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Polyimide Humidity Integrated Sensor Fabricated Using the MEMS Process
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作者 Dianzhong Wen 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2006年第A03期361-362,共2页
This paper reports on the fabrication and sensing characteristics of Polyimide-based humidity sensor,based on that,a new integrated circuit of humidity measurement has been designed.It is a novel capacitive-type syste... This paper reports on the fabrication and sensing characteristics of Polyimide-based humidity sensor,based on that,a new integrated circuit of humidity measurement has been designed.It is a novel capacitive-type systems on a chip structure using the MEMS process.The results show that the new sensor presents sensing characteristics over a humidity range from 10%~70% RH at 20℃,and the sensor is able to fabricated together with ICs technology.The result shows that integration of humidity sensor with integrated circuit of humidity measurement is considerably easier when they are built in sensing groove.The appeal of a new structure like this brings the possibility of applications that would require the flexibility of simple screen printing. 展开更多
关键词 polyimide film humidity sensor mems process IC fabrication humidity integrated sensor
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Flexible PDMS-based triboelectric nanogenerator for instantaneous force sensing and human joint movement monitoring 被引量:20
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作者 Junbin Yu Xiaojuan Hou +5 位作者 Min Cui Shuzheng Shi Jian He Yawei Sun Chao Wang Xiujian Chou 《Science China Materials》 SCIE EI CSCD 2019年第10期1423-1432,共10页
Flexible wearable sensors with excellent electric response and self-powered capability have become an appealing hotspot for personal healthcare and human-machine interfaces.Here,based on triboelectric nanogenerator(TE... Flexible wearable sensors with excellent electric response and self-powered capability have become an appealing hotspot for personal healthcare and human-machine interfaces.Here,based on triboelectric nanogenerator(TENG),a flexible self-powered tactile sensor composed of micro-frustum-arrays-structured polydimethylsiloxane(PDMS)film/copper(Cu)electrodes,and poly(vinylidenefluoride-trifluoroethylene)(P(VDF-TrFE))nanofibers has been demonstrated.The TENG-based self-powered tactile sensor can generate electrical signals through the contact-separation process of two triboelectric layers under external mechanical stimuli.Due to the uniform and controllable micro-frustum-arrays structure fabricated by micro-electro-mechanical system(MEMS)process and the P(VDF-TrFE)nanofibers fabricated by electrostatic spinning,the flexible PDMS-based sensor presents high sensitivity of 2.97 V kPa^-1,stability of 40,000 cycles(no significant decay),response time of 60 ms at 1 Hz,low detection pressure of a water drop(~4 Pa,35 mg)and good linearity of 0.99231 in low pressure region.Since the PDMS film presents ultra-flexibility and excellent-biocompatibility,the sensor can be comfortably attached on human body.Furthermore,the tactile sensor can recognize various types of human body movements by the corresponding electrical signals.Therefore,the as-prepared TENGs are potential on the prospects of gesture detection,health assessment,human-machine interfaces and so on. 展开更多
关键词 SELF-POWERED triboelectric nanogenerator wearable sensor mems process personal healthcare
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