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Effect of Annealing Temperature on GMR of [NiFeCo(10 nm)/Ag(10 nm)]×20 Multilayer Film 被引量:1
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作者 Yuding HE, Shejun HU, Jian LI and Guangrong XIECollege of Material and Energy, Guangdong University of Technology, Guangzhou 510643, China 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2004年第2期179-181,共3页
The composition, phase structure, and microstructure of the discontinuous multilayer films [NiFeCo(10 nm)/ Ag(10 nm)]×20 annealed at temperature 280, 320, 360 and 400℃, respectively were investigated. GMR (giant... The composition, phase structure, and microstructure of the discontinuous multilayer films [NiFeCo(10 nm)/ Ag(10 nm)]×20 annealed at temperature 280, 320, 360 and 400℃, respectively were investigated. GMR (giant magnetore-sistance) ratios of the multilayer films were measured at different temperatures. The results showed that FeNi3 precipitated at 360℃ and dissolved at 400℃. The films annealed at 360℃ for 1 h exhibited the highest GMR ratio 11% when saturation field was equal to 79.6 kA/m. 展开更多
关键词 multilayer film ANNEALING GMR [nifeco(10 nm)/ag(10 nm)]×20
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Effect of Co Ion Implantation on GMR of [NiFeCo(10 nm)/Ag(10 nm)]×20 Multilayer Film
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作者 Yuding HE Shejun HU +1 位作者 Jian LI Guangrong XIE 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2005年第4期593-598,共6页
The composition, phase structure and microstructure of the discontinuous multilayer film[NiFeCo(10 nm)/Ag(10 nm)]×20 were investigated after Co ion implantation and annealing at 280, 320,360 and 400℃, respec... The composition, phase structure and microstructure of the discontinuous multilayer film[NiFeCo(10 nm)/Ag(10 nm)]×20 were investigated after Co ion implantation and annealing at 280, 320,360 and 400℃, respectively.GMR (giant magnetoresistance) ratio of the film with/without Co ion implantation was measured. The results showed that Co ion implantation decreased the granule size of the annealed multilayer film, and increased Hc value and GMR ratio of the multilayer film. After annealing at 360℃, the multilayer film [NiFeCo(10 nm)/Ag(10 nm)]×20 with/without Co ion implantation both exhibited the highest GMR ratio of 12.4%/11% under 79.6 kA/m of applied saturation magnetic field. 展开更多
关键词 Co ion implantation Giant magnetoresistance (GMR) [nifeco(10 nm)/ag(10 nm)]×20 multilayer film
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Structure and tribological properties of Si/a-C:H(Ag)multilayer film in stimulated body fluid 被引量:1
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作者 吴艳霞 刘云琳 +5 位作者 刘颖 周兵 黑鸿君 马永 于盛旺 吴玉程 《Chinese Physics B》 SCIE EI CAS CSCD 2020年第11期412-419,共8页
