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NON-CONTACT MEASUREMENT SYSTEM OF FREEFORM SURFACE AND NURBS RECONSTRUCTION OF MEASUREMENT POINTS 被引量:4
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作者 Li Jian Wang Wen Chen Zichen Institute of Advanced Manufacturing Engineering, Zhejiang University, Hangzhou 310027, China 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2002年第4期366-371,共6页
Based on the development of the non-contact measurement system of free-formsurface, NURBS reconstruction of measurement points of freeform surface is effectively realized bymodifying the objective function and recursi... Based on the development of the non-contact measurement system of free-formsurface, NURBS reconstruction of measurement points of freeform surface is effectively realized bymodifying the objective function and recursive procedure and calculating the optimum number ofcontrol points. The reconstruction precision is evaluated through Ja-cobi's transformation method.The feasibility of the measurement system and effectiveness of the reconstruction algorithm aboveare proved by experiment. 展开更多
关键词 freeform surface non-contact measurement NURBS precision evaluation
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A Contact and Non-Contact Hybrid Profilometer with Large Range
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作者 YUN Jianping YANG Xudong +1 位作者 XIE Tiebang CHANG Suping 《Wuhan University Journal of Natural Sciences》 CAS 2007年第6期1066-1072,共7页
A novel hybrid instrument of contact and non-contact measurement with large range is developed, and both measurement systems are based on a Linnik interference microscope and on white-light interference measuring tech... A novel hybrid instrument of contact and non-contact measurement with large range is developed, and both measurement systems are based on a Linnik interference microscope and on white-light interference measuring techniques. The ambiguity presented in conventional monochromatic interferometers is not present in the contact and non-contact measurement, and they have a virtually unlimited unambiguous range. For the contact measurement, the vertical measuring range is ±5 mm with a resolution of 1 nm and the horizontal measuring range is ±25 mm in x-range and y-range with a resolution of 1.25 μm; for the non-contact measurement, the vertical measuring range is ~5 mm with a resolution of 1 nm and the horizontal resolution better than 0.5 urn. 展开更多
关键词 surface topography contact/non-contact measurement interference microscope
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Non-Contact Blood Pressure Measurement Based on IPPG
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作者 Jiancheng Zou Shouyu Zhou +1 位作者 Bailin Ge Xin Yang 《Journal of New Media》 2021年第2期41-51,共11页
Blood pressure is an important physiological parameter to reflect human vital signs.In order to achieve the non-contact dynamic blood pressure acquisition based on ordinary optical camera,a theoretical understanding o... Blood pressure is an important physiological parameter to reflect human vital signs.In order to achieve the non-contact dynamic blood pressure acquisition based on ordinary optical camera,a theoretical understanding of the functional relationship between blood pressure and pulse wave signal conduction time.And through imaging photoelectric plethysmography(IPPG),pulse wave signal conduction time of forehead and hand was obtained with ordinary optical camera.First,the pulse wave conduction time was obtained by recording the video with an ordinary optical camera.Second,real-time blood pressure values were collected.Finally,based on the relationship between blood pressure and pulse wave conduction time,a non-contact blood pressure measurement prediction model was obtained through neural network fitting.So that non-contact blood pressure measurement with optical camera could be completed.The method in this paper has several advantages,such as low requirements on measuring equipment,low cost,and simple operation.It can let people get rid of the discomfort caused by measuring equipment such as cuff and can measure blood pressure at any time.The predicted blood pressure results were compared with an Omron wrist electronic sphygmomanometer.The calculated error of systolic blood pressure is-9.28%~3.16%,and the error of diastolic blood pressure is-9.84~4.35%. 展开更多
关键词 non contact blood pressure measurement imaging photoelectric plethysmography(IPPG) pulse wave conduction time
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Surface form inspection with contact coordinate measurement:a review 被引量:4
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作者 Yijun Shen Jieji Ren +3 位作者 Nuodi Huang Yang Zhang Xinquan Zhang Limin Zhu 《International Journal of Extreme Manufacturing》 SCIE EI CAS CSCD 2023年第2期119-147,共29页
