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Synthesis and microwave absorption performance of heat-treated RF/SiO_(2)aerogels
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作者 Xinli Ye Hao Yu +4 位作者 Kai Zheng Shan Li Xiaomin Ma Bangxiao Mao Junxiong Zhang 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2024年第4期177-186,共10页
The well-designed composite with satisfactory electromagnetic microwave absorption at high temperatures remains a serious challenge.Herein,we fabricated a resorcinol-formaldehyde/silica dioxide composite aerogel(RF/Si... The well-designed composite with satisfactory electromagnetic microwave absorption at high temperatures remains a serious challenge.Herein,we fabricated a resorcinol-formaldehyde/silica dioxide composite aerogel(RF/SiO_(2))with a three-dimensional network structure using sol-gel,atmospheric pressure drying technique as well as heat-treated processes to achieve enhanced microwave absorption capabilities in the low frequency range.The pristine RF/SiO_(2)aerogel presented a typical micropores structure with a surface area,porous volume,and density of 146.82 m^(2)/g,62.40%,and 0.28 cm^(3)/g,respectively.Remarkably,the RF/SiO_(2)aerogel showed an effective absorption bandwidth of 3.56 GHz and a minimum reflection loss value of-46.10 d B at 2.25 mm after being heat-treated at 1500°C,while the maximum effective absorption bandwidth was 3.60 GHz at 2.30 mm.The intricate three-dimensional networks possessed remarkable impedance matching,multiple attenuation mechanisms,interfacial polarization,and dielectric loss,which were attributed to the exceptional ability to absorb electromagnetic microwaves.It offered a fresh approach to creating adaptable and effective microwave absorption materials in military defense. 展开更多
关键词 rf/SiO_(2) AEROGEL Heat-treated microwave absorption
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ENERGY-EFFICIENT MICROWAVE COMPONENTS FOR MOBILE COMMUNICATION 被引量:2
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作者 Yuanan Liu Quanyuan Feng Fadhel M. Ghannouchi 《China Communications》 SCIE CSCD 2017年第2期19-20,共2页
In the coexisted world of 3G,4G,5G and many other specialized wireless communication systems,billions of connections could be existing for various information transmission types.Unluckily,data show that the increase o... In the coexisted world of 3G,4G,5G and many other specialized wireless communication systems,billions of connections could be existing for various information transmission types.Unluckily,data show that the increase of network capacity is heavily more than the increase of the network energy efficiency in recent years,which could lead to more energy consumption per transmitted bit in the future network.As basic units in mobile communication systems,microwave/RF components and modules play key roles 展开更多
关键词 HIGH data ENERGY-EFFICIENT microwave COMPONENTS FOR MOBILE communication PAPR SHOW DPA
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Integrated 3D Fan-out Package of RF Microsystem and Antenna for 5G Communications
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作者 XIA Chenhui WANG Gang +1 位作者 WANG Bo MING Xuefei 《ZTE Communications》 2020年第3期33-41,共9页
A 3D fan-out packaging method for the integration of 5G communication RF microsystem and antenna is studied.First of all,through the double-sided wiring technology on the glass wafer,the fabrication of 5G antenna arra... A 3D fan-out packaging method for the integration of 5G communication RF microsystem and antenna is studied.First of all,through the double-sided wiring technology on the glass wafer,the fabrication of 5G antenna array is realized.Then the low power devices such as through silicon via(TSV)transfer chips,filters and antenna tuners are flip-welded on the glass wafer,and the glass wafer is reformed into a wafer permanently bonded with glass and resin by the injection molding process with resin material.Finally,the thinning resin surface leaks out of the TSV transfer chip,the rewiring is carried out on the resin surface,and then the power amplifier,low-noise amplifier,power