MICRO TOUCH SENSOR USING PIEZOELECTRIC THIN FILM FOR MINIMAL ACCESS SURGERY

The micro touch sensor which is designed to be used in the blood vessels isproposed. Using this touch sensor, the risk of injuring blood vessels can be reduced. A prototype ofmicro touch sensor using PZT (lead zirconate titanate) thin film synthesized by hydrothermal methodis made. The basic properties of the micro touch sensor are studied. In order to analyse theproperties of the micro touch sensor, a mathematical model is set up.

SURFACE-ENHANCED CANTILEVER SENSORS WITH NANO-POROUS FILMS

Developing surface-enhanced microcantilevers with improved sensitivities is of longstanding interest. In this paper, the design of surface-enhanced cantilever sensors using nano- （micro-） porous films as surface layers is proposed. The static deformation and resonance frequencies of these surface-enhanced sensors with the simultaneous effects of the eigenstrain, the surface stress and the adsorption mass are analyzed. It is shown that the sensitivities of these novel cantilever sensors for the static deformation and resonance frequencies can be tuned by the porosity, the size of the pores and the structure of the porous films. For the three kinds of cantilever consisting of solid films, films with aligned cylindrical micro-scale pores, and those with nano-scale pores, the nano-porous one has the highest static and dynamic sensitivities, whereas the solid one has the lowest.

Dynamic Calibration of the Cutting Temperature Sensor of NiCr/NiSi Thin-film Thermocouple

In high-speed cutting, natural thermocouple, artificial thermocouple and infrared radiation temperature measurement are usually adopted for measuring cutting temperature, but these methods have difficulty in measuring transient temperature accurately of cutting area on account of low response speed and limited cutting condition. In this paper, NiCr/NiSi thin-film thermocouples（TFTCs） are fabricated according to temperature characteristic of cutting area in high-speed cutting by means of advanced twinned microwave electro cyclotron resonance（MW-ECR） plasma source enhanced radio frequency（RF） reaction non-balance magnetron sputtering technique, and can be used for transient cutting temperature measurement. The time constants of the TFTCs with different thermo-junction film width are measured at four kinds of sampling frequency by using Ultra-CFR short pulsed laser system that established. One-dimensional unsteady heat conduction model is constructed and the dynamic performance is analyzed theoretically. It can be seen from the analysis results that the NiCr/NiSi TFTCs are suitable for measuring transient temperature which varies quickly, the response speed of TFTCs can be obviously improved by reducing the thickness of thin-film, and the area of thermo-junction has little influence on dynamic response time. The dynamic calibration experiments are made on the constructed dynamic calibration system, and the experimental results confirm that sampling frequency should be larger than 50 kHz in dynamic measurement for stable response time, and the shortest response time is 0.042 ms. Measurement methods and devices of cutting heat and cutting temperature measurement are developed and improved by this research, which provide practical methods and instruments in monitoring cutting heat and cutting temperature for research and production in high-speed machining.

Formaldehyde OTFT Sensors Based on Airbrushed Different Ratios of P3HT/ZnO Films

The formaldehyde （HCHO） detecting at room temperature is of great significance. Different ratios of P3HT/ZnO composite films （3：1, 1：1, and 1：3） were deposited on the organic thin film transistor （OTFT） by spray-deposition technology, and the electrical properties and HCHO-sensing properties of all the prepared OTFT devices were measured by Keithley 4200-SCS source measurement unit. The results show that the OTFT sensor based on the P3HT/ZnO films with the ratio of 1：1 exhibited the best output and transfer curves. Different changing tendency were observed with the increase of ZnO proportion when exposed to HCHO at room temperature, and the device with the ratio of 1：1 behaved a good response and recovery characteristics.

