Co−TiO2 nanocomposite films were prepared via magnetron sputtering at various substrate temperatures.The films comprise Co particles dispersed in an amorphous TiO2 matrix and exhibit coexisting ferromagnetic and super...Co−TiO2 nanocomposite films were prepared via magnetron sputtering at various substrate temperatures.The films comprise Co particles dispersed in an amorphous TiO2 matrix and exhibit coexisting ferromagnetic and superparamagnetic properties.When the substrate temperature increases from room temperature to 400℃,Co particles gradually grow,and the degree of Co oxidation significantly decreases.Consequently,the saturation magnetization increases from 0.13 to 0.43 T at the same Co content by increasing the substrate temperature from room temperature to 400℃.At a high substrate temperature,conductive pathways form among some of the clustered Co particles.Thus,resistivity rapidly declines from 1600 to 76μΩ·m.The magnetoresistive characteristic of Co−TiO2 films is achieved even at resistivity of as low as 76μΩ·m.These results reveal that the obtained nanocomposite films have low Co oxidation,high magnetization and magnetoresistance at room temperature.展开更多
The nanocomposite films were prepared by poly(ethylene oxide), PEO, intercalation in V2O5 xero-gel in sol-gel. The synthesis and state of the films are investigated by the XRD, IR, SEM, etc. The results show that V2O5...The nanocomposite films were prepared by poly(ethylene oxide), PEO, intercalation in V2O5 xero-gel in sol-gel. The synthesis and state of the films are investigated by the XRD, IR, SEM, etc. The results show that V2O5, xerogel is a layered structure which arranges in c-direction. The mterlayer distance of V2O5 xerogel increases remarkably when PEO is intercalated in V2O5 xero-gel interlayer. PEO has strong interaction with V2O5 host. The surface of the films is homogeneous without holes and cracks.展开更多
The distributions of traps and electron density in the interfaces between polyimide (PI) matrix and Al2O3 nanoparticles are researched using the isothermal decay current and the small-angle x-ray scattering (SAXS)...The distributions of traps and electron density in the interfaces between polyimide (PI) matrix and Al2O3 nanoparticles are researched using the isothermal decay current and the small-angle x-ray scattering (SAXS) tests. According to the electron density distribution for quasi two-phase mixture doped by spherical nanoparticles, the electron densities in the interfaces of PI/Al2O3 nanocomposite films are evaluated. The trap level density and carrier mobility in the interface are studied. The experimental results show that the distribution and the change rate of the electron density in the three layers of interface are different, indicating different trap distributions in the interface layers. There is a maximum trap level density in the second layer, where the maximum trap level density for the nanocomposite film doped by 25 wt% is 1.054 × 10^22 eV·m^-3 at 1.324eV, resulting in the carrier mobility reducing. In addition, both the thickness and the electron density of the nanocomposite film interface increase with the addition of the doped Al2O3 contents. Through the study on the trap level distribution in the interface, it is possible to further analyze the insulation mechanism and to improve the performance of nano-dielectric materials.展开更多
Lightweight,high-efficiency and low reflection electromagnetic interference(EMI)shielding polymer composites are greatly desired for addressing the challenge of ever-increasing electromagnetic pollution.Lightweight la...Lightweight,high-efficiency and low reflection electromagnetic interference(EMI)shielding polymer composites are greatly desired for addressing the challenge of ever-increasing electromagnetic pollution.Lightweight layered foam/film PVDF nanocomposites with efficient EMI shielding effectiveness and ultralow reflection power were fabricated by physical foaming.The unique layered foam/film structure was composed of PVDF/SiCnw/MXene(Ti_(3)C_(2)Tx)composite foam as absorption layer and highly conductive PVDF/MWCNT/GnPs composite film as a reflection layer.The foam layer with numerous heterogeneous interfaces developed between the SiC nanowires(SiCnw)and 2D MXene nanosheets imparted superior EM wave attenuation capability.Furthermore,the microcellular structure effectively tuned the impedance matching and prolonged the wave propagating path by internal scattering and multiple reflections.Meanwhile,the highly conductive PVDF/MWCNT/GnPs composite(~220 S m^(−1))exhibited superior reflectivity(R)of 0.95.The tailored structure in the layered foam/film PVDF nanocomposite exhibited an EMI SE of 32.6 dB and a low reflection bandwidth of 4 GHz(R<0.1)over the Kuband(12.4-18.0 GHz)at a thickness of 1.95 mm.A peak SER of 3.1×10^(-4) dB was obtained which corresponds to only 0.0022% reflection efficiency.In consequence,this study introduces a feasible approach to develop lightweight,high-efficiency EMI shielding materials with ultralow reflection for emerging applications.展开更多
