在光敏面上镀制荧光薄膜将紫外光转变为可见光，是提高CCD和CMOS图像传感器紫外响应灵敏度的一种有效方法。针对荧光薄膜入射界面的散射和反射损耗降低荧光发光强度的分析，研究在荧光薄膜上镀制增透膜和阻隔膜的灵敏度增强特性。采用...在光敏面上镀制荧光薄膜将紫外光转变为可见光，是提高CCD和CMOS图像传感器紫外响应灵敏度的一种有效方法。针对荧光薄膜入射界面的散射和反射损耗降低荧光发光强度的分析，研究在荧光薄膜上镀制增透膜和阻隔膜的灵敏度增强特性。采用真空热阻蒸发的镀膜方法分别制备了单层Lumogen荧光薄膜和MgF2/Lumogen复合膜。利用原子力显微镜，紫外可见近红外分光光度计，荧光光谱仪对两种样品的表面粗糙度，漫反射和透射光谱以及荧光发光光谱分别进行对比测试分析。结果表明：M g F2保护层降低了表面粗糙度，减小了入射界面的漫反射损耗，对500～700 nm的可见波段具有明显增透作用，也增强了Lumogen薄膜对紫外波段受激发射的荧光强度；同时，MgF2薄膜的抗损伤及水汽隔离性能对荧光薄膜紫外响应能力具有保护作用，为延长紫外CCD薄膜及器件的工作寿命提供了有效手段。展开更多
The chemical structures, optical properties and laser-induced damage thresholds of magnesium fluoride films annealed at different temperatures were investigated. The results showed that the stoichiometry of MgF2 film ...The chemical structures, optical properties and laser-induced damage thresholds of magnesium fluoride films annealed at different temperatures were investigated. The results showed that the stoichiometry of MgF2 film changed a little with the increase in annealing temperature. Analysis of the optical properties indicated that excellent antireflection behavior of the film in the range of 200-400 nm can be obtained by the samples coated with MgF2 film. The refractive index increased and the extinction coefficient decreased with increasing annealing temperature. Compared with the asdeposited films, the laser-induced damage threshold was improved after annealing process and decreased with the increase in annealing temperature, which was probably due to the denser film and more absorption centers under higher annealing temperature.展开更多
文摘在光敏面上镀制荧光薄膜将紫外光转变为可见光，是提高CCD和CMOS图像传感器紫外响应灵敏度的一种有效方法。针对荧光薄膜入射界面的散射和反射损耗降低荧光发光强度的分析，研究在荧光薄膜上镀制增透膜和阻隔膜的灵敏度增强特性。采用真空热阻蒸发的镀膜方法分别制备了单层Lumogen荧光薄膜和MgF2/Lumogen复合膜。利用原子力显微镜，紫外可见近红外分光光度计，荧光光谱仪对两种样品的表面粗糙度，漫反射和透射光谱以及荧光发光光谱分别进行对比测试分析。结果表明：M g F2保护层降低了表面粗糙度，减小了入射界面的漫反射损耗，对500～700 nm的可见波段具有明显增透作用，也增强了Lumogen薄膜对紫外波段受激发射的荧光强度；同时，MgF2薄膜的抗损伤及水汽隔离性能对荧光薄膜紫外响应能力具有保护作用，为延长紫外CCD薄膜及器件的工作寿命提供了有效手段。
基金financially supported by the Research Fund of the State Key Laboratory of Solidification Processing,Northwestern Polytechnical University,China(Grant No.155-QP-2016)the Fundamental Research Funds for the Central Universities(No.3102014JCQ01032)the 111 Project(No.B08040)
文摘The chemical structures, optical properties and laser-induced damage thresholds of magnesium fluoride films annealed at different temperatures were investigated. The results showed that the stoichiometry of MgF2 film changed a little with the increase in annealing temperature. Analysis of the optical properties indicated that excellent antireflection behavior of the film in the range of 200-400 nm can be obtained by the samples coated with MgF2 film. The refractive index increased and the extinction coefficient decreased with increasing annealing temperature. Compared with the asdeposited films, the laser-induced damage threshold was improved after annealing process and decreased with the increase in annealing temperature, which was probably due to the denser film and more absorption centers under higher annealing temperature.
