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Highly-compliant,conformal and stretchable microelectrode arrays 被引量:1
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作者 Zhang Hongzhi Xie Lei +3 位作者 Yu Mei Liu Zhiyuan Li Yuchun Yu Zhe 《Engineering Sciences》 EI 2013年第3期72-75,共4页
Most biological tissues are supple and elastic,while current electronic devices fabricated by semiconductors and metals are usually stiff and brittle. As a result,implanted electronic devices can irritate and damage s... Most biological tissues are supple and elastic,while current electronic devices fabricated by semiconductors and metals are usually stiff and brittle. As a result,implanted electronic devices can irritate and damage surrounding tissues,causing immune reaction and scarring. In this work,we develop stretchable microelectrode arrays,with the development of a novel soft lithography technology,which are designed and fabricated with a polymer/stretchable metal/polymer sandwich structure. With the great deformability of stretch,compression,bend and twisting,while preserving electrical property,this technology overcomes the fundamental mismatch of mechanical properties between biological tissues and electronic devices,and provides highly-compliant,conformal and stretchable bio-electronic interfaces. Here we also describe the following three applications of the stretchable electrode arrays:a. monitoring intracranial electroencephalography (EEG);b. stimulating peripheral nerves to drive muscles;c. monitoring epicardial electrocardiography (ECG). Stretchable microelectrode arrays create a promising field in biomedical applications for its better modulus match with biological tissues and robust mechanical and electrical properties. They allow for construction of electronic integrated circuits spread over on complex and dynamic curved surfaces,providing a much friendlier bio-electronic interface for diagnosis,treatment and intelligent bio-control. 展开更多
关键词 微电极阵列 兼容 伸展 生物组织 电子集成电路 电子设备 光刻技术 机械性能
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Design and Implementation Challenges of Microelectrode Arrays: A Review
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作者 Bahareh Ghane-Motlagh Mohamad Sawan 《Materials Sciences and Applications》 2013年第8期483-495,共13页
The emerging field of neuroprosthetics is focused on design and implementation of neural prostheses to restore some of the lost neural functions. Remarkable progress has been reported at most bioelectronic levels—par... The emerging field of neuroprosthetics is focused on design and implementation of neural prostheses to restore some of the lost neural functions. Remarkable progress has been reported at most bioelectronic levels—particularly the various brain-machine interfaces (BMIs)—but the electrode-tissue contacts (ETCs) remain one of the major obstacles. The success of