Parts with high-quality freeform surfaces have been widely used in industries,which require strict quality control during the manufacturing process.Among all the industrial inspection methods,contact measurement with ... Parts with high-quality freeform surfaces have been widely used in industries,which require strict quality control during the manufacturing process.Among all the industrial inspection methods,contact measurement with coordinate measuring machines or computer numerical control machine tool is a fundamental technique due to its high accuracy,robustness,and universality.In this paper,the existing research in the contact measurement field is systematically reviewed.First,different configurations of the measuring machines are introduced in detail,which may have influence on the corresponding sampling and inspection path generation criteria.Then,the entire inspection pipeline is divided into two stages,namely the pre-inspection and post-inspection stages.The typical methods of each sub-stage are systematically overviewed and classified,including sampling,accessibility analysis,inspection path generation,probe tip radius compensation,surface reconstruction,and uncertainty analysis.Apart from those classical research,the applications of the emerging deep learning technique in some specific tasks of measurement are introduced.Furthermore,some potential and promising trends are provided for future investigation. 展开更多
关键词 freeform surface form inspection contact measurement coordinate measurement on-machine inspection
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Permittivity Measurement of Low-Loss Substrates Based on Split Ring Resonators
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作者 Jianyi Li 《World Journal of Engineering and Technology》 2017年第4期62-68,共7页
In this paper, we present the complex permittivity measurement of low-loss substrates based on a microstrip-line-excited split-ring resonator (SRR). Permittivity of an unknown substrate is calculated based on the chan... In this paper, we present the complex permittivity measurement of low-loss substrates based on a microstrip-line-excited split-ring resonator (SRR). Permittivity of an unknown substrate is calculated based on the change in oscillation frequency of SRR caused by the material-under-test (MUT) above the SRR. Theoretical analysis and results of the simulations and experiments demonstrate the microstrip-line-excited SRR can be used to effectively improve measurement sensitivity. Simple equations for measurement of low-loss substrates using SRR are proposed and experimentally verified. 展开更多
关键词 Split-Ring Resonators (SRR) PERMITTIVITY non-contact measurement
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Accurate Measurement Method for Tube's Endpoints Based on Machine Vision 被引量:10
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作者 LIU Shaoli JIN Peng +2 位作者 LIU Jianhua WANG Xiao SUN Peng 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2017年第1期152-163,共12页
Tubes are used widely in aerospace vehicles, and their accurate assembly can directly affect the assembling reliability and the quality of products. It is important to measure the processed tube's endpoints and then ... Tubes are used widely in aerospace vehicles, and their accurate assembly can directly affect the assembling reliability and the quality of products. It is important to measure the processed tube's endpoints and then fix any geometric errors correspondingly. However, the traditional tube inspection method is time-consuming and complex operations. Therefore, a new measurement method for a tube's endpoints based on machine vision is proposed. First, reflected light on tube's surface can be removed by using photometric linearization. Then, based on the optimization model for the tube's endpoint measurements and the principle of stereo matching, the global coordinates and the relative distance of the tube's endpoint are obtained. To confirm the feasibility, ll tubes are processed to remove the reflected light and then the endpoint's positions of tubes are measured. The experiment results show that the measurement repeatability accuracy is 0.167 mm, and the absolute accuracy is 0.328 ram. The measurement takes less than 1 min. The proposed method based on machine vision can measure the tube's endpoints without any surface treatment or any tools and can realize on line measurement. 展开更多
关键词 machine vision non-contact measurement reflection light tube endpoint measurement
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Clinical study using novel endoscopic system for measuring size of gastrointestinal lesion 被引量:2
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作者 Kiyoshi Oka Takeshi Seki +3 位作者 Tomohiro Akatsu Takao Wakabayashi Kazuo Inui Junji Yoshino 《World Journal of Gastroenterology》 SCIE CAS 2014年第14期4050-4058,共9页
AIM: To verify the performance of a lesion size measurement system through a clinical study.
