A new concept of bend-mode inkjet nozzle with double PZT (lead zirconate titanate) actuators has been designed and fabricated in the present study. Then the pressure wave and fluid velocity at the nozzle exit have bee...A new concept of bend-mode inkjet nozzle with double PZT (lead zirconate titanate) actuators has been designed and fabricated in the present study. Then the pressure wave and fluid velocity at the nozzle exit have been investigated. The complex pressure behavior inside the channel was solved numerically based on the narrow channel acoustic theory. The two PZTs attached to a rectangular channel were actuated sequentially by setting the waveforms of each PZT to be center-aligned with various pulse widths. As a result, the double PZT actuation is superior to the single PZT actuation in view of strong momentum force and fast dissipation of residual pressure. The maximum fluid velocity at the nozzle exit is observed when the respective pulse widths equal to their optimum pulse widths. The numerical results are supported by the experimental results with the fabricated inkjet device by measuring the speed of meniscus just out of the nozzle.展开更多
This paper is concerned with the work involved in improving the machining accuracy of a cantilever boring bar by on line compensation with a piezoelectric actuator. A boring bar is made into lever structure, with str...This paper is concerned with the work involved in improving the machining accuracy of a cantilever boring bar by on line compensation with a piezoelectric actuator. A boring bar is made into lever structure, with strain gauges attached to the bar for measuring its force induced deflections. The piezoelectric actuator is employed to compensate the deflections of the boring bar for accuracy improvement. Due to the mechanical advantage of the structure, the boring bar can be made into smaller size. The diameter of the bar implemented is 10 mm and the ratio of length to diameter (L/D) is larger than 8. It is found that the machining accuracy is improved considerably by using the piezoelectric actuator compensation system.展开更多
For the smaller thrust,it is difficult to achieve 3Dtrans-scale precision positioning based on previous stick-slip driving.A large thrust trans-scale precision positioning stage is studied based on the inertial stick-...For the smaller thrust,it is difficult to achieve 3Dtrans-scale precision positioning based on previous stick-slip driving.A large thrust trans-scale precision positioning stage is studied based on the inertial stick-slip driving.The process of the movement is divided into two steps,i.e.,the″sliding″phase and the″stickness″phase.In the whole process,the kinematics model of the inertial stick-slip driving is established,and it reveals some factors affecting the velocity of inertial stick-slip driving.Furthermore,a simulation of movement is preformed by Matlab-Simulink software,and the whole process of the inertial stick-slip driving is displayed.After one experimental prototype is designed,the back and forth velocity is tested.Finally,the simulation verifies the accuracy of the kinematics model.展开更多
An analytical study was presented on active control of sound transmission into a vibro-acoustic enclosure comprising two flexible plates. Two types of actuators were used, i.e. acoustic actuator and distributed lead z...An analytical study was presented on active control of sound transmission into a vibro-acoustic enclosure comprising two flexible plates. Two types of actuators were used, i.e. acoustic actuator and distributed lead zirconate titanate piezoelectric (PZT) actuator instead of point force actuator. Using the modal acoustic transfer impedance-mobility matrices, the excitation and interaction in the coupled sound transmission system can be described with clear physical significance. With the control system designed to globally reduce the sound field, different control system configurations were considered, including the structural actuator on the incident plate, actuator on the receiving plate, acoustic actuator on the cavity, and their combinations. The effectiveness and performance of the control strategy corresponding to each system configuration were compared and discussed. The role and control mechanism of each type of actuator were of particular interest. It was shown that the incident plate actuator is effective in controlling the cavity-dominated modes and the structural modes dominated by the incident plate and receiving plate. Two main control mechanisms are involved in this control configuration, i.e., modal suppressing and modal rearrangement. For control system configuration with only acoustic actuator in the enclosure, the mechanism involved in this arrangement is purely modal suppression. Desirable placements of structural actuators in terms of total potential energy reduction were also discussed.展开更多