these BMIs relies on electrodes which are in contact with the neural tissue. Biological response to chronic implantation of Microelectrode arrays (MEAs) is an essential factor in determining a successful electrode design. By altering the material compositions and geometries of the arrays, fabrication techniques of MEAs insuring these ETCs try to obtain consistent recording signals from small groups of neurons without losing microstimulation capabilities, while maintaining low-impedance pathways for charge injection, high-charge transfer, and high-spatial resolution in recent years. So far, none of these attempts have led to a major breakthrough. Clearly, much work still needs to be done to accept a standard model of MEAs for clinical purposes. In this paper, we review different microfabrication techniques of MEAs with their advantages and drawbacks, and comment on various coating materials to enhance electrode performance. Then, we propose high-density, three-dimensional (3D), silicon-based MEAs using micromachining methods. The geometries that will be used include arrays of penetrating variable-height probes. 展开更多
关键词 microelectrode arrays Electrodes-Tissues CONTACTS microelectrode IMPEDANCE Neural PROSTHESIS
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Microelectrode array recordings of excitability of low Mg^(2+)-induced acute hippocampal slices 被引量:3
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作者 Fan Yang Xinwei Gong +3 位作者 Haiqing Gong Puming Zhang Peiji Liang Qinchi Lu 《Neural Regeneration Research》 SCIE CAS CSCD 2010年第20期1548-1551,共4页
Neuronal connections can be detected by neuronal network discharges in hippocampal neurons cultured on multi-electrodes.However,the multi-electrode-array(MEA)has not been widely used in hippocampal slice culture stu... Neuronal connections can be detected by neuronal network discharges in hippocampal neurons cultured on multi-electrodes.However,the multi-electrode-array(MEA)has not been widely used in hippocampal slice culture studies focused on epilepsy.The present study induced spontaneous synchronous epileptiform activity using low Mg2+artificial cerebrospinal fluid on acute hippocampal slices to record hippocampal discharges with MEA.Results showed that burst duration and average number of spikes in a burst were significantly greater in the CA3 compared with dentate gyrus and CA1 areas.In Schaffer cut-off group,CA1 area discharges disappeared,but synchronous discharges remained in the CA3 area.Moreover,synchronous discharge frequency in the Schaffer cut-off group was similar to control.However,burst duration and average number of spikes in a burst were significantly decreased compared with control(P 〈 0.05).Results demonstrated that highest neuronal excitability occurred in the CA3 area,and synchronous discharges induced by low Mg2+originated from the CA3 region. 展开更多
