Unbroken chain of traceability is currently unsettled issues for developing national/ international nanometer scale metrology standards. The present paper will address
Quantitative characterization of the mechanical properties of materials in micro-/nano-scale using depth-sensing indentation technique demands high performance of nanoindentation instruments in use. In this paper, the...Quantitative characterization of the mechanical properties of materials in micro-/nano-scale using depth-sensing indentation technique demands high performance of nanoindentation instruments in use. In this paper, the efforts to calibrate the capacitive force transducer of a commercial nanoindentation instrument are presented, where the quasi-static characteristic of the force transducer has been calibrated by a precise compensation balance with a resolution of ~1 nN. To investigate the dynamic response of the transducer, an electrostatic MEMS (Micro-Electro-Mechanical System) based on nano-force transfer standard with nano-Newton (10-9 Newton) resolution and a bandwidth up to 6 kHz have been employed. Preliminary experimental results indicate that 1) the force transducer under calibration has a probing force uncertainty less than 300 nN (1σ) in the calibration range of 1 mN;2) the transient duration at contact points amounts to 10 seconds;3) the overshoot of engagement is pre-load dependent.展开更多
Metrological atomic force microscopes(Met.AFMs)with built-in interferometers are one of the main workhorses for versatile dimensional nanometrology.The interferometric nonlinearity error,particularly the high-order(i....Metrological atomic force microscopes(Met.AFMs)with built-in interferometers are one of the main workhorses for versatile dimensional nanometrology.The interferometric nonlinearity error,particularly the high-order(i.e.,3rd-and 4th-order)nonlinearity errors,is a dominant error source for further improving their metrology performance,which cannot be corrected using the conventional Heydemann correction method.To solve this problem,two new methods were developed.One uses a capacitive sensor embedded in the Met.AFM,and the other applies an external physical artifact with a flat surface.Both methods can be applied very conveniently and can effectively reduce the nonlinearity error.In this paper,the propagation of the(residual)nonlinearity error in step height calibrations is examined.Finally,the performance of the improved tool is verified in the calibration of a highly demanding industrial sample.For the measurements performed at 25 different positions and repeated six times,the standard deviation of the total 150 measured values is 0.08 nm,which includes the contributions from the reproducibility of the metrology tool and sample inhomogeneity.This research has significantly improved our dimensional nanometrology service.For instance,the extended measurement uncertainty(k=2)is reduced from 1.0 to 0.3 nm for the step height or etching depth calibrations.展开更多
基金Yan Fang acknowledges research grants from Shanghai Technology Committee (STC) 03JC14020 &0452nm085National Science Foundation of China (NSFC) 30470409Shanghai Xu Hui Region of Science and Technology Committee RCT2008010
文摘Unbroken chain of traceability is currently unsettled issues for developing national/ international nanometer scale metrology standards. The present paper will address
文摘Quantitative characterization of the mechanical properties of materials in micro-/nano-scale using depth-sensing indentation technique demands high performance of nanoindentation instruments in use. In this paper, the efforts to calibrate the capacitive force transducer of a commercial nanoindentation instrument are presented, where the quasi-static characteristic of the force transducer has been calibrated by a precise compensation balance with a resolution of ~1 nN. To investigate the dynamic response of the transducer, an electrostatic MEMS (Micro-Electro-Mechanical System) based on nano-force transfer standard with nano-Newton (10-9 Newton) resolution and a bandwidth up to 6 kHz have been employed. Preliminary experimental results indicate that 1) the force transducer under calibration has a probing force uncertainty less than 300 nN (1σ) in the calibration range of 1 mN;2) the transient duration at contact points amounts to 10 seconds;3) the overshoot of engagement is pre-load dependent.
基金Open Access funding enabled and organized by Projekt DEAL.
文摘Metrological atomic force microscopes(Met.AFMs)with built-in interferometers are one of the main workhorses for versatile dimensional nanometrology.The interferometric nonlinearity error,particularly the high-order(i.e.,3rd-and 4th-order)nonlinearity errors,is a dominant error source for further improving their metrology performance,which cannot be corrected using the conventional Heydemann correction method.To solve this problem,two new methods were developed.One uses a capacitive sensor embedded in the Met.AFM,and the other applies an external physical artifact with a flat surface.Both methods can be applied very conveniently and can effectively reduce the nonlinearity error.In this paper,the propagation of the(residual)nonlinearity error in step height calibrations is examined.Finally,the performance of the improved tool is verified in the calibration of a highly demanding industrial sample.For the measurements performed at 25 different positions and repeated six times,the standard deviation of the total 150 measured values is 0.08 nm,which includes the contributions from the reproducibility of the metrology tool and sample inhomogeneity.This research has significantly improved our dimensional nanometrology service.For instance,the extended measurement uncertainty(k=2)is reduced from 1.0 to 0.3 nm for the step height or etching depth calibrations.