management and other devices are flip-welded on the resin wafer surface.A ball grid array(BGA)is implanted to form the final package.The loss of the RF transmission line is measured by using the RF millimeter wave probe table.The results show that the RF transmission loss from the chip end to the antenna end in the fan-out package is very small,and it is only 0.26 dB/mm when working in 60 GHz.A slot coupling antenna is designed on the glass wafer.The antenna can operate at 60 GHz and the maximum gain can reach 6 dB within the working bandwidth.This demonstration successfully provides a feasible solution for the 3D fan-out integration of RF microsystem and antenna in 5G communications. 展开更多
关键词 AIP fan‐out package rf microsystem 3D integration 5G communications
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Strain-Insensitive Hierarchically Structured Stretchable Microstrip Antennas for Robust Wireless Communication 被引量:2
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作者 Jia Zhu Senhao Zhang +8 位作者 Ning Yi Chaoyun Song Donghai Qiu Zhihui Hu Bowen Li Chenghao Xing Hongbo Yang Qing Wang Huanyu Cheng 《Nano-Micro Letters》 SCIE EI CAS CSCD 2021年第8期1-12,共12页
As the key component of wireless data transmission and powering,stretchable antennas play an indispensable role in flexible/stretchable electronics.However,they often suffer from frequency detuning upon mechanical def... As the key component of wireless data transmission and powering,stretchable antennas play an indispensable role in flexible/stretchable electronics.However,they often suffer from frequency detuning upon mechanical deformations;thus,their applications are limited to wireless sensing with wireless transmission capabilities remaining elusive.Here,a hierarchically structured stretchable microstrip antenna with meshed patterns arranged in an arched shape showcases tunable resonance frequency upon deformations with improved overall stretchability.The almost unchanged resonance frequency during deformations enables robust on-body wireless communication and RF energy harvesting,whereas the rapid changing resonance frequency with deformations allows for wireless sensing.The proposed stretchable microstrip antenna was demonstrated to communicate wirelessly with a transmitter(input power of−3 dBm)efficiently(i.e.,the receiving power higher than−100 dBm over a distance of 100 m)on human bodies even upon 25%stretching.The flexibility in structural engineering combined with the coupled mechanical-electromagnetic simulations,provides a versatile engineering toolkit to design stretchable microstrip antennas and other potential wireless devices for stretchable electronics. 展开更多
关键词 Stretchable microstrip antennas Strain-insensitive resonance frequency Wireless communication rf energy harvesting Wearable and bio-integrated electronics
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Create Your Own Data and Energy Integrated Communication Network:A Brief Tutorial and a Prototype System 被引量:2
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作者 Yali Zheng Yitian Zhang +2 位作者 Yang Wang Jie Hu Kun Yang 《China Communications》 SCIE CSCD 2020年第9期193-209,共17页
In order to satisfy the ever-increasing energy appetite of the massive battery-powered and batteryless communication devices,radio frequency(RF)signals have been relied upon for transferring wireless power to them.The... In order to satisfy the ever-increasing energy appetite of the massive battery-powered and batteryless communication devices,radio frequency(RF)signals have been relied upon for transferring wireless power to them.The joint coordination of wireless power transfer(WPT)and wireless information transfer(WIT)yields simultaneous wireless information and power transfer(SWIPT)as well as data and energy integrated communication network(DEIN).However,as a promising technique,few efforts are invested in the hardware implementation of DEIN.In order to make DEIN a reality,this paper focuses on hardware implementation of a DEIN.It firstly provides a brief tutorial on SWIPT,while summarising the latest hardware design of WPT transceiver and the existing commercial solutions.Then,a prototype design in DEIN with full protocol stack is elaborated,followed by its performance evaluation. 展开更多
