Chaos in a fractional-order micro-electro-mechanical resonator and its suppression

The present paper investigates the existence of chaos in a non-autonomous fractional-order micro-electromechanical resonator system（FOMEMRS）.Using the maximal Lyapunov exponent criterion,we show that the FOMEMRS exhibits chaos.Strange attractors of the system are plotted to validate its chaotic behavior.Afterward,a novel fractional finite-time controller is introduced to suppress the chaos of the FOMEMRS with model uncertainties and external disturbances in a given finite time.Using the latest version of the fractional Lyapunov theory,the finite time stability and robustness of the proposed scheme are proved.Finally,we present some computer simulations to illustrate the usefulness and applicability of the proposed method.

Design of portable and intelligent infuser device for rapid fluid transfusion based on micro-electro-mechanical system

Objective： A novel portable and intelligent fluid resuscitation infuser is proposed in this paper. It satisfies the demands of long time use in harsh environment, such as traffic accident, natural disaster, battlefield, evacuation, pre-hospital emergency and so on. Methods： Miniature linear motor and liquid blood cartridge compose the pump body. It＇s based on the biological impedance method to measure and control, which resolve the disadvantage of traditional infuser device： large power dissipation, big size, AC power supply only and can＇t be use in field. The whole device weights 250 gram and sizes as two mobile phone together Results： Model device experiment shows： six number 7 standard AAA size alkaline batteries will run the pump for approximately 8-10 h at 6 liters per hour; IV bag can be placed at any position of patient, even under the stretcher. Conclusion： It provides accurate and reliable intravenous infusion for fwst-aid treatment in field.

Method of improving pedestrian navigation performance based on chest card

With the development of positioning technology,loca-tion services are constantly in demand by people.As a primary location service pedestrian navigation has two main approaches based on radio and inertial navigation.The pedestrian naviga-tion based on radio is subject to environmental occlusion lead-ing to the degradation of positioning accuracy.The pedestrian navigation based on micro-electro-mechanical system inertial measurement unit(MIMU)is less susceptible to environmental interference,but its errors dissipate over time.In this paper,a chest card pedestrian navigation improvement method based on complementary correction is proposed in order to suppress the error divergence of inertial navigation methods.To suppress atti-tude errors,optimal feedback coefficients are established by pedestrian motion characteristics.To extend navigation time and improve positioning accuracy,the step length in subsequent movements is compensated by the first step length.The experi-mental results show that the positioning accuracy of the pro-posed method is improved by more than 47%and 44%com-pared with the pure inertia-based method combined with step compensation and the traditional complementary filtering com-bined method with step compensation.The proposed method can effectively suppress the error dispersion and improve the positioning accuracy.

用于MEMS惯性开关的微弹簧有限元动力学分析

设计水平和垂直方向两种驱动形式MEMS(micro-electro-mechanical system)惯性开关,应用ANSYS10.0有限元软件对其中的镍质微弹簧结构进行实体建模和动力学模拟分析,得到其在动载荷下的应力分布情况和端部位移响应曲线,并比较静动载荷下结构参数对微弹簧水平和垂直方向上弹性常数(klevel和kvertic)的影响规律。文中的有限元动力学分析方法为较准确地评定类似MEMS微弹簧弹性常数提供一条有效途径,具有工程实际应用价值,特别是为动载荷下工作的惯性类微器件中弹簧的进一步优化与加工提供重要依据。

MEMS低频压电振动能量采集器

设计了基于微机电系统(MEMS)的一阶、二阶传动低频压电振动能量采集器,通过压电效应将低频振动能量转化为电能来解决低频(小于200Hz)振动环境中的能量采集问题。一阶传动能量采集器模型包括一阶传动梁及压电悬臂梁,二阶传动能量采集器模型包括一阶传动梁、二阶传动梁及压电悬臂梁。数学建模及有限元分析显示:采集器工作频率随一阶、二阶传动梁及压电悬臂梁材料的杨氏模量的减小均呈单调递减的趋势;传动梁的设计可有效降低采集器的高阶工作频率、拓宽工作带宽;而二阶传动梁可以在1g加速度条件下,获得10.98Hz和44.52Hz两个超低频率的电压峰值(分别为3.18V/g和1.33V/g),使系统工作频率降得更低,50Hz以下的有效工作带宽更宽,更适合与低频振动环境匹配进行能量采集。

