Finite element simulation of the micromachining of nanosized-silicon-carbide-particle reinforced composite materials based on the cohesive zone model

A finite element method based on the cohesive zone model was used to study the micromachining process of nanosized silicon-carbide-particle(SiCp) reinforced aluminum matrix composites. As a hierarchical multiscale simulation method, the parameters for the cohesive zone model were obtained from the stress-displacement curves of the molecular dynamics simulation. The model considers the random properties of the siliconcarbide-particle distribution and the interface of bonding between the silicon carbide particles and the matrix.The machining mechanics was analyzed according to the chip morphology, stress distribution, cutting temperature, and cutting force. The simulation results revealed that the random distribution of nanosized SiCp causes non-uniform interaction between the tool and the reinforcement particles. This deformation mechanics leads to inhomogeneous stress distribution and irregular cutting force variation.

Fabrication of Ordered Micro/Nanostructures Using Probe‑Based Force‑Controlled Micromachining System

This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/nanostructures.Both the experimental and finite element simulation approaches are employed to investigate the influence of the interval between the adjacent indentations and the rotation angle of the probe on the formed micro/nanostructures.The non-contacting part between indenter and the sample material and the height of the material pile-up are two competing factors to determine the depth relationship between the adjacent indentations.For the one array indentations,nanostructures with good depth consistency and periodicity can be formed after the depth of the indentation becoming stable,and the variation of the rotation angle results in the large difference between the morphology of the formed nanostructures at the bottom of the one array indentation.In addition,for the indentation arrays,the nanostructures with good consistency and periodicity of the shape and depth can be generated with the spacing greater than 1μm.Finally,Raman tests are also carried out based on the obtained ordered micro/nanostructures with Rhodamine probe molecule.The indentation arrays with a smaller spacing lead to better the enhancement effect of the substrate,which has the potential applications in the fields of biological or chemical molecular detection.

Electrochemical micromachining of micro-dimple arrays on cylindrical inner surfaces using a dry-film photoresist

The application of surface textures has been employed to improve the tribological performance of various mechanical components. Various techniques have been used for the application of surface textures such as micro-dimple arrays, but the fabrication of such arrays on cylindrical inner surfaces remains a challenge. In this study, a dry-film photoresist is used as a mask during through-mask electrochemical micromachining to successfully prepare micro-dimple arrays with dimples 94 lm in diameter and 22.7 lm deep on cylindrical inner surfaces, with a machining time of 9 s and an applied voltage of 8 V. The versatility of this method is demonstrated, as are its potential low cost and high efficiency. It is also shown that for a fixed dimple depth, a smaller dimple diameter can be obtained using a combination of lower current density and longer machining time in a passivating sodium nitrate electrolyte.

Thermally reconfigurable quantum photonic circuits at telecom wavelength by femtosecond laser micromachining

The importance of integrated quantum photonics in the telecom band is based on the possibility of interfacing with the optical network infrastructure that was developed for classical communications.In this framework,femtosecond laser-written integrated photonic circuits,which have already been assessed for use in quantum information experiments in the 800-nm wavelength range,have great potential.In fact,these circuits,being written in glass,can be perfectly mode-matched at telecom wavelength to the in/out coupling fibers,which is a key requirement for a low-loss processing node in future quantum optical networks.In addition,for several applications,quantum photonic devices must be dynamically reconfigurable.Here,we experimentally demonstrate the high performance of femtosecond laser-written photonic circuits for use in quantum experiments in the telecom band,and we demonstrate the use of thermal shifters,which were also fabricated using the same femtosecond laser,to accurately tune such circuits.State-of-the-art manipulation of single-and two-photon states is demonstrated,with fringe visibilities greater than 95%.The results of this work open the way to the realization of reconfigurable quantum photonic circuits based on this technological platform.

Possibility of biological micromachining used for metal removal

Besides the physical and chemical machining methods, a biological machining method has been presented. The experimental results show that machining of pure iron, pure copper and constantan by a special bacterium, Thiobacillus ferrooxidans , was possible. A micro gear and grooves on pure copper piece were bio machined. The depth of the groove so bio machined was directly dependent on the machining time. The biomachining mechanism has been analyzed from the electron transport chain (ETC) in the T. ferrooxidans membrane, and its developing direction has been also discussed.

