Characterization of a nano line width reference material based on metrological scanning electron microscope

The line width(often synonymously used for critical dimension,CD)is a crucial parameter in integrated circuits.To accurately control CD values in manufacturing,a reasonable CD reference material is required to calibrate the corresponding instruments.We develop a new reference material with nominal CDs of 160 nm,80 nm,and 40 nm.The line features are investigated based on the metrological scanning electron microscope which is developed by the National Institute of Metrology(NIM)in China.Also,we propose a new characterization method for the precise measurement of CD values.After filtering and leveling the intensity profiles,the line features are characterized by the combination model of the Gaussian and Lorentz functions.The left and right edges of CD are automatically extracted with the profile decomposition and k-means algorithm.Then the width of the two edges at the half intensity position is regarded as the standard CD value.Finally,the measurement results are evaluated in terms of the sample,instrument,algorithm,and repeatability.The experiments indicate efficiency of the proposed method which can be easily applied in practice to accurately characterize CDs.

Diffraction Line Width in Quasicrystals—Sharper than Crystals

A quasicrystal has a structure intermediate between crystals and compound glasses. The disorder in glass makes its diffraction diffuse, so it is surprising that quasicrystals diffract more sharply than crystals. The greater sharpness is computed to be due to the hierarchic structure with unit cell alignment in 3-dimensional space. Electron microscope phase contrast images map the comparatively heavy Mn atoms in icosahedral Al6Mn, where the transition metal locates the centers of unit cells inside clusters and superclusters. Because the solid is aperiodic, each diffracted beam is a product of multiple interplanar spacings combined, and this contrasts with the unique relationship between spacing and incident angle in Bragg diffraction from crystals. Simulated quasi-structure factors add the relative phase shifts that are in geometric series from cell to cluster to superclusters of increasing order. The scattering becomes coherent in best fit, angular configuration between the aperiodic solid and a longitudinally periodic X-ray or electron probe. The quasi-structure factors express angular divergence in each diffracted beam from its corresponding Bragg condition, and the divergence provides a special metric, essential for atomic measurement in the geometric solids. The fit is reinforced at all levels from the unit cell to cluster to high order superclusters. The optics operates under a new quasi-Bragg law in a new geometric space. In this paper, we proceed to examine the effect of specimen size on line resolution in diffraction, first analytically and secondly in simulation. The line resolution follows a power law on the supercluster order, matching its atomic population.

Precise measurement of the line width of the photoassociation spectra of ultracold molecules by using a frequency shifter

We propose a technique to precisely measure the line width of the photoassociation spectra of the excited cesium molecule by using a frequency shifter to generate two laser beams with a precise frequency difference. A series of photoassociation （PA） spectra are recorded with two laser beam induced molecular lines, whose peak separation serves as an accurate frequency ruler to measure the line width of the PA spectra. The full width half maximum line width was studied as a function of PA laser intensity. The extrapolated value at zero laser intensity is （34.8± 0.22） MHz. By analyzing other broadening mechanisms, a value of （32.02 ± 0.70） MHz was deduced. It is shown that this scheme is inexpensive, simple, robust, and is promising for applications in a variety of other atomic species.

On the Vickers Microhardness and Wide-Angle X-Ray Line Width for Characterization of the Oxidative Stability of Poly(ethylene-co-propylene) Pipes

The purpose of the current study is to evaluate the ageing of poly(ethylene-co-propylene) fittings produced by several manufacturers. The fittings were aged for varying times as follows: 0, 2, 13, 23, 45, 106, 225 and 391 days at 100°C. In a previous paper, the oxidation induction time (OItime) and oxidation induction temperature (OItemp) were evaluated with respect to every single step of the ageing process [1]. Here, the Vickers microhardness and wide-angle X-ray line width were used for characterization of the oxidative stability of poly(ethylene-co-propylene) pipes. Both the Vickers microhardness and wide-angle X-ray line width as evaluated from a certain reflex of the diffractogram generally increase with ageing for most samples. The higher microhardness is most likely related to higher fragility of the pipes. The increase of the X-ray line width with ageing indirectly proves that reducing the crystallite size as well as increase of the crystallite defectiveness take place.