Si/a-C:H(Ag)multilayer films with different modulation periods are prepared to test their potential applications in human body.The composition,microstructure,mechanical and tribological properties in the simulated bod... Si/a-C:H(Ag)multilayer films with different modulation periods are prepared to test their potential applications in human body.The composition,microstructure,mechanical and tribological properties in the simulated body fluid are investigated.The results show the concentration of Ag first decreases and then increases with the modulation period decreasing from 984 nm to 250 nm.Whereas the C content has an opposite variation trend.Notably,the concentration of Ag plays a more important role than the modulation period in the properties of the multilayer film.The a-C:H sublayer of the film with an appropriate Ag concentration(8.97 at.%)(modulation period of 512 nm)maintains the highest sp3/sp2 ratio,surface roughness and hardness,and excellent tribological property in the stimulated body fluid.An appropriate number of Ag atoms and size of Ag atom allow the Ag atoms to easily enter into the contact interface for load bearing and lubricating.This work proves that the Ag nanoparticles in the a-C:H sublayer plays a more important role in the tribological properties of the composite-multilayer film in stimulated body fluid condition. 展开更多
关键词 Si/a-C:H(ag)multilayer film modulation periods ag concentration tribological properties
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不同厚度分层沉积对多层NiFeCo/Ag薄膜GMR效应的影响
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作者 何玉定 李健 +1 位作者 胡社军 谢光荣 《真空》 CAS 北大核心 2005年第2期34-37,共4页
用射频磁控溅射法制备了调制周期分别为5nm、10nm、15nm、20nm的NiFeCo/Ag非连续多层膜。用俄歇能谱仪测量薄膜的成分,用原子力显微镜观测NiFeCo膜层及Ag膜层的表面形貌,用四探针法测量了溅射态的及在280℃、360℃、400℃退火后的多层膜... 用射频磁控溅射法制备了调制周期分别为5nm、10nm、15nm、20nm的NiFeCo/Ag非连续多层膜。用俄歇能谱仪测量薄膜的成分,用原子力显微镜观测NiFeCo膜层及Ag膜层的表面形貌,用四探针法测量了溅射态的及在280℃、360℃、400℃退火后的多层膜的GMR值。结果表明:薄膜厚度越大,NiFeCo膜层及Ag膜层的表面粗糙度越大。在经各种不同温度退火后,具有[NiFeCo(10nm)/Ag(10nm)]×20结构的多层膜的GMR效应均比其它结构的多层膜的GMR效应强。退火温度也会影响多层膜的GMR值。经360℃退火后,在79.6kA/m的外加饱和场下[NiFeCo(10nm)/Ag(10nm)]×20呈现出最强的巨磁电阻效应,其GMR值达到11%。 展开更多
关键词 不同厚度分层 GMR nifeco/ag多层膜
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Magnetic properties and structure of (001)-oriented [CoPt/C]_n /Ag nanocomposite films on the glass substrates 被引量:3
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作者 JIN Tao XU Xiaohong WANG Fang LI Xiaoli JIANG Fengxian YANG Zhiguang 《Rare Metals》 SCIE EI CAS CSCD 2006年第3期265-269,共5页
The highly (1301) oriented triple system of [CoPt/C]n/Ag films was deposited on glass substrates by DC and RF magnetron sputtering. After annealing at 600℃ for 30 min, thin films become magnetically hard with coerc... The highly (1301) oriented triple system of [CoPt/C]n/Ag films was deposited on glass substrates by DC and RF magnetron sputtering. After annealing at 600℃ for 30 min, thin films become magnetically hard with coercivities in the range of 160-875 kA/m because of high anisotropy associated with the L10 ordered phase. C doping plays an important role in improving (001) texture and reducing the intergrain interactions. The oriented growth of CoPt films was influenced strongly by the number of repetitions (n) of CoPt/C. By controlling the C content and the number of repetitions (n) of CoPt/C, nearly perfect (001) orientation can be obtained in the [CoPt3nm/C3nm]5/Ag50 nm. 展开更多