A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry (VSMI). A Linnik type interference microscope is ...A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry (VSMI). A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded with a CCD camera. A developed nano-positioning work stage with an integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By a white-light phase shifting algorithm of arbitrary step, frames of interferograms are processed by a computer to rebuild and evaluate the measured profile. Because of the specialty of VSMI, the profilometer is suitable for both smooth and rough surface measurement. It can also be used to measure curved surfaces, dimension of micro electro mechanical systems (MEMS), etc. The vertical resolution of the profilometer is 0.5 nm, and lateral resolution 0.5 μm.展开更多
A fully flexure micro/nano transmission platform(MNTP)which has five degrees of freedom is designed on the basis of bridge type amplification mechanism.According to the kinematic theory and the elastic beam theory,the...A fully flexure micro/nano transmission platform(MNTP)which has five degrees of freedom is designed on the basis of bridge type amplification mechanism.According to the kinematic theory and the elastic beam theory,the theoretical output displacement equation of the platform is derived,and then piezoelectric actuator(PZT)is calibrated.Meanwhile,a full closed-loop control strategy of the platform is established using the feedforward proportional-integral-derivative(PID)compound control algorithm based on the Preisach model.Moreover,the total transfer function of the micro positioning system is derived,and the calculation method of output signal is acquired.Finally,the theoretical output displacement is verified by finite element analysis(FEA)and positioning experiments.展开更多
This paper presents the development of a coarse-fine dual precision positioning stage to achieve long travel range and high accuracy.The fine stage is arranged in series with a coarse stage.The key in the fine stage d...This paper presents the development of a coarse-fine dual precision positioning stage to achieve long travel range and high accuracy.The fine stage is arranged in series with a coarse stage.The key in the fine stage design is the choice of a toggle mechanism for a tight mechanical loop with high stiffness and compactness.We designed the toggle mechanism for reduction of the displacement to suppress signal noises.The performance of the coarse and fine stages was verified with an optical encoder and capacitive sensor,respectively.The measurement results show that the dual mechanism has a travel range of 1 mm and resolution of 30 nm.展开更多
基金supported by Basic Science Research Program through the National Research Foundation of Korea(NRF)funded by the Ministry of Education,Science and Technology(2010-0009054)
文摘A new concept of bend-mode inkjet nozzle with double PZT (lead zirconate titanate) actuators has been designed and fabricated in the present study. Then the pressure wave and fluid velocity at the nozzle exit have been investigated. The complex pressure behavior inside the channel was solved numerically based on the narrow channel acoustic theory. The two PZTs attached to a rectangular channel were actuated sequentially by setting the waveforms of each PZT to be center-aligned with various pulse widths. As a result, the double PZT actuation is superior to the single PZT actuation in view of strong momentum force and fast dissipation of residual pressure. The maximum fluid velocity at the nozzle exit is observed when the respective pulse widths equal to their optimum pulse widths. The numerical results are supported by the experimental results with the fabricated inkjet device by measuring the speed of meniscus just out of the nozzle.
文摘This paper is concerned with the work involved in improving the machining accuracy of a cantilever boring bar by on line compensation with a piezoelectric actuator. A boring bar is made into lever structure, with strain gauges attached to the bar for measuring its force induced deflections. The piezoelectric actuator is employed to compensate the deflections of the boring bar for accuracy improvement. Due to the mechanical advantage of the structure, the boring bar can be made into smaller size. The diameter of the bar implemented is 10 mm and the ratio of length to diameter (L/D) is larger than 8. It is found that the machining accuracy is improved considerably by using the piezoelectric actuator compensation system.
