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Waste Minimization Through Process Integration and Multi-objective Optimization 被引量:4
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作者 高瑛 石磊 姚平经 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2001年第3期267-272,共6页
By avoiding or reducing the production of waste, waste minimization is an effective approach to solve the pollution problem in chemical industry. Process integration supported by multi-objective optimization provides ... By avoiding or reducing the production of waste, waste minimization is an effective approach to solve the pollution problem in chemical industry. Process integration supported by multi-objective optimization provides a framework for process design or process retrofit by simultaneously optimizing on the aspects of environment and economics. Multi-objective genetic algorithm is applied in this area as the solution approach for the multi-objective optimization problem. 展开更多
关键词 waste minimization process integration multi-objective optimization multi-objective genetic algo- rithm
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A Process Oriented Integration Model for Smart Health Services
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作者 Farzana Kausar Gondal Syed Khuram Shahzad +1 位作者 Muhammad Arfan Jaffar Muhammad Waseem Iqbal 《Intelligent Automation & Soft Computing》 SCIE 2023年第2期1369-1386,共18页
Cities are facing challenges of high rise in population number and con-sequently need to be equipped with latest smart services to provide luxuries of life to its residents.Smart integrated solutions are also a need t... Cities are facing challenges of high rise in population number and con-sequently need to be equipped with latest smart services to provide luxuries of life to its residents.Smart integrated solutions are also a need to deal with the social and environmental challenges,caused by increasing urbanization.Currently,the development of smart services’integrated network,within a city,is facing the bar-riers including;less efficient collection and sharing of data,along with inadequate collaboration of software and hardware.Aiming to resolve these issues,this paper recommended a solution for a synchronous functionality in the smart services’integration process through modeling technique.Using this integration modeling solution,atfirst,the service participants,processes and tasks of smart services are identified and then standard illustrations are developed for the better understand-ing of the integrated service group environment.Business process modeling and notation(BPMN)language based models are developed and discussed for a devised case study,to test and experiment i.e.,for remote healthcare from a smart home.The research is concluded with the integration process model application for the required data sharing among different service groups.The outcomes of the modeling are better understanding and attaining maximum automation that can be referenced and replicated. 展开更多
关键词 process modeling business process business process integration business process modeling and notation
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Process design and intensification of multicomponent azeotropes special distillation separation via molecular simulation and system optimization
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作者 Chunliang Liu Jianhui Zhong +5 位作者 Ranran Wei Jiuxu Ruan Kaicong Wang Zhaoyou Zhu Yinglong Wang Limei Zhong 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2024年第7期24-44,共21页
This work provides an overview of distillation processes,including process design for different distillation processes,selection of entrainers for special distillation processes,system integration and intensification ... This work provides an overview of distillation processes,including process design for different distillation processes,selection of entrainers for special distillation processes,system integration and intensification of distillation processes,optimization of process parameters for distillation processes and recent research progress in dynamic control strategies.Firstly,the feasibility of using thermodynamic topological theories such as residual curve,phase equilibrium line and distillation boundary line to analyze different separation regions is discussed,and the rationality of distillation process design is discussed by using its feasibility.Secondly,the application of molecular simulation methods such as molecular dynamics simulation and quantum chemical calculation in the screening of entrainer is discussed for the extractive distillation process.The thermal coupling mechanism of different distillation processes is used to explore the process of different process intensifications.Next,a mixed integer nonlinear optimization strategy for the distillation process based on different algorithms is introduced.Finally,the improvement of dynamic control strategies for different distillation processes in recent years is summarized.This work focuses on the application of process intensification and system optimization in the design of distillation process,and analyzes the challenges,prospects,and development trends of distillation technology in the separation of multicomponent azeotropes. 展开更多
关键词 Azeotrope separation process design Optimization algorithm process integration Dynamic control Entrainer selection
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A review on plasma-based CO_(2) utilization:process considerations in the development of sustainable chemical production
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作者 Sirui LI Giulia De FELICE +2 位作者 Simona EICHKORN Tao SHAO Fausto GALLUCCI 《Plasma Science and Technology》 SCIE EI CAS CSCD 2024年第9期1-16,共16页