Variation of the Observed Widths of La I Lines with the Energy of the Upper Excited Levels, Demonstrated on Previously Unknown Energy Levels

We performed systematic laser spectroscopic investigations of La I spectral lines, using optogalvanic detection. Sixteen previously unknown even parity levels, having energies between 40,300 and 44,300 cm-1, are reported. These levels classify altogether 67 lines, not listed in spectral tables. The new levels were found due to the observation of the depopulation of the lower levels of the excited transitions. We found a remarkable variation of the observed widths of single hyperfine structure components dependent on the energy of the upper excited levels. Some levels having energies higher than 43,000 cm-1 appear to have a very high ionization probability.

钢筋锈蚀作用下隧道衬砌结构力学性能劣化研究

考虑锈蚀引起的钢筋力学性能劣化、混凝土有效截面减少、两者黏结性能退化等因素,建立围岩压力作用下钢筋锈蚀隧道衬砌模型,对不同锈蚀率下衬砌结构变形、损伤、内力重分布和裂缝宽度变化进行分析。研究结果表明,锈蚀对衬砌结构各部位损伤严重程度表现为拱顶>拱肩>拱脚>拱腰>仰拱;锈蚀引起结构内力重分布,当锈蚀率由0%发展到20%时,衬砌结构临空侧受拉处弯矩逐渐减小,围岩侧受拉处的弯矩逐渐增大,衬砌轴力整体变化不大,最大变化量仅为7.53%;拱顶裂缝宽度发展最快,拱肩和拱脚次之,当锈蚀率发展到2.7%时,拱顶最大裂缝宽度已不满足耐久性要求;开裂区钢筋锈蚀对衬砌力学性能劣化起主导作用,仅开裂区钢筋发生锈蚀时,衬砌结构力学性能劣化规律与钢筋全长锈蚀情况类似,但锈蚀导致的内力变化幅度和裂缝宽度减小。

Si/SiO_(2)多层膜线宽关键参数精细化表征技术研究

线边缘粗糙度(LER)和线宽粗糙度(LWR)是衡量线宽标准样片质量的重要指标。文中基于自溯源光栅标准物质的自溯源、高精密尺寸结构特性,提出了一种直接溯源型精确校准SEM放大倍率的方法,以实现SEM对线宽标准样片关键参数的测量与表征。利用校准后的SEM,对利用Si/SiO_(2)多层膜沉积技术制备的线宽名义值为500、200、100 nm样片进行关键参数的测量,采用幅值量化参数的均方根粗糙度RMS描述线边缘粗糙度与线宽粗糙度,并通过图像处理技术确定线边缘位置,对线宽边缘特性进行了精确表征。实验结果表明,名义值为500、200、100 nm对的线宽样片,其实测值分别为459.5、191.0、99.5 nm,σLER分别为2.70、2.35、2.30 nm,σLWR分别为3.90、3.30、2.80 nm,说明了多层膜线宽标准样片线边缘较为平整、线宽变化小、具有良好的均匀性与一致性。基于自溯源标准物质校准SEM的方法缩短了溯源链,提高了SEM的测量精度,实现了线宽及其边缘特性的精确表征,为高精度纳米尺度测量和微电子制造领域提供了计量支持。

曝光单元内线宽均匀度优化对产品工艺窗口的提升分析

阐述随着半导体工艺节点的发展,关键光刻层的最小线宽变得越来越小,由此导致图形边缘位置误差容许范围也越来越小。其中曝光单元内线宽均匀度提升受光罩制作、曝光行为等多方面影响很难控制,导致很多产品在良率验证时出现在Field固定位置发生失效的问题。为此,探讨在28nm HKC+工艺的产品上使用不同的补偿方式优化曝光单元内线宽均匀度,旨在寻找快速高效的补偿方式降低Intra-field CDU,提升图形工艺的工艺窗口。