Gold nanoparticles dispersed Y2O3 films were prepared through a sol-gel method by using yttrium acetate and Au nanoparticles colloid as precursors. The films were characterized by X-ray diffraction (XRD), transmissi...Gold nanoparticles dispersed Y2O3 films were prepared through a sol-gel method by using yttrium acetate and Au nanoparticles colloid as precursors. The films were characterized by X-ray diffraction (XRD), transmission electron microscopy (TEM) and UV-VIS absorption spectra. XRD patterns and TEM images of Y2O3 + Au films give the same resuits on structure and particle size as that of pure Y2O3 films. The surface plasma resonance (SPR) of Au nanoparticles in Y2O3 + Au film was observed around 550 nm in the absorption spectrum and its position shifts to red with increasing annealing temperature is caused by the increase of dielectric constant of Y2O3 matrix and the size of Au nanoparticles. The second and third order nonlinear optical effects of Y2O3 + Au films were also observed. The photoluminescent properties of Y2O3 : Eu + Au films were investigated and results indicate that there exist an energy transfer from Eu^3 + to Au nanoparticles and this energy transfer decreases the emission of Eu^3 + in Y2O3 : Eu + Au film.展开更多
ZnO–TiO_(2) thin films containing 0.5 mol%,1.0 mol%,and 5.0 mol%ZnO were synthesized by oxidative solidphase pyrolysis.The materials contained anatase and rutile phases with particle size of 6–13 nm,as confirmed usi...ZnO–TiO_(2) thin films containing 0.5 mol%,1.0 mol%,and 5.0 mol%ZnO were synthesized by oxidative solidphase pyrolysis.The materials contained anatase and rutile phases with particle size of 6–13 nm,as confirmed using X-ray phase analysis and scanning electron microscopy.When a certain number of ZnO crystallites appeared in the TiO_(2) film structure in the temperature range of room temperature to 220℃,a two-level response of the film resistance was observed,differing by approximately 10%,as obtained by electrophysical measurements.The two-level response correlates with the formation of two donor energy levels of 0.28 and 0.33 eV in the band structure of the ZnO–TiO_(2) films.The donor level with a higher activation energy corresponded to the Ti vacancy(V−Ti),and that with a lower activation energy corresponded to the Zn vacancy(V−Zn).Two levels of gas-sensitive properties were noted for 0.5ZnO–TiO_(2),1ZnO–TiO_(2),and 5ZnO–TiO_(2) under the influence of 50 ppm NO_(2) at 250℃.Such two-level responses can be ascribed to the pinning of the Fermi level on ZnO and TiO_(2) nanocrystallites.The mechanism of the beak-shaped and two-level responses of sensors based on composite nanomaterials when exposed to various gases was elucidated.展开更多
A Ag@CuFe_(2)O_(4)@TiO_(2) nanocomposite film with high performance of photogenerated cathodic protection was prepared by hydrothermal and photoreduction methods.The results showed that when the CuFe_(2)O_(4) hydrothe...A Ag@CuFe_(2)O_(4)@TiO_(2) nanocomposite film with high performance of photogenerated cathodic protection was prepared by hydrothermal and photoreduction methods.The results showed that when the CuFe_(2)O_(4) hydrothermal reaction time was 6 h and the AgNO_(3) concentration was 0.1 M,the Ag@CuFe_(2)O_(4)@TiO_(2) nanocomposite material performed the best cathodic protection capability for 304 stainless steel(304SS).In this case,the protective potential achieved-930 mV(versus SCE)associated with the photocurrent density of 475μA/cm^(2),which was 14.8 times that of pure TiO_(2) nanowires.In the dark,the nanocomposite provided cathodic protection of up to 485 mV for 304SS.Due to the heterogeneous junctions at the two interfaces among the three kinds of nanocomposite materials,the build-in electric field was fabricated,which promoted the separation efficiency of photogenerated electrons and holes and effectively improved the photochemical cathodic protection of 304SS.展开更多
Mo,as a dopant,is doped into SbTe to improve its thermal stability.It is shown in this paper that the Mo-doped Sb_(2)Te_(3)(Mo_(0.26)Sb_(2)Te_(3),MST)material possesses phase change memory(PCM)applications.MST has bet...Mo,as a dopant,is doped into SbTe to improve its thermal stability.It is shown in this paper that the Mo-doped Sb_(2)Te_(3)(Mo_(0.26)Sb_(2)Te_(3),MST)material possesses phase change memory(PCM)applications.MST has better thermal stability than Sb_(2)Te_(3)(ST)and will crystallize only when the annealing temperature is higher than 250℃.With the good thermal stability,MST-based PCM cells have a fast crystallization time of 6 ns.Furthermore,endurance up to 4×10^(5) cycles with a resistance ratio of more than one order of magnitude makes MST a promising candidate for PCM applications.展开更多