Plasma-based processes,particularly in carbon capture and utilization,hold great potential for addressing environmental challenges and advancing a circular carbon economy.While significant progress has been made in un... Plasma-based processes,particularly in carbon capture and utilization,hold great potential for addressing environmental challenges and advancing a circular carbon economy.While significant progress has been made in understanding plasma-induced reactions,plasma-catalyst interactions,and reactor development to enhance energy efficiency and conversion,there remains a notable gap in research concerning overall process development.This review emphasizes the critical need for considerations at the process level,including integration and intensification,to facilitate the industrialization of plasma technology for chemical production.Discussions centered on the development of plasma-based processes are made with a primary focus on CO_(2) conversion,offering insights to guide future work for the transition of the technology from laboratory scale to industrial applications.Identification of current research gaps,especially in upscaling and integrating plasma reactors with other process units,is the key to addressing critical issues.The review further delves into relevant research in process evaluation and assessment,providing methodological insights and highlighting key factors for comprehensive economic and sustainability analyses.Additionally,recent advancements in novel plasma systems are reviewed,presenting unique advantages and innovative concepts that could reshape the future of process development.This review provides essential information for navigating the path forward,ensuring a comprehensive understanding of challenges and opportunities in the development of plasma-based CCU process. 展开更多
关键词 non-thermal plasma carbon capture and utilization process integration process intensification techno-economic analysis life cycle analysis
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Process engineering of demineralisation of moderate to high ash Indian coals through NaOH‑HCl leaching and HF leaching
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作者 Heena Dhawan D.K.Sharma 《International Journal of Coal Science & Technology》 EI CAS CSCD 2024年第2期111-122,共12页
Chemical leaching of coals would be required to produce cleaner coals for some special applications where physical benefi-ciation may not be effective enough.This would also help in recovering Li and rare earth metals... Chemical leaching of coals would be required to produce cleaner coals for some special applications where physical benefi-ciation may not be effective enough.This would also help in recovering Li and rare earth metals besides in the sequestration of CO_(2).About 20 Indian coals having complexly distributed moderate to high ash contents were sequentially treated with various alkali–acid such as NaOH-HCl,HF,HCl,HCl-HF,and NaOH-HCl-HF leaching.This aimed to establish and design the best stepwise sequential process for the highest degree of demineralisation through a chemical leaching process.Kinetics and process intensification studies were carried out.More than 80%demineralisation of Madhaipur and Neemcha coals was observed using the best sequential treatment designed presently.The repeated stepwise treatment of the alkali and the acid was also studied,which was found to significantly enhance the degree of demineralisation of coals.The integrated process of alkali–acid leaching followed by solvent extraction(Organo-refining)and vice versa of the treated coal was also studied for producing cleaner coals. 展开更多
关键词 Alkali–acid leaching DEMINERALISATION Integrated process Rare earth elements
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Integrated vacuum pressure swing adsorption and Rectisol process for CO_(2) capture from underground coal gasification syngas 被引量:1
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作者 Jian Wang Yuanhui Shen +2 位作者 Donghui Zhang Zhongli Tang Wenbin Li 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2023年第5期265-279,共15页
An integrated vacuum pressure swing adsorption(VPSA) and Rectisol process is proposed for CO_(2) capture from underground coal gasification(UCG) syngas. A ten-bed VPSA process with silica gel adsorbent is firstly desi... An integrated vacuum pressure swing adsorption(VPSA) and Rectisol process is proposed for CO_(2) capture from underground coal gasification(UCG) syngas. A ten-bed VPSA process with silica gel adsorbent is firstly designed to pre-separate and capture 74.57% CO_(2) with a CO_(2) purity of 98.35% from UCG syngas(CH_(4)/CO/CO_(2)/H_(2)/N_(2)= 30.77%/6.15%/44.10%/18.46%/0.52%, mole fraction, from Shaar Lake Mine Field,Xinjiang Province, China) with a feed pressure of 3.5 MPa. Subsequently, the Rectisol process is constructed to furtherly remove and capture the residual CO_(2)remained in light product gas from the VPSA process using cryogenic methanol(233.15 K, 100%(mass)) as absorbent. A final purified gas with CO_(2) concentration lower than 3% and a regenerated CO_(2) product with CO_(2) purity higher than 95% were achieved by using the Rectisol process. Comparisons indicate that the energy consumption is deceased from 2.143 MJ·kg^(-1) of the single Rectisol process to 1.008 MJ·kg^(-1) of the integrated VPSA & Rectisol process, which demonstrated that the deployed VPSA was an energy conservation process for CO_(2) capture from UCG syngas. Additionally, the high-value gas(e.g., CH_(4)) loss can be decreased and the effects of key operating parameters on the process performances were detailed. 展开更多