基金supported by the National Natural Science Foundation of China(No.51175358)the Natural Science Foundation of Jiangsu Province (No.BK20140345)+2 种基金Colleges and Universities Natural Science Foundation of Jiangsu Province (No.14KJB460025)the National Science Foundation for Post-Doctoral Scientists of China (No.2014M551651)the Natural Science Foundation of Jiangsu Province for Post-Doctoral Scientists (No. 1401073C)
文摘For the smaller thrust,it is difficult to achieve 3Dtrans-scale precision positioning based on previous stick-slip driving.A large thrust trans-scale precision positioning stage is studied based on the inertial stick-slip driving.The process of the movement is divided into two steps,i.e.,the″sliding″phase and the″stickness″phase.In the whole process,the kinematics model of the inertial stick-slip driving is established,and it reveals some factors affecting the velocity of inertial stick-slip driving.Furthermore,a simulation of movement is preformed by Matlab-Simulink software,and the whole process of the inertial stick-slip driving is displayed.After one experimental prototype is designed,the back and forth velocity is tested.Finally,the simulation verifies the accuracy of the kinematics model.
基金Supported by the National Natural Science Foundation of China (No.10802024)Research Fund for the Doctoral Program of Higher Education of China (No. 200802171009)+1 种基金Innovative Talents Fund of Harbin (No.2009RFQXG211)Fundamental Research Fund of HEU (No. HEUFT08003)
文摘An analytical study was presented on active control of sound transmission into a vibro-acoustic enclosure comprising two flexible plates. Two types of actuators were used, i.e. acoustic actuator and distributed lead zirconate titanate piezoelectric (PZT) actuator instead of point force actuator. Using the modal acoustic transfer impedance-mobility matrices, the excitation and interaction in the coupled sound transmission system can be described with clear physical significance. With the control system designed to globally reduce the sound field, different control system configurations were considered, including the structural actuator on the incident plate, actuator on the receiving plate, acoustic actuator on the cavity, and their combinations. The effectiveness and performance of the control strategy corresponding to each system configuration were compared and discussed. The role and control mechanism of each type of actuator were of particular interest. It was shown that the incident plate actuator is effective in controlling the cavity-dominated modes and the structural modes dominated by the incident plate and receiving plate. Two main control mechanisms are involved in this control configuration, i.e., modal suppressing and modal rearrangement. For control system configuration with only acoustic actuator in the enclosure, the mechanism involved in this arrangement is purely modal suppression. Desirable placements of structural actuators in terms of total potential energy reduction were also discussed.
基金Project supported by the National Natural Science Foundation of China (Grant No.50175037)
文摘A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry (VSMI). A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded with a CCD camera. A developed nano-positioning work stage with an integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By a white-light phase shifting algorithm of arbitrary step, frames of interferograms are processed by a computer to rebuild and evaluate the measured profile. Because of the specialty of VSMI, the profilometer is suitable for both smooth and rough surface measurement. It can also be used to measure curved surfaces, dimension of micro electro mechanical systems (MEMS), etc. The vertical resolution of the profilometer is 0.5 nm, and lateral resolution 0.5 μm.
基金Supported by the State Key Laboratory of Mechanical Transmission Independent Research Fund(SKLMT-ZZKT-2012 MS 05)
文摘A fully flexure micro/nano transmission platform(MNTP)which has five degrees of freedom is designed on the basis of bridge type amplification mechanism.According to the kinematic theory and the elastic beam theory,the theoretical output displacement equation of the platform is derived,and then piezoelectric actuator(PZT)is calibrated.Meanwhile,a full closed-loop control strategy of the platform is established using the feedforward proportional-integral-derivative(PID)compound control algorithm based on the Preisach model.Moreover,the total transfer function of the micro positioning system is derived,and the calculation method of output signal is acquired.Finally,the theoretical output displacement is verified by finite element analysis(FEA)and positioning experiments.
基金supported by the National Science Council (No.NSC-96-2628-E002-199)
文摘This paper presents the development of a coarse-fine dual precision positioning stage to achieve long travel range and high accuracy.The fine stage is arranged in series with a coarse stage.The key in the fine stage design is the choice of a toggle mechanism for a tight mechanical loop with high stiffness and compactness.We designed the toggle mechanism for reduction of the displacement to suppress signal noises.The performance of the coarse and fine stages was verified with an optical encoder and capacitive sensor,respectively.The measurement results show that the dual mechanism has a travel range of 1 mm and resolution of 30 nm.