关键词 [CoPt/C]n/ag multilayer films (001) orientation C content number of repetition
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Microstructures and magnetic properties of [SiO_2/FePt]_5/Ag thin films 被引量:2
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作者 范九萍 许小红 +2 位作者 江凤仙 田宝强 武海顺 《Journal of Central South University of Technology》 EI 2008年第1期11-14,共4页
[SiO2/FePt]5/Ag thin films were deposited by RF magnetron sputtering on the glass substrates and post annealing at 550 ℃ for 30 min in vacuum. Vibrating sample magnetometer and X-ray diffraction analyser were applied... [SiO2/FePt]5/Ag thin films were deposited by RF magnetron sputtering on the glass substrates and post annealing at 550 ℃ for 30 min in vacuum. Vibrating sample magnetometer and X-ray diffraction analyser were applied to study the magnetic properties and microstructures of the films. The results show that without Ag underlayer [SiO2/FePt]5 films deposited onto the glass are FCC disordered; with the addition of Ag underlayer [SiO2/FePt]5/Ag films are changed into L10 and (111) mixed texture. The variation of the SiO2 nonmagnetic layer thickness in [SiO2/FePt]5/Ag films indicates that SiO2-doping plays an important role in improving the order parameter and the perpendicular magnetic anisotropy, and reducing the grain size and intergrain interactions. By controlling SiO2 thickness the highly perpendicular magnetic anisotropy can be obtained in the [SiO2 (0.6 nm)/FePt (3 nm)]5/Ag (50 nm) films and highly (001)-oriented films can be obtained in the [SiO2 (2 nm)/FePt (3 nm)]5/Ag (50 nm) films. 展开更多
关键词 多层膜 二氧化硅 银基底 薄膜结构 磁性
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Effect of Ag Addition on the Microstructure and Magnetic Properties of FePt Thin Films
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作者 程晓敏 杨晓非 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2008年第5期670-674,共5页
FePt thin films and [FePt/Ag]n multilayer thin films were prepared by magnetron sputtering technique and subsequent annealing process. By comparing the microstructure and magnetic properties of these two kinds of thin... FePt thin films and [FePt/Ag]n multilayer thin films were prepared by magnetron sputtering technique and subsequent annealing process. By comparing the microstructure and magnetic properties of these two kinds of thin films, effects of Ag addition on the structure and properties of FePt thin films were investigated. Proper Ag addition was found helpful for FePt phase transition at lower annealing temperature. With Ag addition, the magnetic domain pattern of FePt thin film changed from maze-like pattern to more discrete island-like domain pattern in [FePt/Ag]n multilayer thin films. In addition, introducing nonmagnetic Ag hindered FePt grains from growing larger. The in-depth defects in FePt films and [FePt/Ag]n multilayer films verify that Ag addition is attributed to a large number of pinning site defects in [FePt/Ag]n film and therefore has effects on its magnetic properties and microstructure. 展开更多
