Microwave Electron Cyclotron Resonance (ECR) Plasma assisted Chemical Vapor Deposition (CVD) technology has been used to prepare Si3N4 films, which were analyzed by using infrared (IR) transmission spectroscopy and XP...Microwave Electron Cyclotron Resonance (ECR) Plasma assisted Chemical Vapor Deposition (CVD) technology has been used to prepare Si3N4 films, which were analyzed by using infrared (IR) transmission spectroscopy and XPS. The analysis results show that with the increase of the deposition temperature, the H content decreases, and the densification of the film increases.When the temperature is up to 360℃, the stoichiometrical rate of Si:N is close to 0.75. The protective property of Si3N4 films is also examined.展开更多
The magnetic property of soft magnetic metals and alloys depends strongly on the crystallo-graphic orientation. In automated equipment for orientation research, the intensity for drawing up the pole figure is measured...The magnetic property of soft magnetic metals and alloys depends strongly on the crystallo-graphic orientation. In automated equipment for orientation research, the intensity for drawing up the pole figure is measured in detail. The present research shows that the accurate pole figure can be drawn up without measuring concretely the intensity. For directional Si steel sheet the measuring step may be 4～5 degrees. In this paper the experimental equation for defo-cusing correction was derived from the experimental data in different specimens with random orientation.展开更多
文摘Microwave Electron Cyclotron Resonance (ECR) Plasma assisted Chemical Vapor Deposition (CVD) technology has been used to prepare Si3N4 films, which were analyzed by using infrared (IR) transmission spectroscopy and XPS. The analysis results show that with the increase of the deposition temperature, the H content decreases, and the densification of the film increases.When the temperature is up to 360℃, the stoichiometrical rate of Si:N is close to 0.75. The protective property of Si3N4 films is also examined.
文摘The magnetic property of soft magnetic metals and alloys depends strongly on the crystallo-graphic orientation. In automated equipment for orientation research, the intensity for drawing up the pole figure is measured in detail. The present research shows that the accurate pole figure can be drawn up without measuring concretely the intensity. For directional Si steel sheet the measuring step may be 4～5 degrees. In this paper the experimental equation for defo-cusing correction was derived from the experimental data in different specimens with random orientation.
