New digital drive phase control for improving bias stability of silicon MEMS gyroscope

In order to improve the bias stability of the micro-electro mechanical system（MEMS） gyroscope and reduce the impact on the bias from environmental temperature,a digital signal processing method is described for improving the accuracy of the drive phase in the gyroscope drive mode.Through the principle of bias signal generation,it can be concluded that the deviation of the drive phase is the main factor affecting the bias stability.To fulfill the purpose of precise drive phase control,a digital signal processing circuit based on the field-programmable gate array（FPGA） with the phase-lock closed-loop control method is described and a demodulation method for phase error suppression is given.Compared with the analog circuit,the bias drift is largely reduced in the new digital circuit and the bias stability is improved from 60 to 19 °/h.The new digital control method can greatly increase the drive phase accuracy,and thus improve the bias stability.

Robust fault detection filter and its application in MEMS-based INS/GPS

Since any disturbance and fault may lead to significant performance degradation in practical dynamical systems,it is essential for a system to be robust to disturbances but sensitive to faults.For this purpose,this paper proposes a robust fault-detection filter for linear discrete time-varying systems.The algorithm uses H∞ estimator to minimize the worst possible amplification from disturbances to estimate errors,and H_ index to maximize the minimum effect of faults on the residual output of the filter.This approach is applied to the MEMS-based INS/GPS.And simulation results show that the new algorithm can reduce the effect of unknown disturbances and has a high sensitivity to faults.

基于MEMS加速度计的强振动记录黑匣子的设计

设计基于MEMS加速度传感器的一种强震记录黑匣子,采用SOC系列C8051F005型单片机对MEMS加速度传感器的输出信号进行A/D转换,记录该设备安装点位所经受的强振加速度值,并通过LCD16032显示一分钟内的振动加速度峰值。该系统具有体积小、安装与操作方便、免维护等特性。

Research on technology cluster evolution of global MEMS sensors based on patent co-occurrence analysis

At present, microelectro mechanical systems (MEMS) sensors have gradually replaced traditional mechanical sensors and are applied to several fields. Many developed countries pay high attention to technological innovation of MEMS sensors, and have applied a large number of patents since 2000. In this study, the patents of MEMS sensor from 2000 to 2015 are researched, the patents data is collected from Derwent Innovation Index (DII), and the method of co-classification analysis is used to investigate the technology cluster evolution of MEMS sensors. Results show that the technology diffusion occurrs in each technical field and the technology relevance between different technical fields is changed over time. On the whole, the evolution process of MEMS sensor is the manufacture and material of sensor chip, the electronic components and measuring function, the computing and control technology, and applications to biochemical field and communication.

Noise estimation and filtering method of MEMS gyroscope based on EMMAP

Aiming at the problems of low measurement accuracy,uncertainty and nonlinearity of random noise of the micro electro mechanical system(MEMS)gyroscope,a gyroscope noise estimation and filtering method is proposed,which combines expectation maximum(EM)with maximum a posterior(MAP)to form an adpative unscented Kalman filter(UKF),called EMMAP-UKF.According to the MAP estimation principle,a suboptimal unbiased MAP noise statistical estimation model is constructed.Then,EM algorithm is introduced to transform the noise estimation problem into the mathematical expectation maximization problem,which can dynamically adjust the variance of the observed noise.Finally,the estimation and filtering of gyroscope random drift error can be realized.The performance of the gyro noise filtering method is evaluated by Allan variance,and the effectiveness of the method is verified by hardware-in-the-loop simulation.

Application of Micro Electro Mechanical System(MEMS)Technology in Photoacoustic Imaging

Photoacoustic imaging(PAI)is a new biomedical imaging technology that provides a mixed contrast mechanism and excellent spatial resolution in biological tissues.It is a non-invasive technology that can provide in vivo anatomical and functional information.This technology has great application potential in microscopic imaging and endoscope system.In recent years,the devel-opment of micro electro mechanical system(MEMS)technology has promoted the improvement and miniaturization of the photoacoustic imaging system,as well as its preclinical and clinical appli-cations.This paper introduces the research progress of MEMS technology in photoacoustic micro-scope systems and the miniaturization of photoacoustic endoscope ultrasonic transducers,and points out the shortcomings of existing technology and the direction of future development.