关键词 EPILEPSY low-Mg2+ HIPPOCAMPUS internal circuit-loop microelectrode array
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THE STUDY ON NOVEL MICROELECTRODE ARRAY CHIPS FOR THE DETECTION OF HEAVY METALS IN WATER POLLUTION 被引量:1
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作者 HUI-XIN ZHAO WEI CAI +2 位作者 DA HA HAO WAN PING WANG 《Journal of Innovative Optical Health Sciences》 SCIE EI CAS 2012年第1期11-17,共7页
Qualitative and quantitative analysis of trace heavy metals in aqueous environment are rapidly assuming significance along with the rapid development of industry.In this paper,gold microelectrode array(MEA)plated with... Qualitative and quantitative analysis of trace heavy metals in aqueous environment are rapidly assuming significance along with the rapid development of industry.In this paper,gold microelectrode array(MEA)plated with mercury film was used for simultaneous voltammetric detection of zinc,cadmium,lead and copper ions in water.The electrochemical behavior and the actual surface area of the MEA were investigated by cyclic voltammetry in K_(3)[Fe(CN)_(6)].Electrochemical impedance spectrum(EIS)was utilized to examine the deposition of mercury on the electrode surface.Based on anodic stripping voltammetry,mercury filmAu MEA was applied to the detection of heavy metals in artificial analyte,where good calibrate linearity was obtained for cadmium,lead and copper ions,but with zinc exhibiting poor linearity. 展开更多
关键词 microelectrode array(mea)chip heavy metals detection water pollution
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Electrochemical Properties of Polypyrrole-Coated Microelectrode Array and the Fabrication of Polypyrrole-Based Microelectronic Devices 被引量:2
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作者 CAI Chen-xin,JU Huang-xian and CHEN Hong-yuan (Department of Chemistry,Nanjing University,Nanjing,210093) 《Chemical Research in Chinese Universities》 SCIE CAS CSCD 1995年第2期163-169,共7页
Conducting polymers have been studied extensively. An interesting property of the conducting polymer is that the conductivity of some polymers, such as polypyrrolc, polyaniline, poly(3-methylthiophene) etc. , is affec... Conducting polymers have been studied extensively. An interesting property of the conducting polymer is that the conductivity of some polymers, such as polypyrrolc, polyaniline, poly(3-methylthiophene) etc. , is affected by the voltage applied to them. For polypyrrole, the oxidized state is an electronic conductor and the reduced state is essentially insulating. Using this property, one can fabricate the polymer-based electronic devices. Experimental results of Pickun 展开更多
关键词 microelectrode Microeiectrode array Chemically modified electrode Polymer-based electronic devices Polypyrrole
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Automatic Monitoring Electronic Tongue with MEAs for Environmental Analysis