静电微泵吸合与释放特性研究

为避免静电微泵因驱动电压过高而出现吸合现象,建立描述静电泵膜吸合与释放现象的一维集中质量模型、二维分布式模型和三维有限元模型,对比研究静电致动泵膜在准静态下吸合与释放的循环过程,获得整个循环过程的泵膜挠曲线变化、泵腔体积变形、电容变化等大量的数据与曲线。比较结果表明,二维分布式模型求解效果最好,并利用三维有限元模型和宏模型的计算结果,验证该模型在泵膜大变形下计算吸合过程的准确性,获得的吸合电压为确定静电微泵驱动电压的上限值提供有效依据。

产业共性技术供给体系研究

1999年7月1日,我国正式开始国家产业部门层次的科研院所的体制改革.改革的初衷是为了彻底解决长期困扰我国经济发展和科技进步的"科技经济两张皮"的问题,但这种产业科研院所的转制却会带来一类特殊的技术--产业共性技术"无人"供给的现象[1].

RF MEMS switches based on thermal actuator

A new switching circuit is presented for the application in the frequency range of 0 to 8 GHz. This switch is electro-thermally actuated and exhibits high radio frequency （RF） performance due to its lateral contact mechanism, It composes of electroplated nickel and silicon nitride as structural materials. The isolation between bias and signal ports is realized by using silicon nitride. In the case of a small deformation, the relation between the displacement of the vertex and the pre-bending angle is analyzed. The metal contact is realized by in-plane motion and sidewall connection. The switches were fabricated using the MetalMUMPs process from MEMSCAP. The RF testing results show that the switch has a low insertion loss of 0. 9 dB at 8 GHz and a high isolation of 30 dB below 8 GHz.

MEMS用含能薄膜研究现状及进展

在综合分析国内外含能薄膜相关文献的基础上,认为金属复合含能薄膜桥、含能半导体桥及纳米多孔硅/氧化剂复合薄膜制作工艺与微机电系统(micro-electro-mechanical systems,MEMS)器件制备技术具有良好的兼容性,在此基础上阐述了上述三种薄膜材料的制备方法及输出特性,认为MEMS火工装置为火工技术的发展提供了一个重要的研究方向。

免疫组化法检测恶性胸腔积液脱落细胞EGFR突变状态

目的:评估免疫组织化学染色法(immunohistochemistry,IHC)在恶性胸腔积液脱落细胞EGFR突变检测中的应用价值。方法:连续纳入我院2012年1月至2013年12月154例肺腺癌患者,筛选合格病例入组,使用扩增阻滞突变系统技术(amplification refractory mutation system,ARMS)和IHC分别检测肺癌组织和胸腔积液脱落细胞的EGFR突变状态。比较两种方法的检测敏感度、特异度和一致率等。结果:85例患者最终纳入本研究,患者平均年龄66.4岁。ARMS法检测肿瘤组织的总体突变率约49.4%,其中E746_A750 del突变率17.6%,L858R突变率22.4%。以ARMS法为金标准,IHC染色检测E746_A750 del和L858R突变的敏感度分别为93.3%和89.5%,两种方法的检测一致性极好。进一步,85例患者胸腔积液的脱落肿瘤细胞检出率为41.2%,IHC法检测E746_A750 del和L858R突变的敏感度分别为83.3%和66.7%,特异度均为100.0%。结论:IHC染色是一种可靠、准确的EGFR突变检测方法,能够获得良好的特异度和一致率,可用于恶性胸腔积液脱落肿瘤细胞的常规筛查。

Detecting magnetic field direction by a micro beam operating in different vibration modes

A new method to detect the magnetic field direction by using a silicon structure is presented in this paper. The structure includes a micro beam and an in-plane coil electrode. When the electrode under a magnetic field is applied with an alternating current, the micro beam is actuated under the effect of the Lorentz forces. Magnetic fields of different directions cause different vibration profiles. The direction of the magnetic field is obtained by measuring the vibration amplitudes of the micro beam, which is driven to work at first- and second-order resonant modes. A micro structure has been fabricated using the bulk microma^hined silicon process. A laser Doppler vibrometer system is implemented to measure the vibration amplitudes. The experimental results show that the amplitude of the structure, which depends on the different modes, is a sine or cosine function of the angle of the magnetic field. It agrees well with the simulation result. Currently a resolution of 10~ for the magnetic field direction measurement can be obtained using the detecting principle.

