This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a ...This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200μm×200μm×400μm, is placed between the silicon nitride diaphragm and glass (Corning 7740). This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique.展开更多
The object of present study is to investigate the bed shear stress on a slope under regular breaking waves by a novel instrument named Micro-Electro-Mechanical System (MEMS) flexible hot-film shear stress sensor. Th...The object of present study is to investigate the bed shear stress on a slope under regular breaking waves by a novel instrument named Micro-Electro-Mechanical System (MEMS) flexible hot-film shear stress sensor. The sensors were calibrated before application, and then a wave flume experiment was conducted to study the bed shear stress for the case of regular waves spilling and plunging on a 1 : 15 smooth PVC slope. The experiment shows that the sensor is feasible for the measurement of the bed shear stress under breaking waves. For regular incident waves, the bed shear stress is mainly periodic in both outside and inside the breaking point. The fluctuations of the bed shear stress increase significantly after waves breaking due to the turbulence and vortexes generated by breaking waves. For plunging breaker, the extreme value of the mean maximum bed shear stress appears after the plunging point, and the more violent the wave breaks, the more dramatic increase of the maximum bed shear stress will occur. For spilling breaker, the increase of the maximum bed shear stress along the slope is gradual compared with the plunging breaker. At last, an empirical equation about the relationship between the maximum bed shear stress and the surf similarity parameter is given, which can be used to estimate the maximum bed shear stress under breaking waves in practice.展开更多
A novel instrument named Micro-Electro-Mechanical System(MEMS) flexible hot-film shear stress sensor was used to study the boundary shear stress distribution in the generalized natural meandering open channel, and the...A novel instrument named Micro-Electro-Mechanical System(MEMS) flexible hot-film shear stress sensor was used to study the boundary shear stress distribution in the generalized natural meandering open channel, and the mean sidewall shear stress distribution along the meandering channel, and the lateral boundary shear stress distribution in the typical cross-section of the meandering channel was analysed. Based on the measurement of the boundary shear stress, a semi-empirical semi-theoretical computing approach of the boundary shear stress was derived including the effects of the secondary flow, sidewall roughness factor, eddy viscosity and the additional Reynolds stress, and more importantly, for the first time, it combined the effects of the cross-section central angle and the Reynolds number into the expressions. Afterwards, a comparison between the previous research and this study was developed. Following the result, we found that the semi-empirical semi-theoretical boundary shear stress distribution algorithm can predict the boundary shear stress distribution precisely. Finally, a single factor analysis was conducted on the relationship between the average sidewall shear stress on the convex and concave bank and the flow rate, water depth, slope ratio,or the cross-section central angle of the open channel bend. The functional relationship with each of the above factors was established, and then the distance from the location of the extreme sidewall shear stress to the bottom of the open channel was deduced based on the statistical theory.展开更多
The stretchable sensor wrapped around a foldable airfoil or embedded inside of it has great potential for use in the monitoring of the structural status of the foldable airfoil.The design methodology is important to t...The stretchable sensor wrapped around a foldable airfoil or embedded inside of it has great potential for use in the monitoring of the structural status of the foldable airfoil.The design methodology is important to the development of the stretchable sensor for status monitoring on the foldable airfoil.According to the requirement of mechanical flexibility of the sensor,the combined use of a layered flexible structural formation and a strain isolation layer is implemented.An analytical higher-order model is proposed to predict the stresses of the strain-isolation layer based on the shear-lag model for the safe design of the flexible and stretchable sensors.The normal stress and shear stress equations in the constructed structure of the sensors are obtained by the proposed model.The stress distribution in the structure is investigated when bending load is applied to the structures.The numerical results show that the proposed model can predict the variation of normal stress and shear stress along the thickness of the strain-isolation(polydimethylsiloxane)layer accurately.The results by the proposed model are in good agreement with the finite element method,in which the normal stress is variable while the shear stress is invariable along the thickness direction of strain-isolation layer.The high-order model is proposed to predict the stresses of the layered structure of the flexible and stretchable sensor for monitoring the status of the foldable airfoil.展开更多
An analytical sandwich beam model for piezoelectric bender elements is derived based on the first-order shear deformation theory (FSDT), which assumes a single rotation angle for the whole cross-section and a quadrati...An analytical sandwich beam model for piezoelectric bender elements is derived based on the first-order shear deformation theory (FSDT), which assumes a single rotation angle for the whole cross-section and a quadratic distribution for coupled electric potential in piezoelectric layers. Shear coefficient is introduced to correct the effect of transverse shear strain on shear force and the electric displacement integration. Static and free vibration analyses of simply-supported bender elements are carried out for the sensor function. The results illustrate the high accuracy of the present model compared with the exact 2D solutions.展开更多
基金Project supported by the National Natural Science Foundation of China (Grant No 60576053)Technology Innovation of Chinese Academy of Sciences (Grant No CXJJ-176)
文摘This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200μm×200μm×400μm, is placed between the silicon nitride diaphragm and glass (Corning 7740). This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique.