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作者 Shaofang Zou Hong Men +2 位作者 Yi Li Yinping Wang Ping Wang 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2006年第A03期381-384,共4页
An automatic monitoring electronic tongue based on differential pulse stripping voltammetry (DPSV) was developed for heavy metals analysis.Simultaneous detections of trace Zn(Ⅱ),Cd(Ⅱ),Pb(Ⅱ),Cu(Ⅱ),Fe(Ⅲ) and Cr(Ⅲ)... An automatic monitoring electronic tongue based on differential pulse stripping voltammetry (DPSV) was developed for heavy metals analysis.Simultaneous detections of trace Zn(Ⅱ),Cd(Ⅱ),Pb(Ⅱ),Cu(Ⅱ),Fe(Ⅲ) and Cr(Ⅲ) in water samples were performed with three electrochemical sensors.The sensor chip combined a silicon-based Hg-coated Au microelectrode array (MEA) as the working electrode on one side with an Ag/AgCl reference electrode and a Pt counter electrode on the other side.With a computer controlled multipotentiostat,pumps and valves,the electronic tongue realized in-situ real-time detection of the six metals mentioned above at parts-per-billion level without manual operation. 展开更多
关键词 electronic tongue heavy metals automatic monitoring microelectrode array multipotentiostat
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Quantitative evaluation of extrinsic factors influencing electrical excitability in neuronal networks: Voltage Threshold Measurement Method(VTMM)
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作者 Shuai An Yong-Fang Zhao +1 位作者 Xiao-Ying Lu Zhi-Gong Wang 《Neural Regeneration Research》 SCIE CAS CSCD 2018年第6期1026-1035,共10页
The electrical excitability of neural networks is influenced by different environmental factors. Effective and simple methods are required to objectively and quantitatively evaluate the influence of such factors, incl... The electrical excitability of neural networks is influenced by different environmental factors. Effective and simple methods are required to objectively and quantitatively evaluate the influence of such factors, including variations in temperature and pharmaceutical dosage. The aim of this paper was to introduce ‘the voltage threshold measurement method', which is a new method using microelectrode arrays that can quantitatively evaluate the influence of different factors on the electrical excitability of neural networks. We sought to verify the feasibility and efficacy of the method by studying the effects of acetylcholine, ethanol, and temperature on hippocampal neuronal networks and hippocampal brain slices. First, we determined the voltage of the stimulation pulse signal that elicited action potentials in the two types of neural networks under normal conditions. Second, we obtained the voltage thresholds for the two types of neural networks under different concentrations of acetylcholine, ethanol, and different temperatures. Finally, we