关键词 Underground coal gasification Vacuum pressure swing adsorption Rectisol process CO_(2)capture Integrated process
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Study of Total Process Energy Integration
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作者 俞红梅 姚平经 袁一 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 1999年第2期182-188,共7页
The energy utilization consistency method in process integration extracts the key component of process energy utilization, and simplifies the procedure of process analysis and integration. The method allows the conver... The energy utilization consistency method in process integration extracts the key component of process energy utilization, and simplifies the procedure of process analysis and integration. The method allows the conversion of the total process energy integration into a synthesis problem of a pseudo-heat exchanger network. The advantages of using the energy utilization consistency and the pseudo-temperature methods are presented by two examples of integration of large-scale complex processes. The improved genetic algorithm is proved to be an effective tool in the retrofitting procedures. 展开更多
关键词 total process energy integration global optimization synthesis of heat exchanger net-works ethylene process
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ENTERPRISE INTEGRATION PLATFORM BASED ON SERVICEORIENTED ARCHITECTURE 被引量:2
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作者 MENG Xiaojun ZHANG Xu +1 位作者 NING Ruxin SONG Yu 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2008年第3期36-40,共5页
To achieve information integration, process integration and application integration of enterprise, an enterprise integration platform (EIP) based on service-oriented architecture (SOA) is built. The enterprise int... To achieve information integration, process integration and application integration of enterprise, an enterprise integration platform (EIP) based on service-oriented architecture (SOA) is built. The enterprise integration model depending on encapsulating the business processes as well as the enterprise applications by the neutral and standard web services is presented. The problem how to discover the existed enterprise resources and share them was resolved depending on the mechanism of publishing and discovering the services. The EIP is integrated closely with product lifecycle management (PLM) system so that the process integration as well as orchestration of the business process services is implemented by encapsulating the workflow engine of PLM system. Not only process integration and application integration, but also information integration based on the bill of material (BOM) conversion driven by process are achieved. Finally, an interpretive, qualitative case study on EIP is conducted for this research. 展开更多
关键词 Enterprise integration platform (EIP) Service-oriented architecture (SOA) Information integration process integration Application integration
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DATA CONTEXT MODEL IN THE PRO-CESS INTEGRATION FRAMEWORK 被引量:2
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作者 ZHAO Bo YAN Yan +1 位作者 NING Ruxin LI Shiyun 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2008年第2期104-107,共4页
Process integration is the important aspect of product development process. The recent researches focus on project management, workflow management and process modeling. Based on the analysis of the process, product de... Process integration is the important aspect of product development process. The recent researches focus on project management, workflow management and process modeling. Based on the analysis of the process, product development process is divided into three levels according to different grains from macroscopy to microcosm. Our research concentrate on the workflow and the free-grained design process. According to the need of representing the data and the relationships among them for process integration, context model is introduced, and its characters are analyzed. The tree-like structure of inheritance among context model's classes is illustrated; The relationships of reference among them are also explained. Then, extensible markup language (XML) file is used to depict these classes. A four-tier framework of process integration has been established, in which model-view-controller pattern is designed to realize the separation between context model and its various views. The integration of applications is applied by the encapsulation of enterprise's business logic as distributed services. The prototype system for the design of air filter is applied in an institute. 展开更多
关键词 Context model process integration Extensible markup language(XML) Model-view-controller(MVC) Service
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Sequential Ordering Algorithm for Mass Integration: The Case of Direct Recycling
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作者 Filippo Marchione Stavros Papadokonstantakis Konrad Hungerbuehler 《Advances in Chemical Engineering and Science》 2016年第2期158-182,共25页
