状态变量的后验概率分布,对角变量的估计精度明显优于扩展卡尔曼滤波方法(EKF)。