关键词 data and energy integrated communication network(DEIN) wireless power transfer(WPT) simultaneously wireless information and power transfer(SWIPT) rf charging hardware implementation
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Study of High-Temperature Superconductor Diplexers for Satellite Communications 被引量:1
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作者 刘娟秀 羊恺 +3 位作者 罗正祥 补世荣 宁俊松 张天良 《Journal of Electronic Science and Technology of China》 2005年第3期260-263,共4页
The high-temperature superconductor (HTSC) resonator and diplexer are simulated by full-wave tools. A newly developed miniature HTSC diplexer is designed and fabricated on double sided YBa2Cu3O7 (YBCO) film (YBCO... The high-temperature superconductor (HTSC) resonator and diplexer are simulated by full-wave tools. A newly developed miniature HTSC diplexer is designed and fabricated on double sided YBa2Cu3O7 (YBCO) film (YBCO/LaAlO3/YBCO), the thickness of which is 400 nm for YBCO and 0.5 mm for the LaAlO3. The measured results show a good agreement with the simulation. The volume and mass of the diplexers are greatly reduced by miniaturized configuration. 展开更多
关键词 high-temperature superconductor microwave DIPLEXER satellite communication
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Design of Transmitter Combiner for 800MHz Trucking Mobile Communication
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作者 马汉炎 吴群 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 1996年第3期28-32,共5页
The structural composition, scheme selection and component design of a five-channel transmitter combiner for 800MHz trucking mobile communication system (TMC) is proposed. More attentions have been paid to the analysi... The structural composition, scheme selection and component design of a five-channel transmitter combiner for 800MHz trucking mobile communication system (TMC) is proposed. More attentions have been paid to the analysis and design of the high-Q microwave resonant cavity with accurate tuning structure. Also, a model transmitter combiner designed by the authors is proposed. Test results of the combiner are given. It has been proved that the technical specifications of the combiner have reached an advanced technical level compared with the products of the same kind imported from abroad. 展开更多
关键词 ss:Transmitter COMBINER mobile communication microwave RESONANT CAVITY
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The Experimental Exploration and Discovery of DNA Communication between the Plants
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作者 Xinzhou Yuan Jiafeng Yuan +3 位作者 Zhongxian Deng Shikui Wang Zhen Yang Qiao Bi 《Journal of Modern Physics》 CAS 2022年第11期1499-1517,共19页
For the first time, through the invention of Compensating Bio-information Energy (CBE) technology and bioinformatics breeding machine, we have completed a number of experiments by using plant signals to transfer plant... For the first time, through the invention of Compensating Bio-information Energy (CBE) technology and bioinformatics breeding machine, we have completed a number of experiments by using plant signals to transfer plant genetic traits in the same family or across families, and discovered the transfer phenomenon of life genetic information. The test results show that plants can change from random variation to controllable and directional variation, thus opening up plant asexual, no molecular transfer, fast and low-cost breeding. The new approach provides new evidence for the connection of information energy waves between plant DNA, which deserves the attention and in-depth study of the scientific community. 展开更多
关键词 Biological Signal Biological microwave Radiation DNA communication Bio-Information Breeding Machine
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Microwave Reflectometry on HL-2A Tokamak
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作者 LIU Zetian XIAO Weiwen DING Xuantong CAO Jianyong SHI Zhongbing LI Yingliang LU Jie LUO Cuiwen 《Southwestern Institute of Physics Annual Report》 2005年第1期32-34,共3页