关键词 Lesion size non-contact measurement ENDOSCOPE Grid scale Low level laser
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CAD-DIRECTED INSPECTION PLANNING FOR FREEFORM SURFACE USING CONTACT PROBES
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作者 Chen Manyi Li Bin Duan Zhengcheng 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2005年第4期579-581,共3页
A methodology for CAD-directed measurement of freeform surface using a coordinate measuring machine equipped with a touch-trigger probe is presented, mainly including adaptive sampling of measurement points and regist... A methodology for CAD-directed measurement of freeform surface using a coordinate measuring machine equipped with a touch-trigger probe is presented, mainly including adaptive sampling of measurement points and registration of freeform surface. The proposed sampling method follows four steps: Freeform surface is fitted by bi-cubic B-spline; Curvedness measure of the surface is computed; Given a number of sampling points, an iterative algorithm is constructed for selecting a set of measurement points by employing the curvedness information; The measurement points is regularized for tradeoff between maximizing the measurement accuracy and minimizing the sampling time and cost. The aforesaid algorithm is demonstrated in term of a marine propeller blade. An offset surface registration method is presented to improve alignment accuracy of freeform objects, and Monte Carlo simulation is conducted to verify the effectiveness of the method. 展开更多
关键词 Freeform surface Inspection Coordinate measurement contact probe
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大直径钢筒圆度异常区快速检测方法
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作者 吕伟荣 吴佳强 +4 位作者 姚帅 戚菁菁 卢倍嵘 丁时宝 甘德家 《测绘通报》 CSCD 北大核心 2024年第7期100-104,128,共6页
大直径钢筒在制作、运输、安装及运行时均可能因某些原因导致其出现一个或多个圆度异常区,以至于不满足设备验收和运行的相关要求。目前,针对大直径钢筒圆度异常的检测方法均较为复杂,并不适合快速检出。为此,本文基于三坐标测量原理,... 大直径钢筒在制作、运输、安装及运行时均可能因某些原因导致其出现一个或多个圆度异常区,以至于不满足设备验收和运行的相关要求。目前,针对大直径钢筒圆度异常的检测方法均较为复杂,并不适合快速检出。为此,本文基于三坐标测量原理,结合高精度全站仪的非接触自动测量模式,并采用Matlab编制了自动搜索程序,提出了大直径钢筒圆度异常区的快速检测方法。通过AutoCAD算例模拟和现场实测,结果表明,该检测方法不仅速度快,且可通过增加测点密度实现大幅提高检出精度,为后续修复和改进工作提供准确数据。 展开更多
关键词 大直径 钢筒 圆度 三坐标测量 非接触
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大量程高线性光谱共焦位移测量系统
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作者 肖康 陈小君 吴永前 《激光杂志》 CAS 北大核心 2024年第6期33-38,共6页