obtained the relationship between voltage threshold and the three influential factors. Our results indicated that the normal voltage thresholds of the hippocampal neuronal network and hippocampal slice preparation were 56 and 31 m V, respectively. The voltage thresholds of the two types of neural networks were inversely proportional to acetylcholine concentration, and had an exponential dependency on ethanol concentration. The curves of the voltage threshold and the temperature of the medium for the two types of neural networks were U-shaped. The hippocampal neuronal network and hippocampal slice preparations lost their excitability when the temperature of the medium decreased below 34 and 33°C or increased above 42 and 43°C, respectively. These results demonstrate that the voltage threshold measurement method is effective and simple for examining the performance/excitability of neuronal networks. 展开更多
关键词 nerve regeneration threshold voltage microelectrode array electrical excitability of neural networks ACETYLCHOLINE ALCOHOL temperature hippocampal neuronal network hippocampal slice electrical stimulation action potentials neural regeneration
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一种鲁棒区分PJVS交流量子电压台阶平稳区与过渡区的判据
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作者 麻滨麒 徐晴 +3 位作者 陈铭明 赵伟 王磊 李世松 《高电压技术》 EI CAS CSCD 北大核心 2024年第2期784-792,共9页
可编程约瑟夫森电压基准(programmable Josephson voltage standard,PJVS)通过生成阶梯波构建交流量子电压,其产生量子电压台阶过程中,会伴生过渡过程,导致电压台阶两端数据的准确性较低。常见的数据处理方法是将过渡过程的数据剔除,仅... 可编程约瑟夫森电压基准(programmable Josephson voltage standard,PJVS)通过生成阶梯波构建交流量子电压,其产生量子电压台阶过程中,会伴生过渡过程,导致电压台阶两端数据的准确性较低。常见的数据处理方法是将过渡过程的数据剔除,仅利用量子电压台阶上平稳区的数据,实现交流量子电压量值的复现。针对常用的3σ(σ为数据标准差)准则、片段采样方法等数据筛选准则,该文提出一种由量子电压台阶中心双向延拓并最小化A类测量不确定度的平稳区与过渡区判据,通过自动识别量子电压台阶的平稳区与过渡区,提升PJVS电压阶梯波复现交流电压量值的准确性。实验结果表明:该文提出的数据平稳区与过渡区的判据具有较高的鲁棒性和交流电压复现准确性,在2.5 kHz范围内,可使量子电压阶梯波信号复现交流电压幅值的偏差和A类测量不确定度均优于2.5×10-6。研究成果可有效提升量子电压阶梯波信号的测算准确性。 展开更多
关键词 阶梯波 可编程约瑟夫森结阵 信号过渡过程 交流量子电压 测量不确定度
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体外培养的神经元网络可塑性
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作者 邵琪 孟维伟 +1 位作者 李晓红 邵文威 《生物化学与生物物理进展》 SCIE CAS CSCD 北大核心 2024年第5期1000-1009,共10页
神经元网络是大脑执行高级认知行为的结构基础,研究证明学习记忆及神经退行性疾病与神经元网络可塑性密切相关。因此,揭示调控和改变神经元网络可塑性的机制对理解神经系统信息交互以及疾病治疗具有重大意义。目前,基于微电极阵列(micro... 神经元网络是大脑执行高级认知行为的结构基础,研究证明学习记忆及神经退行性疾病与神经元网络可塑性密切相关。因此,揭示调控和改变神经元网络可塑性的机制对理解神经系统信息交互以及疾病治疗具有重大意义。目前,基于微电极阵列(microelectrode array,MEA)培养的神经元网络是体外探究学习和记忆机制的理想模型,同时针对该模型的研究为预防和治疗神经退行性疾病提供了独特的视角。本文综述了基于MEA采集体外培养神经元网络的放电信号来构建功能网络的相关研究,分别从二维神经元网络和三维脑类器官发育,以及开环和闭环电刺激对神经元网络可塑性影响的角度,总结了体外培养神经元网络可塑性的相关研究,最后对该方向的应用前景进行了展望。 展开更多
关键词 微电极阵列 可塑性 功能网络 发育 电刺激调控
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用于单片集成MEA系统的神经信号探测电路和激励电路阵列(英文)
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作者 谢书珊 王志功 +1 位作者 潘海仙 吕晓迎 《Journal of Southeast University(English Edition)》 EI CAS 2009年第2期175-179,共5页
