TiBCN films were deposited on Si(100) and cemented carbide substrates by using multi-cathodic arc ion plating in C_2H_2 and N_2atmosp^here. Their structure and mechanical properties were studied systematically under d...TiBCN films were deposited on Si(100) and cemented carbide substrates by using multi-cathodic arc ion plating in C_2H_2 and N_2atmosp^here. Their structure and mechanical properties were studied systematically under different N_2 flow rates. The results showed that the Ti BCN films were adhered well to the substrates. Rutherford backscattering sp^ectroscopy was employed to determine the relative concentration of Ti, B, C and N in the films.The chemical bonding states of the films were explored by X-ray photoelectron sp^ectroscopy, revealing the presence of bonds of Ti N, Ti(C,N), BN, pure B, sp^2C–C and sp^3C–C, which changed with the N_2 flow rate. Ti BCN films contain nanocrystals of Ti N/Ti CN and Ti B_2/Ti(B,C)embedded in an amorphous matrix consisting of amorphous BN and carbon at N_2 flow rate of up to 250 sccm.展开更多
It is known that gas flow rate is a key factor in controlling industrial plasma processing. In this paper, a 2D PIC/MCC model is developed for an rf hollow cathode discharge with an axial nitrogen gas flow. The effect...It is known that gas flow rate is a key factor in controlling industrial plasma processing. In this paper, a 2D PIC/MCC model is developed for an rf hollow cathode discharge with an axial nitrogen gas flow. The effects of the gas flow rate on the plasma parameters are calculated and the results show that： with an increasing flow rate, the total ion（N＋2, N＋） density decreases, the mean sheath thickness becomes wider, the radial electric field in the sheath and the axial electric field show an increase, and the energies of both kinds of nitrogen ions increase;and, as the axial ion current density that is moving toward the ground electrode increases, the ion current density near the ground electrode increases. The simulation results will provide a useful reference for plasma jet technology involving rf hollow cathode discharges in N2.展开更多
Three CrN coatings were deposited on the Inconel X750 through the metal vapor vacuum arc ion implantation and the magnetic filtered cathodic vacuum arc deposition system(MEVVA-FCVA) with the N2 flow rates of 10,50,and...Three CrN coatings were deposited on the Inconel X750 through the metal vapor vacuum arc ion implantation and the magnetic filtered cathodic vacuum arc deposition system(MEVVA-FCVA) with the N2 flow rates of 10,50,and 100sccm, respectively.The surface morphologies and cross-section morphologies of the CrN coatings were obtained through scanning electron microscopy(SEM) and an optical profilometer.The microstructures of the coatings were characterized through X-ray diffraction(XRD).The hardness and the elastic modulus of the coatings were tested by a nano-hardness tester.The adhesion strength and friction coefficients were investigated through scratch tests and ball-on-disk tests and the wear tracks were tested by the optical profilometer. The experimental results indicate that the CrN coating deposited on the Inconel X750 substrate displays a uniform thickness and a smooth surface. The mechanical properties behaves well as the N2 flow rate varies.The CrN coating significantly reduces the friction coefficient fluctuation and improves the antiadhesion and anti-wear properties of the Inconel X750.展开更多
基金supported by the National Natural Science Foundation of China(Nos.11375135 and 11275141)International Cooperation Program of the Ministry of Science and Technology of China(No.2015DFR00720)Fundamental Research Funds for the Central Universities
文摘TiBCN films were deposited on Si(100) and cemented carbide substrates by using multi-cathodic arc ion plating in C_2H_2 and N_2atmosp^here. Their structure and mechanical properties were studied systematically under different N_2 flow rates. The results showed that the Ti BCN films were adhered well to the substrates. Rutherford backscattering sp^ectroscopy was employed to determine the relative concentration of Ti, B, C and N in the films.The chemical bonding states of the films were explored by X-ray photoelectron sp^ectroscopy, revealing the presence of bonds of Ti N, Ti(C,N), BN, pure B, sp^2C–C and sp^3C–C, which changed with the N_2 flow rate. Ti BCN films contain nanocrystals of Ti N/Ti CN and Ti B_2/Ti(B,C)embedded in an amorphous matrix consisting of amorphous BN and carbon at N_2 flow rate of up to 250 sccm.
基金supported by the Natural Science Foundation of Hebei Province,China(No.A2012205072)
文摘It is known that gas flow rate is a key factor in controlling industrial plasma processing. In this paper, a 2D PIC/MCC model is developed for an rf hollow cathode discharge with an axial nitrogen gas flow. The effects of the gas flow rate on the plasma parameters are calculated and the results show that： with an increasing flow rate, the total ion（N＋2, N＋） density decreases, the mean sheath thickness becomes wider, the radial electric field in the sheath and the axial electric field show an increase, and the energies of both kinds of nitrogen ions increase;and, as the axial ion current density that is moving toward the ground electrode increases, the ion current density near the ground electrode increases. The simulation results will provide a useful reference for plasma jet technology involving rf hollow cathode discharges in N2.
基金Funded by the Special Plan of Scientific and Technological Innovation for Graduate Student in Beijing Institute of Technology(2015CX10015)the National Natural Science Foundation of China(51405455)
文摘Three CrN coatings were deposited on the Inconel X750 through the metal vapor vacuum arc ion implantation and the magnetic filtered cathodic vacuum arc deposition system(MEVVA-FCVA) with the N2 flow rates of 10,50,and 100sccm, respectively.The surface morphologies and cross-section morphologies of the CrN coatings were obtained through scanning electron microscopy(SEM) and an optical profilometer.The microstructures of the coatings were characterized through X-ray diffraction(XRD).The hardness and the elastic modulus of the coatings were tested by a nano-hardness tester.The adhesion strength and friction coefficients were investigated through scratch tests and ball-on-disk tests and the wear tracks were tested by the optical profilometer. The experimental results indicate that the CrN coating deposited on the Inconel X750 substrate displays a uniform thickness and a smooth surface. The mechanical properties behaves well as the N2 flow rate varies.The CrN coating significantly reduces the friction coefficient fluctuation and improves the antiadhesion and anti-wear properties of the Inconel X750.