兼具高精度、高稳定性并能实现非接触测量的光谱共焦位移测量系统在工业、医疗、科研等许多领域得到了广泛应用。目前制约光谱共焦位移测量系统应用发展的因素是大量程和高线性度。讨论了光谱共焦位移测量系统中色散物镜实现线性轴向色... 兼具高精度、高稳定性并能实现非接触测量的光谱共焦位移测量系统在工业、医疗、科研等许多领域得到了广泛应用。目前制约光谱共焦位移测量系统应用发展的因素是大量程和高线性度。讨论了光谱共焦位移测量系统中色散物镜实现线性轴向色散的条件,设计了一种高线性色散和大色散范围的色散物镜,指定了适合的公差范围,加工装配了一组色散物镜,搭建了光谱共焦位移测量系统,采用双频激光干涉仪进行了位移标定,并对标准量块进行了厚度测量。结果表明,该系统工作波段为450 nm~650 nm,实际位移范围为10 200μm,线性拟合判定系数R^(2)达到0.993 7,实际测量最大误差仅为3μm,证明该光谱共焦位移测量系统同时具备大量程、高线性度和高测量精度的特点。 展开更多
关键词 光谱共焦 色散物镜 位移测量 非接触 光学设计
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接触式与白光干涉测头复合测量坐标统一与数据融合
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作者 程真英 徐东见 +2 位作者 张成瑶 刘云龙 李瑞君 《光学精密工程》 EI CAS CSCD 北大核心 2024年第17期2698-2707,共10页
针对复合测量中两测头空间坐标系不统一的问题,提出了基于标定器提供基准点结合单位四元数法求解空间变换矩阵的坐标统一方法,并以均方根误差(RMSE)来评估坐标统一的效果。设计并制作了一种新型标定器,为坐标统一提供稳定可靠的基准点,... 针对复合测量中两测头空间坐标系不统一的问题,提出了基于标定器提供基准点结合单位四元数法求解空间变换矩阵的坐标统一方法,并以均方根误差(RMSE)来评估坐标统一的效果。设计并制作了一种新型标定器,为坐标统一提供稳定可靠的基准点,并建立了基准点精度与坐标统一精度的关系模型。针对两测头测量数据,提出了空间误差椭球搜索策略结合加权最小二乘法的数据融合方法。实验结果表明,复合测量的坐标统一化配准精度可达1.889μm,所提出的数据融合方法相较传统加权最小二乘法的相对误差减小了16%,重复性精度提高了38%,实现了复合测量的高精度坐标统一与稳定精确的数据融合,提升了对器件的测量能力。 展开更多
关键词 接触式测头 白光干涉测头 复合测量 坐标统一 数据融合
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Investigating Averaging Effect by Using Three Dimension Spectrum
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作者 WANG Kai LI Yan 《International Journal of Plant Engineering and Management》 2005年第4期224-228,共5页
The eddy current displacement sensor's averaging effect has been investigated in this paper, and the frequency spectrum property of the averaging effect was also deduced. It indicates that the averaging effect has no... The eddy current displacement sensor's averaging effect has been investigated in this paper, and the frequency spectrum property of the averaging effect was also deduced. It indicates that the averaging effect has no influences on measuring a rotor's rotating error, but it has visible influences on measuring the rotor's profile error. According to the frequency spectrum of the averaging effect, the actual sampling data can be adjusted reasonably, thus measuring precision is improved. 展开更多
关键词 eddy current sensor averaging effect non-contact measurement radial rotating error profile error
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非侵入式电压测量双平板电容传感器设计
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作者 许守东 张文斌 +2 位作者 吴远密 惠世贤 杨永龙 《传感器与微系统》 CSCD 北大核心 2024年第9期119-122,共4页
传统的单电极电容探头测量误差较大、测量精度易受温度、湿度等环境因素的影响,而非侵入式电压测量传感器可用于检测输电线和电力设备中的电压,且无需与带电导体或设备直接接触。因此,本文提出了一种基于电容耦合的双电容非接触式电压... 传统的单电极电容探头测量误差较大、测量精度易受温度、湿度等环境因素的影响,而非侵入式电压测量传感器可用于检测输电线和电力设备中的电压,且无需与带电导体或设备直接接触。因此,本文提出了一种基于电容耦合的双电容非接触式电压测量方法。设计并制造了测量系统。在实验室设施中进行了测试。实验结果表明:所研制的传感器具有良好的精度和线性度。其在工频下的比值误差在±1.7%以内。此外,它还具有成本低、小型化、外形灵活、分压比易于调整等优点。 展开更多