One of the most important electron density diagnostics, microwave reflectometry, has been developed on many large and medium nuclear fusion devices in recent years . Not only the electron density profiles with high te... One of the most important electron density diagnostics, microwave reflectometry, has been developed on many large and medium nuclear fusion devices in recent years . Not only the electron density profiles with high temporal and spatial resolutions, but also the profiles of plasma rotation and turbulence can be obtained with this diagnostic system. 展开更多
关键词 microwave scanning frequency rf modulation reflection and receiver
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一种用于RF MEMS移相器及开关可变电容的复合微桥膜结构 被引量:2
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作者 缪旻 肖志勇 +2 位作者 武国英 金玉丰 郝一龙 《微纳电子技术》 CAS 2003年第7期371-374,共4页
提出了一种基于微机械工艺的新型复合微桥膜结构 ,由低应力SiN/SiO2 (0 .5 μm/5 0nm )及Cr/Au(30nm/1μm)构成。相应的工艺流程较为简单。对影响其特性的因素进行了理论分析 ,并提出了 3种桥膜的平面结构 ;利用静电 /力耦合有限元法分... 提出了一种基于微机械工艺的新型复合微桥膜结构 ,由低应力SiN/SiO2 (0 .5 μm/5 0nm )及Cr/Au(30nm/1μm)构成。相应的工艺流程较为简单。对影响其特性的因素进行了理论分析 ,并提出了 3种桥膜的平面结构 ;利用静电 /力耦合有限元法分析了各种结构的静电驱动特性以及各阶模态 ,结果得到了令人满意的驱动和机械性能 ;通过有限元高频仿真软件对桥膜结构与共面波导形成的可调电容结构进行了分析 ,结果表明其具有良好的射频 /微波性能。该桥膜结构适用于RFMEMS开关。 展开更多
关键词 微电子机械系统 射频MEMS 移相器 开关 可变电容 复合微桥膜 微桥结构
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Changes in gap junctional intercellular communication in rabbits lens epithelial cells induced by low power density microwave radiation
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作者 叶娟 姚克 +1 位作者 曾群力 鲁德强 《Chinese Medical Journal》 SCIE CAS CSCD 2002年第12期1873-1876,154,共4页
OBJECTIVE: To demonstrate the changes in gap junctional intercellular communication (GJIC) mediated by low power density microwave radiation in rabbits lens epithelial cells (LECs) and its mechanisms. METHODS: Rabbits... OBJECTIVE: To demonstrate the changes in gap junctional intercellular communication (GJIC) mediated by low power density microwave radiation in rabbits lens epithelial cells (LECs) and its mechanisms. METHODS: Rabbits' eyes were exposed to 5 mW/cm(2) and 10 mW/cm(2) power densities of microwave radiation for 3 hours. The fluorescence-recovery-after-photobleaching (FRAP) method was used to determine the GJIC. The localization and function of connexin 43 in LECs was detected by laser scanning confocal microscopy. RESULTS: The GJIC of rabbits LECs was inhibited by microwave radiation especially in the 10 mW/cm(2) irradiated samples. A decrease in connexin 43-positive staining was seen in 5 mW/cm(2) x 3 h treated LECs. Intracellular space accumulation and cytoplasmic internalization were clearly demonstrated in 10 mW/cm(2) group. CONCLUSIONS: Low power densities microwave radiation (5 mW/cm(2) and 10 mW/cm(2)) induces damage to connexin 43 and inhibits the GJIC of rabbits LECs. These changes result in an osmotic imbalance within the lens and induce early cataract. 5 mW/cm(2) or 10 mW/cm(2) microwave radiation is cataractogenic. 展开更多
关键词 ANIMALS CATARACT Cell communication Connexin 43 Epithelial Cells Fluorescent Antibody Technique Indirect Gap Junctions Lens Crystalline microwaves RABBITS
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高隔离度宽频段组合式RF-MEMS开关的设计
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作者 孙建海 崔大付 张璐璐 《半导体技术》 CAS CSCD 北大核心 2009年第3期251-253,265,共4页
接触式与电容耦合式两类RFMEMS开关各自在一定的频段内,都具有较高的隔离度,但仍然很难满足微波控制系统中对高隔离度的要求。为了获得全波段高隔离度RFMEMS开关,单元开关很难达到要求,在此目标要求下,提出了组合式RFMEMS开关的设计,分... 接触式与电容耦合式两类RFMEMS开关各自在一定的频段内,都具有较高的隔离度,但仍然很难满足微波控制系统中对高隔离度的要求。为了获得全波段高隔离度RFMEMS开关,单元开关很难达到要求,在此目标要求下,提出了组合式RFMEMS开关的设计,分别利用HFSS软件对各单元进行结构参数优化,再将两者集成在一起,得到的组合式RFMEMS开关,这种组合式开关在0~20GHz时隔离度都高于-60dB,在(≤5GHz),隔离度高于-70dB,这是一般单元开关及其他半导体固态开关所无法企及的,而且,在DC~20GHz范围内,开关的插入损耗小于-0.20dB,而且并没因隔离度的提高,牺牲了插入损耗。 展开更多
关键词 组合式射频微电子机械系统开关 插入损耗 隔离度 微波控制系统
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应用于微波和RF电路中的厚膜材料和工艺 被引量:3
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作者 王志会 《半导体情报》 2000年第2期21-29,共9页