Chlorine Gas Sensors with HPS Film on Interdigitated Capacitors

The Cl2-sensitive heteropolysiloxanes(HPS) film was formed on the interdigital capacitor based on silicon dioxide by means of sol-gel process and spin-on technique.Measurements of interdigital capacitance were performed at room temperature for frequencies 100 Hz,1 kHz and 10 kHz.It is shown that there is a linear relationship between the capacitance and the concentration of chlorine gas.Influences of the measurement frequency and film thickness of silicate on the sensitivity of the sensor to C12 gas were discussed.And organically modified N,N-diethylaminopropyl-trimethoxysilane (APMS) had a much higher sensitivity.

Electrocatalytic and Sensors Properties of Natural Smectite Type Clay towards the Detection of Paraquat Using a Film-Modified Electrode

In this study, a low-cost and sensitive voltammetric method was developed for the determination of paraquat (PQ2+). This was achieved by coating a glassy carbon electrode with a purified fraction of a smectite-type clay, which was then used to accumulate paraquat by an ion exchange process. The electronanalytical procedure involves two steps: the chemical preconcentration of paraquat under open-circuit conditions in an aqueous medium, followed by the voltammetric detection of the preconcentrated pollutant in a medium containing permanganate ions which significantly improved through its catalytic action the electrode response. A systematic study of the experimental conditions (pH of the accumulation and detection media, permanganate concentration in the detection medium, clay content of the coating, potential and duration of the electrolysis step) on the stripping response were examined in detail. After optimization, a linear calibration curve for paraquat was obtained in the concentration range from 1.6 to 2.8 μM, leading to a detection limit of 3.8 × 10–9 mol·L–1 (S/N = 3). The proposed method was successfully applied to the determination of paraquat in spring water.

Synthesis of Tin Oxide Thick Film and Its Investigation as a LPG Sensor at Room Temperature

Present paper reports the synthesis of SnO2, its characterization and performance as Liquefied Petroleum Gas (LPG) Sensor. XRD pattern revealed the tetragonal crystalline nature of the material. Crystallites sizes were in the range 14 - 30 nm. Tin oxide thick film was prepared by using screen printing technique. After that these were investigated through SEM. SEM image of thick-film surface was spherical in shape and porous. Further at room temperature, the film was exposed to LPG in a controlled gas chamber and variations in resistance with the concentrations of LPG were observed. The maximum value of average sensitivity of thick film was 37 MΩ/min for 5 vol. % of LPG. Sensor responses as a function of exposure and response times were also estimated and maximum sensor response were found 273 and 312 for 4 and 5 vol. % of LPG respectively.

Electrodeposited Cobalt-Iron Alloy Thin-Film for Potentiometric Hydrogen Phosphate-Ion Sensor

A cobalt-iron alloy thin-film electrode-based electrochemical hydrogen-phosphate-ion sensor was prepared by electrodepositing on an Au-coated Al2O3 substrate from an aqueous solution of metal-salts. The use of a cobalt-iron alloy electrode greatly improved the hydrogen-ion sensor response performance, i.e., the sensor worked stably for more than 7 weeks and showed a quick response time of several seconds. Among the cobalt and iron alloy systems tested, the electrodeposited Co58Fe42 thin-film electrode showed the best EMF response characteristics, i.e., the sensor exhibited a linear potentiometric response to hydrogen-phosphate ion at the concentration range between 1.0 × 10–5 and 1.0 × 10–2 M with the slope of –43 mV/decade at pH 5.0 and at 30℃. A sensing mechanism of the Co-based potentiometric hydrogen-phosphate ion sensor was proposed on the basis of results of instrumental analysis.

Quartz Crystal Microbalance Sensor Deposited with LB Films of Functional Polymers for the Detection of Phenols in Vapour Phase

ＩｎｔｒｏｄｕｃｔｉｏｎＩｎｒｅｃｅｎｔｙｅａｒｓａｎｉｎｃｒｅａｓｉｎｇｄｅｍａｎｄｆｏｒｅｎｖｉｒｏｎｍｅｎｔａｌｍｏｎｉｔｏｒｉｎｇｈａｓｓｔｉｍｕｌａｔｅｄａｎａ－ｌｙｔｉｃａｌｃｈｅｍｉｓｔｓｔｏｍａｋｅｇｒｅａｔｅｒｅｆｏｒｔｓｔｏｄｅｖ...