Real-Time, Automatic and Wireless Bridge Monitoring System Based on MEMS Technology

Currently, the monitoring of bridges in China heavily relies on manual operation, which has several major problems. It generally takes a very long time to complete an inspection process on bridges. The manual data is sometimes unreliable or even wrong in the case of careless operation. The inspection activity itself is dangerous for inspectors, e.g., bridges are located in the sea or river. Some semi-automatic monitoring methods are recently employed, but they are either very expensive or do not work properly. Therefore, the traditional bridge monitoring process becomes an increasing challenge for bridge operators. In this paper, a real-time and automatic bridge monitoring system is presented to meet the bridge monitoring needs, and MEMS （Micro Electro Mechanical Systems） are the key building block in this system. By using the MEMS-based sensors, it is much more efficient and accurate in monitoring bridges with the measurement of inclination, acceleration, displacement, moisture, temperature, stress and other data.

Study on Energy Stored in Thin Layers of MEMS Ultrasonic Resonance Separator

The particles suspending in liquid suffer acoustical radiation force from ultrasonic field. The force may cause particles movement and has special advantage to separate particles from liquid in Micro Electro Mechanical Systems （MEMS）. It is important to improve the energy stored in liquid layer so as to increase separation ability for decreasing drive demand in MEMS. Resonance may hugely increase the magnitude and generally be employed in micro separator. The summits of admittance spectrum show the resonance frequencies. It may come from resonance in one layer or multi layers in micro separator. This paper studies the difference of energy stored in layers at each rein frequency. It provides the way to select the most effect separation frequency other than admittance spectrum.

压电多层膜悬臂梁受力的有限元仿真

采用有限元软件ABAQUS6.14对压电多层膜悬臂梁进行了仿真模拟,在自由端受集中载荷下,预测薄膜结构对悬臂梁曲率半径和自由端及中心固定端等效应力的影响。结果表明自由端受到的载荷越大,则各层所对应的自由端和中心固定端的等效应力越大,而中性层曲率半径则越小。薄膜厚度越厚,自由端和固定端各层的等效应力越小,而各层的中性层曲率半径越大。同时将数值解与解析解进行比较,以验证有限元模型的正确性。仿真结果与解析解吻合良好,为后续MEMS微悬臂梁器件的结构优化和加工工艺提供可靠依据。

运用研磨和化学机械抛光技术制备高品质的石英薄膜

石英薄膜的质量是决定各种石英基底的微纳器件品质高低的关键所在。阐述如何运用研磨和化学机械抛光CMP(Chemical&Mechanical Polishing)技术获得高品质石英薄膜的方法。由于石英属于高硬度材料,选用金刚石研磨液和球墨铸铁研磨盘对石英衬底进行研磨,以获得较高的研磨速率和较好的研磨后的表面粗糙度。在石英CMP中,采用特殊的"两步抛"工艺,对衬底进行抛光。第一步粗抛抛光液采用金刚石颗粒直径为0.3μm的研磨液与SiO2颗粒直径为50 nm的抛光液相混合,第二步精抛只采用SiO2的抛光液。实验结果表明,采用上述技术,可以获得高品质的石英薄膜,厚度为(25.1±3.2)μm,表面粗糙度约为0.89 nm(RMS)。

Measuring In-Plane Micro-Motion of Micro-Structure Using Optical Flow

Optical flow method is one of the most important methods of analyzing motion images. Optical flow field is used to analyze characteristics of motion objects. According to motion features of micro-electronic mechani-cal system (MEMS) micro-structure, the optical algorithm based on label field and neighborhood optimization is presented to analyze the in-plane micro-motion of micro-structure. Firstly, high speed motion states for each fre-quency segment of micro-structure in cyclic motion are frozen based on stroboscopic principle. Thus a series of dynamic images of micro-structure are obtained. Secondly, the presented optical algorithm is used to analyze the image sequences, and can obtain reliable and precise optical field and reduce computing time. As micro-resonator of testing object, the phase-amplitude curve of micro-structure is derived. Experimental results indicate that the meas-urement precision of the presented algorithm is high, and measurement repeatability reaches 40 nm under the same experiment condition.

