Drive and Control of Electromagnetic Drive Module on Reciprocally Rotating Disc Used for Micro-Gyroscope

An innovative 3-phase AC (Alternative Current) drive circuit for the seismic disc in micro-gyroscopes is designed and verified by computer simulations and experiments. The in-plane dynamic model of the seismic disc with mass eccentricity and air gap against the centre bearing and the mathematic expression of two sinusoidal magnetic fields are developed respectively. In order to prevent the seismic disc from collision with the centre bearing and the EM (Electromagnetic) poles, an anti-collision controller is established by employing two Look-up tables which define the intensity of the applied current to the EM poles. Self-sensing technique is included to measure the real-time offset of the disc by two orthogonal pairs of EM poles, without any additional sensors. The drive circuit under SPWM (Sinusoidal Pulse Width Modulation) operation and the anti-collision strategy are verified by intensive computer simulations via commercial software, OrCAD 9, and experiments.

Modeling and Analysis of a Micromotor with an Electrostatically Levitated Rotor

The modeling and evaluation of a prototype rotary micromotor where the annular rotor is supported electrostatically in five degrees of freedom is presented in order to study the behavior of this levitated micromotor and further optimize the device geometry. The analytical torque model is obtained based on the principle of a planar variable-capacitance electrostatic motor while the viscous damping caused by air film between the stator and rotor is derived using laminar Couette flow model. Simulation results of the closed-loop drive motor, based on the developed dynamic model after eliminating mechanical friction torque via electrostatic suspension, are presented. The effects of the high-voltage drive, required for rotation of the rotor, on overload capacity and suspension stiffness of the electrostatic bearing system are also analytically evaluated in an effort to determine allowable drive voltage and attainable rotor speed in operation. The analytical results show that maximum speed of the micromotor is limited mainly by viscous drag torque and stiffness of the bearing system. Therefore, it is expected to operate the device in vacuum so as to increase the rotor speed significantly, especially for those electrostatically levitated micromotors to be used as an angular rate micro-gyroscope.

Complete decoupling rebalance loop design of a micromachined electrostatically suspended gyroscope

A micromachined electrostatically suspended gyroscope(MESG)based on UV-LIGA microfabrication process was introduced.By close-loop control,the suspended rotor is kept in null position and through the torque rebalance loop,in which the output control voltages reflects the input angular velocity,a dual-axis input angular velocity can be measured simultaneously.First,the system model of MESG was established by dynamic analysis based on the torque analysis.Then,the rebalance loop under ideal condition is designed using modern control technique.The performance of the designed decoupling rebalance loop was compared with that of conventional proportional integral differential(PID)rebalance loop combined with the compensation loop.In order to realize the decoupling of the output voltages,a compensated decoupling matrix and its difference equation were presented and realized by a digital decoupling method employing digital signal processor(DSP).It was confirmed that the controller could realize the complete decoupling and improve the performance of the gyroscope,which includes merits of fast response speed,low overshoot and good dynamic performance,as the simulation results shown.At last,the circuit and digital realization scheme were given.

静电驱动下指数型变截面梁式陀螺仪的非线性特性与分析

本文设计一类新型的指数型变截面梁式微陀螺,变截面指数梁的宽度与长度的关系为指数函数变化的形式,且指数梁的截面变化因子小于等于零,梁的厚度随梁长仍保持不变.考虑了曲率非线性和惯性非线性对系统的影响,利用扩展哈密顿原理、单模近似法和拉格朗日微分方程,建立了指数型变截面梁式非线性陀螺仪的振动控制方程、边界条件和非线性离散化模型,且考虑了陀螺仪驱动和检测两个方向上直流电压和交流电压对系统响应的影响,采用ADM法求解陀螺仪系统在不同截面变化因子下的静态响应,利用多尺度法对系统的非线性离散化模型进行摄动求解,分析各个参数对陀螺仪动态响应的影响规律.结果表明,随着截面变化因子的增大,指数梁陀螺仪的吸合电压和一阶固有频率逐渐增加,并呈现近似线性的变化规律.通过调节指数梁截面变化因子,可以控制科氏力响应峰值频率和检测峰值频率的差值.利用指数梁陀螺仪系统的硬化非线性特征,当交流电压施加在指数梁厚度方向时,选择合适的指数截面变化因子、阻尼比和交流电压,可以使指数梁式陀螺仪系统获得更好的带宽性能及线性可测范围;当交流电压施加在指数梁宽度方向,选取合适的截面变化因子,不仅可以获得较高的系统灵敏度性能,同时增加陀螺仪对外部输入角速度的线性可测范围.

MEMS and MOEMS Gyroscopes: A Review

Micro-gyroscopes using micro-electro-mechanical system(MEMS)and micro-optoelectro-mechanical system(MOEMS)are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies.According to the working principle and used materials,the newly-reported micro-gyroscopes in recent years include the silicon-based micromechanical vibratory gyroscope,hemispherical resonant gyroscope,piezoelectric vibratory gyroscope,suspended rotor gyroscope,microfluidic gyroscope,optical gyroscope,and atomic gyroscope.According to different sensitive structures,the silicon-based micromechanical vibratory gyroscope can also be divided into double frame type,tuning fork type,vibrating ring type,and nested ring type.For those micro-gyroscopes,in recent years,many emerging techniques are proposed and developed to enhance different aspects of performances,such as the sensitivity,angle random walk(ARW),bias instability(BI),and bandwidth.Therefore,this paper will firstly review the main performances and applications of those newly-developed MEMS/MOEMS gyroscopes,then comprehensively summarize and analyze the latest research progress of the micro-gyroscopes mentioned above,and finally discuss the future development trends of MEMS/MOEMS gyroscopes.