The fabrication and characterization of a hybrid Silicon-PDMS micropump based on MEMS technology is presented. The micropump consists of one chamber,two passive valves and one PDMS diaphragm.A PZT bimorph working as t...The fabrication and characterization of a hybrid Silicon-PDMS micropump based on MEMS technology is presented. The micropump consists of one chamber,two passive valves and one PDMS diaphragm.A PZT bimorph working as the actuator is mounted on the PDMS diaphragm.The use of the PDMS diaphragm and the PZT bimorph can give rise to large displacements of the pump diaphragm,making the micropump more efficient and easier to be fabricated.The flow rate of the micropump is a function to the voltage and frequency of the applied square wave.When a square wave of 100V is applied,a maximum flow rate of 317μL/min and a back-pressure of 2 kPa are achieved at 20 Hz.展开更多
基金The authors greatly acknowledge the financial support from the National Science Foundation of China (Grant number 20299030, 60427001 and 60501020).
文摘The fabrication and characterization of a hybrid Silicon-PDMS micropump based on MEMS technology is presented. The micropump consists of one chamber,two passive valves and one PDMS diaphragm.A PZT bimorph working as the actuator is mounted on the PDMS diaphragm.The use of the PDMS diaphragm and the PZT bimorph can give rise to large displacements of the pump diaphragm,making the micropump more efficient and easier to be fabricated.The flow rate of the micropump is a function to the voltage and frequency of the applied square wave.When a square wave of 100V is applied,a maximum flow rate of 317μL/min and a back-pressure of 2 kPa are achieved at 20 Hz.
基金Supported by the NSAF(No.10676015)the National Natural Science Foundation of China(No.50621201)+1 种基金the National 863 High Technology Research and Development Program of China(No.2007AA03Z107)the New Star in Science and Technology of Beijing Novaprogram(No.2006B56)