Direct ink writing of 3D-Honeycombed CL-20 structures with low critical size

3D-Honeycombed CL-20 structures with low critical size of detonation have been fabricated successfully for intelligent weapon systems using a micro-flow direct ink writing(DIW) technology.The CL-20-based explosive ink for DIW technology was prepared by a two-component adhesive system with waterborne polyurethane(WPU) and ethyl cellulose(EC).Not only the preparation of the explosive ink but also the principle of DIW process have been investigated systematically.The explosive ink displayed stro ng shea rthinning behavior that permitted layer-by-laye r deposition from a fine nozzle onto a substrate to produce complex shapes.The EC content was varied to alter the pore structure distribution and rheological behavior of ink samples after curing.The deposited explosive composite materials are of a honeycombed structure with high porosity,and the pore size distribution increases with the increase of EC content.No phase change was observed during the preparation process.Both WPU and EC show good compatibility with CL-20 particles.Apparently high activation energy was realized in the CL-20-based composite ink compared with that of the refined CL-20 due to the presence of non-energetic but stable WPU.The detonation performance of the composite materials can be precisely controlled by an adjustment in the content of binders.The 3D honeyco mbed CL-20 structures,which are fabricated by DIW technology,have a very small critical detonation size of less than 69 μm,as demonstrated by wedge shaped charge test.The ink can be used to create 3D structures with complex geometries not possible with traditional manufacturing techniques,which presents a bright future for the development of intelligent weapon systems.

Chaos and Nonlinear Feedback Control of the Arch Micro-Electro-Mechanical System

This paper addresses a nonlinear feedback control problem for the chaotic arch micro- electro-mechanical system with unknown parameters,immeasurable states and partial state-constraint subjected to the distributed electrostatic actuation.To reflect inherent properties and design controller, the phase diagrams,bifurcation diagram and Poincare section are presented to investigate the nonlinear dynamics.The authors employ a symmetric barrier Lyapunov function to prevent violation of constraint when the arch micro-electro-mechanical system faces some limits.An RBF neural network system integrating with an update law is adopted to estimate unknown function with arbitrarily small error. To eliminate chaotic oscillation,a neuro-adaptive backstepping control scheme fused with an extended state tracking differentiator and an observer is constructed to lower requirements on measured states and precise system model.Besides,introducing an extended state tracking differentiator avoids repeated derivative for the virtual control signal associated with conventional backstepping.Finally,simulation results are presented to illustrate feasibility of the proposed scheme.

NONLINEAR DYNAMICS OF LATERAL MICRO-RESONATOR INCLUDING VISCOUS AIR DAMPING

The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not be fixed as a constant. Therefore the linear dynamic analysis which used the constant air damping coefficient can not describe the actual dynamic characteristics of the mi-cro-resonator. The nonlinear dynamic model including the air damping force is established. On the base of Navier-Stokes equation and nonlinear dynamical equation, a coupled fluid-solid numerical simulation method is developed and demonstrates that damping force is a vital factor in micro-comb structures. Compared with existing experimental result, the nonlinear numerical value has quite good agreement with it. The differences of the amplitudes （peak） between the experimental data and the results by the linear model and the nonlinear model are 74.5% and 6% respectively. Nonlinear nu-merical value is more exact than linear value and the method can be applied in other mi-cro-electro-mechanical systeme （MEMS） structures to simulate the dynamic performance.

HIGH PERFORMANCE ELECTRIC FIELD MICRO SENSOR WITH COMBINED DIFFERENTIAL STRUCTURE

This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combined differential structure effectively reduces various environmental affections,such as thermal drift,humidity drift and electrostatic charge accumulation.The sensor is tested in near-ground place as well as balloon-borne sounding.In different weather conditions,the measurement results showed good agreement with those of the commercial electric field mill.

Analysis and Prevention for Oscillation Failure of Capacitive Micro-accelerometers