Study on the characterization and technology of Cu thin-film temperature sensor fabricated on aluminum alloy

In the present study,anodic films on aluminium alloy was used as the dielectric layer for Cu thinfilm temperature sensor,and then Cu film was deposited by unbalanced magnetron sputtering ion plating as the sensitive layer.Microstructure and surface morphologies of Cu film were investigated by optical microscope(OM),atomic force microscope(AFM) and scanning electron microscope(SEM).Electrical properties of Cu thin-film temperature sensor were tested by four-point probe technique and Digit Multimeter.The results showed that the surface roughness of anodic films can be reduced from Ra 58.096 nm to Ra 16.335 nm by proper polishing.Continual Cu stripes can be obtained both on polished anodic alumina film and smooth alumina wafer by etching after Cu film annealing.The resistivity of Cu films before and after 300 ℃ as well as 400 ℃ annealing are 12.48 mΩ·cm,5.48 mΩ·cm and 4.83 mΩ·cm,respectively.The resistances of Cu thin-film temperature sensor in 70 ℃ and 0 ℃ are 946.5 Ω and 761.15 Ω respectively.The temperature coefficient of resistivity(TCR) of the sensor is 3479 × 10^(- 6) /℃.

Fluorescent-Dye Doped Thin-Film Sensors for the Detection of Alcohol Vapors

Fluorescence sensors based on a trifluoroacetophone compound doped in ethyl cellulose (EC) thin films have been developed for the detection of methanol, ethanol, and 2-propanol (isopropanol, PriOH) vapors. Thin-film sensors are prepared with 4-dibutylamino-4’-(trifluoroacetyl)stilbene (Chromoionophore IX or CIX) as the fluorescent dye and its solution in EC was spin-coated onto glass slides. The luminescence intensity of the dye (555 nm) is quenched when exposed to alcohol vapor. Tested in the range of ca. 0 - 1.5?× 104 ppm (wt) for MeOH and EtOH, and ca. 0 - 2.3 × 104 ppm for PriOH, the sensors gave detection limits of 9, 13, 21 ppm and quantification limits of 32, 43, and 70 ppm, respectively. To enhance the sensitivity of the sensors, TiO2 particles have been added to the films to induce Mie scattering, which increases the incident light interaction with the sensing films. The sensors in this work have been designed to work in a multianalyte platform for the simultaneous detection of multiple gas analytes.

Quantitative research of the liquid film characteristics in upward vertical gas, oil and water flows

The study of liquid film characteristics in multiphase flow is a very important research topic, however,the characteristics of the liquid film around Taylor bubble structure in gas, oil and water three-phase flow are not clear. In the present study, a novel liquid film sensor is applied to measure the distributed signals of the liquid film in three-phase flow. Based on the liquid film signals, the liquid film characteristics including the structural characteristics and the nonlinear dynamics characteristics in three-phase flows are investigated for the first time. The structural characteristics including the proportion, the appearance frequency and the thickness of the liquid film are obtained and the influences of the liquid and gas superficial velocities and the oil content on them are investigated. To investigate the nonlinear dynamics characteristics of the liquid film with the changing flow conditions, the entropy analysis is introduced to successfully uncover and quantify the dynamic complexity of the liquid film behavior.

