3C-SiC is a promising structural material for piezoresistive sensors used in high-temperature applications. For sensor development, the preparation of sensor materials and study of its electrical properties, such as r...3C-SiC is a promising structural material for piezoresistive sensors used in high-temperature applications. For sensor development, the preparation of sensor materials and study of its electrical properties, such as resistivity, barrier height of grain boundaries, and temperature coefficient of resistivity, are important in addition to structural properties and these have to be optimized. In the present work, 3C-SiC thin film with in situ doping of nitrogen is prepared through low- pressure chemical vapor deposition by using methyl trichloro silane, ammonia, and hydrogen as precursors. Electrical properties of deposited 3C-SiC thin films with varying nitrogen doping concentration through four probe technique are studied. Atomic force microscopy investigations are carried out to study the grain size on and average root-mean-squared roughness 3C-SiC thin films. A decrease in the degree of crystallinity is observed in nitrogen-doped 3C-SiC thin films. The sheet resistivity of nitrogen-doped 3C-SiC thin film is found to decrease with increase in temperature in the range from 303 to 823 K. The sheet resistivity, average temperature coefficient of resistance, and barrier height of the grain boundaries of film doped with 17 at.% of nitrogen are 0.14 cm, -1.0 x 10-n/K, and 0.01 eV, respectively. Comparing all the nitrogen-doped 3C-SiC thin films, the film doped with 17 at.% of nitrogen exhibits an improved structural and electrical properties and it can be used as sensing material for high-temperature applications.展开更多
SiC thin-films were prepared by RF-magnetron sputtering technique(RMS) with the target of single crystalline SiC and then annealed. The surface morphology of thin-films was characterized by AFM. The result shows that ...SiC thin-films were prepared by RF-magnetron sputtering technique(RMS) with the target of single crystalline SiC and then annealed. The surface morphology of thin-films was characterized by AFM. The result shows that the surface of the thin-films is smooth and compact; XRD analysis reveals that the thin-films are amorphous. The thickness, square-resistance and curves of resistance—temperature were measured. The results show that the curves of lnR versus 1/kT both before and after annealing satisfy the expression of lnR∝△W/kT, where ?W is electron excitation energy in the range of 0.014 2-0.018 5 eV, and it has a trend of increasing when the temperature is increased. After synthetical analysis we get the conclusion that the electronic mechanism of the thin-films is short distance transition between the localized states in the temperature range of 25-250 ℃. The resistivity is in the range of 2.4×10-3-4.4×10-3 Ω·cm and it has the same trend as electron excitation energy when annealing temperature is increased, which further confirms the electronic mechanism of thin-films and the trend of electron excitation energy versus annealing temperature.展开更多
文摘3C-SiC is a promising structural material for piezoresistive sensors used in high-temperature applications. For sensor development, the preparation of sensor materials and study of its electrical properties, such as resistivity, barrier height of grain boundaries, and temperature coefficient of resistivity, are important in addition to structural properties and these have to be optimized. In the present work, 3C-SiC thin film with in situ doping of nitrogen is prepared through low- pressure chemical vapor deposition by using methyl trichloro silane, ammonia, and hydrogen as precursors. Electrical properties of deposited 3C-SiC thin films with varying nitrogen doping concentration through four probe technique are studied. Atomic force microscopy investigations are carried out to study the grain size on and average root-mean-squared roughness 3C-SiC thin films. A decrease in the degree of crystallinity is observed in nitrogen-doped 3C-SiC thin films. The sheet resistivity of nitrogen-doped 3C-SiC thin film is found to decrease with increase in temperature in the range from 303 to 823 K. The sheet resistivity, average temperature coefficient of resistance, and barrier height of the grain boundaries of film doped with 17 at.% of nitrogen are 0.14 cm, -1.0 x 10-n/K, and 0.01 eV, respectively. Comparing all the nitrogen-doped 3C-SiC thin films, the film doped with 17 at.% of nitrogen exhibits an improved structural and electrical properties and it can be used as sensing material for high-temperature applications.
基金Project(60371046) supported by the National Natural Science Foundation of China
文摘SiC thin-films were prepared by RF-magnetron sputtering technique(RMS) with the target of single crystalline SiC and then annealed. The surface morphology of thin-films was characterized by AFM. The result shows that the surface of the thin-films is smooth and compact; XRD analysis reveals that the thin-films are amorphous. The thickness, square-resistance and curves of resistance—temperature were measured. The results show that the curves of lnR versus 1/kT both before and after annealing satisfy the expression of lnR∝△W/kT, where ?W is electron excitation energy in the range of 0.014 2-0.018 5 eV, and it has a trend of increasing when the temperature is increased. After synthetical analysis we get the conclusion that the electronic mechanism of the thin-films is short distance transition between the localized states in the temperature range of 25-250 ℃. The resistivity is in the range of 2.4×10-3-4.4×10-3 Ω·cm and it has the same trend as electron excitation energy when annealing temperature is increased, which further confirms the electronic mechanism of thin-films and the trend of electron excitation energy versus annealing temperature.