A simple method using a water soluble lignin quaternary ammonium salt (LQAS) and TiO2 has been developed for the preparation of lignin/TiO2 nanocomposites in an aqueous medium under mild conditions. The LQAS/TiO2 nano...A simple method using a water soluble lignin quaternary ammonium salt (LQAS) and TiO2 has been developed for the preparation of lignin/TiO2 nanocomposites in an aqueous medium under mild conditions. The LQAS/TiO2 nanocomposites contain well-dispersed small particles with excellent ultraviolet (UV) shielding abilities and good compatibilities with waterborne polyurethane (WPU). When the LQAS/TiO2 nanocomposites were blended with WPU, the UV absorbance and the tensile ductility of the WPU increased significantly. The composite WPU hybrid film containing 6 wt-% LQAS/TiO2 nanocomposite had the highest visible light transmittance and had excellent ultraviolet aging properties. After 192 h of UV light irradiation, the tensile strength of the composite film was above 8 MPa and the elongation at break was 800%. This work highlights new possibilities for the utilization of alkali lignin.展开更多
Designing super-broadband transparent conductors is challenging because of the exclusive nature of conductivity and infrared transmittance.Here,using a one-step process,we created vertically aligned nanocomposite cond...Designing super-broadband transparent conductors is challenging because of the exclusive nature of conductivity and infrared transmittance.Here,using a one-step process,we created vertically aligned nanocomposite conducting films with high transparency across a super-broad wavelength range.Vertically aligned transparent Ba_(3)V_(2)O_(8)nanocolumns with lateral-100-nm widths enable high transmittance(>50%,even at a 4-μm wavelength)for all incident light and outperform that of Sn-doped In_(2)O_(3),while the conducting SrVO_(3)matrix retains low resistivity(<0.56 mΩcm at room temperature).A combined study of scanning transmission electron microscopy,scattering scanning nearfield infrared microscopy,and X-ray diffraction revealed that spontaneous phase separation of Ba_(3)V_(2)O_(8)nanocolumns in a SrVO_(3)matrix film occurs via self-assembled epitaxial nucleation.Our vertically aligned nanocomposite films provide a fertile platform for next-generation optoelectronics.展开更多
In the present study,WB 2(N) films are fabricated on silicon and YG8 substrates at different N 2 pressures by reactive magnetron sputtering.The influence of N 2 partial pressure(P (N2)) on the film microstructur...In the present study,WB 2(N) films are fabricated on silicon and YG8 substrates at different N 2 pressures by reactive magnetron sputtering.The influence of N 2 partial pressure(P (N2)) on the film microstructure and characteristics is studied systematically,including the chemical composition,crystalline structure,residual stress,surface roughness as well as the surface and the cross-section morphology.Meanwhile,nano-indentation and ball-on-disk tribometer are performed to analyze the mechanical and tribological properties of the films.The results show that the addition of nitrogen apparently leads to the change of the structure from(1 0 1) to(0 0 1) orientation then to the amorphous structure with the formation of BN phase.And the addition of nitrogen can greatly refine the grain size and microstructure of the films.Furthermore,the residual stress of the film is also found to change from tensile to compressive stress as a function of P (N2),and the compressive stress increases with P (N2),The WB 2(N) films with small nitrogen content,which are deposited at P (N2) of 0.004 and 0.006 Pa,exhibit better mechanical,tribological and corrosion properties than those of other films.Further increase of nitrogen content accelerates the formation of BN phase and fast decreases the film hardness.In addition,the large N 2 partial pressure gives rise to the target poisoning accompanied by the increase of the target voltage and the decrease of the deposition rate.展开更多
基金Project(2016YFE0205700)supported by the National Key Research and Development Program of ChinaProject(18JCYBJC18000)supported by the Natural Science Foundation of Tianjin City,China。
文摘Co−TiO2 nanocomposite films were prepared via magnetron sputtering at various substrate temperatures.The films comprise Co particles dispersed in an amorphous TiO2 matrix and exhibit coexisting ferromagnetic and superparamagnetic properties.When the substrate temperature increases from room temperature to 400℃,Co particles gradually grow,and the degree of Co oxidation significantly decreases.Consequently,the saturation magnetization increases from 0.13 to 0.43 T at the same Co content by increasing the substrate temperature from room temperature to 400℃.At a high substrate temperature,conductive pathways form among some of the clustered Co particles.Thus,resistivity rapidly declines from 1600 to 76μΩ·m.The magnetoresistive characteristic of Co−TiO2 films is achieved even at resistivity of as low as 76μΩ·m.These results reveal that the obtained nanocomposite films have low Co oxidation,high magnetization and magnetoresistance at room temperature.