Barom etric altim eter in wireless com m unication network indoor positioning system

A differential barometric altimetry technology based on the digital pressure sensors is put forward by using the existing mobile phone base station as reference. The height of known base sta- tion is precise. The pressure and temperature of the known base station is measured by sensors and transmitted to users. The absolute height value of user will be calculated by combining the baromet- ric pressure values and temperature values from the base station with the locally measured values. In order to decrease system errors caused by inconsistency between the measured pressure value at base station and the locally measured pressure value, weights correction is applied based on multiple reference stations. The calculated height value is accurate due to eliminating the measured errors caused by irregular changes of atmospheric pressure, with the error less than 1 m. Resolution of ele- vation positioning depends upon the resolution of the pressure sensor, the relationship between which is approximately linear. When the resolution of sensor is 0.01 hPa, the resolution of elevation positioning is about 0. 1 m. In addition, the data frame format at base station is designed in this arti- cle. Experimental results show that the method is accurate, reliable, stable and has the ability to distinguish floors and stair steps.

Integration of Strain Sensors on Additively Manufactured Implantable Devices

The development of personalized healthcare is rapidly growing thanks to the support of low-power electronics,advanced fabrication processes and secured data transmission protocols.Long-acting drug delivery systems able to sustain the release of therapeutics in a controllable manner can provide several advantages in the treatment of chronic diseases.Various systems under development control drug release from an implantable reservoir via concentration driven diffusion through nanofluidic membranes.Given the high drug concentration in the reservoir,an inward osmotic fluid transport occurs across the membrane,which counters the outward diffusion of drugs.The resulting osmotic pressure buildup may be sufficient to cause the failure of implants with associated risks to patients.Confidently assessing the osmotic pressure buildup requires testing in vivo.Here,using metal and polymer AM(additive manufacturing)processes,we designed and developed implantable drug reservoirs with embedded strain sensors to directly measure the osmotic pressure in drug delivery implants in vitro and in vivo.

An improved noise reduction transformation for algorithm based on wavelet MEMS gyroscope

To solve the large noise problem for the low- precision gyroscopes in micro-electro mechanical systems （MEMS） of inertial navigation system, an improved noise reduction method, based on the analyses of the fast Fourier transformation （FFT） noise reduction principle and the simple wavelet noise reduction principle, was proposed. Furthermore, the FFT noise reduction method, the simple wavelet noise reduction method and the improved noise reduction method were comparatively analyzed and experimentally verified in the case of the constant rate and dynamic rate. The experimental analysis results showed that the improved noise reduction method had a very good result in the noise reduction of the gyroscope data at different fi：equencies, and its performance was superior to those of the FFT noise reduction method and the simple wavelet noise reduction method.

MEMS-Based Low-Cost Flight Control System for Small UAVs

Small unmanned air vehicles （UAVs） can be used for various kinds of surveillance and data collection missions. The UAV flight control system is the key to a successful mission. This paper describes a low-cost micro-electro mechanical system-based flight control system for small UAVs. The integrated hardware flight control system weighs only 24 g. The system includes a highly-integrated wireless transmission link, which is lighter than traditional links. The flight control provides altitude hold control and global positioning system navigation based on gain scheduling proportional-integral-derivative control. Flight tests to survey the grass quality of a large lawn show that the small UAV can fly autonomously according to a series of pre-arranged waypoints with a controlled altitude while the wireless video system transmits images of the surveillance target to a ground control station.

Computer Aided Modeling for a Miniature Silicon-on-Insulator MEMS Piezoresistive Pressure Sensor

The silicon-on-insulator diaphragm structure is a combined structure of the silicon dioxide and silicon layer. This work presents a new method to estimate the deflection response of silicon with that of a silicon-on-insulator （SOI） diaphragm structure, based on the burst pressure design approach. It also evaluates the output voltage of the diaphragm under two different conditions, flipped and un-flipped. The new modified analytical model developed and presented in this paper for describing the load deflection of SOI diaphragm is able to predict the deflection accurately when compared with the results obtained by finite element analysis CoventorWare~.

