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Improved performance of 4H-SiC metal-semiconductor field-effect transistors with step p-buffer layer
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作者 邓小川 张波 +2 位作者 张有润 王易 李肇基 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第1期584-588,共5页
An improved 4H-SiC metal-semiconductor field-effect transistors (MESFETs) with step p-buffer layer is proposed, and the static and dynamic electrical performances are analysed in this paper. A step p-buffer layer ha... An improved 4H-SiC metal-semiconductor field-effect transistors (MESFETs) with step p-buffer layer is proposed, and the static and dynamic electrical performances are analysed in this paper. A step p-buffer layer has been applied not only to increase the channel current, but also to improve the transconductance. This is due to the fact that the variation in p-buffer layer depth leads to the decrease in parasitic series resistance resulting from the change in the active channel thickness and modulation in the electric field distribution inside the channel. Detailed numerical simulations demonstrate that the saturation drain current and the maximum theoretical output power density of the proposed structure are about 30% and 37% larger than those of the conventional structure. The cut-off frequency and the maximum oscillation frequency of the proposed MESFETs are 14.5 and 62 GHz, respectively, which are higher than that of the conventional structure. Therefore, the 4H-SiC MESFETs with step p-buffer layer have superior direct-current and radio-frequency performances compared to the similar devices based on the conventional structure. 展开更多
关键词 4H-SIC metal-semiconductor field-effect transistors step buffer laver
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Effects of gate-buffer combined with a p-type spacer structure on silicon carbide metal semiconductor field-effect transistors
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作者 Song Kun Chai Chang-Chun +3 位作者 Yang Yin-Tang Chen Bin Zhang Xian-Jun Ma Zhen-Yang 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第1期426-432,共7页
An improved structure of silicon carbide metal-semiconductor field-effect transistors (MESFET) is proposed for high power microwave applications. Numerical models for the physical and electrical mechanisms of the de... An improved structure of silicon carbide metal-semiconductor field-effect transistors (MESFET) is proposed for high power microwave applications. Numerical models for the physical and electrical mechanisms of the device are presented, and the static and dynamic electrical performances are analysed. By comparison with the conventional structure, the proposed structure exhibits a superior frequency response while possessing better DC characteristics. A p-type spacer layer, inserted between the oxide and the channel, is shown to suppress the surface trap effect and improve the distribution of the electric field at the gate edge. Meanwhile, a lightly doped n-type buffer layer under the gate reduces depletion in the channel, resulting in an increase in the output current and a reduction in the gate-capacitance. The structural parameter dependences of the device performance are discussed, and an optimized design is obtained. The results show that the maximum saturation current density of 325 mA/mm is yielded, compared with 182 mA/mm for conventional MESFETs under the condition that the breakdown voltage of the proposed MESFET is larger than that of the conventional MESFET, leading to an increase of 79% in the output power density. In addition, improvements of 27% cut-off frequency and 28% maximum oscillation frequency are achieved compared with a conventional MESFET, respectively. 展开更多
关键词 silicon carbide metal-semiconductor field-effect transistor p-type spacer gate-buffer
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等平面化SiC MESFET的研制 被引量:2
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作者 杨霏 陈昊 +8 位作者 潘宏菽 默江辉 商庆杰 李亮 闫锐 冯震 杨克武 蔡树军 姚素英 《微纳电子技术》 CAS 2008年第8期440-443,483,共5页