基金This project was supported by National Natural Science Foundation of China (Grant No.59802009 ) and Hubei Province Natural Science Foundation(Grant No. 99J053).
文摘The nanocomposite films were prepared by poly(ethylene oxide), PEO, intercalation in V2O5 xero-gel in sol-gel. The synthesis and state of the films are investigated by the XRD, IR, SEM, etc. The results show that V2O5, xerogel is a layered structure which arranges in c-direction. The mterlayer distance of V2O5 xerogel increases remarkably when PEO is intercalated in V2O5 xero-gel interlayer. PEO has strong interaction with V2O5 host. The surface of the films is homogeneous without holes and cracks.
基金Supported by the National Natural Science Foundation of China under Grant Nos 51337002,51077028,51502063 and 51307046the Foundation of Harbin Science and Technology Bureau of Heilongjiang Province under Grant No RC2014QN017034
文摘The distributions of traps and electron density in the interfaces between polyimide (PI) matrix and Al2O3 nanoparticles are researched using the isothermal decay current and the small-angle x-ray scattering (SAXS) tests. According to the electron density distribution for quasi two-phase mixture doped by spherical nanoparticles, the electron densities in the interfaces of PI/Al2O3 nanocomposite films are evaluated. The trap level density and carrier mobility in the interface are studied. The experimental results show that the distribution and the change rate of the electron density in the three layers of interface are different, indicating different trap distributions in the interface layers. There is a maximum trap level density in the second layer, where the maximum trap level density for the nanocomposite film doped by 25 wt% is 1.054 × 10^22 eV·m^-3 at 1.324eV, resulting in the carrier mobility reducing. In addition, both the thickness and the electron density of the nanocomposite film interface increase with the addition of the doped Al2O3 contents. Through the study on the trap level distribution in the interface, it is possible to further analyze the insulation mechanism and to improve the performance of nano-dielectric materials.
基金the financial support of NSERC(Discovery Grant RGPIN-2015-03985).
文摘Lightweight,high-efficiency and low reflection electromagnetic interference(EMI)shielding polymer composites are greatly desired for addressing the challenge of ever-increasing electromagnetic pollution.Lightweight layered foam/film PVDF nanocomposites with efficient EMI shielding effectiveness and ultralow reflection power were fabricated by physical foaming.The unique layered foam/film structure was composed of PVDF/SiCnw/MXene(Ti_(3)C_(2)Tx)composite foam as absorption layer and highly conductive PVDF/MWCNT/GnPs composite film as a reflection layer.The foam layer with numerous heterogeneous interfaces developed between the SiC nanowires(SiCnw)and 2D MXene nanosheets imparted superior EM wave attenuation capability.Furthermore,the microcellular structure effectively tuned the impedance matching and prolonged the wave propagating path by internal scattering and multiple reflections.Meanwhile,the highly conductive PVDF/MWCNT/GnPs composite(~220 S m^(−1))exhibited superior reflectivity(R)of 0.95.The tailored structure in the layered foam/film PVDF nanocomposite exhibited an EMI SE of 32.6 dB and a low reflection bandwidth of 4 GHz(R<0.1)over the Kuband(12.4-18.0 GHz)at a thickness of 1.95 mm.A peak SER of 3.1×10^(-4) dB was obtained which corresponds to only 0.0022% reflection efficiency.In consequence,this study introduces a feasible approach to develop lightweight,high-efficiency EMI shielding materials with ultralow reflection for emerging applications.
