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Parylene C薄膜微波电路的应用可行性研究 被引量:2
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作者 张亚楠 孙鹏 周澄 《宇航材料工艺》 CAS CSCD 北大核心 2021年第1期55-59,共5页
针对三防材料在微波电路中多余物防控方面的可行性、可靠性问题,提出在产品表面用真空化学气相沉积法镀Parylene C薄膜,结果表明该膜层可有效控制直径d小于1 mm的可动多余物,提高微波产品PIND(颗粒碰撞粒子检测)测试的合格率。同时与焊... 针对三防材料在微波电路中多余物防控方面的可行性、可靠性问题,提出在产品表面用真空化学气相沉积法镀Parylene C薄膜,结果表明该膜层可有效控制直径d小于1 mm的可动多余物,提高微波产品PIND(颗粒碰撞粒子检测)测试的合格率。同时与焊接、胶粘、互联、清洗等配装工艺有良好的适配性,且满足可靠性要求。该薄膜较高的绝缘强度,对微波电路有优异的绝缘防护作用。说明Parylene C薄膜材料在微波产品中具有应用可行性和潜在价值。 展开更多
关键词 微波产品 parylene c薄膜 真空化学气相沉积法 多余物 可行性
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Sorption and permeation of gaseous molecules in amorphous and crystalline PPX C membranes: molecular dynamics and grand canonical Monte Carlo simulation studies 被引量:2
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作者 边亮 舒远杰 王新峰 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第7期325-336,共12页
Amorphous and crystalline poly (chloro-p-xytylene) (PPX C) membranes are constructed by using a novel com- putational technique, that is, a combined method of NVT+NPT-molecular dynamics (MD) and gradually reduc... Amorphous and crystalline poly (chloro-p-xytylene) (PPX C) membranes are constructed by using a novel com- putational technique, that is, a combined method of NVT+NPT-molecular dynamics (MD) and gradually reducing the size (GRS) methods. The related free volumes are defined as homology clusters. Then the sorption and the permeation of gases in PPX C polymers are studied using grand canonical Monte Carlo (GCMC) and NVT-MD methods. The results show that the crystalline PPX C membranes provide smaller free volumes for absorbing or transferring gases relative to the amorphous PPX C area. The gas sorption in PPX C membranes mainly belongs to the physical one, and H bonds can appear obviously in the amorphous area. By cluster analyzing on the mean square displacement of gases, we find that gases walk along the x axis in the crystalline area and walk randomly in the amorphous area. The calculated permeability coefficients are close to the experimental data. 展开更多
关键词 cluster analysis parylene c grand canonical Monte carlo method molecular dynamics
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金属表面派瑞林防腐蚀涂层的制备与防护性研究
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作者 高淑婷 李航 +2 位作者 贾宝栋 陈建松 赵志军 《冶金与材料》 2023年第5期10-12,共3页
文章利用化学气相沉积法在铜样品表面涂覆派瑞林(Parylene C)涂层,研究了工艺参数对Parylene C涂层沉积速率的影响。扫描电镜形貌分析结果显示,制备的Parylene C涂层具有良好的连续性。利用电化学工作站测定了Parylene C涂层的表面电阻... 文章利用化学气相沉积法在铜样品表面涂覆派瑞林(Parylene C)涂层,研究了工艺参数对Parylene C涂层沉积速率的影响。扫描电镜形貌分析结果显示,制备的Parylene C涂层具有良好的连续性。利用电化学工作站测定了Parylene C涂层的表面电阻并推测其抗腐蚀性,并对比了光辐照对涂层电极电位的影响,结果表明:Parylene C涂层对金属绝缘防护能力很强,可见光波段辐照对涂层电极电位的影响较小,在大湿度盐雾环境中,Parylene C涂层能够保证金属导体间的良好防潮绝缘性能。 展开更多
关键词 化学气相沉积 parylene c涂层 防潮防护性 光辐照
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Electron-beam lithography for polymer bioMEMS with submicron features 被引量:2
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作者 Kee Scholten Ellis Meng 《Microsystems & Nanoengineering》 EI 2016年第1期45-51,共7页
We present a method for submicron fabrication of flexible,thin-film structures fully encapsulated in biocompatible polymer poly(chloro-p-xylylene)(Parylene C)that improves feature size and resolution by an order of ma... We present a method for submicron fabrication of flexible,thin-film structures fully encapsulated in biocompatible polymer poly(chloro-p-xylylene)(Parylene C)that improves feature size and resolution by an order of magnitude compared with prior work.We achieved critical dimensions as small as 250 nm by adapting electron beam lithography for use on vapor deposited Parylene-coated substrates and fabricated encapsulated metal structures,including conducting traces,serpentine resistors,and nano-patterned electrodes.Structures were probed electrically and mechanically demonstrating robust performance even under flexion or torsion.The developed fabrication process for electron beam lithography on Parylene-coated substrates and characterization of the resulting structures are presented in addition to a discussion of the challenges of applying electron beam lithography to polymers.As an application of the technique,a Parylene-based neural probe prototype was fabricated with 32 recording sites patterned along a 2 mm long shank,an electrode density surpassing any prior polymer probe. 展开更多
关键词 electron beam lithography flexible electronics parylene c polymer MEMS
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家用aPTT检测技术芯片修饰方法的研究
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作者 杨语谌 张威 +5 位作者 周连群 姚佳 郭振 张芷齐 严茹红 朱红楠 《光电子.激光》 EI CAS CSCD 北大核心 2018年第1期57-63,共7页
采用凝血检测光学透射比浊方法检测活化部分凝血活酶时间(aPTT),尝试用聚乙烯(PE)、聚苯乙烯(PS)和Parylene-C 3种疏水材料,研究压电石英晶体微电平(QCM)传感芯片表面修饰。修饰后,芯片品质用网络分析仪衡量,PE、PS和Parylene-C3种疏水... 采用凝血检测光学透射比浊方法检测活化部分凝血活酶时间(aPTT),尝试用聚乙烯(PE)、聚苯乙烯(PS)和Parylene-C 3种疏水材料,研究压电石英晶体微电平(QCM)传感芯片表面修饰。修饰后,芯片品质用网络分析仪衡量,PE、PS和Parylene-C3种疏水材料的疏水修饰接触角分别为92.3°、90.7°和93.3°。结果表明,Parylene-C修饰后QCM芯片的品质提高,有效信号峰-峰值提高了11%;用于光学aPTT检测对比体现出良好重复性,血浆7次检测变异系数(CV)为1.51%,重复性良好,全血7次检测CV为1.15%。本文的Parylene-C修饰QCM,可为家用aPTT检测仪器的开发提供参考。 展开更多
关键词 活化部分凝血活酶时间(aPTT)检测 压电石英晶体微天平(QcM) parylenec修饰 稳定性 重复性
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