As actuator of the force-rebalanced servo loop, the electrostatic force generator of the micro-accelerometer shows high nonlinearity while the interpole of the micro-electro-mechanical system（MEMS） sensor is far away from its balance position. The control system cannot rebalance itself with the limited bandwidth after an external long overload, because the characteristics of the force generator differ from normal case. Although for similar problems, solutions with cascading lead-lag blocks, with the anti-windup（AW） technology, or with the sliding-mode control, are widely reported, the problems such as performance loss or difficulty to synthesize a digital controller still remain. Based on existing researches, remedies are developed by analyzing the characteristic of the system not only near the balance position, but also corresponding to the whole moveable range of the interpole, and a new controller is proposed. The solution is compared with the common solutions of cascading lead-lag blocks method, AW methods, and sliding mode methods. Comparison results show that the proposed solution avoid performance loss, compared to cascading lead-lag blocks solution; the proposed solution is easily synthesized and implemented in the analog servo loop of the micro-accelerometer, compared to digital AW methods; at the same time, the proposed solution avoids suffering the chattering effect problem but just utilize it, compared to the sliding-mode control solution. Nevertheless, comparison results show the solution is lack of commonality, since the solution is only more suitable to micro electrostatic force-rebalance system. The SIMULINK models with and without the proposed solution, taking typical micro-accelerometer parameters, have been set up for simulation; corresponding experiments utilizing electrometric method are also conducted after the successful simulations. Simulation and experiment results verify that the micro-accelerometer will reliably return to normal operation after external long overload with the proposed solution. Therefore, it is expected to design the analog servo loop of high performance micro electrostatic force-rebalance system so as to ensure the rebalance after long overload without performance loss.

Ultrasonic Linear Motor with Anisotropic Composite

An idea to make up the vibrating body of ultrasonic motor with anisotropic composite is proposed and a linear piezoelectric motor is developed in this paper. Relative problems such as actuating mechanism, resonant frequency are discussed theoretically. According to the feature that impulse exists between the elastic body of composite ultrasonic linear motor and the base, an impulse analysis is presented to calculate the motor′s friction driving force and frictional conversion efficiency. The impulse analysis essentially explains the reason why the ultrasonic motor has great driving force, and can be applied to analyze the non-linear ultrasonic motor.

Correcting dynamic residual aberrations of conformal optical systems using AO technology

This paper analyses the dynamic residual aberrations of a conformal optical system and introduces adaptive optics （AO） correction technology to this system. The image sharpening AO system is chosen as the correction scheme.Communication between MATLAB and Code V is established via ActiveX technique in computer simulation.The SPGD algorithm is operated at seven zoom positions to calculate the optimized surface shape of the deformable mirror.After comparison of performance of the corrected system with the baseline system,AO technology is proved to be a good way of correcting the dynamic residual aberration in conformal optical design.

Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces

We propose an inductor-capacitor(LC)wireless passive flexible accelerometer,which eliminates the difficulty in measuring the acceleration on the surface of a bending structure.The accelerometer is composed of a flexible polyimide(PI)substrate and a planar spiral inductance coil(thickness 300 nm),made using micro-electro-mechanical system(MEMS)technology.It can be bent or folded at will,and can be attached firmly to the surface of objects with a bending structure.The principle of radio frequency wireless transmission is used to measure the acceleration signal by changing the distance between the accelerometer and the antenna.Compared with other accelerometers with a lead wire,the accelerometer can prevent the lead from falling off in the course of vibration,thereby prolonging its service life.Through establishment of an experimental platform,when the distance between the antenna and accelerometer was 5 mm,the characterization of the surface of bending structures demonstrated the sensing capabilities of the accelerometer at accelerations of 20-100 m/s2.The results indicate that the acceleration and peak-to-peak output voltage were nearly linear,with accelerometer sensitivity reaching 0.27 mV/(m·s-2).Moreover,the maximum error of the accelerometer was less than 0.037%.

Highly reliable and selective ethanol sensor based on α-Fe2O3 nanorhombs working in realistic environments

A highly reliable and selective ethanol gas sensor working in realistic environments based on alpha-Fe2O3(α-Fe2O3)nanorhombs is developed. The sensor is fabricated by integrating α-Fe2O3 nanorhombs onto a low power microheater based on micro-electro-mechanical systems(MEMS) technology. The α-Fe2O3 nanorhombs, prepared via a solvothermal method, is characterized by transmission electron microscopy(TEM), Raman spectroscopy, x-ray diffraction(XRD), and x-ray photoelectron spectroscopy(XPS). The sensing performances of the α-Fe2O3 sensor to various toxic gases are investigated. The optimum sensing temperature is found to be about 280℃. The sensor shows excellent selectivity to ethanol.For various ethanol concentrations(1 ppm-20 ppm), the response and recovery times are around 3 s and 15 s at the working temperature of 280℃, respectively. Specifically, the α-Fe2O3 sensor exhibits a response shift less than 6% to ethanol at280℃ when the relative humidity(RH) increases from 30% to 70%. The good tolerance to humidity variation makes the sensor suitable for reliable applications in Internet of Things(IoT) in realistic environments. In addition, the sensor shows great long-term repeatability and stability towards ethanol. A possible gas sensing mechanism is proposed.