In the nanoscale beam,two effects become domineering.One is the non-Fourier effect in heat conduction and the other is the coupling effect between temperature and strain rate.In the present study,a generalized solutio...In the nanoscale beam,two effects become domineering.One is the non-Fourier effect in heat conduction and the other is the coupling effect between temperature and strain rate.In the present study,a generalized solution for the generalized thermoelastic vibration of gold nano-beam resonator induced by ramp type heating is developed.The solution takes into account the above two effects.State-space and Laplace transform methods are used to determine the lateral vibration,the temperature,the displacement,the stress and the strain energy of the beam.The effects of the relaxation time and the ramping time parameters have been studied.展开更多
Diffraction effects will bring about more difficulties in actuating resonators,which are electrostatically actuated ones with sub-micrometer or nanometer dimensions,and in detecting the frequency of the resonator by o...Diffraction effects will bring about more difficulties in actuating resonators,which are electrostatically actuated ones with sub-micrometer or nanometer dimensions,and in detecting the frequency of the resonator by optical detection.To avoid the effects of diffraction,a new type of nanoelectromechanical systems（NEMS） resonators is fabricated and actuated to oscillate.As a comparison,a doubly clamped silicon beam is also fabricated and studied.The smallest width and thickness of the resonators are 180 and 200 nm,respectively.The mechanical oscillation responses of these two kinds of resonators are studied experimentally.Results show that the resonant frequencies are from 6.8 to 20 MHz,much lower than the theoretical values.Based on the simulation,it is found that over-etching is one of the important factors which results in lower frequencies than the theoretical values.It is also found that the difference between resonance frequencies of two types of resonators decreases with the increase in beam length.The quality factor is improved greatly by lowering the pressure in the sample chamber at room temperature.展开更多
A novel size-dependent model is developed herein to study the bending behavior of beam-type micro/nano-structures considering combined effects of nonlocality and micro-rotational degrees of freedom. To accomplish this...A novel size-dependent model is developed herein to study the bending behavior of beam-type micro/nano-structures considering combined effects of nonlocality and micro-rotational degrees of freedom. To accomplish this aim, the micropolar theory is combined with the nonlocal elasticity. To consider the nonlocality, both integral (original) and differential formulations of Eringen’s nonlocal theory are considered. The beams are considered to be Timoshenko-type, and the governing equations are derived in the variational form through Hamilton’s principle. The relations are written in an appropriate matrix-vector representation that can be readily utilized in numerical approaches. A finite element (FE) approach is also proposed for the solution procedure. Parametric studies are conducted to show the simultaneous nonlocal and micropolar effects on the bending response of small-scale beams under different boundary conditions.展开更多
文摘In the nanoscale beam,two effects become domineering.One is the non-Fourier effect in heat conduction and the other is the coupling effect between temperature and strain rate.In the present study,a generalized solution for the generalized thermoelastic vibration of gold nano-beam resonator induced by ramp type heating is developed.The solution takes into account the above two effects.State-space and Laplace transform methods are used to determine the lateral vibration,the temperature,the displacement,the stress and the strain energy of the beam.The effects of the relaxation time and the ramping time parameters have been studied.
基金The National High Technology Research and Development Program of China(863 Program)(No.2007AA04Z301)
文摘Diffraction effects will bring about more difficulties in actuating resonators,which are electrostatically actuated ones with sub-micrometer or nanometer dimensions,and in detecting the frequency of the resonator by optical detection.To avoid the effects of diffraction,a new type of nanoelectromechanical systems（NEMS） resonators is fabricated and actuated to oscillate.As a comparison,a doubly clamped silicon beam is also fabricated and studied.The smallest width and thickness of the resonators are 180 and 200 nm,respectively.The mechanical oscillation responses of these two kinds of resonators are studied experimentally.Results show that the resonant frequencies are from 6.8 to 20 MHz,much lower than the theoretical values.Based on the simulation,it is found that over-etching is one of the important factors which results in lower frequencies than the theoretical values.It is also found that the difference between resonance frequencies of two types of resonators decreases with the increase in beam length.The quality factor is improved greatly by lowering the pressure in the sample chamber at room temperature.
文摘A novel size-dependent model is developed herein to study the bending behavior of beam-type micro/nano-structures considering combined effects of nonlocality and micro-rotational degrees of freedom. To accomplish this aim, the micropolar theory is combined with the nonlocal elasticity. To consider the nonlocality, both integral (original) and differential formulations of Eringen’s nonlocal theory are considered. The beams are considered to be Timoshenko-type, and the governing equations are derived in the variational form through Hamilton’s principle. The relations are written in an appropriate matrix-vector representation that can be readily utilized in numerical approaches. A finite element (FE) approach is also proposed for the solution procedure. Parametric studies are conducted to show the simultaneous nonlocal and micropolar effects on the bending response of small-scale beams under different boundary conditions.
