通过APC(Advance Process Control)的建模和研磨实验,研究了APC的闭环控制(Close Loop Control)和开环控制(Open Loop Control)在DSTI CMP(Direct STI CMP)制程中的应用。比较了固定时间、终点监测和闭环APC控制下的氮化硅去除量及晶圆...通过APC(Advance Process Control)的建模和研磨实验,研究了APC的闭环控制(Close Loop Control)和开环控制(Open Loop Control)在DSTI CMP(Direct STI CMP)制程中的应用。比较了固定时间、终点监测和闭环APC控制下的氮化硅去除量及晶圆片间差异分布。进一步分析了在双研磨液工艺中一步式研磨自动化过程的开环控制。展开更多
Purpose:This study aims to evaluate the accuracy of authorship attributions in scientific publications,focusing on the fairness and precision of individual contributions within academic works.Design/methodology/approa...Purpose:This study aims to evaluate the accuracy of authorship attributions in scientific publications,focusing on the fairness and precision of individual contributions within academic works.Design/methodology/approach:The study analyzes 81,823 publications from the journal PLOS ONE,covering the period from January 2018 to June 2023.It examines the authorship attributions within these publications to try and determine the prevalence of inappropriate authorship.It also investigates the demographic and professional profiles of affected authors,exploring trends and potential factors contributing to inaccuracies in authorship.Findings:Surprisingly,9.14%of articles feature at least one author with inappropriate authorship,affecting over 14,000 individuals(2.56%of the sample).Inappropriate authorship is more concentrated in Asia,Africa,and specific European countries like Italy.Established researchers with significant publication records and those affiliated with companies or nonprofits show higher instances of potential monetary authorship.Research limitations:Our findings are based on contributions as declared by the authors,which implies a degree of trust in their transparency.However,this reliance on self-reporting may introduce biases or inaccuracies into the dataset.Further research could employ additional verification methods to enhance the reliability of the findings.Practical implications:These findings have significant implications for journal publishers,Beyond authorship:Analyzing contributions in PLOS ONE and Maddi,A.,&the challenges of appropriate attribution highlighting the necessity for robust control mechanisms to ensure the integrity of authorship attributions.Moreover,researchers must exercise discernment in determining when to acknowledge a contributor and when to include them in the author list.Addressing these issues is crucial for maintaining the credibility and fairness of academic publications.Originality/value:This study contributes to an understanding of critical issues within academic authorship,shedding light on the prevalence and impact of inappropriate authorship attributions.By calling for a nuanced approach to ensure accurate credit is given where it is due,the study underscores the importance of upholding ethical standards in scholarly publishing.展开更多
We propose and experimentally demonstrate an integrated silicon photonic scheme to generate multi-channel millimeter-wave(MMW) signals for 5 G multi-user applications. The fabricated silicon photonic chip has a footpr...We propose and experimentally demonstrate an integrated silicon photonic scheme to generate multi-channel millimeter-wave(MMW) signals for 5 G multi-user applications. The fabricated silicon photonic chip has a footprint of 1.1 × 2.1 mm^2 and integrates 7 independent channels each having on-chip polarization control and heterodyne mixing functions. 7 channels of4-Gb/s QPSK baseband signals are delivered via a 2-km multi-core fiber(MCF) and coupled into the chip with a local oscillator(LO) light. The polarization state of each signal light is automatically adjusted and aligned with that of the LO light, and then 7 channels of 28-GHz MMW carrying 4-Gb/s QPSK signals are generated by optical heterodyne beating. Automated polarizationcontrol function of each channel is also demonstrated with ～7-ms tuning time and ～27-dB extinction ratio.展开更多
文摘通过APC(Advance Process Control)的建模和研磨实验,研究了APC的闭环控制(Close Loop Control)和开环控制(Open Loop Control)在DSTI CMP(Direct STI CMP)制程中的应用。比较了固定时间、终点监测和闭环APC控制下的氮化硅去除量及晶圆片间差异分布。进一步分析了在双研磨液工艺中一步式研磨自动化过程的开环控制。
文摘Purpose:This study aims to evaluate the accuracy of authorship attributions in scientific publications,focusing on the fairness and precision of individual contributions within academic works.Design/methodology/approach:The study analyzes 81,823 publications from the journal PLOS ONE,covering the period from January 2018 to June 2023.It examines the authorship attributions within these publications to try and determine the prevalence of inappropriate authorship.It also investigates the demographic and professional profiles of affected authors,exploring trends and potential factors contributing to inaccuracies in authorship.Findings:Surprisingly,9.14%of articles feature at least one author with inappropriate authorship,affecting over 14,000 individuals(2.56%of the sample).Inappropriate authorship is more concentrated in Asia,Africa,and specific European countries like Italy.Established researchers with significant publication records and those affiliated with companies or nonprofits show higher instances of potential monetary authorship.Research limitations:Our findings are based on contributions as declared by the authors,which implies a degree of trust in their transparency.However,this reliance on self-reporting may introduce biases or inaccuracies into the dataset.Further research could employ additional verification methods to enhance the reliability of the findings.Practical implications:These findings have significant implications for journal publishers,Beyond authorship:Analyzing contributions in PLOS ONE and Maddi,A.,&the challenges of appropriate attribution highlighting the necessity for robust control mechanisms to ensure the integrity of authorship attributions.Moreover,researchers must exercise discernment in determining when to acknowledge a contributor and when to include them in the author list.Addressing these issues is crucial for maintaining the credibility and fairness of academic publications.Originality/value:This study contributes to an understanding of critical issues within academic authorship,shedding light on the prevalence and impact of inappropriate authorship attributions.By calling for a nuanced approach to ensure accurate credit is given where it is due,the study underscores the importance of upholding ethical standards in scholarly publishing.
基金supported by the National Key R&D Pro-gram of China under Grant 2016YFB0402501in part by the Natural Science Foundation of China under grant 61605112Open Fund of IPOC under grant BUPT
文摘We propose and experimentally demonstrate an integrated silicon photonic scheme to generate multi-channel millimeter-wave(MMW) signals for 5 G multi-user applications. The fabricated silicon photonic chip has a footprint of 1.1 × 2.1 mm^2 and integrates 7 independent channels each having on-chip polarization control and heterodyne mixing functions. 7 channels of4-Gb/s QPSK baseband signals are delivered via a 2-km multi-core fiber(MCF) and coupled into the chip with a local oscillator(LO) light. The polarization state of each signal light is automatically adjusted and aligned with that of the LO light, and then 7 channels of 28-GHz MMW carrying 4-Gb/s QPSK signals are generated by optical heterodyne beating. Automated polarizationcontrol function of each channel is also demonstrated with ～7-ms tuning time and ～27-dB extinction ratio.