基金supported by the National Key Scientific Instrument and Equipment Development Project(Grant No.2013YQ04091108)the National Natural Science Foundation of China(Grant No.51309158)
文摘The object of present study is to investigate the bed shear stress on a slope under regular breaking waves by a novel instrument named Micro-Electro-Mechanical System (MEMS) flexible hot-film shear stress sensor. The sensors were calibrated before application, and then a wave flume experiment was conducted to study the bed shear stress for the case of regular waves spilling and plunging on a 1 : 15 smooth PVC slope. The experiment shows that the sensor is feasible for the measurement of the bed shear stress under breaking waves. For regular incident waves, the bed shear stress is mainly periodic in both outside and inside the breaking point. The fluctuations of the bed shear stress increase significantly after waves breaking due to the turbulence and vortexes generated by breaking waves. For plunging breaker, the extreme value of the mean maximum bed shear stress appears after the plunging point, and the more violent the wave breaks, the more dramatic increase of the maximum bed shear stress will occur. For spilling breaker, the increase of the maximum bed shear stress along the slope is gradual compared with the plunging breaker. At last, an empirical equation about the relationship between the maximum bed shear stress and the surf similarity parameter is given, which can be used to estimate the maximum bed shear stress under breaking waves in practice.
基金financially supported by the National Key R&D Program of China(Grant No.2016YFC0402306)the National Natural Science Foundation of China(Grant No.51779149)
文摘A novel instrument named Micro-Electro-Mechanical System(MEMS) flexible hot-film shear stress sensor was used to study the boundary shear stress distribution in the generalized natural meandering open channel, and the mean sidewall shear stress distribution along the meandering channel, and the lateral boundary shear stress distribution in the typical cross-section of the meandering channel was analysed. Based on the measurement of the boundary shear stress, a semi-empirical semi-theoretical computing approach of the boundary shear stress was derived including the effects of the secondary flow, sidewall roughness factor, eddy viscosity and the additional Reynolds stress, and more importantly, for the first time, it combined the effects of the cross-section central angle and the Reynolds number into the expressions. Afterwards, a comparison between the previous research and this study was developed. Following the result, we found that the semi-empirical semi-theoretical boundary shear stress distribution algorithm can predict the boundary shear stress distribution precisely. Finally, a single factor analysis was conducted on the relationship between the average sidewall shear stress on the convex and concave bank and the flow rate, water depth, slope ratio,or the cross-section central angle of the open channel bend. The functional relationship with each of the above factors was established, and then the distance from the location of the extreme sidewall shear stress to the bottom of the open channel was deduced based on the statistical theory.
基金Supported by National Natural Science Foundation of China(Grant No.51075327)Open Project of State Key Laboratory for Strength and Vibration of Mechanical Structures of China(Grant No.SV2014-KF-08)Shaanxi Provincial Natural Science Foundation of China(Grant No.2014JM2-5082)
文摘The stretchable sensor wrapped around a foldable airfoil or embedded inside of it has great potential for use in the monitoring of the structural status of the foldable airfoil.The design methodology is important to the development of the stretchable sensor for status monitoring on the foldable airfoil.According to the requirement of mechanical flexibility of the sensor,the combined use of a layered flexible structural formation and a strain isolation layer is implemented.An analytical higher-order model is proposed to predict the stresses of the strain-isolation layer based on the shear-lag model for the safe design of the flexible and stretchable sensors.The normal stress and shear stress equations in the constructed structure of the sensors are obtained by the proposed model.The stress distribution in the structure is investigated when bending load is applied to the structures.The numerical results show that the proposed model can predict the variation of normal stress and shear stress along the thickness of the strain-isolation(polydimethylsiloxane)layer accurately.The results by the proposed model are in good agreement with the finite element method,in which the normal stress is variable while the shear stress is invariable along the thickness direction of strain-isolation layer.The high-order model is proposed to predict the stresses of the layered structure of the flexible and stretchable sensor for monitoring the status of the foldable airfoil.
基金Project supported by the National Natural Science Foundation of China (No. 10472102)the National Basic Research Program(973) of China (No. 2007CB714200)
文摘An analytical sandwich beam model for piezoelectric bender elements is derived based on the first-order shear deformation theory (FSDT), which assumes a single rotation angle for the whole cross-section and a quadratic distribution for coupled electric potential in piezoelectric layers. Shear coefficient is introduced to correct the effect of transverse shear strain on shear force and the electric displacement integration. Static and free vibration analyses of simply-supported bender elements are carried out for the sensor function. The results illustrate the high accuracy of the present model compared with the exact 2D solutions.