介绍了应用于微波和 RF电路中的厚膜材料和工艺。无玻璃的厚膜导体材料 (如金、银等 )的电阻率极低。氧化铝 (96% ,99% )、氧化铍和氮化铝陶瓷的高频损耗很低 ,是优良的微波和 RF电路用基板。采用先进的厚膜细线技术 ,使厚膜导体的线分... 介绍了应用于微波和 RF电路中的厚膜材料和工艺。无玻璃的厚膜导体材料 (如金、银等 )的电阻率极低。氧化铝 (96% ,99% )、氧化铍和氮化铝陶瓷的高频损耗很低 ,是优良的微波和 RF电路用基板。采用先进的厚膜细线技术 ,使厚膜导体的线分辨率几乎达到了薄膜工艺的水平。新开发的低损耗、低介电常数的低温共烧陶瓷 (L TCC)材料最适合做微波 MCM的基板材料。 展开更多
关键词 厚膜材料 微波 低温共烧陶瓷 rf电路
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RF磁控溅射微波介质陶瓷薄膜的影响因素及其应用
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作者 崔传文 石锋 +2 位作者 李玉国 张月甫 张敬尧 《科学技术与工程》 2008年第7期1741-1747,共7页
RF磁控溅射是目前应用最广泛的一种溅射沉积方法。由于陶瓷溅射的现象相当复杂,目前尚无完整的溅射理论可以用来分析溅射现象,所以通常通过实验来确定溅射过程中的影响因素。综述了RF磁控溅射陶瓷薄膜过程中的影响因素,阐述了微波介质... RF磁控溅射是目前应用最广泛的一种溅射沉积方法。由于陶瓷溅射的现象相当复杂,目前尚无完整的溅射理论可以用来分析溅射现象,所以通常通过实验来确定溅射过程中的影响因素。综述了RF磁控溅射陶瓷薄膜过程中的影响因素,阐述了微波介质陶瓷薄膜的应用前景,并指出了今后的发展方向。 展开更多
关键词 rf磁控溅射 微波介质陶瓷薄膜 影响因素
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RF MEMS开关的研究进展及其应用 被引量:12
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作者 黄成远 张斌珍 +2 位作者 段俊萍 王雄师 徐永庆 《微纳电子技术》 北大核心 2018年第9期652-659,共8页
射频微电子机械系统(RF MEMS)开关是射频电子系统中的关键器件,首先简要介绍了RF MEMS开关的结构特点及分类方式,综述了RF MEMS开关的发展现状,列举了国内著名科研机构具有代表性的成果,并对比了其结构特点及性能参数,指出国内RF MEM... 射频微电子机械系统(RF MEMS)开关是射频电子系统中的关键器件,首先简要介绍了RF MEMS开关的结构特点及分类方式,综述了RF MEMS开关的发展现状,列举了国内著名科研机构具有代表性的成果,并对比了其结构特点及性能参数,指出国内RF MEMS开关正向着小体积、宽频化、低驱动电压、高性能指标的方向发展。此外,还阐述了RF MEMS开关在多位移相器、可调滤波器、可重构天线等方面的应用,其在与多器件的集成和联合运用中潜力巨大。最后,分析了现有的RF MEMS开关的发展瓶颈,并展望了其以设计新结构、探寻新材料、探索新工艺、多种驱动方式相结合、多器件相集成为未来发展新方向。研发制作新的RF MEMS开关及其功能系统必将会对射频微波领域造成巨大影响。 展开更多
关键词 射频微电子机械系统(rf MEMS)开关 移相器 可调滤波器 可重构天线 微波
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一种基于RF MEMS开关的四端口电子校准件设计 被引量:1
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作者 曹钎龙 吴倩楠 +3 位作者 朱光州 陈玉 王俊强 李孟委 《微电子学》 CAS 北大核心 2022年第3期437-441,共5页
针对射频多端口器件微波测试需求,基于SOLT校准原理设计了一种工作频率在DC~12 GHz范围内、基于RF MEMS开关的四端口电子校准件。数值仿真结果表明,在短路状态下,器件的回波损耗小于0.15 dB;在直通状态下,器件的插入损耗小于0.5 dB,端... 针对射频多端口器件微波测试需求,基于SOLT校准原理设计了一种工作频率在DC~12 GHz范围内、基于RF MEMS开关的四端口电子校准件。数值仿真结果表明,在短路状态下,器件的回波损耗小于0.15 dB;在直通状态下,器件的插入损耗小于0.5 dB,端口之间的隔离度大于20 dB;在开路状态下,器件的回波损耗小于0.3 dB,端口之间的隔离度大于25 dB;同时采用微表面加工工艺,利用磁控溅射工艺对负载电阻进行了制备,其测试结果约为50Ω,符合设计要求。设计的基于RF MEMS开关的四端口校准件,具有射频性能好、体积小、易于集成等优点,能够满足X波段微波多端口器件在片测试的应用需求。 展开更多
关键词 rf MEMS 插入损耗 回波损耗 隔离度 微波校准
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Ground Passive Microwave Remote Sensing of Atmospheric Profiles Using WRF Simulations and Machine Learning Techniques
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作者 Lulu ZHANG Meijing LIU +4 位作者 Wenying HE Xiangao XIA Haonan YU Shuangxu LI Jing LI 《Journal of Meteorological Research》 SCIE CSCD 2024年第4期680-692,共13页
Microwave radiometer(MWR) demonstrates exceptional efficacy in monitoring the atmospheric temperature and humidity profiles.A typical inversion algorithm for MWR involves the use of radiosonde measurements as the trai... Microwave radiometer(MWR) demonstrates exceptional efficacy in monitoring the atmospheric temperature and humidity profiles.A typical inversion algorithm for MWR involves the use of radiosonde measurements as the training dataset.However,this is challenging due to limitations in the temporal and spatial resolution of available sounding data,which often results in a lack of coincident data with MWR deployment locations.Our study proposes an alternative approach to overcome these limitations by harnessing the Weather Research and Forecasting(WRF) model's renowned simulation capabilities,which offer high temporal and spatial resolution.By using WRF simulations that collocate with the MWR deployment location as a substitute for radiosonde measurements or reanalysis data,our study effectively mitigates the limitations associated with mismatching of MWR measurements and the sites,which enables reliable MWR retrieval in diverse geographical settings.Different machine learning(ML) algorithms including extreme gradient boosting(XGBoost),random forest(RF),light gradient boosting machine(LightGBM),extra trees(ET),and backpropagation neural network(BPNN) are tested by using WRF simulations,among which BPNN appears as the most superior,achieving an accuracy with a root-mean-square error(RMSE) of 2.05 K for temperature,0.67 g m~(-3) for water vapor density(WVD),and 13.98% for relative humidity(RH).Comparisons of temperature,RH,and WVD retrievals between our algorithm and the sounding-trained(RAD) algorithm indicate that our algorithm remarkably outperforms the latter.This study verifies the feasibility of utilizing WRF simulations for developing MWR inversion algorithms,thus opening up new possibilities for MWR deployment and airborne observations in global locations. 展开更多
