To improve the consistency of the adhesive amount dispensed by the time-pressure dispenser for semiconductor manufacturing, a non-Newtonian fluid flow rate model is developed to represent and estimate the adhesive amo...To improve the consistency of the adhesive amount dispensed by the time-pressure dispenser for semiconductor manufacturing, a non-Newtonian fluid flow rate model is developed to represent and estimate the adhesive amount dispensed in each cycle. Taking account of gas compressibility, an intelligent model-based control strategy is proposed to compensate the deviation of adhesive amount dispensed from the desired one. Both simulations and experiments show that the dispensing consistency is greatly improved by using the model-based control strategy developed in this paper.展开更多
Control design is important for PEMFC （proton exchange membrane fuel cell） distributed power generator to satisfy user requirement for safe and stable operation. For a complex multi-variable dynamic system, a dynami...Control design is important for PEMFC （proton exchange membrane fuel cell） distributed power generator to satisfy user requirement for safe and stable operation. For a complex multi-variable dynamic system, a dynamic simulation model is first established. In view of close coupling and non-linear relationships between variables, the intelligent auto-adapted PI decoupling control method is used. From the simulation results it is found that, by bringing quadratic performance index in the single neuron, constructing adaptive PI controller, and adjusting gas flow rates through the second pressure relief valve and air compressor coordinately, both anode and cathode pressures can be maintained at ideal levels.展开更多
基金This work was supported by National Natural Science Foundation of China (No.50390063,50390064)the National Basic Research Program of China (973 Program) (No.2003CB716207).
文摘To improve the consistency of the adhesive amount dispensed by the time-pressure dispenser for semiconductor manufacturing, a non-Newtonian fluid flow rate model is developed to represent and estimate the adhesive amount dispensed in each cycle. Taking account of gas compressibility, an intelligent model-based control strategy is proposed to compensate the deviation of adhesive amount dispensed from the desired one. Both simulations and experiments show that the dispensing consistency is greatly improved by using the model-based control strategy developed in this paper.
基金Project supported by National High-Technology Research andDevelopment Program of China (Grant No .2002AA517020)
文摘Control design is important for PEMFC （proton exchange membrane fuel cell） distributed power generator to satisfy user requirement for safe and stable operation. For a complex multi-variable dynamic system, a dynamic simulation model is first established. In view of close coupling and non-linear relationships between variables, the intelligent auto-adapted PI decoupling control method is used. From the simulation results it is found that, by bringing quadratic performance index in the single neuron, constructing adaptive PI controller, and adjusting gas flow rates through the second pressure relief valve and air compressor coordinately, both anode and cathode pressures can be maintained at ideal levels.
