We report a wavelength and power monitoring system based on a scanning MEMS filter as wavelength discriminator and a near threshold-biased Fabry-Perot diode laser as wavelength reference. This system is capable of mon...We report a wavelength and power monitoring system based on a scanning MEMS filter as wavelength discriminator and a near threshold-biased Fabry-Perot diode laser as wavelength reference. This system is capable of monitoring 250 channels of DWDM signal at 25 GHz ITU Grid with an error of less than ±8 pm.展开更多
This paper presents and analyzes a notch observed in MEMS （micro electric mechanical system） filter characterization using the difference method. The difference method takes advantage of the cancellation of parasiti...This paper presents and analyzes a notch observed in MEMS （micro electric mechanical system） filter characterization using the difference method. The difference method takes advantage of the cancellation of parasitic feed-through, which could potentially obscure the relatively small motional signal and lead to failure in character- ization of the MEMS components. In this paper, typical clamped-clamped beam MEMS filters are fabricated and characterized with the difference method. Using the difference method a better performance is obtained but a notch is induced as a potential problem. Analysis is performed and reveals the mismatch of the two differential excitation signals in measurement circuit contributes to the notch. The relevant circuit design rule is also proposed to avoid the notch in the difference method.展开更多
文摘We report a wavelength and power monitoring system based on a scanning MEMS filter as wavelength discriminator and a near threshold-biased Fabry-Perot diode laser as wavelength reference. This system is capable of monitoring 250 channels of DWDM signal at 25 GHz ITU Grid with an error of less than ±8 pm.
基金Project supported by the National Natural Science Foundation of China(Nos.61274001,61006073,61234007)the National Hi-Tech Research and Development Program of China(No.2006AA04Z339)
文摘This paper presents and analyzes a notch observed in MEMS （micro electric mechanical system） filter characterization using the difference method. The difference method takes advantage of the cancellation of parasitic feed-through, which could potentially obscure the relatively small motional signal and lead to failure in character- ization of the MEMS components. In this paper, typical clamped-clamped beam MEMS filters are fabricated and characterized with the difference method. Using the difference method a better performance is obtained but a notch is induced as a potential problem. Analysis is performed and reveals the mismatch of the two differential excitation signals in measurement circuit contributes to the notch. The relevant circuit design rule is also proposed to avoid the notch in the difference method.