Wafer-level SLID bonding for MEMS encapsulation

Hermetic packaging is often an essential requirement to enable proper functionality throughout the device＇s lifetime and ensure the optimal performance of a micro electronic mechanical system （MEMS） device. Solid-liquid interdiffusion （SLID） bonding is a novel and attractive way to encapsulate MEMS devices at a wafer level. SLID bonding utilizes a low-melting-point metal to reduce the bonding process temperature; and metallic seal rings take out less of the valuable surface area and have a lower gas permeability compared to polymer or glass- based sealing materials. In addition, ductile metals can adopt mechanical and thermo-mechanical stresses during their service lifetime, which improves their reliability. In this study, the principles of Au-Sn and Cu-Sn SLID bonding are presented, which are meant to be used for wafer-level hermetic sealing of MEMS resonators. Seal rings in 15.24 cm silicon wafers were bonded at a width of 60 gin, electroplated, and used with Au-Sn and Cu-Sn layer structures. The wafer bonding temperature varied between 300 ℃ and 350 ℃, and the bonding force was 3.5 kN under the ambient pressure, that is, it was less than 0.1 Pa. A shear test was used to compare the mechanical properties of the interconnections between both material systems, in addition, important factors pertaining to bond ring design are discussed according to their effects on the failure mechanisms. The results show that the design ofmetal structures can significantly affect the reliability of bond rings.

Application of Novel Rotation Angular Model for 3D Mouse System Based on MEMS Accelerometers

A new scheme is proposed to model 3D angular motion of a revolving regular object with miniature, low-cost micro electro mechanical systems(MEMS) accelerometers(instead of gyroscope),which is employed in 3D mouse system.To sense 3D angular motion,the static property of MEMS accelerometer,sensitive to gravity acceleration,is exploited.With the three outputs of configured accelerometers,the proposed model is implemented to get the rotary motion of the rigid object.In order to validate the effectiveness of the proposed model,an input device is developed with the configuration of the scheme.Experimental results show that a simulated 3D cube can accurately track the rotation of the input device.The result indicates the feasibility and effectiveness of the proposed model in the 3D mouse system.

Attitude Determination for MAVs Using a Kalman Filter

This paper presents a Kalman filter to effectively and economically determine the Euler angles for micro aerial vehicles （MAVs）, whose size and payload are severely limited. The filter uses data from a series of micro-electro mechanical system sensors to determine the selected 3 variables of the direction cosine matrix and the bias of the rate gyro sensors as state elements in a dynamic model, with the gravitational acceleration to build a measurement model. For high speed maneuvers, rigid motion equations are used to correct the measurements of the gravitational acceleration. The filter is designed to automatically tune its gain based on the dynamic system state. Simulations indicate that the Euler angles can be determined with standard deviations less than 3°. The algorithm was successfully implemented in a miniature attitude measurement system suitable for MAVs. Aerobatic flights show that the attitude determination algorithm works effectively. The attitude determination algorithm is effective and economical, and can also be applied to bionic robofishs and land vehicles, whose size and payload are also greatly limited.

Preparation and characterization of three-dimensional micro-electrode for micro-supercapacitor based on inductively coupled plasma reactive etching technology

The capacity of supercapacitor charge storage depends on the size of the electrode surface area and the active material on the electrodes.To enhance the charge storage capacity with a reduced volume,silicon is used as the electrode material,and three-dimensional electrode structure is prepared to increase the electrode surface area on the footprint area by inductively coupled plasma reactive etching(ICP) techniques.The anodic constant current deposition method is employed to deposit manganese oxide on the electrode surface as the electroactive material.For comparison,samples without slot are prepared with a two-dimensional electrode.Scanning Electron Microscopy(SEM) and Energy Dispersive Spectroscopy(EDS) are used to characterize the surface morphology of the electrode structure and the deposited electroactive material.Electrochemical properties of the electrode are characterized by the cyclic voltammetry(CV) and the constant current charge-discharge method.Experimental results show that our approach can effectively increase the electrode surface area with more electroactive substances,and hence can increase storage capacity of the micro-supercapacitor.