In the last three decades much effort has been devoted in process integration as a way to improve economic and environmental performance of chemical processes. Although the established frameworks have undergone consta... In the last three decades much effort has been devoted in process integration as a way to improve economic and environmental performance of chemical processes. Although the established frameworks have undergone constant refinement toward formulating and solving complicated process integration problems, less attention has been drawn to the problem of sequential applications of mass integration. This work addresses this problem by proposing an algorithm for optimal ordering of the process sinks in direct recycling problems, which is compatible with the typical mass integration formulation. The order consists in selecting the optimal sink at a specific integration step given the selection of the previous steps and the remaining process sources. Such order is identified through a succession of preemptive goal programming problems, namely of optimization problems characterized by more objectives at different priority levels. Indeed, the target for each sink is obtained by maximizing the total flow recycled from the available process sources to this sink and then minimizing the use of pure sources, starting from the purest one;the hierarchy is respected through a succession of linear optimization problems with a single objective function. While the conditional optimality of the algorithm holds always, a thorough statistical analysis including structured to random scenarios of process sources and process sinks shows how frequently the sequential ordering algorithm is outperformed with respect to the total recycled amount by a different selection of process sinks with the same cardinality. Two more case studies proving the usefulness of ordering the process sinks are illustrated. Extensions of the algorithm are also identified to cover more aspects of the process integration framework. 展开更多
关键词 process integration Preemptive Goal Programming Conditional Optimality Recycling Activities Prioritization Linear Programming
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IMC-PID tuning method based on sensitivity specification for process with time-delay 被引量:9
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作者 赵志诚 刘志远 张井岗 《Journal of Central South University》 SCIE EI CAS 2011年第4期1153-1160,共8页
To overcome the deficiencies addressed in the conventional PID control and improve the dynamic performance and robustness of the system, a simple design and parameters tuning approach of internal model control-PID (I... To overcome the deficiencies addressed in the conventional PID control and improve the dynamic performance and robustness of the system, a simple design and parameters tuning approach of internal model control-PID (IMC-PID) controller was proposed for the first order plus time-delay (FOPTD) process and the second order plus time-delay (SOPTD) process. By approximating the time-delay term of the process model with the first-order Taylor series, the expressions for IMC-PID controller parameters were derived, and they had only one adjustable parameter 2 which was directly related to the dynamic performance and robustness of the system. Moreover, an analytical approach of selecting 2 was given based on the maximum sensitivity Ms. Then, the robust tuning of the system could be achieved according to the value of Ms. In addition, the proposed method could be extended to the integrator plus time-delay (IPTD) process and the first order delay integrating (FODI) process. Simulation studies were carried out on various processes with time-delay, and the results show that the proposed method could provide a better dynamic performance of both the set-point tracking and disturbance rejection and robustness against parameters perturbation. 展开更多
关键词 process with time-delay integrating process internal model control-PID ROBUSTNESS sensitivity parameters tuning
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Virtual Reality Based Process Integrated Simulation Platform in Refinery:Virtual Refinery and Its Application 被引量:6
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作者 Zhou Zewei Feng Yiping +1 位作者 Rong Gang Wu Yucheng (State Key Laboratory of Industrial Control Technology,Institute of Cyber-Systems and Control,Zhejiang University,Hangzhou 310027,China) 《China Petroleum Processing & Petrochemical Technology》 SCIE CAS 2011年第3期74-84,共11页
With the combination between system simulation and virtual reality,we have established an integrated virtual refinery simulation platform,and analyzed the overall design and principal architecture.This paper introduce... With the combination between system simulation and virtual reality,we have established an integrated virtual refinery simulation platform,and analyzed the overall design and principal architecture.This paper introduces a simulation algorithm about a refinery based on virtual reality,and explains how the algorithm can be applied to the virtual refinery integrated simulation platform in detail.The virtual refinery simulation platform,which consists of a three-dimensional scene system,an integrated database system and a dynamic-static simulation system,has many applications,such as dynamic-static simulation of key process unit used as process control and oil tank blending simulation for scheduling.With the visualization and human-computer interaction for acquiring production and process data,this platform can provide effective supports on staff training related with monitoring,control and operation in refinery.Virtual refinery can also be web published through the internet and it is helpful for the distance training and education. 展开更多
关键词 virtual refinery petrochemical enterprise process integrated simulation information representation intelligent manufacturing systems
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Global satisfactory control for nonlinear integrator processes with long delay 被引量:4
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作者 Yiqun YANG Guobo XIANG 《控制理论与应用(英文版)》 EI 2007年第2期207-210,共4页
