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Profilometry with Grating Projection Based on One-step Phase Shift 被引量:1
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作者 FAN Yun zheng (School of Physics and Microelectronics, Shandong University, Jinan 250061, CHN) 《Semiconductor Photonics and Technology》 CAS 2001年第3期189-192,共4页
An optical technique for 3 D shape measurement is presented. This technique, based on a deformed projected grating pattern which carries 3 D information of the measured object, can automatically and accurately obtain ... An optical technique for 3 D shape measurement is presented. This technique, based on a deformed projected grating pattern which carries 3 D information of the measured object, can automatically and accurately obtain the phase map of a measured object by using one step phase shift algorithm.In comparison with traditional phase shift technique, the technique is much faster, with the equivalent accuracy. Only one frame image is sufficient for measuring. Experimental result of typical object is presented. 展开更多
关键词 3-D surface contouring Phase shift profilometry of projected grating
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