Diamond films were prepared by electron-assisted chemical vapor deposition (EACVD) system, and the thermal diffusivities of the films with or without substrate were studied by use of photothermal deflection (PTD) tech...Diamond films were prepared by electron-assisted chemical vapor deposition (EACVD) system, and the thermal diffusivities of the films with or without substrate were studied by use of photothermal deflection (PTD) technique. The results show that less non-diamond component and larger crystalline size result in higher thermal conductivity of CVD diamond film. The influence of substrate on the measurement of thermal conductivity of the film was investigated, and a simple two-layer heat conduction model is given to account for the influence and used to draw the thermal conductivity of the film from the effective thermal diffusivity of film/substrate system.展开更多
基金the High Technology Research and Development Programme of ChinaDoctoral Research Foundation of the Chinese E-ducation Commission.
文摘Diamond films were prepared by electron-assisted chemical vapor deposition (EACVD) system, and the thermal diffusivities of the films with or without substrate were studied by use of photothermal deflection (PTD) technique. The results show that less non-diamond component and larger crystalline size result in higher thermal conductivity of CVD diamond film. The influence of substrate on the measurement of thermal conductivity of the film was investigated, and a simple two-layer heat conduction model is given to account for the influence and used to draw the thermal conductivity of the film from the effective thermal diffusivity of film/substrate system.