在原有设计以及工艺的基础上,采用了器件表面等平面化处理及侧壁钝化工艺,器件工作电压大幅度提高,截止漏电流降低约两个数量级,跨导提高1.5mS/mm。2GHz下测试,微波功率附加效率提高10%左右,增益平均提高了2dB,在VDS=60V的条件下单管功... 在原有设计以及工艺的基础上,采用了器件表面等平面化处理及侧壁钝化工艺,器件工作电压大幅度提高,截止漏电流降低约两个数量级,跨导提高1.5mS/mm。2GHz下测试,微波功率附加效率提高10%左右,增益平均提高了2dB,在VDS=60V的条件下单管功率输出达到了86.5W。经过内匹配和功率合成研制成大功率的SiC脉冲功率管的综合性能较好,在250W的输出功率下,器件仍然保持高达10.5dB的高增益,功率附加效率30%。台阶仪和扫描电镜观测表明,台阶高度已经大大降低,侧壁得到了钝化,尖锐突起和凹坑都已经变得平缓。 展开更多
关键词 碳化硅(SIC) 金属消特基势垒场效应晶体管 高增益 功率附加效率 大功率 等平面化 侧壁钝化
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基于各向异性导电膜的射频SP8T开关无损测试
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作者 睢林 曹咏弘 +3 位作者 王耀利 张凯旗 张翀 程亚昊 《半导体技术》 北大核心 2024年第1期97-102,共6页
为了解决射频器件无损测试的难点,基于各向异性导电膜Z轴(ACF-Z)连接结构,设计并实现了射频器件无损测试技术。针对表面贴装式GaAs金属半导体场效应晶体管(MESFET)单刀八掷(SP8T)开关,该测试技术使用ACF-Z轴连接结构实现器件与测试板的... 为了解决射频器件无损测试的难点,基于各向异性导电膜Z轴(ACF-Z)连接结构,设计并实现了射频器件无损测试技术。针对表面贴装式GaAs金属半导体场效应晶体管(MESFET)单刀八掷(SP8T)开关,该测试技术使用ACF-Z轴连接结构实现器件与测试板的无损连接,通过矢量网络分析仪对GaAs MESFET SP8T开关性能进行测试,最多可同时测试SP8T开关的8个通道。测试结果显示,1~8 GHz内,器件的插入损耗为-15~-35 dB,回波损耗为-15~-35 dB,测试过程中未对器件造成损伤。 展开更多
关键词 射频器件 无损测试 各向异性导电膜Z轴(ACF-Z)连接结构 GaAs金属半导体场效应晶体管(mesfet) 单刀八掷(SP8T)开关 插入损耗
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S波段连续波输出功率20W的SiC MESFET 被引量:1
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作者 娄辰 潘宏菽 《半导体技术》 CAS CSCD 北大核心 2012年第5期355-358,共4页
采用自主开发的SiC外延材料和工艺技术,相继实现了S波段连续波状态下输出功率瓦级和10 W的SiC MESFET。经过版图设计的改进和工艺条件的优化,取得了S波段连续波状态下输出功率大于20 W,功率增益大于12 dB,功率附加效率大于30%的SiC MES... 采用自主开发的SiC外延材料和工艺技术,相继实现了S波段连续波状态下输出功率瓦级和10 W的SiC MESFET。经过版图设计的改进和工艺条件的优化,取得了S波段连续波状态下输出功率大于20 W,功率增益大于12 dB,功率附加效率大于30%的SiC MESFET研制结果。器件的功率增益和输出功率较以往的研制结果均得到显著提高,器件的反向截止泄漏电流也大幅度降低。由于器件未采用内匹配结构,其体积也比一般内匹配器件的体积小。研制结果为多胞合成实现更大功率输出的器件创造了条件,也使S波段连续波大功率输出器件的研制水平上了一个新的台阶。 展开更多
关键词 碳化硅 金属-肖特基场效应晶体管 连续波 大功率 高增益
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8.9W/mm高功率密度SiC MESFET器件研制
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作者 李亮 默江辉 +5 位作者 邓小川 李佳 冯志红 崔玉兴 付兴昌 蔡树军 《半导体技术》 CAS CSCD 北大核心 2013年第1期20-24,共5页
基于自主研发的碳化硅(SiC)材料外延技术,优化了材料各层结构及参数,减小了Al记忆效应,最终得到了高质量SiC外延片。采用自主研发成熟的SiC MESFET工艺平台,制作了多凹栅器件结构,优化了凹槽尺寸,采用细栅制作技术完成了栅电极制作,最... 基于自主研发的碳化硅(SiC)材料外延技术,优化了材料各层结构及参数,减小了Al记忆效应,最终得到了高质量SiC外延片。采用自主研发成熟的SiC MESFET工艺平台,制作了多凹栅器件结构,优化了凹槽尺寸,采用细栅制作技术完成了栅电极制作,最终得到了不同栅宽的SiC MESFET芯片。突破了大栅宽芯片流片、封装及大功率脉冲测试技术,研制成功了微波功率特性良好的MESFET器件。微波测试结果表明,在2 GHz脉冲条件下,0.25 mm栅宽器件,输出功率密度达到8.96 W/mm,功率附加效率达到30%。单胞20 mm大栅宽器件,3.4 GHz脉冲条件下,功率输出达到94 W,功率附加效率达到22.4%。 展开更多
关键词 碳化硅 微波 金属半导体场效应晶体管 功率密度 脉冲
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S波段大功率SiC MESFET的设计与工艺制作
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作者 付兴昌 潘宏菽 《微纳电子技术》 CAS 北大核心 2011年第9期558-561,582,共5页
针对SiC功率金属半导体场效应晶体管如何在实现高性能的同时保证器件长期稳定的工作,从金属半导体接触、器件制造过程中的台阶控制、氧化与钝化层的设计及器件背面金属化实现等方面进行了分析;并结合具体工艺,对比给出了部分实验结果。... 针对SiC功率金属半导体场效应晶体管如何在实现高性能的同时保证器件长期稳定的工作,从金属半导体接触、器件制造过程中的台阶控制、氧化与钝化层的设计及器件背面金属化实现等方面进行了分析;并结合具体工艺,对比给出了部分实验结果。从测试数据看,研制的微波SiC MESFET器件性能由研制初期在S波段瓦级左右的功率输出及较低的功率增益和功率附加效率,达到了在实现大功率输出的条件下,比Si器件高的功率增益和30%以上的功率附加效率,初步体现了SiC MESFET微波功率器件的优势,器件的稳定性也得到了提升,为器件性能和可靠性的进一步提升奠定了设计和工艺基础。 展开更多
关键词 碳化硅(SiC) 金属半导体场效应晶体管(mesfet) 功率 微波 S波段
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基于流体动力学模型的2维砷化镓金属半导体场效应管数值模拟 被引量:3
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作者 贡顶 韩峰 王建国 《强激光与粒子束》 EI CAS CSCD 北大核心 2006年第7期1134-1138,共5页
介绍了用于描述工作在高频强电场条件下的亚微米半导体器件的流体动力学模型,并讨论了为求解流体动力学模型所采用的算子分裂方法和有限体积法。使用流体动力学模型,对亚微米GaAs金属半导体场效应管器件进行了2维数值模拟,得到了该器件... 介绍了用于描述工作在高频强电场条件下的亚微米半导体器件的流体动力学模型,并讨论了为求解流体动力学模型所采用的算子分裂方法和有限体积法。使用流体动力学模型,对亚微米GaAs金属半导体场效应管器件进行了2维数值模拟,得到了该器件的I-V曲线、电子密度分布和电子温度分布。数值模拟结果表明,器件栅极电压越负,肖特基结的耗尽层越厚,源漏电流越小;在耗尽层内电场最强处,电子温度达到4 000 K;在强电场下,电子温度将严重偏离晶格温度,形成所谓热电子。 展开更多
关键词 金属半导体场效应管 砷化镓 2维半导体模拟 流体动力学模型 AUSM+up格式
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Epitaxial growth of metal-semiconductor van der Waals heterostructures NbS2/MoS2 with enhanced performance of transistors and photodetectors 被引量:4
