This article mainly deals with the preparation and properties of PZTthin films. A new type of Metal-Me tal Oxide composite target was developed. Relating factors have been discussed. The electrical and optical propert...This article mainly deals with the preparation and properties of PZTthin films. A new type of Metal-Me tal Oxide composite target was developed. Relating factors have been discussed. The electrical and optical properties of PZT thin films have also been studied.展开更多
The micro touch sensor which is designed to be used in the blood vessels isproposed. Using this touch sensor, the risk of injuring blood vessels can be reduced. A prototype ofmicro touch sensor using PZT (lead zircona...The micro touch sensor which is designed to be used in the blood vessels isproposed. Using this touch sensor, the risk of injuring blood vessels can be reduced. A prototype ofmicro touch sensor using PZT (lead zirconate titanate) thin film synthesized by hydrothermal methodis made. The basic properties of the micro touch sensor are studied. In order to analyse theproperties of the micro touch sensor, a mathematical model is set up.展开更多
Ferroelectric Pb(Zr_(0.52)Ti_(0.48))O_(3)(PZT)thick films with highly(100)preferential orientation have been prepared by chemical solution deposition process on Pt/Ti/SiO_(2)/(100)Si substrates and pyrolyzed at 350℃-...Ferroelectric Pb(Zr_(0.52)Ti_(0.48))O_(3)(PZT)thick films with highly(100)preferential orientation have been prepared by chemical solution deposition process on Pt/Ti/SiO_(2)/(100)Si substrates and pyrolyzed at 350℃-450℃,then annealed at 650℃.The typical thickness of the films is 3.9m.Effects of the pyrolysis temperature and excess PbO on the orientation,dielectric and ferroelectric properties of PZT thick films have been discussed.Domain switching and depoling process were studied by piezoelectric force microscopy.(100)oriented PZT films exhibit enhanced electrical properties.The dielectric constant and loss tangent of the films are 1444 and 0.022 at 1 kHz,respectively.The remnant polarization increases from 27.6 to 34.6μC/cm^(2),and the coercive field decreases from 61.4 to 43.5 kV/cm,when the orientation of the films changes from the random orientation to the preferential(100)orientation.The leakage current density is 10^(-8)A/cm^(2) at dc field of 0.25 kV/cm,and then increases to 10^(-6) A/cm^(2) at 40 kV/cm.The piezoelectric response of the oriented films is investigated by Piezoelecric Force Microscopy(PFM).展开更多
Energy harvesting was demonstrated in hydrothermal PZT nanocrystal films driven by ultra-sound.With high temperature sintering and solution infiltration,PZT films with nanograin sizewas found to exhibit bulk-like prop...Energy harvesting was demonstrated in hydrothermal PZT nanocrystal films driven by ultra-sound.With high temperature sintering and solution infiltration,PZT films with nanograin sizewas found to exhibit bulk-like properties such as large remnant polarization of 42μC/cm^(2).Withthe bulk-like properties,a packaged PZT film device was demonstrated to be capable of convertingmechanical energy carried by the ultrasonic wave into electrical energy in a reliable and efficient way.The result suggests an alternative potential solution for energy harvesting application.展开更多
基金supported by the National Natural Science Foundation of China (No. 50872080)Shanghai Special Foundation of Nanotechnology (No. 1052nm07300)+1 种基金Shanghai Education Development Foundation (No. 08SG41)Shanghai Leading Academic Disciplines (No. S30107)
文摘This article mainly deals with the preparation and properties of PZTthin films. A new type of Metal-Me tal Oxide composite target was developed. Relating factors have been discussed. The electrical and optical properties of PZT thin films have also been studied.
基金This project is supported by National Natural Science Foundation of China (No.90207003) Scientific Research Foundation of Ministry of Education and Dalian City for the Returned Overseas Chinese Scholars, China.
文摘The micro touch sensor which is designed to be used in the blood vessels isproposed. Using this touch sensor, the risk of injuring blood vessels can be reduced. A prototype ofmicro touch sensor using PZT (lead zirconate titanate) thin film synthesized by hydrothermal methodis made. The basic properties of the micro touch sensor are studied. In order to analyse theproperties of the micro touch sensor, a mathematical model is set up.
基金supported by the Natural Science Foundation of China(Grant No.90923001)the International Science&Technology Cooperation Program of China(Grant Nos.2010DFB13640 and 2011DFA51880)the Shaanxi Province International Collaboration Program(Grant Nos.2009KW-12 and 2010KW-09).
文摘Ferroelectric Pb(Zr_(0.52)Ti_(0.48))O_(3)(PZT)thick films with highly(100)preferential orientation have been prepared by chemical solution deposition process on Pt/Ti/SiO_(2)/(100)Si substrates and pyrolyzed at 350℃-450℃,then annealed at 650℃.The typical thickness of the films is 3.9m.Effects of the pyrolysis temperature and excess PbO on the orientation,dielectric and ferroelectric properties of PZT thick films have been discussed.Domain switching and depoling process were studied by piezoelectric force microscopy.(100)oriented PZT films exhibit enhanced electrical properties.The dielectric constant and loss tangent of the films are 1444 and 0.022 at 1 kHz,respectively.The remnant polarization increases from 27.6 to 34.6μC/cm^(2),and the coercive field decreases from 61.4 to 43.5 kV/cm,when the orientation of the films changes from the random orientation to the preferential(100)orientation.The leakage current density is 10^(-8)A/cm^(2) at dc field of 0.25 kV/cm,and then increases to 10^(-6) A/cm^(2) at 40 kV/cm.The piezoelectric response of the oriented films is investigated by Piezoelecric Force Microscopy(PFM).
文摘Energy harvesting was demonstrated in hydrothermal PZT nanocrystal films driven by ultra-sound.With high temperature sintering and solution infiltration,PZT films with nanograin sizewas found to exhibit bulk-like properties such as large remnant polarization of 42μC/cm^(2).Withthe bulk-like properties,a packaged PZT film device was demonstrated to be capable of convertingmechanical energy carried by the ultrasonic wave into electrical energy in a reliable and efficient way.The result suggests an alternative potential solution for energy harvesting application.