关键词 [FePt/ag]n multilayer thin films FePt thin films COERCIVITY magnetic domain patterns pinning sites
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GZO/Ag/GZO多层薄膜制备、结构与光电特性的研究 被引量:4
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作者 杨田林 张之圣 +4 位作者 宋淑梅 辛艳青 姜丽莉 李延辉 韩圣浩 《功能材料》 EI CAS CSCD 北大核心 2009年第11期1767-1769,共3页
采用射频磁控溅射和离子束溅射联合设备在玻璃衬底上制备出了具有良好附着性、低电阻率和高透过率的GZO/Ag/GZO(ZnO掺杂Ga2O3简称GZO)多层薄膜。X射线衍射谱表明GZO/Ag/GZO多层薄膜是多晶膜,GZO层具有ZnO的六角纤锌矿结构,最佳取向为(0... 采用射频磁控溅射和离子束溅射联合设备在玻璃衬底上制备出了具有良好附着性、低电阻率和高透过率的GZO/Ag/GZO(ZnO掺杂Ga2O3简称GZO)多层薄膜。X射线衍射谱表明GZO/Ag/GZO多层薄膜是多晶膜,GZO层具有ZnO的六角纤锌矿结构,最佳取向为(002)方向;Ag层是立方结构,具有(111)取向。在GZO层厚度一定的情况下,研究了Ag层厚度的变化对多层膜结构以及光电特性的影响。研究发现,当Ag层厚度为10nm时,3层膜的电阻率为9×10-5Ω.cm,在可见光范围内平均透过率达到89.7%,薄膜对应的品质因子数值为3.4×10-2Ω-1。 展开更多
关键词 GZO/ag/GZO 多层膜 溅射方法 透明导电膜
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Cr/Ag纳米多层薄膜膜-基结合强度及摩擦学性能研究 被引量:4
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作者 胡明 张立平 +3 位作者 高晓明 伏彦龙 杨军 翁立军 《摩擦学学报》 EI CAS CSCD 北大核心 2012年第6期544-549,共6页
采用中频磁控溅射技术在AISI 440C钢表面制备了不同调制周期的Cr/Ag纳米多层薄膜.通过X射线衍射仪(XRD)及高分辨透射电子显微镜(HRTEM)分析表征了纳米多层薄膜的微观组织结构,通过划痕试验机与真空球-盘摩擦试验机分别测试了纳米多层薄... 采用中频磁控溅射技术在AISI 440C钢表面制备了不同调制周期的Cr/Ag纳米多层薄膜.通过X射线衍射仪(XRD)及高分辨透射电子显微镜(HRTEM)分析表征了纳米多层薄膜的微观组织结构,通过划痕试验机与真空球-盘摩擦试验机分别测试了纳米多层薄膜膜-基结合强度及真空摩擦学性能,并与纯Ag薄膜及Cr/Ag双层薄膜进行了对比.结果表明:纳米多层结构可以显著提高Ag基固体润滑薄膜膜-基结合强度,Cr/Ag纳米多层薄膜在较高转速及载荷条件下表现出明显优于纯Ag及Cr/Ag双层薄膜的摩擦学性能.Cr薄膜层与钢基体表面良好结合以及纳米多层薄膜内良好的层间结合性能是纳米多层薄膜膜-基结合强度提高的主要原因. 展开更多
关键词 磁控溅射 CR ag纳米多层薄膜 膜-基结合强度 摩擦学性能
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纤维基ZnO/Ag/ZnO多层膜的制备、结构及性能研究 被引量:2
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作者 邓炳耀 刘江峰 高卫东 《真空科学与技术学报》 EI CAS CSCD 北大核心 2008年第3期244-247,共4页
利用射频磁控溅射法,室温下通过交替溅射ZnO和Ag,在PET纤维基材上制备ZnO/Ag/ZnO纳米结构多层膜。运用扫描电镜和原子力显微镜对薄膜表面形貌进行分析,用分光光度计测试其透光性能,用四探针电阻测试仪测试其方块电阻。结果表明:纤维基Zn... 利用射频磁控溅射法,室温下通过交替溅射ZnO和Ag,在PET纤维基材上制备ZnO/Ag/ZnO纳米结构多层膜。运用扫描电镜和原子力显微镜对薄膜表面形貌进行分析,用分光光度计测试其透光性能,用四探针电阻测试仪测试其方块电阻。结果表明:纤维基ZnO/Ag/ZnO多层膜致密、均匀,对紫外光表现为较强的吸收能力;Ag膜厚度的改变可以调控多层膜的光电性能;ZnO(40 nm)/Ag(20 nm)/ZnO(40 nm)多层膜呈现多晶结构,方块电阻为4.4Ω;透光率接近30%。 展开更多
关键词 磁控溅射 原子力显微镜 PET纤维 ZnO/ag/ZnO多层膜 光学性能 电学性能
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纤维基ZnO/Ag/ZnO多层膜表面形貌的AFM观察 被引量:2
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作者 刘江峰 邓炳耀 高卫东 《纺织学报》 EI CAS CSCD 北大核心 2008年第8期23-26,共4页
在室温状态下,采用磁控溅射法在PET纤维上制备了Ag膜、ZnO膜和ZnO/Ag/ZnO多层膜,运用原子力显微镜(AFM)对纳米结构薄膜的表面形貌进行观察,并对导电特性进行测试。结果表明,随着Ag膜厚度从10 nm增加到20 nm,Ag膜的致密性和均匀性变好;... 在室温状态下,采用磁控溅射法在PET纤维上制备了Ag膜、ZnO膜和ZnO/Ag/ZnO多层膜,运用原子力显微镜(AFM)对纳米结构薄膜的表面形貌进行观察,并对导电特性进行测试。结果表明,随着Ag膜厚度从10 nm增加到20 nm,Ag膜的致密性和均匀性变好;在纤维表面和ZnO膜表面生长相同厚度的Ag膜,其表面形貌不同,在ZnO薄膜表面生长的Ag膜比在纤维表面生长的Ag膜均匀性好,Ag颗粒更大,颗粒的匀整性也更好;同样,在纤维表面和Ag膜表面生长相同厚度的ZnO膜,其表面形貌也不同。多层膜的电阻随着Ag膜厚度的增加而减小;当Ag膜为20 nm时,电阻达到最小。 展开更多