Electrochemical micromachining of microgroove arrays on phosphor bronze surface for improving the tribological performance

A high friction coefficient and a low wear rate of contacted surfaces are essential elements to friction pairs between the stator and the rotor in ultrasonic motors. It has been shown that surface textures have a significant effect on improving the tribological performance of friction pairs.In this paper, microgroove arrays are introduced to the stator surface for improving the tribological performance of friction pairs between the stator and the rotor in ultrasonic motors. Microgrooves were fabricated on a phosphor bronze surface by through-mask electrochemical micromachining（TMEMM）. Parameters, namely, the electrolyte inlet pressure, applied voltage, pulse duty cycle,and frequency, were varied to investigate their influences on the dimensions and morphology of the microgrooves. Results showed that the width and depth of the microgrooves were strongly affected by the applied voltage and frequency, while the morphology of the microgrooves was dependent on the electrolyte inlet pressure and the pulse duty cycle. Compared with a smooth surface, the friction coefficient increased from 0.245 to 0.334 and less abrasion was obtained when a surface was textured with microgrooves of which the width and depth were 185.6 and 57.6 lm,respectively. Microgroove arrays might play an important role in enhancing the performance of ultrasonic motors.

Research on the technology of femtosecond laser micromachining based on image edge tracing

Aiming at fabrication of complex microstructures and micro-patterns, a kind of femtosecond laser micromachining technology based on the BMP image edge tracing was proposed. We introduced the general principle of this technology and discussed the implementation of the machining paths extraction, optimization, tracing and the feedback of the machining procession in detail. On the basis of this technology, control software for femtosecond laser micromachining was developed. Furthermore, we have accomplished the fabrication of complicated two-dimensional (2D) micro-patterns on a copper thin film. The results indicate that this technology can be used for digital control micromachining of complex patterns or microstructures at micron and submicron scales by femtosecond laser.

Analysis of the current density characteristics in through-mask electrochemical micromachining(TMEMM) for fabrication of micro-hole arrays on invar alloy film

Invar alloy consisting of 64% iron and 36% nickel has been widely used for the production of shadow masks for organic light emitting diodes（OLEDs） because of its low thermal expansion coefficient（1.86 × 10^-6cm/°C）.To fabricate micro-hole arrays on 30 lm invar alloy film,through-mask electrochemical micromachining（TMEMM） was developed and combined with a portion of the photolithography etching process.For precise hole shapes,patterned photoresist（PR） film was applied as an insulating mask.To investigate the relationship between the current density and the material removal rate,the principle of the electrochemical machining was studied with a focus on the equation.The finite element method（FEM） was used to verify the influence of each parameter on the current density on the invar alloy film surface.The parameters considered were the thickness of the PR mask,inter-electrode gap（IEG）,and electrolyte concentration.Design of experiments（DOE） was used to figure out the contribution of each parameter.A simulation was conducted with varying parameters to figure out their relationships with the current density.Optimization was conducted to select the suitable conditions.An experiment was carried out to verify the simulation results.It was possible to fabricate micro-hole arrays on invar alloy film using TMEMM,which is a promising method that can be applied to fabrications of OLEDs shadow masks.

3D multiphysic simulations of energy field and material process in radial ultrasonic rolling electrochemical micromachining

The radial ultrasonic rolling electrochemical micromachining(RUR-EMM)combined rolling electrochemical micromachining(R-EMM)and ultrasonic vibration was studied in this paper.The fundamental understanding of the machining process especially the interaction between multiphysics in the interelectrode gap(IEG)was investigated and discussed by the finite element method.The multiphysics coupling model including flow field model,Joule heating model,material dissolution model and vibration model was built.3D multiphysics simulation based on micro dimples process in RUR-EMM and R-EMM was proposed.Simulation results showed that the electrolyte flowed into and out IEG periodically,gas bubbles were easy to squeeze out and the gas void fraction deceased about 16%to 54%,the maximum current density increased by 1.36 times in RUR-EMM than in R-EMM in one vibration period of time.And application of the ultrasonic vibration increased the electrolyte temperature about 1.3–4.4%in IEG.Verification experiments of the micro dimple process denoted better corrosion consistency of array dimples in RUR-EMM,there was no island at the micro dimple bottom which always formed in R-EMM,and an aggregated deviation of less than 8.7%for the micro dimple depth and 4%for the material removal amount between theory and experiment was obtained.