文摘Gold nanoparticles dispersed Y2O3 films were prepared through a sol-gel method by using yttrium acetate and Au nanoparticles colloid as precursors. The films were characterized by X-ray diffraction (XRD), transmission electron microscopy (TEM) and UV-VIS absorption spectra. XRD patterns and TEM images of Y2O3 + Au films give the same resuits on structure and particle size as that of pure Y2O3 films. The surface plasma resonance (SPR) of Au nanoparticles in Y2O3 + Au film was observed around 550 nm in the absorption spectrum and its position shifts to red with increasing annealing temperature is caused by the increase of dielectric constant of Y2O3 matrix and the size of Au nanoparticles. The second and third order nonlinear optical effects of Y2O3 + Au films were also observed. The photoluminescent properties of Y2O3 : Eu + Au films were investigated and results indicate that there exist an energy transfer from Eu^3 + to Au nanoparticles and this energy transfer decreases the emission of Eu^3 + in Y2O3 : Eu + Au film.
基金supported by the Russian Science Foundation 24-29-00203(https://rscf.ru/project/24-29-00203/)at the Southern Federal University.
文摘ZnO–TiO_(2) thin films containing 0.5 mol%,1.0 mol%,and 5.0 mol%ZnO were synthesized by oxidative solidphase pyrolysis.The materials contained anatase and rutile phases with particle size of 6–13 nm,as confirmed using X-ray phase analysis and scanning electron microscopy.When a certain number of ZnO crystallites appeared in the TiO_(2) film structure in the temperature range of room temperature to 220℃,a two-level response of the film resistance was observed,differing by approximately 10%,as obtained by electrophysical measurements.The two-level response correlates with the formation of two donor energy levels of 0.28 and 0.33 eV in the band structure of the ZnO–TiO_(2) films.The donor level with a higher activation energy corresponded to the Ti vacancy(V−Ti),and that with a lower activation energy corresponded to the Zn vacancy(V−Zn).Two levels of gas-sensitive properties were noted for 0.5ZnO–TiO_(2),1ZnO–TiO_(2),and 5ZnO–TiO_(2) under the influence of 50 ppm NO_(2) at 250℃.Such two-level responses can be ascribed to the pinning of the Fermi level on ZnO and TiO_(2) nanocrystallites.The mechanism of the beak-shaped and two-level responses of sensors based on composite nanomaterials when exposed to various gases was elucidated.
基金financially supported by the National Natural Science Foundation of China(Nos.U1706225,42006046,2019GGX102014,2019YFC0312103)the Research Fund of Open Studio for Marine Corrosion and Protection,Pilot National Laboratory for Marine Science and Technology(Qingdao,No.HYFSKF201804)。
文摘A Ag@CuFe_(2)O_(4)@TiO_(2) nanocomposite film with high performance of photogenerated cathodic protection was prepared by hydrothermal and photoreduction methods.The results showed that when the CuFe_(2)O_(4) hydrothermal reaction time was 6 h and the AgNO_(3) concentration was 0.1 M,the Ag@CuFe_(2)O_(4)@TiO_(2) nanocomposite material performed the best cathodic protection capability for 304 stainless steel(304SS).In this case,the protective potential achieved-930 mV(versus SCE)associated with the photocurrent density of 475μA/cm^(2),which was 14.8 times that of pure TiO_(2) nanowires.In the dark,the nanocomposite provided cathodic protection of up to 485 mV for 304SS.Due to the heterogeneous junctions at the two interfaces among the three kinds of nanocomposite materials,the build-in electric field was fabricated,which promoted the separation efficiency of photogenerated electrons and holes and effectively improved the photochemical cathodic protection of 304SS.
基金Project supported by the National Key Research and Development Program of China(Grant Nos.2017YFB0701703 and 2017YFA0206101)the National Natural Science Foundation of China(Grant No.61874151)the Science and Technology Council of Shanghai,China(Grant Nos.19JC1416801 and 19JC1416802).
文摘Mo,as a dopant,is doped into SbTe to improve its thermal stability.It is shown in this paper that the Mo-doped Sb_(2)Te_(3)(Mo_(0.26)Sb_(2)Te_(3),MST)material possesses phase change memory(PCM)applications.MST has better thermal stability than Sb_(2)Te_(3)(ST)and will crystallize only when the annealing temperature is higher than 250℃.With the good thermal stability,MST-based PCM cells have a fast crystallization time of 6 ns.Furthermore,endurance up to 4×10^(5) cycles with a resistance ratio of more than one order of magnitude makes MST a promising candidate for PCM applications.