高回弹性压阻式薄膜压力传感器的研究进展

压阻式薄膜压力传感器作为薄膜压力传感器的重要分支,具有灵敏度高、响应快、弹性好等优点,如何同时实现高灵敏度、宽工作范围、快速响应和快速回弹是未来所面临的挑战,而新型材料、结构设计、传感器制备方式及动态特性建模是高回弹性传感器研制的关键。本文归纳了基底及活性层材料制备及其相应单一微结构、仿生结构、皱褶结构的设计,同时阐述了高回弹性压阻式薄膜的制备技术,总结了薄膜压力传感器动态建模和动态补偿的方法,最后对薄膜压力传感器发展中的新需求做了展望。

Low-Temperature Formation of a WO₃Thin Film by the Sol-Gel Method Using Photo-Irradiation and Fabrication of a Flexible Hydrogen Sensor

Hydrogen has been recently attracted much attention with respect to high energy-conversion efficiency and low environmental burden. However, hydrogen gas is dangerous due to an explosive gas and a fast combustion rate. Therefore, the development of hydrogen sensor with high accuracy and reliability that can detect hydrogen easily is required. Especially, a flexible hydrogen sensor is useful because it has a high degree of freedom with respect to the shape of location in which the sensor is to be located. A flexible hydrogen sensor—namely, a WO3 thin film formed on a PET film by the sol-gel method using photo irradiation—based on gasochromism of WO3 was developed. By irradiating a thin film, which was prepared by using WO3 precursor solution synthesized by the sol-gel method, with ultraviolet rays, a high-purity WO3 film could be prepared on PET at low temperature. The sensor was structured as a polystyrene (PS) film containing palladium (Pd) laminated on a WO3 film. The WO3 layer was porous, so the PS containing Pd atoms solution penetrated the WO3 layer. WO3 reacted with hydrogen gas and instantly turned blue as the transmittance of the WO3 layer changed. The sensor showed high reactivity even for hydrogen concentration below 4% (1%, 0.5%, 0.25%, and 0.1%), which was the lower limit of hydrogen ignition, and a linear relationship between hydrogen concentration and change in transmittance was found. Moreover, the resistance of the WO3 film significantly and instantaneously changed due to hydrogen-gas exposure, and the hydrogen concentration and resistance change showed a linear relationship. It is therefore possible to quantitatively detect low concentrations of hydrogen by using changes in transmittance and resistance as indices. Since these changes occur selectively under hydrogen at room temperature and normal pressure, they form the basis of a highly sensitive hydrogen sensor. Since the developed sensor is flexible, it has a high degree of freedom with respect to the shape of location in which the sensor is to be

用于压电传感器的层加层结构纳米纤维膜

通过聚丙烯腈(PAN)与改性木质素(CEHL-PTMG)接枝物进行共混,使用多层静电纺丝技术得到PAN|PAN/CEHL-PTMG|PAN层加层结构的纳米纤维膜,并制备一系列的薄膜。对制备的层加层结构纳米纤维膜进行表面形貌、构象、热性能、力学性能以及压电性能测试。实验结果表明:层加层结构使得薄膜的压电性能得到了大幅提高,PAN(11%,1 mL)|PAN/CEHL-PTMG(11%/2%,2 mL)|PAN(11%,1 mL)层加层结构纳米纤维膜的压电性能最为优异,输出电压和电流分别可达2.57 V、1468.0 nA;层加层结构薄膜的拉伸强度提高到了7.16 MPa,相较复合纳米纤维膜拉伸强度提高了7.51%,比纯PAN薄膜拉伸强度提高了52.67%;结构化后的薄膜的稳定性大幅提高,经过上千次的撞击仍能输出较好的电压;同时将其附于手指及手肘上,能更加明确地指示两者的运动,且在数值上出现较大的差距。

Toluene Sensing Properties of P4VP/Multi-Walled Carbon Nanotubes Multi-Layer Film Sensors

Abstract--Poly4-vinylphenol （P4VP）/multi-wan carbon nanotubes （MWNTs） multi-layer sensitive films were deposited on interdigitated electrodes by airbrush technology to detect toluene vapor at room temperature. The surface and section morphologies of the multi-layer films were observed by a scanning electron microscope （SEM）. It is found that the resistance of the sensor increases when it is exposed to toluene vapor and the response has a good linearity with the concentration of toluene. The results show that the P4VP/MWNTs three-layer film sensors have better sensing properties compared with the two-layer film sensors. The related sensing mechanism is studied in detail.