Investigation on surface structuring generated by electrochemical micromachining

Surface geometrical features and their function- ality depend on the manufacturing process which is employed for fabrication of surface structures. Maskless electrochemical micromachining （EMM） is used to generate various surface structures for diminishing and controlling friction and wear to increase the lifetime, reliability, and efficiency of mechanical systems. This paper presents a method for the generation of structured surfaces on stainless steel （SS-304） surfaces by using maskless EMM. The micropatterned tool is composed of 800 μm diameter circular holes in a 5 × 5 matrix form. The indigenously developed EMM set up consists of an EMM cell, electrical power supply system, and a controlled vertical cross-flow electrolyte circulation arrangement to control the influence of process parameters during the generation of the micro features of structured surfaces. The single structured cathode tool is used for the mass production of structured surfaces with a short fabrication time in the industrial context by avoiding the use of an individual masking process for each workpiece. The process has been characterized in terms of the effects of predominant process parameters such as machining voltage, electrolyte concentration, duty ratio, pulsed frequency, and machining time on the machined surface characteristics such as current efficiency, machining accuracy, and depth of the circular pattern on the stainless steel surfaces. A mathematical model is also developed to determine the theoretical depth of the dimple pattern and correlate the theoretical depths with actual depths as obtained by experimentation. Moreover, an effort has been made to study the structuringcharacteristics on the basis of micrographs obtained duringthe EMM.

Encrypted optical fiber tag based on encoded fiber Bragg grating array

Optical fibers are typically used in telecommunications services for data transmission,where the use of fiber tags is essential to distinguish between the different transmission fibers or channels and thus ensure the working functionality of the communication system.Traditional physical entity marking methods for fiber labeling are bulky,easily confused,and,most importantly,the label information can be accessed easily by all potential users.This work proposes an encrypted optical fiber tag based on an encoded fiber Bragg grating(FBG)array that is fabricated using a point-by-point femtosecond laser pulse chain inscription method.Gratings with different resonant wavelengths and reflectivities are realized by adjusting the grating period and the refractive index modulations.It is demonstrated that a binary data sequence carried by a fiber tag can be inscribed into the fiber core in the form of an FBG array,and the tag data can be encrypted through appropriate design of the spatial distributions of the FBGs with various reflection wavelengths and reflectivities.The proposed fiber tag technology can be used for applications in port identification,encrypted data storage,and transmission in fiber networks.

Femtosecond laser direct writing of flexibly configured waveguide geometries in optical crystals:fabrication and application

Optical waveguides are far more than mere connecting elements in integrated optical systems and circuits.Benefiting from their high optical confinement and miniaturized footprints,waveguide structures established based on crystalline materials,particularly,are opening exciting possibilities and opportunities in photonic chips by facilitating their on-chip integration with different functionalities and highly compact photonic circuits.Femtosecond-laser-direct writing(FsLDW),as a true three-dimensional(3D)micromachining and microfabrication technology,allows rapid prototyping of on-demand waveguide geometries inside transparent materials via localized material modification.The success of FsLDW lies not only in its unsurpassed aptitude for realizing 3D devices but also in its remarkable material-independence that enables cross-platform solutions.This review emphasizes FsLDW fabrication of waveguide structures with 3D layouts in dielectric crystals.Their functionalities as passive and active photonic devices are also demonstrated and discussed.

Laser fabrication of functional micro-supercapacitors

Due to the rapid development of portable,wearable and implantable electronics in the fields of mobile communications,biomonitoring,and aerospace or defense,there is an increasing demand for miniaturized and lightweight energy storage devices.Micro-supercapacitors(MSCs)possessing long lifetime,high power density,environment friendliness and safety,have attracted great attention recently.Since the performance of the MSCs is mainly related to the structure of the active electrode,there is a great need to explore the efficient fabricating strategies to deterministically coordinate the structure and functionality of microdevices.Considering that laser technology possesses many superior features of facility,high-precision,low-cost,high-efficiency,shape-adaptability and maneuverability,herein we summarize the development of laser technologies in MSCs manufacturing,along with their strengths and weaknesses.The current achievements and challenges are also highlighted and discussed,aiming to provide a valuable reference for the rational design and manufacture of MSCs in the future.