关键词 microwave radiometer(MWR) Weather Research and Forecasting(Wrf)model extreme gradient boosting(XGBoost) random forest(rf) light gradient boosting machine(LightGBM) extra trees(ET) backpropagation neural network(BPNN) monochromatic radiative transfer model(MonoRTM)
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RF/微波无线系统中的MEMS技术 被引量:6
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作者 云振新 《微纳电子技术》 CAS 2002年第2期6-11,共6页
着重论述了RF/微波MEMS元件及其制造技术、封装要求和设计,并在此基础上阐述RF/微波MEMS元件的应用电路和系统。
关键词 rf/微波MEMS元件 rf/微波无线系统 MEMS技术 微机电系统
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Relation between quantum NOT gate speed and asymmetry of the potential of RF-SQUID 被引量:1
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作者 嵇英华 蔡十华 胡菊菊 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第2期440-444,共5页
This paper investigates the relationship between the speed of a quantum not gate and the asymmetry of the potential in an interactive system formed by a two-level RF-SQUID qubit and a classical microwave pulse. The RF... This paper investigates the relationship between the speed of a quantum not gate and the asymmetry of the potential in an interactive system formed by a two-level RF-SQUID qubit and a classical microwave pulse. The RFSQUID is characterized by an asymmetric double well potential which gives rise to diagonal matrix elements that describe the interaction of the SQUID with the microwave pulse. And the diagonal matrix elements account for the interaction of the microwave pulse with the SQUID. The results indicate that, when the angular frequency of the microwave field is chosen as near resonate with the transition (0) ←→ (1), i.e. ω1 -ω0 ≈ ωm, (1) the gate speed is decided by three factors, the Rabi frequency, the difference of the diagonal matrix elements between the two levels, and the angular frequency of the applied microwave pulse ωm; (2) the gate speed descends when the asymmetry of the potential is considered. 展开更多
关键词 gate speed asymmetry microwave pulse rf-SQUID
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Design and fabrication of a series contact RF MEMS switch with a novel top electrode
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作者 Qiannan Wu Honglei Guo +4 位作者 Qiuhui Liu Guangzhou Zhu Junqiang Wang Yonghong Cao Mengwei Li 《Nanotechnology and Precision Engineering》 CAS CSCD 2023年第1期47-55,共9页
Radio-frequency(RF)micro-electro-mechanical-system(MEMS)switches are widely used in communication devices and test instruments.In this paper,we demonstrate the structural design and optimization of a novel RF MEMS swi... Radio-frequency(RF)micro-electro-mechanical-system(MEMS)switches are widely used in communication devices and test instruments.In this paper,we demonstrate the structural design and optimization of a novel RF MEMS switch with a straight top electrode.The insertion loss,isolation,actuator voltage,and stress distribution of the switch are optimized and explored simultaneously by HFSS and COMSOL software,taking into account both its RF and mechanical properties.Based on the optimized results,a switch was fabricated by a micromachining process compatible with conventional IC processes.The RF performance in the DC to 18 GHz range was measured with a vector network analyzer,showing isolation of more than 21.28 dB over the entire operating frequency range.Moreover,the required actuation voltage was about 9.9 V,and the switching time was approximately 33μs.A maximum lifetime of 109 switching cycles was obtained.Additionally,the dimension of the sample is 1.8 mm×1.8 mm×0.3 mm,which might find application in the current stage. 展开更多
关键词 rf MEMS switch communication devices straight top electrode
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