为了有效改善硅基负极材料的性能及降低制备成本,以微米级单质硅为原料,通过金属辅助化学刻蚀法制备多孔硅负极材料,该方法步骤简单可控、成本低廉,易于大规模生产。采用场发射扫描电镜和电池测试系统,对比分析不同工艺参数下制得的硅...为了有效改善硅基负极材料的性能及降低制备成本,以微米级单质硅为原料,通过金属辅助化学刻蚀法制备多孔硅负极材料,该方法步骤简单可控、成本低廉,易于大规模生产。采用场发射扫描电镜和电池测试系统,对比分析不同工艺参数下制得的硅负极材料的形貌和性能差异,从而进行工艺优化,并得出较优的工艺参数:Ag NO_(3)浓度约为0.015 mol/L、伽伐尼反应时间选择1~4 min、刻蚀剂中C_(HF)/(C_(H_(2)O_(2))+C_(HF))为70%~90%。在合适的工艺参数下制备的多孔硅负极材料电化学性能明显优于硅负极材料,在0.5C倍率下循环50次后容量仍有1 130.7 m A·h/g,在2C、5C的倍率下仍有929、669 m A·h/g的较高比容量。该方法得到的多孔硅负极材料能够有效缓解单质硅负极材料体积膨胀严重和导电性差的问题,从而有效提高其电化学性能。展开更多
Nonpolar （1120） GaN films are grown on the etched a-plane GaN substrates via metalorganic vapor phase epitaxy. High-resolution X-ray diffraction analysis shows great decreases in the full width at half maximum of th...Nonpolar （1120） GaN films are grown on the etched a-plane GaN substrates via metalorganic vapor phase epitaxy. High-resolution X-ray diffraction analysis shows great decreases in the full width at half maximum of the samples grown on etched substrates compared with those of the sample without etching, both on-axis and off-axis, indicating the reduced dislocation densities and improved crystalline quality of these samples. The spatial mapping of the E2 （high） phonon mode demonstrates the smaller line width with a black background in the wing region, which testifies the reduced dislocation densities and enhanced crystalline quality of the epitaxial lateral overgrowth areas. Raman scattering spectra of the E2 （high） peaks exhibit in-plane compressive stress for all the overgrowth samples, and the E2 （high） peaks of samples grown on etched substrates shift toward the lower frequency range, indicating the relaxations of in-plane stress in these GaN films. Furthermore, room temperature photoluminescence measurement demonstrates a significant decrease in the yellow-band emission intensity of a-plane GaN grown on etched templates, which also illustrates the better optical properties of these samples.展开更多
在常温常压条件下,采用改进的金属催化化学腐蚀方法在n型单晶硅片（100）上制备了大面积垂直于硅衬底、直径均匀、排列整齐的硅纳米线阵列。分析了样品的表面形貌和反射谱,纳米线直径为1050 nm。在腐蚀时间分别为15,30,60 m in时,纳米...在常温常压条件下,采用改进的金属催化化学腐蚀方法在n型单晶硅片（100）上制备了大面积垂直于硅衬底、直径均匀、排列整齐的硅纳米线阵列。分析了样品的表面形貌和反射谱,纳米线直径为1050 nm。在腐蚀时间分别为15,30,60 m in时,纳米线长度分别为9,17,34μm。样品的减反射性能优异,在3001 000nm波段,得到了2.4%的反射率。初步分析了纳米线阵列的减反射机制和不同腐蚀时间样品的反射率差异。展开更多
文摘为了有效改善硅基负极材料的性能及降低制备成本,以微米级单质硅为原料,通过金属辅助化学刻蚀法制备多孔硅负极材料,该方法步骤简单可控、成本低廉,易于大规模生产。采用场发射扫描电镜和电池测试系统,对比分析不同工艺参数下制得的硅负极材料的形貌和性能差异,从而进行工艺优化,并得出较优的工艺参数:Ag NO_(3)浓度约为0.015 mol/L、伽伐尼反应时间选择1~4 min、刻蚀剂中C_(HF)/(C_(H_(2)O_(2))+C_(HF))为70%~90%。在合适的工艺参数下制备的多孔硅负极材料电化学性能明显优于硅负极材料,在0.5C倍率下循环50次后容量仍有1 130.7 m A·h/g,在2C、5C的倍率下仍有929、669 m A·h/g的较高比容量。该方法得到的多孔硅负极材料能够有效缓解单质硅负极材料体积膨胀严重和导电性差的问题,从而有效提高其电化学性能。
基金Project supported by the National Natural Science Foundation of China(Grant No.61204006)the Fundamental Research Funds for the Central Universities,China(Grant No.K50511250002)the National Key Science & Technology Special Project,China(Grant No.2008ZX01002-002)
文摘Nonpolar （1120） GaN films are grown on the etched a-plane GaN substrates via metalorganic vapor phase epitaxy. High-resolution X-ray diffraction analysis shows great decreases in the full width at half maximum of the samples grown on etched substrates compared with those of the sample without etching, both on-axis and off-axis, indicating the reduced dislocation densities and improved crystalline quality of these samples. The spatial mapping of the E2 （high） phonon mode demonstrates the smaller line width with a black background in the wing region, which testifies the reduced dislocation densities and enhanced crystalline quality of the epitaxial lateral overgrowth areas. Raman scattering spectra of the E2 （high） peaks exhibit in-plane compressive stress for all the overgrowth samples, and the E2 （high） peaks of samples grown on etched substrates shift toward the lower frequency range, indicating the relaxations of in-plane stress in these GaN films. Furthermore, room temperature photoluminescence measurement demonstrates a significant decrease in the yellow-band emission intensity of a-plane GaN grown on etched templates, which also illustrates the better optical properties of these samples.
文摘在常温常压条件下,采用改进的金属催化化学腐蚀方法在n型单晶硅片（100）上制备了大面积垂直于硅衬底、直径均匀、排列整齐的硅纳米线阵列。分析了样品的表面形貌和反射谱,纳米线直径为1050 nm。在腐蚀时间分别为15,30,60 m in时,纳米线长度分别为9,17,34μm。样品的减反射性能优异,在3001 000nm波段,得到了2.4%的反射率。初步分析了纳米线阵列的减反射机制和不同腐蚀时间样品的反射率差异。