Comparison experiments of neon and helium buffer gases cooling in trapped ^(199)Hg^+ ions linear trap

The influences of different buffer gas, neon and helium, on 199^Hg^＋ clock transition are compared in trapped 199^Hg^＋ linear trap. By the technique of time domain＇s Ramsey separated oscillatory fields, the buffer gas pressure frequency shifts of 199^Hg^＋ clock transition are measured to be （df/dPNe）（1/f） = 1.8 × 10^-8 Torr^-1 for neon and （df/dPHe） （1/f） = 9.1 × 10^-8 Torr^-1 for helium. Meanwhile, the line-width of 199^Hg^＋ clock transition spectrum with the buffer gas neon is narrower than that with helium at the same pressure. These experimental results show that neon is a more suitable buffer gas than helium in 199^Hg^＋ ions microwave frequency standards because of the 199^Hg^＋ clock transition is less sensitive to neon variations and the better cooling effect of neon. The optimum operating pressure for neon is found to be about 1.0 × 10^-5 Torr in our linear ion trap system.

一种可降低Littman-Metcalf光栅外腔半导体激光器衍射损耗的结构设计

基于原有Littman-Metcalf型光栅外腔半导体激光器的工作原理,设计了一种可以降低衍射损耗的外腔结构。在Littman-Metcalf结构的基础上增加一个反射镜,将闪耀光栅二次衍射产生的零级衍射光反馈回半导体激光器本征腔。推导了新结构模型外腔损耗的表达式,通过等效腔的概念对两种结构激光器的外腔损耗、阈值电流、输出线宽以及输出功率进行了仿真分析。结果表明:将二次衍射产生的零级光反馈回有源区可有效降低Littman-Metcalf结构激光器的外腔损耗,提高了系统的耦合效率,从而降低阈值电流,提高了激光器的输出功率。同时,由于提高了外腔反射效率,该外腔结构进一步压窄激光器的输出线宽。对影响低损耗Littman-Metcalf外腔激光器输出线宽以及输出功率的因素(端面反射率、内外腔长、闪耀光栅衍射效率以及反射镜反射率等)也进行了仿真分析,为后期激光器制作提高了理论指导。

Research on Total Electric Field for DC Lines Converted from Double-Circuit AC Lines

With rapid growth of power demand, transmission capacity is also in urgent need of upgrading. In some cases, converting existing AC transmission lines to DC lines can Improve the transmission capacity and reduce the construction investment. In this paper, the upstream finite element method was expanded to calculate the total electric field of same tower multi-circuit DC lines converted from double-circuit AC lines, and the validity of the algorithm was confirmed by experiments. Taking a DC line converted from a typical same tower 500 kV double-circuit AC transmission line as an example, the surface electric field and the ground total electric field in different pole conductor arrangement schemes were calculated and analyzed, and the critical height of pole conductors for DC lines in residential and non-residential area were determined. Then, the corridor width of DC and AC lines at critical height in residential and non-residential areas before and after AC-DC line transformation were compared. The results indicate that for DC lines converted from common 500 kV double-circuit AC lines, the ground total electric field can meet the requirements of corresponding standard with appropriate pole conductor arrangement schemes.

复合型高深宽比沟槽标准样板

硅基MEMS器件中存在大量高深宽比结构,对这些结构进行线宽和深度的无损检测,是当前的热点问题。为了实现对这些高深宽比结构无损测量系统的准确校准,采用半导体工艺研制了一系列高深宽比沟槽标准样板,宽度范围2~30μm、深度范围10~300μm,其深宽比最大达到30∶1。为了满足样板的校准功能,设计了多种特征结构,包括辅助定值结构、测量定位结构和定位角结构等,还设计了样板量值的表征与考核方法。考核量值包括线宽尺寸、沟槽深度尺寸和均匀性。使用扫描电镜对标准样板进行了测试,结果表明该标准样板可以用于校准近红外宽光谱干涉显微测量系统。