基金the National Natural Science Foundation of China (Grant Nos. 21436004 and 21706082)the Science and Technology Program of Guangzhou (201707020025)+1 种基金the Fundamental Research Funds for the Central Universities (D2174110)Guangdong Province Science Foundation for Cultivating National Engineering Research Center for Efficient Utilization of Plant Fibers (2017B090903003) for the financial support.
文摘A simple method using a water soluble lignin quaternary ammonium salt (LQAS) and TiO2 has been developed for the preparation of lignin/TiO2 nanocomposites in an aqueous medium under mild conditions. The LQAS/TiO2 nanocomposites contain well-dispersed small particles with excellent ultraviolet (UV) shielding abilities and good compatibilities with waterborne polyurethane (WPU). When the LQAS/TiO2 nanocomposites were blended with WPU, the UV absorbance and the tensile ductility of the WPU increased significantly. The composite WPU hybrid film containing 6 wt-% LQAS/TiO2 nanocomposite had the highest visible light transmittance and had excellent ultraviolet aging properties. After 192 h of UV light irradiation, the tensile strength of the composite film was above 8 MPa and the elongation at break was 800%. This work highlights new possibilities for the utilization of alkali lignin.
基金supported by the national R&D programs through the National Research Foundation of Korea funded by the Ministry of Science and ICT(Project Nos.:NRF-2021M3F3A2A03015439,NRF-2021R1C1C1005042,and NRF-2018R1A5A1025511)We also acknowledge partial support from the national R&D programs through the National Research Foundation of Korea funded by the Ministry of Education(Project No.:NRF-2021R1A6A3A13043948)+1 种基金the DGIST R&D program of the Ministry of Science and ICT of Korea(Project Nos.:22-HRHR+-05,22-CoE-NT-02,and 22-SENS-1)Judith L.MacManus-Driscoll thanks the EU-H2020-ERC-ADG#882929 EROS grant for support,and the Royal Academy of Engineering-grant CIET1819_24.
文摘Designing super-broadband transparent conductors is challenging because of the exclusive nature of conductivity and infrared transmittance.Here,using a one-step process,we created vertically aligned nanocomposite conducting films with high transparency across a super-broad wavelength range.Vertically aligned transparent Ba_(3)V_(2)O_(8)nanocolumns with lateral-100-nm widths enable high transmittance(>50%,even at a 4-μm wavelength)for all incident light and outperform that of Sn-doped In_(2)O_(3),while the conducting SrVO_(3)matrix retains low resistivity(<0.56 mΩcm at room temperature).A combined study of scanning transmission electron microscopy,scattering scanning nearfield infrared microscopy,and X-ray diffraction revealed that spontaneous phase separation of Ba_(3)V_(2)O_(8)nanocolumns in a SrVO_(3)matrix film occurs via self-assembled epitaxial nucleation.Our vertically aligned nanocomposite films provide a fertile platform for next-generation optoelectronics.
基金supported by the National Key Basic Research Program of China (973 Program,No.2012CB625100)the Natural Science Foundation of Liaoning Province of China (No.2013020093)
文摘In the present study,WB 2(N) films are fabricated on silicon and YG8 substrates at different N 2 pressures by reactive magnetron sputtering.The influence of N 2 partial pressure(P (N2)) on the film microstructure and characteristics is studied systematically,including the chemical composition,crystalline structure,residual stress,surface roughness as well as the surface and the cross-section morphology.Meanwhile,nano-indentation and ball-on-disk tribometer are performed to analyze the mechanical and tribological properties of the films.The results show that the addition of nitrogen apparently leads to the change of the structure from(1 0 1) to(0 0 1) orientation then to the amorphous structure with the formation of BN phase.And the addition of nitrogen can greatly refine the grain size and microstructure of the films.Furthermore,the residual stress of the film is also found to change from tensile to compressive stress as a function of P (N2),and the compressive stress increases with P (N2),The WB 2(N) films with small nitrogen content,which are deposited at P (N2) of 0.004 and 0.006 Pa,exhibit better mechanical,tribological and corrosion properties than those of other films.Further increase of nitrogen content accelerates the formation of BN phase and fast decreases the film hardness.In addition,the large N 2 partial pressure gives rise to the target poisoning accompanied by the increase of the target voltage and the decrease of the deposition rate.