In order to improve femtosecond laser throughput,a parallel processing system consisting of liquid crystal on silicon(LCOS)device as spatial light modulator is put forward.A method is described for displaying Fourier ...In order to improve femtosecond laser throughput,a parallel processing system consisting of liquid crystal on silicon(LCOS)device as spatial light modulator is put forward.A method is described for displaying Fourier hologram on LCOS,and a high uniformity of several diffraction peaks in the computer reconstruction is achieved.Application of this method to the parallel femtosecond laser processing is also demonstrated,and two intersecting rings and three tangent rings are fabricated respectively by one time in the photoresist.展开更多
基金National Natural Science Foundation of China(No.51275502)Natural Science Key Project of Anhui Province(No.KJ2011A014)+1 种基金China Postdoctoral Science Foundation funded project(NO.2012M511416)The Innovation Foundationof Anhui University and the Personnel Construction Project of Anhui University
文摘In order to improve femtosecond laser throughput,a parallel processing system consisting of liquid crystal on silicon(LCOS)device as spatial light modulator is put forward.A method is described for displaying Fourier hologram on LCOS,and a high uniformity of several diffraction peaks in the computer reconstruction is achieved.Application of this method to the parallel femtosecond laser processing is also demonstrated,and two intersecting rings and three tangent rings are fabricated respectively by one time in the photoresist.