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作者 Peng Zhang Ce Bian +9 位作者 Jiafu Ye Ningyan Chen Xingguo Wang Huaning Jiang Yi Wei Yiwei Zhang Yi Du Lihong Bao Weida Hu Yongji Gong 《Science China Materials》 SCIE EI CSCD 2020年第8期1548-1559,共12页
Two-dimensional(2D)heterostructures based on layered transition metal dichalcogenides(TMDs)have attracted increasing attention for the applications of the nextgeneration high-performance integrated electronics and opt... Two-dimensional(2D)heterostructures based on layered transition metal dichalcogenides(TMDs)have attracted increasing attention for the applications of the nextgeneration high-performance integrated electronics and optoelectronics.Although various TMD heterostructures have been successfully fabricated,epitaxial growth of such atomically thin metal-semiconductor heterostructures with a clean and sharp interface is still challenging.In addition,photodetectors based on such heterostructures have seldom been studied.Here,we report the synthesis of high-quality vertical NbS2/MoS2metallic-semiconductor heterostructures.By using NbS2as the contact electrodes,the field-effect mobility and current on-off ratio of MoS2can be improved at least 6-fold and two orders of magnitude compared with the conventional Ti/Au contact,respectively.By using NbS2as contact,the photodetector performance of MoS2is much improved with higher responsivity and less response time.Such facile synthesis of atomically thin metal-semiconductor heterostructures by a simple chemical vapor deposition strategy and its effectiveness as ultrathin 2D metal contact open the door for the future application of electronics and optoelectronics. 展开更多
关键词 metal-semiconductor heterostructures contact engineering field-effect transistor PHOTODETECTOR
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In-plane epitaxial growth of 2D CoSe-WSe2 metalsemiconductor lateral heterostructures with improved WSe2 transistors performance 被引量:1
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作者 Huifang Ma Kejing Huang +11 位作者 Ruixia Wu Zhengwei Zhang Jia Li Bei Zhao Chen Dai Ziwei Huang Hongmei Zhang Xiangdong Yang BoLi Yuan Liu Xiangfeng Duan Xidong Duan 《InfoMat》 SCIE CAS 2021年第2期222-228,共7页
The two-dimensional(2D)in-plane(lateral)heterostructures have attracted increasing interest for potential applications in the atomically thin electronics and optoelectronics.While most studies focus on semiconductorse... The two-dimensional(2D)in-plane(lateral)heterostructures have attracted increasing interest for potential applications in the atomically thin electronics and optoelectronics.While most studies focus on semiconductorsemiconductor lateral heterostructures with highly similar lattice structures between the constituent components,the synthesis of metal-semiconductor lateral heterostructures is much less explored and usually more challenging due to more distinct lattice structures or chemical properties.Herein,a vapor phase epitaxy growth method of high-quality metal-semiconductor lateral heterostructures between tetragonal CoSe and hexagonal WSe2 is reported.The 2D CoSe can selectively nucleate at the edge of pre-grown WSe2 nanosheets to form CoSe-WSe2 metal-semiconductor lateral heterostructures.Optical microscopy(OM),scanning electron microscopy(SEM),and atomic force microscopy(AFM)studies reveal distinct contrast across the heterostructure interface.High-resolution transmission electron microscopy(HRTEM)and selected area electron diffraction(SAED)studies further confirm the microstructure modulation across the heterostructure interface.The field-effect transistors(FETs)of CoSe-WSe2 lateral heterostructures show satisfactory Ohmic contacts and considerably better FET performance over those with deposited Cr/Au contacts,suggesting the in-plane metal-semiconductor junctions may function as improved contacts for the atomically thin electronics. 展开更多
关键词 2D atomic crystals chemical vapor deposition field-effect transistors lateral heterostructures metal-semiconductor contacts
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