介绍了单片集成MEA系统和用于该系统的神经元信号探测电路和激励电路,基本单元电路是低功耗、低噪声、高增益和小版图尺寸的运算放大器.详细讨论了探测电路、激励电路和基本单元运算放大器的设计.神经元信号探测电路版图面积290μm×... 介绍了单片集成MEA系统和用于该系统的神经元信号探测电路和激励电路,基本单元电路是低功耗、低噪声、高增益和小版图尺寸的运算放大器.详细讨论了探测电路、激励电路和基本单元运算放大器的设计.神经元信号探测电路版图面积290μm×400μm,功耗2.02mW,等效输入噪声17.72nV/Hz,增益60.5dB,输出电压摆幅-2.48~+2.5V.激励电路版图面积130μm×290μm,功耗740μW,输出电压摆幅-2.5~2.04V.参数表明这2种电路适用于单片集成MEA系统.探测电路和单片集成MEA系统已经流片.探测电路的测试结果表明电路工作正常. 展开更多
关键词 神经信号 探测 噪声 微电极阵列 CMOS工艺
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Spatio-temporally resolved measurement of quantal exocytosis from single cells using microelectrode array modified with poly L-lysine and poly dopamine
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作者 Li Wang Sheng-Wei Xu +4 位作者 Hui-Ren Xu Yi-Lin Song Jun-Tao Liu Jin-Ping Luo Xin-Xia Cai 《Chinese Chemical Letters》 SCIE CAS CSCD 2016年第5期738-744,共7页
The subsecond, temporal, vesicular exocytosis is ubiquitous, but difficult detecting in communication mechanisms of cells. A microelectrode array (MEA), fabricated by MEMS technology, was applied successfully for re... The subsecond, temporal, vesicular exocytosis is ubiquitous, but difficult detecting in communication mechanisms of cells. A microelectrode array (MEA), fabricated by MEMS technology, was applied successfully for real-time monitoring of quantal exocytosis from single pheochromocytoma (PC12) cell, The developed MEA was evaluated by dopamine (DA) using electrochemical methods and the results revealed that the sensitivity of DA was improved to 12659.24 p.A L mmol 1 cm 2. The modified MEA was used to detect in vitro vesicular exocytosis of DA from single PCI 2 cells stimulated by concentrated 100 mmol L-1 K+ cell solution. A total of 592 spikes were measured and analyzed by three parameters and the statistical results revealed the population of each parameter was an approximate Gaussian distribution, and on average, 1.31 × 106 ± 9.25× 104 oxidizable molecules were released in each quantal exocytosis. In addition, results also indicate that a single PC12 cell probably releases the spikes with T ranging from 25.6 ms to 35.4 ms corresponding to/max ranging from 45.6 pA to 65.2 pA. The devices, including a homemade computer interface and the MEA modified with polymer film, provides a new means for further research on the neural, intercellular, communication mechanism. 展开更多
关键词 microelectrode array Quantal exocytosis Dopamine Parameter
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平面微电极阵列技术实验教学实践与探索
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作者 李华 许晴 +2 位作者 薛奋勤 刘丽娜 魏华 《基础医学教育》 2023年第9期810-814,共5页
平面微电极阵列技术实验教学课程注重培养学生动手技能的同时,开拓思维,将理论知识转化为科研能力。学生通过对大型仪器基本操作的学习与实践,从而掌握实验技术,为从事相关科研工作打下坚实的基础。文章介绍了课程内容,分享教学经验并... 平面微电极阵列技术实验教学课程注重培养学生动手技能的同时,开拓思维,将理论知识转化为科研能力。学生通过对大型仪器基本操作的学习与实践,从而掌握实验技术,为从事相关科研工作打下坚实的基础。文章介绍了课程内容,分享教学经验并针对实验中的问题提出解决方案,探讨性地提出改进设想,为进一步开展电生理实验提供了有益的借鉴。 展开更多