关键词 磁控溅射 原子力显微镜 PET纤维 ZnO/ag/ZnO多层膜 电阻
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粉末靶磁控溅射制备AZO/Ag/AZO透明导电薄膜的特性 被引量:1
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作者 刘思宁 周艳文 +1 位作者 吴川 吴法宇 《半导体技术》 CAS CSCD 北大核心 2015年第12期937-943,共7页
室温下采用射频磁控溅射粉末靶,在玻璃基底上制备了掺铝氧化锌/银/掺铝氧化锌(AZO/Ag/AZO)三层透明导电薄膜。通过优化中间银层厚度,优化了三层透明导电薄膜的光电性能。采用原子力显微镜和X射线衍射仪分别对薄膜的形貌和结构进行检测分... 室温下采用射频磁控溅射粉末靶,在玻璃基底上制备了掺铝氧化锌/银/掺铝氧化锌(AZO/Ag/AZO)三层透明导电薄膜。通过优化中间银层厚度,优化了三层透明导电薄膜的光电性能。采用原子力显微镜和X射线衍射仪分别对薄膜的形貌和结构进行检测分析;采用紫外可见分光光度计和霍尔效应仪分别对薄膜的光电性能进行检测分析。结果表明,所制备的三层膜表面平整,颗粒大小错落均称;三层膜呈现多晶结构,AZO层薄膜具有(002)择优取向的六方纤锌矿结构,Ag层薄膜具有(111)择优取向的立方结构;当三层薄膜为AZO(20 nm)/Ag(12 nm)/AZO(20 nm)时,在550 nm处的透光率为88%,方块电阻为4.3Ω/□,电阻率为2.2×10^(-5)Ω·cm,载流子浓度为2.8×1022/cm^3,迁移率为10 cm^2/(V·s),品质因子为3.5×10-2Ω^(-1)。 展开更多
关键词 AZO/ag/AZO 多层透明导电薄膜 六方纤锌矿结构 粉末靶 射频磁控溅射
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Structures and properties of [CoPt/Ag]_(n) multilayer films 被引量:1
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作者 XU Xiaohong YANG Zhiguang WU Haishun 《Science China(Technological Sciences)》 SCIE EI CAS 2005年第2期214-219,共6页
The magnetic properties and structures of [CoPt/Ag]n multilayer films deposited by DC magnetron sputtering have been studied. During the deposited process, two kinds of deposited sequences, that is Ag layer (FDAG) fir... The magnetic properties and structures of [CoPt/Ag]n multilayer films deposited by DC magnetron sputtering have been studied. During the deposited process, two kinds of deposited sequences, that is Ag layer (FDAG) first deposited or CoPt layer (FDCP) first deposited, have been chosen. The results show that the microstructures and coercivities were strongly influenced by the deposited sequence and the thickness of films. The coercivities of [Ag/CoPt]n with FDAG are obviously higher than those of [CoPt/Ag]n with FDCP. Especially, when the thickness of films is 8 nm, the difference of coercivities between the FDAG film and the FDCP film is the largest. It is possibly because Ag plays a role of underlayer in FDAG multilayers, which can induce both the transformation from fcc to fct and the oriented growth along c-axis. In addition, δ M curves reveal that the [CoPt/Ag]8 multilayer film has a lower intergrain interaction than the CoPt/Ag bilayer film. 展开更多
关键词 [CoPt/ag]n multilayer films deposition sequence magnetic properties X-ray diffraction.
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Structure and magnetic properties of [FePt/Ag]_(10) multilayer films
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作者 XUXiaohong WANGFang WUHaishun 《Chinese Science Bulletin》 SCIE EI CAS 2004年第23期2455-2458,共4页