ANALYSIS OF NANO CHANNEL FORMATION IN QUARTZ CUBES BY LASER-INDUCED PROCESS

A novel laser processing technique was developed for making channels in the nano regime in this paper.A Nd:YAG laser was used to dry fabricate micro channels(25μm～100μm di- ameter)in a 1 cm^3 fused silica substrate by thermal-induced processing.By controlling the locations of these initiating micro channels on a silica cube,1D-controllable self-connecting nano fractures can be formed as rectangular channels.These nano channels are smooth and with extremely high aspect ratio(～10~4 depth to width ratio).A possible mechanism is proposed to explain the formation of the nano channels.This laser-based nano channel fabrication technique is fast and inexpensive,and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.

Technologies and applications of silicon-based micro-optical electromechanical systems:A brief review

Micro-optical electromechanical systems(MOEMS)combine the merits of micro-electromechanical systems(MEMS)and micro-optics to enable unique optical functions for a wide range of advanced applications.Using simple external electromechanical control methods,such as electrostatic,magnetic or thermal effects,Si-based MOEMS can achieve precise dynamic optical modulation.In this paper,we will briefly review the technologies and applications of Si-based MOEMS.Their basic working principles,advantages,general materials and micromachining fabrication technologies are introduced concisely,followed by research progress of advanced Si-based MOEMS devices,including micromirrors/micromirror arrays,micro-spectrometers,and optical/photonic switches.Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing,they have several promising applications in optical communications,digital light processing,and optical sensing.Finally,future research and development prospects of Si-based MOEMS are discussed.

Advances in femtosecond laser direct writing of fiber Bragg gratings in multicore fibers:technology,sensor and laser applications

In this article,we review recent advances in the technology of writing fiber Bragg gratings(FBGs)in selected cores of multicore fibers(MCFs)by using femtosecond laser pulses.The writing technology of such a key element as the FBG opens up wide opportunities for the creation of next generation fiber lasers and sensors based on MCFs.The advantages of the technology are shown by using the examples of 3D shape sensors,acoustic emission sensors with spatially multiplexed channels,as well as multicore fiber Raman lasers.

Theoretical and Experimental Investigation of Laser Milling Assisted with Jet Electrochemical Machining

In laser milling assisted with jet electrochemical machining(LMAJECM),the source of energy is a pulsed laser beam aligned coaxially with a jet of electrolyte,which focuses optical energy on the surface of workpiece.The impact of jet of electrolyte develops a state-of-art work to perform operations such as electrolytic etching,effective cooling,and transportation of debris.Therefore,a special jet cell is designed to obtain stable jet as to be a kind of noncontact tool,i.e.,electrode.According to the theoretical model of on-off pulse time process,laser machining and electrolytic anodization are simulated by finite element analysis(FEA)method.Grooves on a 0.5mm thick 321 stainless steel sheet produced by LMAJECM is performed with pulsed Nd:YAG laser at the second harmonic wavelength.Compared with laser milling under ambient atmosphere conditions,the recast layer and burrs are effectively diminished.And the accuracy of depth is dedicated to laser milling,whilst that of width is dominated by jet electrochemical machining.It is demonstrated that LMAJECM can be a highly potential approach for fabricating 3-D micro components.

A Novel Al_2O_3-Based Semiconductor Gas Sensor for CO and CH_4 Detection

A new type of semiconductor gas sensor fabricated on an alumina substrate for CO and CH_4 detection has been developed.The alumina substrate was obtained by an anodizing method companying with micromachining to form patterned structure.Gas sensitive material was made of nano-sized SnO_2 powder prepared by a chemical precipitation method.Au (0.048wt.%) and Pd (0.3 wt%) were doped to SnO_2 powder to increase sensitivity to CO and CH_4,respectively.The heating power and sensing performance were measured with an automatic test system.The results show that the sensors have remarkable responses and certain selectivity to the target gases.Our study demonstrates that alumina substrate can be successfully applied in sensor micromachining technology.

DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS

Micromachined piezoresistive flowmeters with four different types of sensing struc- tures have been designed,fabricated and tested.Piezoresistors were defined at the end of the sensors through p-diffusion,and their values were about 3.5kΩ.Wheatstone bridge was configured with the piezoresistors in order to measure the output response.The output voltage increases with increasing flow rate of air,obeying determined relationships.The testing results show that the sensors that are designed for measuring 10L/M in full operational range have desired sensitivities.The sensor chip is manufactured with bulk-micromachining technologies,requiring a set of seven masks.