Integrator processes with long delay are difficult to control. Nonlinear characteristics of actuators make the control problem more challenging. A technique is proposed in this paper for global satisfactory control (... Integrator processes with long delay are difficult to control. Nonlinear characteristics of actuators make the control problem more challenging. A technique is proposed in this paper for global satisfactory control (GSC) of such processes with relay-type nonlinearity. An oscillatory control signal is injected into the nonlinear process; the amplitude and frequency of the oscillatory signal are designed to linearise the nonlinear process in the sense of harmonic analysis; and a state feedback controller is configured to implement GSC over the linearised process. An illustrative example is given to demonstrate the effectiveness of 展开更多
关键词 Integrator processes Time delay Oscillation Harmonic linearisation Global satisfactory control
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Anti-windup design for the controllers of integrating processes with long delay 被引量:2
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作者 Zhang Guanghui Shao Huihe 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2007年第2期297-303,共7页
For several superior controllers of the first-order integrating processes with long delay, the windup problems are analyzed in detail when the control signal saturates. The results show that these controllers have sim... For several superior controllers of the first-order integrating processes with long delay, the windup problems are analyzed in detail when the control signal saturates. The results show that these controllers have similar characteristics about the process input limitation. And then, a simple and effective anti-windup scheme, without an additional parameter, is designed for these controllers. Simulations run with three main controllers, and the results illustrate that the proposed method may achieve good performance under the nominal and model uncertainty cases. 展开更多
关键词 ANTI-WINDUP Integrating processes Smith predictor Time-delay system.
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Anti-windup Scheme for the Controller of Integrating Processes with Dead-time 被引量:3
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作者 张广辉 钱锋 邵惠鹤 《Journal of Donghua University(English Edition)》 EI CAS 2006年第3期79-83,共5页
For the first-order integrating processes with long delay, the disturbance observer-based 2DoF control scheme is analyzed in detail with regard to the control input limitation. After that, a simple anti-windup scheme,... For the first-order integrating processes with long delay, the disturbance observer-based 2DoF control scheme is analyzed in detail with regard to the control input limitation. After that, a simple anti-windup scheme, without an additional parameter, is proposed to compensate for the adverse effects of the input saturation. The proposed method can properly keep the control signal saturated for an optimum length of time without discarding the control energy. The simulation results show that the control input saturation can dramatically degrade the closed loop system performance. Under the nonfinal and model uncertainty cases, the controller with anti-windup strategy will obtain fast and smooth responses. Furthermore, the simulation results illustrate that the proposed anti-windup scheme may achieve good performance for the high order integrating processes with long delay. 展开更多
关键词 anti-ugndup integrating processes time-delay system.
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Remarkable carbon dioxide catalytic capture (CDCC) leading to solid-form carbon material via a new CVD integrated process (CVD-IP): An alternative route for CO_2 sequestration 被引量:5
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作者 Wei Chu Maofei Ran +4 位作者 Xu Zhang Ning Wang Yufei Wang Heping Xie Xiusong Zhao 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2013年第1期136-144,共9页
Through our newly-developed "chemical vapor deposition integrated process (ISVD-IP)'" using carbon OlOXlae (t..u2) as me raw matenal and only carbon source introduced, CO2 could be catalytically activated and c... Through our newly-developed "chemical vapor deposition integrated process (ISVD-IP)'" using carbon OlOXlae (t..u2) as me raw matenal and only carbon source introduced, CO2 could be catalytically activated and converted to a new solid-form product, i.e., carbon nanotubes (CO2-derived) at a quite high yield (the single-pass carbon yield in the solid-form carbon-product produced from CO2 catalytic capture and conversion was more than 30% at a single-pass carbon-base). For comparison, when only pure carbon dioxide was introduced using the conventional CVD method without integrated process, no solid-form carbon-material product could be formed. In the addition of saturated steam at room temperature in the feed for CVD, there were much more end-opening carbon nano-tubes produced, at a slightly higher carbon yield. These inspiring works opened a remarkable and alternative new approach for carbon dioxide catalytic capture to solid-form product, comparing with that of CO2 sequestration (CCS) or CO2 mineralization (solidification), etc. As a result, there was much less body volume and almost no greenhouse effect for this solid-form carbon-material than those of primitive carbon dioxide. 展开更多
关键词 carbon dioxide catalytic capture (CDCC) carbon nanotubes (CNTs) chemical vapor deposition integrated process (CVD-IP) solid-formcarbon material debating greenhouse gases (GHG) effects
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Robust PID controller design for time delay processes with peak of maximum sensitivity criteria 被引量:5