关键词 平面微电极阵列技术 电生理实验 教学改进 实验教学 大型仪器基本操作
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应用线性硅电极阵列检测海马场电位和单细胞动作电位 被引量:19
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作者 封洲燕 光磊 +2 位作者 郑晓静 王静 李淑辉 《生物化学与生物物理进展》 SCIE CAS CSCD 北大核心 2007年第4期401-407,共7页
近年来,硅材料微电极阵列发展迅速,μ为研究大脑神经细胞活动的时空特性提供了理想的手段.考察了线性硅材料微电极阵列在神经细胞电位检测中的稳定性,以及对于单细胞动作电位检测的有效性.实验结果表明,在麻醉大鼠海马CA1区场电位记录中... 近年来,硅材料微电极阵列发展迅速,μ为研究大脑神经细胞活动的时空特性提供了理想的手段.考察了线性硅材料微电极阵列在神经细胞电位检测中的稳定性,以及对于单细胞动作电位检测的有效性.实验结果表明,在麻醉大鼠海马CA1区场电位记录中,上下移动记录微电极200μm,对于正向和反向诱发电位的记录几乎没有影响,说明,线性微电极阵列对于神经细胞的损伤很小,检测性能稳定.电极阵列上处于细胞胞体层的测量点可以有效地记录到CA1神经细胞的动作电位发放,同一记录点上可以清楚地分辨出数个不同神经细胞的发放电位.实验结果显示了硅电极阵列操作简便、检测信号稳定和获取信息多等特点,对于开展微电极阵列应用研究的工作人员具有借鉴作用. 展开更多
关键词 硅电极阵列 场电位 细胞外动作电位 海马 记录稳定性
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神经元集群电信号探测用微电极阵列 被引量:3
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作者 潘海仙 吕晓迎 +3 位作者 王志功 王余峰 陆慧琴 沈洪妹 《东南大学学报(自然科学版)》 EI CAS CSCD 北大核心 2009年第3期468-472,共5页
介绍了一种用于神经元集群电信号探测的2×2微电极阵列芯片.该芯片集成了4个直径为20μm、中心间距为100μm的圆形微电极.4个电极点周围都布满地线作为参考电极,4个电极点与参考电极的间距分别为5,10,15和20μm.芯片版图设计及验证... 介绍了一种用于神经元集群电信号探测的2×2微电极阵列芯片.该芯片集成了4个直径为20μm、中心间距为100μm的圆形微电极.4个电极点周围都布满地线作为参考电极,4个电极点与参考电极的间距分别为5,10,15和20μm.芯片版图设计及验证采用华大九天系统设计软件Zeni完成,并通过无锡CSMC公司的0.6μm DMDP CMOS标准工艺实现,芯片面积为0.28mm×0.40mm.对芯片进行了在晶圆电学测试,采用频率为10Hz~1MHz,幅度为50mV的正弦信号作为输入信号,分别测试4个电极点的阻抗特性.测试结果表明,在10kHz处4个电极点的等效阻抗模值在0.7~2.1MΩ之间,达到了细胞外电信号测量的要求.在芯片表面进行了L-929细胞和胎鼠海马神经元培养实验,结果表明芯片经过表面生物相容性修饰后可用于细胞外电信号测量. 展开更多
关键词 CMOS 微电极阵列 神经元集群 细胞外测量
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基于SOI基底的高通量细胞电融合芯片 被引量:8
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作者 胡宁 杨军 +5 位作者 侯文生 郑小林 曹毅 杨静 许蓉 张瑞强 《高等学校化学学报》 SCIE EI CAS CSCD 北大核心 2009年第1期42-45,共4页
提出了一种以MEMS技术为基础,可在低电压驱动条件下工作的创新型细胞电融合芯片.该芯片的设计原理在于通过缩短微电极间的间距,在低电压条件下获得足够强度的排队和融合电场强度.原型芯片以SOI硅片为加工材料,通过刻蚀方式在顶层低阻硅... 提出了一种以MEMS技术为基础,可在低电压驱动条件下工作的创新型细胞电融合芯片.该芯片的设计原理在于通过缩短微电极间的间距,在低电压条件下获得足够强度的排队和融合电场强度.原型芯片以SOI硅片为加工材料,通过刻蚀方式在顶层低阻硅形成微电极和微通道;在微电极上沉淀2μm厚的铝膜以降低电阻率,提高导电性;通过PECVD方法形成150nm厚SiO2保障铝膜的抗腐蚀性及芯片生物相容性;芯片最终采用DIP法进行封装.在该芯片上进行了低电压(传统电融合设备工作电压的1/20)驱动条件下的基于介电电泳的细胞排队实验及后期的细胞电融合实验,结果表明,细胞多以两两结合的方式排列,与传统的细胞融合电仪器相比较,降低了多细胞排队概率,进而减少了传统电融合设备多细胞融合的概率,为细胞高效率融合奠定了基础.在加载的低电压短脉冲信号后,微通道中形成了高压短脉冲电场,在脉冲作用下,烟草原生质体细胞在微通道中发生了融合,融合时间(2min)远低于传统电融合方法(10~30min),融合率远远高于传统的PEG方法(融合率小于1%)和传统电融合方法(利用BTX ECM 2001细胞电融合系统得到,融合率小于5%). 展开更多
关键词 细胞电融合芯片 微电极阵列 仿真 介电电泳
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基于叉指阵列微电极的阻抗免疫传感器研究进展 被引量:15
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作者 颜小飞 汪懋华 安冬 《分析化学》 SCIE EI CAS CSCD 北大核心 2011年第10期1601-1610,共10页
叉指阵列微电极(Interdigitated array microelectrodes,IDAM)具有检出限低、灵敏度高和信噪比好等优点,近年来在分析化学领域引起了极大的关注。阻抗免疫传感器将IDAM与免疫测定技术相结合,通过抗原抗体的特异性反应引起IDAM之间介质... 叉指阵列微电极(Interdigitated array microelectrodes,IDAM)具有检出限低、灵敏度高和信噪比好等优点,近年来在分析化学领域引起了极大的关注。阻抗免疫传感器将IDAM与免疫测定技术相结合,通过抗原抗体的特异性反应引起IDAM之间介质的阻抗变化实现对目标物的检测。本文分析了IDAM的特点、制作材料以及电极设计参数对系统检测性能的影响,评述了IDAM阻抗免疫传感器的工作原理、等效电路分析,综述了IDAM阻抗免疫传感器在食品安全分析和临床诊断领域中的应用,并讨论了目前研究中存在的问题及其发展趋势。 展开更多