基于共溅射ZnO/SnO_(2)异质结薄膜的气体传感器研究

采用射频磁控共溅射法在叉指电极上制备了ZnO/SnO_(2)n-n异质结复合薄膜,系统测试了其气敏特性,并分析了其气敏机理。结果表明,与ZnO薄膜和SnO_(2)薄膜气体传感器相比,ZnO/SnO_(2)异质结薄膜气体传感器具有更低的工作温度、更高的灵敏度以及更快的响应和恢复速度。ZnO/SnO_(2)异质结薄膜气体传感器对乙醇具有较好的选择性,最低检测体积分数为1×10^(-6),最佳工作温度为250℃;对1×10^(-4)乙醇气体的灵敏度可达18.4,响应时间和恢复时间分别为10 s和19 s。

碳膜原子氧传感器研制及地面性能测试

研制低地球轨道(LEO)原子氧(AO)探测器并且开展AO环境在轨监测对于LEO航天器设计及防护具有重要意义。基于电阻分析法的碳膜AO传感器因工作时间较长、响应线性度较好且无污染,在国内外得到较多应用。为优化AO在轨监测手段,设计了一种矩形碳膜AO传感器:采用阴极电弧放电工艺制备了厚约2.5μm的AO敏感碳膜;利用AO地面模拟设备,测试了传感器的性能,并表征了碳膜在AO作用前后的形貌。结果显示,传感器碳膜的初始电阻与AO试验过程中的实时测量电阻的比值R0/R与AO积分通量F具有较好的线性关系。根据测试结果推导,该传感器能探测的最大AO积分通量约为2.29×10^(21)atom·cm^(-2)。

Temperature Dependence of Electrical Properties of Organic Thin Film Transistors Based on pn Heterojuction and Their Applications in Temperature Sensors

Organic thin film transistors based on an F16CuPc/α6T pn heterojunction have been fabricated and analyzed to investigate the temperature dependence of electrical properties and apply in temperature sensors. The mobility follows a thermally activated hopping process. At temperatures over 200 K, the value of thermal activation energy (EA) is 40. 1 meV, similar to that of the single-layer device. At temperatures ranging from 100 to 200 K, we have a second regime with a much lower EA of 16.3 meV, where the charge transport is dominated by shallow traps. Similarly, at temperatures above 200 K, threshold voltage (VT) increases linearly with decreasing temperature, and the variations of VT of 0.185 V/K is larger than the variation of VT (~0.020 V/K) in the single layer devices. This result is due to the interface dipolar charges. At temperatures ranging from 100 K to 200 K, we have a second regime with much lower variations of 0.090 V/K. By studying gate voltage (VG)-dependence temperature variation factor (k), the maximum value of k (~0.11 dec/K) could be obtained at VG = 5 V. Furthermore, the pn heterojunction device could be characterized as a temperature sensor well working at low operating voltages.

基于温度原位监测的微反应器在HNS微流道制备过程中的应用

针对含能材料微流道制备过程中缺乏温度原位监测手段的问题,提出一种集成薄膜温度传感器的微反应器系统;微反应器由包含薄膜温度传感器的玻璃基片与包含微流道的硅基片键合组成;微流道的上游、中游、下游分别放置了3个温度传感器,以实现微反应过程中高空间分辨率的温度测量;基于该微反应器,搭建了六硝基茋(HNS)连续化微流道制备系统,实时监测了HNS微纳米化及球形化过程中的温度变化。结果表明,微反应器具有精度高、耐腐蚀、可观测的优点;HNS微纳米化是一个放热反应,流体最大温升为6.4℃,由于HNS的逐渐析出,流体中的固体含量增大,流速变慢,流体温度的分布发生变化;在HNS球形化过程中,两相流体的混合是一个放热过程,流体最大温升为2.3℃;微流道中游处的温度明显高于上游与下游,说明当液滴流动至中游时,HNS微球已经制备完成。