烟草叶宽性状主效QTL定位及育种评价

为研究烟草叶宽性状调控的遗传规律,定位其主效QTL位点,利用烟草SNP芯片对构建的重组自交系(Recombinant Inbred Lines, RILs)群体(小黄金1025×Beinhart1000-1)进行基因分型,并使用IciMapping 4.2软件的ICIM-ADD方法在全基因组范围内定位到6个与叶宽性状相关的QTL,分别位于2、4、9、13、17和20号连锁群上,可以解释2.9%~36.8%的表型遗传变异;其中qMLW20-1可解释36.8%的表型变异,为主效基因。以K326为轮回亲本、Samsun为主效基因qMLW20-1供体亲本构建染色体片段代换系评估烟草叶宽主效QTL的遗传效应,结果表明,导入qMLW20-1主效基因能显著提高烟叶叶宽,其中G3材料显著提高了烟叶钾含量,感官质量等其他重要性状与对照无显著性差异,未携带不良性状基因,具有较好的育种利用价值。研究结果为克隆叶宽性状主效基因和进行分子改良奠定了基础。

基于相位调制等效展宽激光线宽的极低相噪光电振荡器

光电振荡器是一种采用光电结合方式的新型微波频率源,其利用光学长时储能,可以实现极低相位噪声的信号输出。文章研究了光纤中散射噪声对光电振荡器相位噪声的影响,重点介绍了基于相位调制等效展宽激光线宽,抑制布里渊散射噪声架构,通过理论公式推导以及实验验证,表明了上述架构可极大改善光电振荡器的相位噪声。实验中采用调制频率为50 MHz、调制幅度为3.1的相位调制信号对激光线宽进行等效展宽,得到在10 GHz频率下为-157.3 dBc/Hz@10 kHz的极低相位噪声信号输出。

基于3×3干涉仪和相位信号解调的信号采样对激光噪声的影响

提出了一种基于3×3耦合器的非平衡迈克尔逊干涉仪和相位信号解调的激光器线宽测量系统,基于相位信号解调的微分交叉相乘算法,可对所采信号进行高速实时处理,快速给出待测激光器的频率噪声信息和线宽值。该系统光路结构简单,无须主动控制,测量结果重复性高。考虑采样信号是否同时包含源信号的最大值和最小值这一重要问题,在仿真和实验两种情况下着重讨论了对源信号进行采样窗口为0.5,0.4,0.1,0.05和0.01 s的采样对所测试激光器频率噪声功率谱密度的影响。仿真和实验均表明,使用采样窗口为0.1,0.05和0.01 s未同时包含源信号的最大值和最小值的采样信号计算获得的激光频率噪声功率谱密度幅值偏高。进一步使用β-分割线法对1.5μm波段商用激光器和实验室自制的2μm波段激光器进行线宽测量验证,结果表明,使用同时包含源信号最大值和最小值的采样信号处理得到1.5μm波段商用激光器的线宽值在测量时间为2 ms时为5 kHz,同时本结论可拓展至全波段适用。

梅钢1号板坯连铸机改造实践

梅山钢铁1号板坯连铸机改造前以生产低碳钢为主,且近些年产量不足60万t/a。为适应公司“规模精品化,精品规模化”的发展定位,满足产品结构向高端钢种发展的需求,中冶赛迪承担了1号板坏连铸机的改造任务。介绍了中冶赛迪在板坯表面质量、内部质量和高效化3个方面所做的优化。通过优化二冷分区,配置三维动态二冷模型,优化扇形段结构,实施动态轻压下、结晶器在线热调宽,铸流热跟踪和高拉速技术,设备运行安全、稳定、可靠,即使在所生产钢种难度大幅增加的前提下,铸坯质量亦大幅提升,角部裂纹发生率降低80%。内部裂纹评级优化提升14.6%,三角区裂纹评级优化提升20.4%,内部偏析曼标评级优化提升11.2%,低碳钢稳定拉速达到1.8 m/min,年产量达220万t。同时可为国内同类型连铸机改造升级提供借鉴。