关键词 叉指阵列微电极 阻抗 免疫传感器 等效电路 综述
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基于Parylene的柔性微电极阵列微加工工艺研究 被引量:7
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作者 吴义伯 侯安州 +3 位作者 倪鹤南 徐爱兰 惠春 任秋实 《半导体技术》 CAS CSCD 北大核心 2007年第12期1018-1020,1036,共4页
基底集成的柔性微电极阵列(MEAs)从一个全新的角度演绎了植入式神经系统,对神经进行电刺激并记录神经电信号。以一种新型聚合物材料聚对二甲苯(parylene)为基底,制备出了用于神经接口的柔性神经微电极阵列。采用MEMS加工技术,设计了一... 基底集成的柔性微电极阵列(MEAs)从一个全新的角度演绎了植入式神经系统,对神经进行电刺激并记录神经电信号。以一种新型聚合物材料聚对二甲苯(parylene)为基底,制备出了用于神经接口的柔性神经微电极阵列。采用MEMS加工技术,设计了一种基于parylene柔性神经微电极阵列的加工工艺方法,并讨论了在流片过程中的关键问题,如掩膜层的选择、电极的剥离及焊接与封装等。该柔性微电极阵列在用于视觉假体的神经接口方面具有独特的应用优势。 展开更多
关键词 柔性微电极阵列 聚对二甲苯 微加工工艺 神经接口
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神经电生理微电极阵列检测系统研制 被引量:8
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作者 林楠森 宋轶琳 +1 位作者 刘春秀 蔡新霞 《电子与信息学报》 EI CSCD 北大核心 2011年第8期2028-2032,共5页
该文设计了基于微电极阵列的16通道神经电生理信号检测系统。检测系统由硬件和软件两部分组成,其中硬件部分可分为以下3个模块:微电极阵列接口模块,用于实现微电极阵列和检测系统的可靠连接;多通道信号放大模块,用于对微弱电生理信号进... 该文设计了基于微电极阵列的16通道神经电生理信号检测系统。检测系统由硬件和软件两部分组成,其中硬件部分可分为以下3个模块:微电极阵列接口模块,用于实现微电极阵列和检测系统的可靠连接;多通道信号放大模块,用于对微弱电生理信号进行提取并放大至合适的幅度;数据采集模块,对放大后的电生理信号进行高速数据采集并通过USB2.0接口和计算机相连。软件部分采用多线程、多缓存等技术保证对信号的实时观测和分析。对检测系统的主要参数进行了测试,并结合实验室自制神经微电极阵列对SD大鼠海马区脑切片进行神经电生理信号的检测。系统的输入噪声Vrms<2μV,放大倍数为1000倍,频率带宽范围为10~3000 Hz,并且能够检测到放电幅度为20μV左右的神经电生理信号。该文针对微电极阵列神经电生理信号检测中的技术难点,从硬件和软件设计上保证微弱信号的提取,检测系统的分辨率可达0.6μV,各项参数能够满足神经电生理信号的检测需要。 展开更多
关键词 微电极阵列 检测系统 神经电生理信号
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基于Parylene的柔性生物微电极阵列的制作 被引量:5
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作者 芮岳峰 王亚军 +1 位作者 刘景全 杨春生 《纳米技术与精密工程》 EI CAS CSCD 2011年第5期422-426,共5页
在神经工程中,微电极阵列是神经系统与外界电子电路的接口,其性能决定了整个神经系统的信号采集和刺激的效果.提出了一种基于Parylene的半球形柔性生物微电极阵列.在微电极的制备过程中,使用了光刻胶热熔技术和MEMS技术.半球形形貌的微... 在神经工程中,微电极阵列是神经系统与外界电子电路的接口,其性能决定了整个神经系统的信号采集和刺激的效果.提出了一种基于Parylene的半球形柔性生物微电极阵列.在微电极的制备过程中,使用了光刻胶热熔技术和MEMS技术.半球形形貌的微电极有利于形成和神经组织的良好接触,并且相比同底面积的平板电极,表面积增加为2倍,这有利于降低界面阻抗,降低系统功耗.使用化学气相沉积法沉积Parylene C薄膜作为微电极的封装材料,它具有良好的生物相容性和柔性,可以降低对神经组织的损害.实验结果表明,与此半球形微电极底面积大1.3倍的平板电极相比,半球形微电极的界面阻抗下降了55%,并且界面阻抗随着微电极顶部开口直径的变化而变化.使用Comsol有限元软件进行了电极/组织液液面流出电流密度仿真,仿真结果也表明,微电极的流出电流密度也随着微电极顶部开口直径的变化而变化,因此可以通过调整微电极顶部开口直径来调节电流密度,从而满足不同部位需要不同电流密度刺激的要求. 展开更多
关键词 神经工程 MEMS PARYLENE 微电极阵列
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微型电化学传感器研究的最新进展 被引量:14
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作者 邹绍芳 门洪 王平 《传感技术学报》 CAS CSCD 2004年第2期336-341,共6页
随着各种微加工技术广泛地应用于电化学传感器中 ,微型传感器在电化学分析中的应用取得了快速的发展。微型传感器易于实现批量生产 ,只需要少量的样品 ,大大降低有毒试剂的消耗 ,减少环境污染 ,同时具有分析成本低 ,响应时间快 ,检测下... 随着各种微加工技术广泛地应用于电化学传感器中 ,微型传感器在电化学分析中的应用取得了快速的发展。微型传感器易于实现批量生产 ,只需要少量的样品 ,大大降低有毒试剂的消耗 ,减少环境污染 ,同时具有分析成本低 ,响应时间快 ,检测下限低和适用于现场快速检测等优点。本文综述了微型电化学传感器及其阵列的最新研究进展 ,介绍了不同结构的基于汞膜、碳 /石墨和贵金属等材料的微型传感器的特点和采用腐蚀、剥离、金属掩膜和丝网印刷等微加工技术的微型传感器及其阵列制作工艺 ,阐明了微型电化学传感器与溶出伏安法相结合 ,在生物医学、食品和环境检测中将具有广阔的应用前景。 展开更多
关键词 电化学传感器 重金属检测 微电极 溶出伏安法 传感器阵列
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