Thermal performance of sputtered Cu films containing insoluble Zr and Cr for advanced barrierless Cu metallization

Pure Cu films and Cu alloy films containing insoluble substances(Zr and Cr)were deposited on Si(100)substrates,in the presence of interfacial native suboxide(SiOx),by magnetron sputtering.Samples were vacuum annealed between 300℃and 500 ℃to investigate effects of Zr and Cr additions on the thermal performance of Cu films.After annealing,copper silicides were found in the Cu(Zr)films,while no detectable silicides were observed in Cu and Cu(Cr)films.Upon annealing,Zr accelerated the diffusion and reaction between the film and the substrate,and lowered the thermal stability of Cu(Zr)alloy films on Si substrates,which was ascribed to the‘purifying effect’of Zr on the Si substrates.Whereas,Cr prohibited the agglomeration of Cu films at 500℃and decreased the surface roughness.As a result,the diffusion of Cu in Si substrates for Cu(Cr)films was effectively inhibited.In contrast to the high resistivity of Cu(Zr)films,the final resistivity of about 2.76μΩ·cm was achieved for the Cu(Cr)film.These results indicate that Cu(Cr)films have higher thermal stability than Cu(Zr)films on Si substrates and are preferable in the advanced barrierless Cu metallization.

Study on the Ability of Coriander Water Purification

In order to study on the water purification ability of coriander, according to the material of Iris pseudacorus, Pontederia cordata, Thalia dealbata, coriander, Lythrum salicaria as the research object, the paper carries on the analysis and comparison of water purification ability under greenhouse conditions in the 3~6 month period. The results showed： N, P content of coriander organizational changes before and after the test. Physiological responses of different plants, coriander is not sensitive to the physiological responses to stress of sewage, sewage adaptability is relatively strong. Judging from the effect of different plants to the water, then spent force has highest the removal rate for TN, coriander has the strongest absorption capacity for TP, water purification plant is excellent