FePt/Ag]10 multilayers were deposited on glass substrates by magnetron sputtering. After being annealed at 550℃ for 30 min, the coercivities of [FePt/Ag]10 multilayer films were observably improved. Magnetic properti... FePt/Ag]10 multilayers were deposited on glass substrates by magnetron sputtering. After being annealed at 550℃ for 30 min, the coercivities of [FePt/Ag]10 multilayer films were observably improved. Magnetic properties of [FePt/Ag]10multilayer films are influenced by the Ag content. The highest coercivity is obtained for those multilayer films that the Ag content is about 25%. The analysis for the re- manence curves shows that the lower FePt layer thickness is favorable for decreasing the intergranular interaction. Re- sult of XRD shows that a thick Ag layer can enhance the intensity of FePt(001) peak. A magnetic activation volume of the order of 10?24 m3 is obtained by the measurement of magnetic viscosity, showing that it is promising to be ultra- high density recording media. 展开更多
关键词 [FePt/ag]10 多层薄膜 化学结构 磁性 矫顽力 磁交换量 薄膜材料
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基于AZO/Ag/AZO透明导电薄膜的染料敏化太阳电池研究
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作者 李俊泓 《电源技术》 CAS CSCD 北大核心 2016年第4期777-780,共4页
采用化学气相沉积和直流溅射沉积方法成功制备了与基体附着力高的不同Pt厚度的Pt/碳纳米管(CNT)膜层。通过扫描电子显微镜(SEM)和能谱分析(EDS)分别对薄膜厚度和表面形貌以及膜层中Pt的含量进行了研究;通过电化学阻抗谱和循环伏安曲线... 采用化学气相沉积和直流溅射沉积方法成功制备了与基体附着力高的不同Pt厚度的Pt/碳纳米管(CNT)膜层。通过扫描电子显微镜(SEM)和能谱分析(EDS)分别对薄膜厚度和表面形貌以及膜层中Pt的含量进行了研究;通过电化学阻抗谱和循环伏安曲线分别对Pt和Pt/CNT对电极的光电催化性进行了研究。结果表明:CNT与基体具有良好的接触性,并且随Pt沉积时间的增加,Pt在CNT薄膜中的含量增加,染料敏化太阳电池(DSSC)的光电转化效率随Pt厚度的增加而增加;与单纯的Pt对电极相比,Pt/CNT对电极具有更高的活性比表面,更低的电子迁移电阻以及更高的还原电流密度;以Pt(80 nm)/CNT为对电极的DSSC具有最高的光电转化效率8.54%;另外,与Pt(80 nm)对电极相比,以Pt(40 nm)/CNT为对电极制备的DSSC具有更高的光电转化效率,因此,该新型对电极结构可大大节省贵金属Pt的用量,在DSSC的应用中具有很大的潜力。 展开更多
关键词 染料敏化太阳电池 铝掺杂氧化锌(AZO)/银/AZO多层膜 铌掺杂二氧化钛阻挡膜 Pt/CNT对电极
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银基透明导电多层膜界面研究进展 被引量:1
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作者 张晓锋 颜悦 《功能材料》 EI CAS CSCD 北大核心 2011年第B02期6-10,共5页
由于具有较低的电阻率和成本、较好的机械加工性能、设计上的灵活性,可室温沉积等优点,银基透明导电多层膜已广泛应用于低辐射膜、强电磁屏蔽、低功耗光电子器件特别是柔性电子器件等领域。但由于材料自身的性质与制备条件的差异性,实... 由于具有较低的电阻率和成本、较好的机械加工性能、设计上的灵活性,可室温沉积等优点,银基透明导电多层膜已广泛应用于低辐射膜、强电磁屏蔽、低功耗光电子器件特别是柔性电子器件等领域。但由于材料自身的性质与制备条件的差异性,实际制备的金属/电介质(或半导体)透明导电多层膜界面处往往存在表面等离子体共振、界面导电电子散射、膜层脱层开裂等问题,这些均与多层膜界面特性密切相关。本文针对这类问题,评述了近年来银基透明导电多层膜界面研究的进展,并对今后发展给予分析和展望。 展开更多
关键词 银基透明导电薄膜 多层膜 界面研究 表面等离子体共振(SPR)
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离子束改性对颗粒膜巨磁电阻效应的影响 被引量:4
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作者 李健 胡社军 +1 位作者 温伟祥 黄拿灿 《重庆师范学院学报(自然科学版)》 2002年第2期45-49,共5页
用射频磁控溅射方法在Si/SiO2 衬底上制备了 (NiFeCo) 3 6Ag64 颗粒膜。用四探针法测量了注入Co离子前后(NiFeCo) 3 6Ag64 颗粒膜巨磁电阻效应的变化。用场发射扫描电镜分析了颗粒膜的形貌及成分。实验结果表明 :注入Co离子对颗粒膜巨... 用射频磁控溅射方法在Si/SiO2 衬底上制备了 (NiFeCo) 3 6Ag64 颗粒膜。用四探针法测量了注入Co离子前后(NiFeCo) 3 6Ag64 颗粒膜巨磁电阻效应的变化。用场发射扫描电镜分析了颗粒膜的形貌及成分。实验结果表明 :注入Co离子对颗粒膜巨磁电阻有显著的影响 ,在相同退火温度下 ,注入离子可使GMR效应提高一倍以上。随着退火温度增加 ,颗粒膜巨磁电阻效应先增加而后减小 ,在 36 0℃下退火可获得 10 .2 %的最大室温巨磁电阻效应。 展开更多
关键词 离子束 改性 颗粒膜 巨磁电阻交 离子注入
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