关键词 非接触式 电压测量 双电容 电场耦合
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融合GBWO与ENN的人体尺寸预测模型
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作者 杨晓文 李雅婷 +3 位作者 韩燮 况立群 庞敏 张元 《计算机技术与发展》 2024年第6期132-139,共8页
为了提高人体尺寸预测的效率和准确性,该文提出了GBWO-ENN(Grey Black Wolf Optimization-Elman Neural Network)的方法。针对传统灰狼算法易于陷入局部最优和无法平衡全局与局部搜索的平衡性问题,提出了GBWO算法。该算法融合黑寡妇优... 为了提高人体尺寸预测的效率和准确性,该文提出了GBWO-ENN(Grey Black Wolf Optimization-Elman Neural Network)的方法。针对传统灰狼算法易于陷入局部最优和无法平衡全局与局部搜索的平衡性问题,提出了GBWO算法。该算法融合黑寡妇优化算法中蜘蛛的运动方式对灰狼优化算法中α狼位置更新进行了优化,通过非线性递减的方法降低了收敛系数,并且提出了按位置等级更新种群的策略。随后采用GBWO算法对Elman神经网络的权值和阈值进行优化,并将GBWO-ENN模型应用于三维人体尺寸预测。实验结果表明,GBWO-ENN模型结构简单,能够准确预测人体尺寸,具有较好的预测能力。 展开更多
关键词 GBWO算法 黑寡妇优化算法 ELMAN神经网络 人体尺寸预测 非接触性测量
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基于线激光的压缩机曲轴圆度和平面度测量
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作者 梁杰 孙震伟 《郑州大学学报(工学版)》 CAS 北大核心 2024年第4期133-139,共7页
目前人工使用千分表测量空调压缩机曲轴圆度和平面度时存在易伤工件表面、效率低和不能精确评定等问题。针对上述问题,设计了一套基于线激光位移传感器的空调压缩机曲轴圆度和平面度非接触式测量系统。首先,通过测量标准量棒,提出一种... 目前人工使用千分表测量空调压缩机曲轴圆度和平面度时存在易伤工件表面、效率低和不能精确评定等问题。针对上述问题,设计了一套基于线激光位移传感器的空调压缩机曲轴圆度和平面度非接触式测量系统。首先,通过测量标准量棒,提出一种系统误差的标定方法;其次,基于线激光采样数据,开发了一种曲轴横截面圆度测点的提取算法,并将系统误差用于测点补偿,实现曲轴圆度测量;接着根据曲轴平面测点间的斜率分离出轮廓线,通过均匀下采样方法获取精简点云数据并采用最小二乘法实现曲轴平面度测量;最后,基于上述方法开展了曲轴圆度和平面度的测量实验。实验结果表明:该测量系统的圆度测量精度<4μm,平面度测量精度<2μm,圆度重复度测量误差<0.8μm,平面度重复度测量误差<0.3μm,满足曲轴圆度和平面度快速准确的测量需求。 展开更多
关键词 线激光位移传感器 非接触测量 空调压缩机曲轴 圆度测量 平面度测量
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复杂曲面光学元件高精度面形检测技术概述 被引量:1
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作者 刘斌 王孝坤 +7 位作者 程强 刘忠凯 李凌众 蔡梦雪 张洛嘉 李文涵 王金成 张学军 《南通大学学报(自然科学版)》 CAS 2024年第1期1-27,共27页
复杂曲面光学元件应用于光学系统中可以增大系统设计自由度,同时减少系统所需元件数量,有利于实现光学系统的紧凑化、轻量化,被誉为现代光学系统的变革性元件,被广泛应用于空间光学、光刻系统、汽车照明等领域,极大推动了航天、国防及... 复杂曲面光学元件应用于光学系统中可以增大系统设计自由度,同时减少系统所需元件数量,有利于实现光学系统的紧凑化、轻量化,被誉为现代光学系统的变革性元件,被广泛应用于空间光学、光刻系统、汽车照明等领域,极大推动了航天、国防及高科技民用事业的发展。然而,复杂曲面光学元件对面形精度要求较高,如何对其面形进行高精度检测从而指导加工成为限制该类元件大范围应用的瓶颈。文章对10余种常用的复杂曲面光学元件面形检测方法进行了分类梳理,按照是否采用干涉原理,将检测方法分为非干涉检测法和干涉检测法两大类,分别介绍了各种检测方法的原理和适用范围,回顾了各方法的发展历程,着重分析了几种典型方法进行面形检测的特点,并对未来复杂曲面光学元件高精度面形检测技术的发展趋势加以展望。 展开更多
关键词 复杂光学曲面 面形检测 非接触检测 干涉检测 零位检测 非零位检测
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基于服装个性化智能定制的三维人体测量系统物-像结构算法的研究 被引量:1
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作者 王悦 任军 +1 位作者 马飞 吴龙 《计算机科学》 CSCD 北大核心 2024年第S01期1110-1114,共5页
