Impedance matching for repetitive high voltage all-solid-state Marx generator and excimer DBD UV sources

The purpose of impedance matching for a Marx generator and DBD lamp is to limit the output current of the Marx generator,provide a large discharge current at ignition,and obtain fast voltage rising/falling edges and large overshoot.In this paper,different impedance matching circuits（series inductor,parallel capacitor,and series inductor combined with parallel capacitor） are analyzed.It demonstrates that a series inductor could limit the Marx current.However,the discharge current is also limited.A parallel capacitor could provide a large discharge current,but the Marx current is also enlarged.A series inductor combined with a parallel capacitor takes full advantage of the inductor and capacitor,and avoids their shortcomings.Therefore,it is a good solution.Experimental results match the theoretical analysis well and show that both the series inductor and parallel capacitor improve the performance of the system.However,the series inductor combined with the parallel capacitor has the best performance.Compared with driving the DBD lamp with a Marx generator direcdy,an increase of 97.3%in radiant power and an increase of 59.3%in system efficiency are achieved using this matching circuit.

An All Solid-State Pulsed Power Generator for Plasma Immersion Ion Implantation (PⅢ)

An all solid-state pulsed power generator for plasma immersion ion implantation （PIII） is described. The pulsed power system is based on a Marx circuit configuration and semi- conductor switches, which have many advantages in adjustable repetition frequency, pulse width modulation and long serving life compared with the conventional circuit category, tube-based technologies such as gridded vacuum tubes, thyratrons, pulse forming networks and transformers. The operation of PIII with pulse repetition frequencies up to 500 Hz has been achieved at a pulse voltage amplitude from 2 kV to 60 kV, with an adjustable pulse duration from 1 μs to 100 μs. The proposed system and its performance, as used to drive a plasma ion implantation chamber, are described in detail on the basis of the experimental results.

Design and Fabrication of a High Voltage Lightning Impulse Generator

This paper reports 10 kV to 100 kV high voltage impulse generator. Generation of variable outputs impulse generator can be designed by combination of flyback transformer and Marx generator which can produce different high voltages. It is a portable device for field. The experimental final results have been taken by using spark gap measurements and voltage divider technique. This high voltage lightning impulse generator produces standard T1/T2 waveshape impulses. The testing of protection devices such as SPD (surge protection device) is extremely important to find out whether these devices can operate in standard conditions or not. That’s why the high voltage lightning impulse generator is developed for such testing. Similarly, our research work consists of modeling and practical design of a 100 kV impulse generator.

Design of the Solid State Marx Modulator

The design of the Marx Modulator is based on oil-free,air-cooled,and capable of delivering 120kV,140A, 1600usec pulses at a rate of 5Hz.The Marx modulator design employs a stack of sixteen 12kV Marx modules that generate high-voltage output pulses directly from a 12kV input supply voltage.This direct switching eliminates the requirement for a massive transformer reduces the capacitor bank size by more than a factor of four,yielding a consid- erably cheaper and more compact mechanical solution.Advantages of the ILC Marx design include higher efficiency, smaller physical size,and a modular architecture that provides greater reliability and cost- effective PC board-level integration.