基于R_(24)过不动点理论的线宽测量技术

在基于TDLAS技术的温度反演中,吸收分子线宽的准确性对流场参数测量精度影响较大。论文基于吸收光谱理论的波长调制法研究了低吸收情况下二次与四次谐波系数之比与调制系数的关系,在该关系中推知谐波通项表达式,根据该表达式仿真得到一个不动点,利用该点特征得出线宽在线测量算法。为了验证该算法,在实验条件下,采用H_(2)O分子在6807.835cm^(-1)附近的吸收谱线进行数值分析和仿真实验;同时考虑到检测系统的简化以及测量成本问题,提出基于不动点采用多项式拟合对H_(2)O分子吸收光谱求线宽,实验结果表明,五次拟合与传统的2f/1f免标法测得的线宽结果误差在5%以内,该算法降低了测量成本,进一步提高了气体参数测量精度。

高温条件下光谱线型模型对光谱反演的影响分析

针对高温条件下光谱高精度反演的需求,对比分析了7种不同的光谱线型模型在光谱反演中的精度和稳定性,并发展了适用于高温诊断的光谱线型选择策略。首先测量了1100~1600 K温度范围的两条H 2O吸收光谱,采用七种不同的光谱线型模型分别进行分析,获取了各测量光谱的积分吸光度,速度依赖线宽和多普勒半高宽,并根据双线比值法计算气体温度值。对比分析表明,在高温常压条件下,Gaussian线型拟合精度最差,但通过Gaussian线型反演的气体温度精度最高;光谱拟合过程中,通过设置线型模型中的多普勒半高宽参数为已知量,能有效提高光谱线参数的反演稳定性和精度,也能有效提高各光谱线型温度反演精度。与高阶非Voigt线型(Speed-dependent Voigt线型,Rautian线型,Speed-dependent Rautian线型和Hartman-Tran线型)对比,Voigt线型获取的积分吸光度和速度依赖线宽偏小,计算的温度结果相对误差偏大。最后,对比了7种线型模型拟合程序的运行时间,在保证精度的条件下,Speed-dependent Voigt线型拟合速度最快。因此,通过Gaussian线型获取气体温度,然后根据温度计算多普勒半高宽参数并将其固定为已知量,采用Speed-dependent Voigt线型拟合能有效提高高温光谱的反演精度,速度和稳定性。

基于片上微腔自反馈注入锁定的窄线宽激光器

对半导体激光器外腔自反馈注入锁定进行了理论分析,研究了片上微腔的自反馈注入锁定对于分布反馈(DFB)激光器输出线宽的影响,分析了决定锁定带宽及线宽压缩系数的关键参数。基于Q值为2.4×10~6的片上Si_(3)N_(4)微腔的后向瑞利散射实现了DFB激光器的自反馈注入锁定,将其输出线宽由自由运转时的556.71 kHz压窄到了92.28 kHz,锁定带宽达到425 MHz。研究结果有助于理解半导体激光器自反馈注入锁定机理,并为实现窄线宽激光器提供了新的结构更简单、集成化潜力更高的方案。

不锈钢管子与管板强度胀接性能对比研究

为了使换热管与管板接头获得更好的密封性能及拉脱强度,分析对比了液压胀和机械胀对不锈钢强度胀接头的性能影响及不同槽宽的机械胀对不锈钢接头的性能影响。3块S30408试件管板孔内分别加工宽度为3,4,9 mm的两道胀槽,窄槽采用机械胀,宽槽采用液压胀,对比胀接后的胀度、氦检密封性、拉脱应力及解剖线宽。试件经过漏率为1×10^(-6)(Pa·m^(3))/s的氦检全部合格,拉脱应力超出标准要求的4 MPa。试验结果表明机械胀胀度不稳定、容易过胀,槽宽4 mm和3 mm的机械胀接头的性能差别不明显,液压强度胀接头综合性能更优。