目前,我国基于服装个性化智能量身定制的理念日趋完善。但是,在消费者目标尺寸自动获取方面仍然缺乏实用的设备和技术,成为了大多数企业个性化智能定制发展的一个瓶颈,其根本原因是缺少实用性强的个性化智能定制系统。人体动态测量与其... 目前,我国基于服装个性化智能量身定制的理念日趋完善。但是,在消费者目标尺寸自动获取方面仍然缺乏实用的设备和技术,成为了大多数企业个性化智能定制发展的一个瓶颈,其根本原因是缺少实用性强的个性化智能定制系统。人体动态测量与其他工业产品精密测量相比具有自身独有的特殊性和困难。在探讨了现有的光学类基于个性化智能定制系统的现状的前提下,针对目前存在的激光三维人体扫描测量系统普遍存在硬件设备庞大、结构复杂的问题,对文中提出的基于个性化智能定制系统进行了原理设计,建立了系统的物-像结构算法的数学模型。该算法采用了扫描单元旋转的测量方式,使系统能够在垂直方向上获得较大的测量范围,目的是使系统采用较小的硬件获取满意的三维人体空间坐标,有利于节省竖直空间、减小体积。该算法已成功应用于基于服装个性化智能定制系统。为了验证本算法的精度,设计了与法国力克系统的三维人台对比扫描实验,实验数据验证了本系统结构算法的精度、工程实用性和可靠性。 展开更多
关键词 人体测量 非接触式测量 服装个性化量身定制 精度 线结构光测量法
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基于非接触式电压测量的电压监测系统 被引量:2
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作者 张泽林 刘希喆 《电子测量与仪器学报》 CSCD 北大核心 2024年第5期229-237,共9页
非接触式电压测量方法不直接与线路的金属导体部分接触,能适应多种应用场景的电压监测。设计一种利用改进的非接触式电压测量技术对线路电压进行测量并将测量得到的电压波形用于线路故障电压诊断的系统。对传统的非接触式电压测量技术... 非接触式电压测量方法不直接与线路的金属导体部分接触,能适应多种应用场景的电压监测。设计一种利用改进的非接触式电压测量技术对线路电压进行测量并将测量得到的电压波形用于线路故障电压诊断的系统。对传统的非接触式电压测量技术进行拓扑分析并对测量电路拓扑进行改进,能够不受耦合电容影响并准确地测量线路上的电压。由于目前单一的故障特征提取方法具有局限性,为了利用由非接触式电压测量技术测量得到的电压波形实现准确地对线路故障电压进行识别诊断,提出了基于集成学习的故障电压状态识别系统,利用多种特征提取方法提取非接触式电压测量得到的电压波形特征,其识别结果用于对线路故障进行预警和处理。针对该电压监测系统,设计了测量精度和故障识别测试,得到稳态平均误差为0.9%,故障识别准确率最高可达到93%,表明该电压监测系统具有较高的精度和故障识别准确率。 展开更多
关键词 非接触式电压测量 离散小波阈值降噪 硬件加速计算 集成学习
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基于时空图像法监测流量的测量误差分析 被引量:1
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作者 江赛男 刘德地 +2 位作者 徐永新 周婉 何喆 《中国农村水利水电》 北大核心 2024年第3期62-68,共7页
流量测量是开展水文分析和水资源管理的必要任务,有助于了解河流的水量变化,预测洪水风险,优化水资源分配。传统接触式测流方法装置布设复杂、测量效率低,以视频测流为代表的非接触式方法极大地提高施测效率,降低了成本,但对测流结果的... 流量测量是开展水文分析和水资源管理的必要任务,有助于了解河流的水量变化,预测洪水风险,优化水资源分配。传统接触式测流方法装置布设复杂、测量效率低,以视频测流为代表的非接触式方法极大地提高施测效率,降低了成本,但对测流结果的误差分析不足,导致测流结果在水文分析与水资源管理中的应用存在风险。为分析视频测流误差,在通过视频图像法计算断面水位、时空图像法(Space-time Image Velocity,STIV)计算断面流速的基础上,假定单次测量的误差分布,推求了水位和流速测量误差、流量测算误差及其主要来源。并定义了误差平均带宽(EAB)来定量评估误差的大小。以栾川县养子沟流域为对象开展实例研究,结果表明:在水位或流速快速上升阶段,测量误差区间较小;仅考虑水位的不确定性、仅考虑流速的不确定性,以及同时考虑水位和流速的不确定性时流量测量误差平均带宽(EAB)值分别为4.98%、10.83%和15.83%,流速测量不确定性对流量的影响比水位测量不确定性对流量的影响更大。考虑水位与流速不确定性影响的视频测流方法有利于提高流量测量准确性,为流域水资源管理提供可靠的数据支撑,特别是在需要对不断变化的水体状况进行监测和响应的情况下。对误差的深入理解也有助于改进视频测流技术,以减小误差并提高其在实际应用中的可靠性。 展开更多
关键词 非接触式测流 时空图像法 流量 不确定性
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基于4.3 THz量子级联激光器的微米级无损厚度测量
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作者 李弘义 谭智勇 +1 位作者 万文坚 曹俊诚 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2024年第3期354-358,共5页
构建和描述了一种用于获取硅片厚度的零差检测系统。利用4.3-THz激光束的传输相变与机械旋转台控制的入射角之间的关系,可以使用标准残差法精确推导被测样品的厚度值。结果表明,样品的厚度拟合值与光学显微镜的精确测量结果仅相差2.5~3... 构建和描述了一种用于获取硅片厚度的零差检测系统。利用4.3-THz激光束的传输相变与机械旋转台控制的入射角之间的关系,可以使用标准残差法精确推导被测样品的厚度值。结果表明,样品的厚度拟合值与光学显微镜的精确测量结果仅相差2.5~3μm,实现了微米级精度的太赫兹无损厚度测量。实验验证了太赫兹量子级联激光器在非接触无损测量中的有效性。 展开更多
关键词 太赫兹 量子级联激光器 零差探测 无损检测 非接触测量
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