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Optimization of Polishing Parameters with Taguchi Method for LBO Crystal in CMP 被引量:4
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作者 Jun Li Yongwei Zhu +2 位作者 Dunwen Zuo Yong Zhu Chuangtian Chen 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2009年第5期703-707,共5页
Chemical mechanical polishing (CMP) was used to polish Lithium triborate (LiB3O5 or LBO) crystal. Taguchi method was applied for optimization of the polishing parameters. Material removal rate (MRR) and surface ... Chemical mechanical polishing (CMP) was used to polish Lithium triborate (LiB3O5 or LBO) crystal. Taguchi method was applied for optimization of the polishing parameters. Material removal rate (MRR) and surface roughness are considered as criteria for the optimization. The polishing pressure, the abrasive concentration and the table velocity are important parameters which influence MRR and surface roughness in CMP of LBO crystal. Experiment results indicate that for MRR the polishing pressure is the most significant polishing parameter followed by table velocity; while for the surface roughness, the abrasive concentration is the most important one. For high MRR in CMP of LBO ctystal the optimal conditions are: pressure 620 g/cm^2, concentration 5.0 wt pct, and velocity 60 r/min, respectively. For the best surface roughness the optimal conditions are: pressure 416 g/cm^2, concentration 5.0 wt pct, and velocity 40 r/min, respectively. The contributions of individual parameters for MRR and surface roughness were obtained. 展开更多
关键词 Chemical mechanical polishing (CMP) Lithium triborate lbo crystal Material removal rate (MRR) Surface roughness Taguchi method
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Employing SiO_2 Buffer Layer to Improve Adhesion of the Frequency-doubled Antireflection Coating on LBO
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作者 谭天亚 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2009年第6期849-851,共3页
Frequency-doubled antireflection coatings simultaneously effective at 1064 nm and 532 nm were deposited on the lithium triborate (LiB3O5 or LBO) crystals using the electron beam evaporation method. Comparing with th... Frequency-doubled antireflection coatings simultaneously effective at 1064 nm and 532 nm were deposited on the lithium triborate (LiB3O5 or LBO) crystals using the electron beam evaporation method. Comparing with the sample without buffer layer, it is found that the adhesion of the sample with buffer layer of SiO2 between coating and LBO substrate is improved significantly from 137.4 mN to greater than 200 mN. And the laser-induced damage threshold is increased by 20% from 15.1 J/cm^2 to 18.6 J/cm^2. The strengthening mechanism of adhesion of the buffer layer of SiO2 is discussed by considering full plastic indentation and shear theory. 展开更多
关键词 frequency-doubled antireflection coating lbo crystal ADHESION
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Ultra-broadband all-OPCPA petawatt facility fully based on LBO 被引量:3
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作者 Mario Galletti Pedro Oliveira +8 位作者 Marco Galimberti Munadi Ahmad Giedre Archipovaite Nicola Booth Emerald Dilworth Andy Frackiewicz Trevor Winstone Ian Musgrave Cristina Hernandez-Gomez 《High Power Laser Science and Engineering》 SCIE CAS CSCD 2020年第4期1-16,共16页
A petawatt facility fully based on noncollinear optical parametric chirped pulse amplification(NOPCPA)technology,Vulcan OPPEL(Vulcan OPCPA PEtawatt Laser),is presented.This system will be coupled with the existing hyb... A petawatt facility fully based on noncollinear optical parametric chirped pulse amplification(NOPCPA)technology,Vulcan OPPEL(Vulcan OPCPA PEtawatt Laser),is presented.This system will be coupled with the existing hybridCPA/OPCPA VULCAN laser system(500 J,500 fs beamline;250 J,ns regime beamline)based on Nd:glass amplification.Its pulse duration(20 times shorter)combined with the system design will allow the auxiliary beamline and its secondary sources to be used as probe beams for longer pulses and their interactions with targets.The newly designed system will be mainly dedicated to electron beam generation,but could also be used to perform a variety of particle acceleration and optical radiation detection experimental campaigns.In this communication,we present the entire beamline design discussing the technology choices and the design supported by extensive simulations for each system section.Finally,we present experimental results and details of our commissioned NOPCPA picosecond front end,delivering 1.5 mJ,~180 nm(1/e^(2))of bandwidth compressed to sub-15 fs. 展开更多
关键词 high-power laser lbo nonlinear crystal nonlinear optics ultra-broadband OPA ultrafast laser
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