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作者 Mohammad Shamsuzzoha 《Journal of Central South University》 SCIE EI CAS 2014年第10期3777-3786,共10页
The motivation of this work is to obtain single PI/PID tuning formula for different types of processes with enhanced disturbance rejection performance. The proposed tuning formula consistently gives better performance... The motivation of this work is to obtain single PI/PID tuning formula for different types of processes with enhanced disturbance rejection performance. The proposed tuning formula consistently gives better performance in comparison to several well-known methods at the same degree of robustness for stable, integrating and unstable processes. For the selection of the closed-loop time constant(τc), a guideline is provided over a broad range of time-delay/time-constant ratios on the basis of the peak of maximum sensitivity(Ms). An analysis has been performed for the uncertainty margin with the different process parameters for the robust controller design. It gives the guideline of the Ms-value settings for the PI controller designs based on the process parameters uncertainty. Furthermore, a relationship has been developed between Ms-value and uncertainty margin with the different process parameters(k, τ and θ). Simulation study has been conducted for the broad class of processes and the controllers are tuned to have the same degree of robustness by measuring the maximum sensitivity, Ms, in order to obtain a reasonable comparison. 展开更多
关键词 PI/PID controller tuning internal model control(IMC) method unstable delay process integrating delay process disturbance rejection
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Predictive functional control of integrating process based on impulse response 被引量:2
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作者 BinZHANG PingLI WeidongZHANG 《控制理论与应用(英文版)》 EI 2004年第2期196-200,共5页
The predictive model is built according to the characteristics of the impulse response of integrating process. In order to eliminate the permanent offset between the setpoint and the process output in the presence of ... The predictive model is built according to the characteristics of the impulse response of integrating process. In order to eliminate the permanent offset between the setpoint and the process output in the presence of the load disturbance, a novel error compensation method is proposed. Then predictive functional control of integrating process is designed. The method given generates a simple control structure, which can significandy reduce online computation. Furthermore, the tuning of the controller is fairly straightforward. Simulation results indicate that the designed control system is relatively robust to the parameters variation of the process. 展开更多
关键词 Integrating process Time delay Impulse response Predictive functional control (PFC)
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A practical predictive control algorithm for integral processes and a case study in boiler level system 被引量:2
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作者 Zou Tao(邹涛) Liu Hongbo Li Shaoyuan 《High Technology Letters》 EI CAS 2005年第3期263-267,共5页
The Dynamic Matrix Control (DMC) algorithm tor integral processes is investigated in this paper. The reason why the original DMC algorithm cannot be applied to these processes is analyzed. The shifting matrix is tra... The Dynamic Matrix Control (DMC) algorithm tor integral processes is investigated in this paper. The reason why the original DMC algorithm cannot be applied to these processes is analyzed. The shifting matrix is transformed into another form and the corresponding theorem is proved, then its applicable range is extended. Compared with other algorithms on the integral processes, this algorithm is more practical and simple to implement. Simulation results also prove its validity. Applying this algorithm, we succeed in the control of the boiler level system in power units. 展开更多
关键词 integral processes predictive control dynamic matrix control shifting matrix
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Integrated Product and Process Control for Sustainable Semiconductor Manufacturing 被引量:2
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作者 陈良 Yinlun Huang 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2011年第2期192-198,共7页
Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an ... Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an advanced control strategy through integrating product and process control is established.The proposed multiscale scheme contains three layers for coordinated equipment control,process control and product quality control.In the upper layer,online control performance assessment is applied to reduce the quality variation and maximize the overall product performance (OPP).It serves as supervisory control to update the recipe of the process controller in the middle layer.The process controller is designed as an exponentially weighted moving average (EWMA) run-to-run controller to reject disturbances,such as process shift,drift and tool worn out,that are exerted to the op-eration.The equipment in the process is individually controlled to maintain its optimal operational status and maximize the overall equipment effectiveness (OEE),based on the set point given by the process controller.The ef-ficacy of the proposed integrated control scheme is demonstrated through case studies,where both the OPP (for product) and the OEE (for equipment) are enhanced. 展开更多
关键词 semiconductor manufacturing run-to-run control integrated product and process control
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